CN102064458A - Hollow frustum resonant cavity gas laser - Google Patents
Hollow frustum resonant cavity gas laser Download PDFInfo
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- CN102064458A CN102064458A CN2009102162141A CN200910216214A CN102064458A CN 102064458 A CN102064458 A CN 102064458A CN 2009102162141 A CN2009102162141 A CN 2009102162141A CN 200910216214 A CN200910216214 A CN 200910216214A CN 102064458 A CN102064458 A CN 102064458A
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- 239000007789 gas Substances 0.000 claims description 22
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
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Abstract
本发明中空圆台谐振腔气体激光器，属光学和光学工程领域，构建和提供一种产生特殊空间分布形状激光光束的气体激光器。该激光器输出的光束随着传输距离的增加，从空心光束演化为实心光束，再演化为空心光束。本发明由于采用圆环部分反射输出镜，光束的腰斑位置位于腔外，有效的降低了输出镜的需要承受的功率密度，即使是高功率情况，对输出镜的材质的选取也容易实现，且样品位置距离输出镜足够远并能有效利用光束的最大功率密度分布位置。由于该发明直接通过激光器在腔外实现和束，容易实现高功率输出。本发明可以实现中小功率激光以及高功率激光。本发明实现的激光光束可以用于生物医学、科学研究以及对材料的特殊处理等方面。
The invention relates to a gas laser with a hollow circular table resonant cavity, which belongs to the field of optics and optical engineering. It constructs and provides a gas laser that generates a laser beam with a special spatial distribution shape. The beam output by the laser evolves from a hollow beam to a solid beam and then to a hollow beam as the transmission distance increases. Because the present invention adopts the ring part to reflect the output mirror, the position of the waist spot of the light beam is located outside the cavity, which effectively reduces the power density that the output mirror needs to bear. Even in the case of high power, the selection of the material of the output mirror is also easy to realize. And the position of the sample is far enough away from the output mirror and the maximum power density distribution position of the beam can be effectively used. Since the invention realizes summing directly outside the cavity through the laser, it is easy to realize high power output. The invention can realize low and medium power laser and high power laser. The laser beam realized by the invention can be used in biomedicine, scientific research, special treatment of materials and the like.
Description
Technical field the present invention relates to optics and optical engineering field, mainly is the method and the device of gas laser that is obtained a kind of laser beam of special shape by the hollow round table resonant cavity.
The spatial form of background technology laser beam has the branch of solid light beam and hollow beam usually.They play a significant role in application separately.The realization of hollow beam can obtain by solid optical beam transformation.The gas laser good beam quality, directivity is stable.Patent ZL2007100483280 makes up and provides a kind of gas laser that can directly produce the hollow laser beam.This invention simple possible.But, the waist spot of the output beam of the laser of this invention is positioned at the outgoing mirror position just, seek out powerful laser, to choosing and cooling processing of outgoing mirror material, must consider by emphasis.And because the waist spot of this Laser Output Beam is positioned at the outgoing mirror position, power density distribution maximum herein, in use, because sample is placed with the outgoing mirror minute surface and must be maintained a certain distance guaranteeing that outgoing mirror can not polluted by sputter, thus the place of this laser output power density distribution maximum can not be used effectively.The 3rd is exactly that the output beam of this laser need be through focusing on the hollow laser beam of the various sizes just can obtain to comprise very small dimensions.
Summary of the invention the present invention is directed to patent ZL2007100483280 invention have more universality method and device, purpose is to make up and provide a kind of gas laser that produces special space shape laser light beam, the light beam of this laser output is along with the increase of transmission range, developing from hollow beam is solid light beam, develops to be hollow beam again.By resonant cavity rationally is set, the output beam of two these lasers can also be realized hollowing shape laser zone.The present invention has not only inherited ZL2007100483280 and has directly produced hollow light beam and gas laser good beam quality, the advantage that directivity is stable, and overcome the shortcoming that its output beam begins to disperse from the outgoing mirror position.The present invention is owing to adopt the symmetrical annulus partial reflection outgoing mirror of rotation, and the waist spot of light beam is positioned at outside the chamber, effectively reduced the power density that the needs of outgoing mirror bear, even high power situation, choosing also of material to outgoing mirror realized easily, and the minimum beam radial location of output beam is enough far away apart from outgoing mirror, make laboratory sample can effectively utilize the maximum power density distributing position of light beam and can bespatter the output eyeglass.Because this invention directly realizes outside the chamber by laser and restraints, and realizes high power output easily.Invention can realize middle low power laser and high power laser light, and the laser beam that this invention realizes can be used for biomedicine, scientific research and to the aspects such as special processing of material.
The objective of the invention is to be realized by following measure: the device of hollow round table gas laser is divided into helium neon laser or carbon dioxide laser by working-laser material, employing is easy to realize at special-shaped region of discharge the radio frequency discharge mode of glow discharge, laser is characterised in that its resonant cavity is a hollow round table shape resonant cavity, the bottom of resonant cavity is the symmetrical concave surface annulus total reflective mirror of rotation, the top is the symmetrical convex surface annulus partial reflection outgoing mirror of rotation, the hollow round table interlayer that the hollow round table shape material that equates with two drift angles is nested to form is the laser medium zone, this concave mirror surface and convex lens face are about the central axis rotation symmetry of truncated conical shape dielectric area, resonant cavity is along bunch concavo-convex stable cavity of formation of the transmission ray in the vertical section of the central symmetry axes in laser medium district, the sub-chamber that is called hollow round table shape resonant cavity, the chamber axle in this sub-chamber and the central symmetry axes in laser medium district intersect, and the waist spot position of sub-chamber output beam can be arranged on outgoing mirror as required apart between the intersection point of the central symmetry axes in the axis of symmetry of ion chamber and laser medium district, also can overlap with this intersection point or outside.Therefore, the laser that this construction method provides is compared the advantage with gain region volume and power output big a lot (increase of the order of magnitude) with the general gas laser of same region of discharge length, because the waist spot of output beam is positioned at outside the outgoing mirror, under same power output situation, the power little a lot (reducing of the order of magnitude) that outgoing mirror of the present invention need bear than the outgoing mirror unit are of patent ZL2007100483280, and because the waist spot of output beam is positioned at outside the outgoing mirror, help sample and effectively utilize light beam maximum power density distributing position, have more practicality than patent ZL2007100483280 (the waist spot of output beam is positioned on the outgoing mirror).So it is less and export higher laser device to make volume.And the waist spot position in sub-chamber can rationally be provided with as required, thereby the evolution that hollow beam arrives hollow beam again to solid light beam appears in the spatial distribution that realizes light beam.Output beam small-power situation of the present invention can be used for aspects such as Laser Biomedicine research (realizing light spanner, light tweezer, laser accunputure moxibustion etc.), microelectronics and laser education experiment, high-power helium-neon laser can be used for the photodynamics medical treatment, and high-power carbon dioxide laser can be used for the special processing of material.
Helium neon laser, discharge tube adopts glass or quartz ampoule.Carbon dioxide laser, from 9.2 to 10.8 microns of its laser wavelength ranges, discharge tube adopts glass or quartz ampoule or other insulating material, large-scale carbon dioxide laser adopts rf discharge excitation mode or preionization energisation mode, working method is continuous, adopt blower fan to drive the working gas water cooling method of holding concurrently, when carrying out pulsed discharge when radio-frequency power supply is modulated, working method then is pulse.
Description of drawings Fig. 1,2, the 3rd, the profile of hollow round table type gas laser device structural perspective, device, hollow round table shape laser along in the axle vertical section about the schematic diagram of chamber mirror.
In accompanying drawing 1-3, the 1st, rotate symmetrical concave surface annular completely reflecting mirror, the 2nd, interior electrode, the 3rd, hollow round table shape discharge tube, the 4th, external electrode, the 5th, water collar, the 6th, rotate symmetrical convex surface annulus partially reflecting mirror, the 7th, blower fan, the 8th, radio-frequency power supply and matching network, the 9th, cylinder, the 1st, with respect to 10 rotational symmetric concave mirrors, the center of curvature of the upper and lower part branch of this mirror lays respectively at O in the section
11, O
12, radius of curvature is r
1, the 6th, with respect to axle 10 rotational symmetric convex mirrors, the center of curvature of the upper and lower part branch of this mirror lays respectively at O in the section
21, O
22, radius of curvature is r
2, l is the distance between mirror 1 and the mirror 6, the i.e. length of discharge tube.When being used for helium neon laser, among the accompanying drawing 1-2,5 and 7 is unwanted, so when being used for this laser, 5 and 7 are cancelled.10 is the axis of symmetry in truncated cone-shaped gas laser medium district among Fig. 2,10 consistent with among Fig. 3,11 is the center circle conical surface in truncated cone-shaped gas medium district and the intersection in vertical section, also be the axis of light bunch in this vertical section and resonant cavity at the chamber, sub-chamber of this cross-sectional area axle, the waist spot position of upper and lower sub-chamber output beam lays respectively at O
01, O
02, axle 10 is O with the intersection point of axle 11.O
01, O
02Can be designed as between mirror 6 and intersection point O, also can all overlap with the O point.θ is the drift angle of the center circle conical surface, and a is the radial width in gas medium district, and l is the length of dielectric area.After being pumped into high vacuum, discharge tube 3 charges into gas laser medium, radio frequency discharge by electrode 2 and 4 comes excitable media, stimulated radiation along the spontaneous radiation induction of axis 11 transmission of arbitrary section is as shown in Figure 2 amplified, and be subjected to the interreflection of speculum 1 and 6 and set up vibration at this section, output is provided by the transmission of mirror 6, when need cooling off, then carries out gas medium by 5 and 7, when gas medium does not need to cool off, then do not establish 5 and 7, this moment 5 and 7 and the connecting pipe of discharge tube 3 blocked by vacuum leakproofness, cylinder 9 can make laser have more the multiplex (MUX) makes material and increases the service life.
Embodiment is done detailed description below in conjunction with the drawings and specific embodiments to the present invention.
The symmetrical concave surface annular of rotation of the present invention completely reflecting mirror 1 adopts circular optical glass or quartz wedge to do substrate, to He-Ne laser and CO
2Laser is suitable for, and adopts the higher round copper billet of the good hardness of compactness to do substrate, and this is to the CO of very high output
2Laser is suitable for, and adopts the hole cutter sweep that the part in the middle of it is cut down by requirements of annular mirror inner dimensions, but the centre this part should be glued together so that grind processing with ring block.The grinding tool that grinds minute surface adopts low-carbon steel material to be processed by design by Digit Control Machine Tool, because minute surface does not possess the single center of curvature, so grinding tool does not possess the single center of curvature yet, so design and processing is difficulty, but its curved surface has strict rotating shaft symmetry characteristic, so there is not big difficulty in the processing of grinding tool.After grinding tool processes, process of lapping to mirror must keep strict rotating shaft symmetry requirement, one that will be glued at the center after the mirror ultrafinish polishing is again taken off, and can obtain rotating the symmetroid speculum, cleans and plates the film rear of being all-trans through strictness and can be used on the device of the present invention.Convex surface annulus partially reflecting mirror 6 of the present invention, process of lapping is consistent with the process of lapping of mirror 1, difference is that mirror 6 is that convex surface is as partially reflecting mirror reflecting surface plating partial reflection film, the another side relative with convex surface is from seeing it is taper in face of the direction of central symmetry axes, and the bus of this taper is vertical with the chamber axle in the concavo-convex chamber of section.The material of mirror 6 substrates can be selected glass for use for helium neon laser, for carbon dioxide laser, can select germanium wafer or zinc selenide etc. for use according to power requirement.
Hollow round table shape discharge tube 3 of the present invention then adopts the liquid of glass or quartzy fusing to inject in the graphite jig that is in uniform temperature to helium neon laser and makes after the cooling gradually.Hollow round table shape discharge tube is made of inside and outside two-layer truncated cone-shaped glass or quartz ampoule, so graphite jig should be two covers.Graphite intensity is better, so can go up lathe comparatively accurately by design processing, precision can reach 0.1 millimeter.When mould is longer, assembling again after the then available several graphite material segmental machining, the mould ectonexine all can adopt certain auxiliary clamp.Mould is not enough as if precision after use, then the mould that should repair or more renew.Hollow round table shape discharge tube of the present invention is to CO
2Laser then adopts aluminium, copper or thin stainless steel material to make, and inside and outside two hollow round table shape metal tubes then directly are used as two sparking electrodes.
In laser array process of assembling of the present invention, the support of inside and outside two round table surface of hollow round table shape discharge tube 3 of the present invention and fixedly by adopting special support to realize.When being helium neon laser, all grind at the bottom and the top of two glass or quartzy round table surface, the vertical section of bottom annulus mirror 1 is a concave surface, the diameter of crossing the mid point of this concave surface is parallel to the round platform bus, the vertical section reflecting surface of top annulus mirror 6 partly is a convex surface, and the diameter of crossing the mid point of this convex surface is parallel to the round platform bus.The grinding back surface of mirror 1 is the plane, and when mirror 1 and hollow round table discharge tube gummed, the back side plane of mirror 1 is perpendicular to the axis of symmetry 10 of hollow round table discharge tube.The grinding back surface of mirror 6 is the conical surface.The vertical section of this conical surface is the bus of straight line perpendicular to the hollow round table discharge tube.Select glass that the two sides is parallel to each other and flatness is higher or quartzy annulus, the inner edge radius of round table surface bottom is smaller in the inner edge radius ratio of annulus, and the outer rim radius of the outer round table surface of outer rim radius ratio bottom is bigger.This annulus is placed the more flat top of not high metallic support, the mirror 1 that interior physical dimension and round type bottom size is matched and slightly can become flexible places on this ring, the inside that will lighter electrode places internal layer truncated cone-shaped glass or quartz ampoule, place the bottom of interior round type on this annulus again and be positioned within the axisymmetric curved surface mirror inner edge, place outer round table surface bottom on this annulus again and be enclosed within the outer rim of mirror 1, because precision has been guaranteed in the processing of element, so suitably can reach requirement after the adjustment to each element in the suitable monitoring of optical correction's instrument with by supplementary means, and then with vacuum compound with mirror 1, inside and outside round platform pipe and annulus stick together, and 6 in the mirror at top is installed under in advance consistent with axis calibration beam monitoring and glued together.Again external electrode is loaded onto.This laser can be at this support vertical working, and from top output, its advantage is easy to assembly, and optical element is stressed very little.Also can be in assembling back traverse or the inverted work that finishes, but tackle support at traverse or before standing upside down and do certain processing, make it that supplemental support of certain intensity be arranged the ectonexine round type, make its traverse or the gravity of stand upside down back ectonexine round platform pipe and electrode almost by the support support, this moment, laser output mirror was from laterally or from following output.When being carbon dioxide laser, because the ectonexine round type is a metal tube and simultaneously as electrode, so the intensity of pipe is very high, its support problem solves easily, assemble the basic identical of preceding preparation and assembling process and helium neon laser, it should be noted that the Insulation Problems that is between two electrodes, when with glass or quartz substrate axisymmetric curved surface mirror, if the plating deielectric-coating does not then have problems, if metal-coated membrane, then should two conical base with insulating barrier is arranged between completely reflecting mirror is connected, but the voltage of radio-frequency power supply all is lower.
After laser array installs, discharge tube and coupling part all are pumped into high vacuum.To helium neon laser when vacuum degree reaches 10-6 * 133.3Pa, in Ne: He=1: 8 ratio, charging into gaseous mixture pressure is 0.8 * 133.3Pa, half-reflecting mirror is 98% to the reflectivity of 0.6328 micron wave length light wave, the completely reflecting mirror reflectivity is more than 99.8%, it is imposed radio frequency discharge, can obtain output.To carbon dioxide laser, when vacuum degree reaches 10
-3During * 133.3Pa, press CO
2: N
2: He=1: 1.5: 7.5, stagnation pressure was 10 * 133.3Pa, and half-reflecting mirror is 80% to 10.6 micron wave length light wave reflectivity, and the completely reflecting mirror reflectivity is more than 99%, it to be imposed radio frequency discharge, can obtain output.
Hollow round table shape resonant cavity gas laser, comprise the symmetrical concave surface annular completely reflecting mirror of rotation, hollow round table shape discharge tube, rotate symmetrical convex surface annulus partially reflecting mirror, interior electrode, external electrode, cylinder, blower fan, radio-frequency power supply and matching network, water collar, referring to figs. 1 through Fig. 2, rotate symmetrical concave surface annular completely reflecting mirror 1 and be connected with the bottom of hollow round table shape discharge tube 3, convex surface annulus partially reflecting mirror 6 is connected with the top of discharge tube 3, and interior electrode 2 is close to discharge tube 3 inboards or directly is close to the discharge tube outside for interior electrode (when for metal material) external electrode 4 or directly is external electrode (when for metal material) by outer wall by inner layer wall, cylinder 9 is connected with discharge tube and around discharge tube, water collar 5 is around discharge tube, and blower fan 7 is connected with discharge tube by cylinder, and radio-frequency power supply and matching network 8 are connected with external electrode 4 with interior electrode 2.It is characterized in that discharge tube 3 is hollow round table shape discharge tubes, internal and external walls is a round type, constitute region of discharge by the truncated cone-shaped mezzanine space between two round types, its bottom and top are respectively by completely reflecting mirror 1 and partially reflecting mirror 6 vacuum sealing labels, make hollow round table clevis sheaf space energy pumping high vacuum, under high vacuum condition with He-Ne gaseous mixture or carbon dioxide, nitrogen, helium gas mixture charges into discharge tube 3, its feature is that also resonant cavity is a hollow round table shape resonant cavity, it is made up of the rotation symmetry concave surface annular completely reflecting mirror 1 that is installed on hollow round table shape discharge tube bottom and a rotation symmetry convex surface annulus partially reflecting mirror 6 that is installed on the discharge tube top, the symmetry axis of completely reflecting mirror 1, the dead in line of the symmetry axis of partially reflecting mirror 6 and discharge tube 3, at laser along in arbitrary section of discharge tube axis, total reflective mirror 1 and partially reflecting mirror 6 all have two centers of curvature to be symmetrically distributed in discharge tube axis both sides respectively, resonant cavity is to bunch formation two concavo-convex thorax chambeies of light in the section, be designed to stable cavity, the waist spot of this sub-chamber output beam is positioned at outside the chamber.
The present invention compares with the hollow laser beam technology of existing generation, has following features:
1, the light beam that the present invention produces develops with the hollow light beam of the increase of transmission range and is solid light beam, and developing is hollow light beam again.
2, the present invention adopts gas laser, good beam quality, and directionality is stable.
3, the present invention proposes hollow round table type resonant cavity and directly produces the hollow laser beam, the acquisition good reproducibility of its hollow laser beam.
4, wave-length coverage of the present invention is wide, suitable multiple needs.
The present invention compares with existing patent ZL2007100483280, has following characteristics:
1, the resonant cavity that the present invention adopts is concavo-convex stable cavity (sub-chamber) along the section of the axis of symmetry, and the waist spot of this sub-chamber output beam is positioned at outside the chamber, and for same high power situation, the power density distribution that outgoing mirror need bear reduces a lot (order of magnitude reduction).
2, the minimum beam radial location of output beam of the present invention is enough far away apart from the outgoing mirror position, make laboratory sample can effectively utilize the maximum power density distributing position of light beam and can bespatter the output eyeglass.
3, the present invention directly realizes and bundle outside the chamber by laser, realizes high power output easily.
Claims (3)
1. gas laser is used to export the light beam of special shape, it is characterized in that resonant cavity for being the hollow round table shape, and gain media is the hollow round table shape.
2. according to the described laser of claim 1, its resonant cavity is the hollow round table resonant cavity, it is characterized in that, paste rotation symmetrical concave surface annular completely reflecting mirror (1) in the bottom of hollow round table shape discharge tube, paste the symmetrical convex surface annulus partially reflecting mirror of rotation (6) at the top of truncated cone-shaped discharge tube and make outgoing mirror usefulness, laser is independent of each other to light bunch two of formations along the interior resonance chamber, arbitrary vertical section of central symmetry axis (10), with respect to the axisymmetric concavo-convex chamber of laser central symmetry axis (10) (sub-chamber), be stable cavity, the chamber axle (11) in two concavo-convex chambeies oneself intersects at an O with the laser central symmetry axis, the waist spot position of two sub-chamber output beams can overlap with intersection point O, can not overlap yet, the vertical section of mirror this moment (1) is a concave mirror, the vertical section of mirror (6) is the convex portions speculum, and the output face end is a straight line.
3. hollow round table resonant cavity gas laser device, comprise glass or quartz discharge tube (3), rotate symmetrical concave surface annular completely reflecting mirror (1), rotate symmetrical convex surface annulus partially reflecting mirror (6), interior electrode (2), external electrode (4), cylinder (9), blower fan (7), water collar (5), radio-frequency power supply (8), mirror (1) is connected with discharge tube (3) bottom, mirror (6) is connected with the top of discharge tube (3), interior electrode (2) is close to discharge tube (3) madial wall, external electrode (4) is close to discharge tube (3) lateral wall, radio-frequency power supply and matching network (8) and interior electrode (2), external electrode (4) connects, cylinder (5) is connected with discharge tube (3) and around discharge tube (3), water collar (5) is connected with discharge tube (3) outer wall, blower fan (7) is connected with discharge tube (3), it is characterized in that discharge tube (3) is a hollow round table shape discharge tube, internal and external walls all is round types, constitute region of discharge by the hollow round table clevis sheaf space between two round types, its bottom and top be respectively by mirror (3) and mirror (6) vacuum sealing label, makes the hollow round table clevis sheaf space can pumping high vacuum, under high vacuum condition with He-Ne gaseous mixture or carbon dioxide, nitrogen, helium gas mixture charges into discharge tube.
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| CN2009102162141A CN102064458B (en) | 2009-11-13 | 2009-11-13 | Hollow round table resonant cavity gas laser |
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|---|---|---|---|
| CN2009102162141A CN102064458B (en) | 2009-11-13 | 2009-11-13 | Hollow round table resonant cavity gas laser |
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| CN102064458B CN102064458B (en) | 2012-05-23 |
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| CN103545701A (en) * | 2013-10-11 | 2014-01-29 | 四川大学 | Phase-locked cylindrical CO2 laser |
| CN103972775A (en) * | 2014-05-13 | 2014-08-06 | 四川大学 | Device and method for realizing two-dimensional spiral and hollow laser beams |
| CN104294407A (en) * | 2014-10-15 | 2015-01-21 | 北京化工大学 | Shaft core focused carbon fiber graphitization furnace through laser tunnel reflection method |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0610170B1 (en) * | 1993-02-01 | 1997-06-25 | Dieter Dr. Univ. Prof. Schuöcker | Gas laser |
| CN2891409Y (en) * | 2006-03-15 | 2007-04-18 | 华中科技大学 | Right-angle truncated cone inner surface and right-angle taper outer surface combined full reflector laser resonator |
| CN100405678C (en) * | 2006-03-15 | 2008-07-23 | 华中科技大学 | Combination of the inner surface of the right-angle circular table and the outer surface of the right-angle cone with all-mirror laser resonator |
| CN1996683A (en) * | 2006-12-28 | 2007-07-11 | 华中科技大学 | Laser resonance cavity of the combined full reflection mirror with the right-angle interval and external taper |
| CN100530864C (en) * | 2007-01-25 | 2009-08-19 | 四川大学 | Hollow beam gas laser |
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| CN103972775B (en) * | 2014-05-13 | 2018-04-13 | 四川大学 | A kind of apparatus and method for realizing two-dimensional helical hollow laser beam |
| CN104294407A (en) * | 2014-10-15 | 2015-01-21 | 北京化工大学 | Shaft core focused carbon fiber graphitization furnace through laser tunnel reflection method |
| CN104760953A (en) * | 2015-04-13 | 2015-07-08 | 北京化工大学 | Total reflection axis focused carbon fibre graphitization furnace for laser tunnel |
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