CN102858512B - 一种用于制造微型结构的系统和方法 - Google Patents

一种用于制造微型结构的系统和方法 Download PDF

Info

Publication number
CN102858512B
CN102858512B CN201180009435.7A CN201180009435A CN102858512B CN 102858512 B CN102858512 B CN 102858512B CN 201180009435 A CN201180009435 A CN 201180009435A CN 102858512 B CN102858512 B CN 102858512B
Authority
CN
China
Prior art keywords
molding
hole
layer
flow
molded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180009435.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN102858512A (zh
Inventor
谭永杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN201610973868.9A priority Critical patent/CN106945202A/zh
Publication of CN102858512A publication Critical patent/CN102858512A/zh
Application granted granted Critical
Publication of CN102858512B publication Critical patent/CN102858512B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C44/00—Shaping by internal pressure generated in the material, e.g. swelling or foaming ; Producing porous or cellular expanded plastics articles
    • B29C44/34—Auxiliary operations
    • B29C44/36—Feeding the material to be shaped
    • B29C44/38—Feeding the material to be shaped into a closed space, i.e. to make articles of definite length
    • B29C44/385—Feeding the material to be shaped into a closed space, i.e. to make articles of definite length using manifolds or channels directing the flow in the mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/26—Perforating by non-mechanical means, e.g. by fluid jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/26—Perforating by non-mechanical means, e.g. by fluid jet
    • B26F1/28—Perforating by non-mechanical means, e.g. by fluid jet by electrical discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B26F3/004—Severing by means other than cutting; Apparatus therefor by means of a fluid jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C31/00—Handling, e.g. feeding of the material to be shaped, storage of plastics material before moulding; Automation, i.e. automated handling lines in plastics processing plants, e.g. using manipulators or robots
    • B29C31/04—Feeding of the material to be moulded, e.g. into a mould cavity
    • B29C31/042—Feeding of the material to be moulded, e.g. into a mould cavity using dispensing heads, e.g. extruders, placed over or apart from the moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/0033—Moulds or cores; Details thereof or accessories therefor constructed for making articles provided with holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/22—Component parts, details or accessories; Auxiliary operations
    • B29C39/24—Feeding the material into the mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/22—Component parts, details or accessories; Auxiliary operations
    • B29C39/26—Moulds or cores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/22—Component parts, details or accessories; Auxiliary operations
    • B29C39/42—Casting under special conditions, e.g. vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
    • B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C41/12—Spreading-out the material on a substrate, e.g. on the surface of a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
    • B29C41/34—Component parts, details or accessories; Auxiliary operations
    • B29C41/36—Feeding the material on to the mould, core or other substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
    • B29C41/34—Component parts, details or accessories; Auxiliary operations
    • B29C41/38—Moulds, cores or other substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/00373—Selective deposition, e.g. printing or microcontact printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2793/00—Shaping techniques involving a cutting or machining operation
    • B29C2793/0045—Perforating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/14—Filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/737—Articles provided with holes, e.g. grids, sieves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/753—Medical equipment; Accessories therefor
    • B29L2031/7544—Injection needles, syringes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/756—Microarticles, nanoarticles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/055—Microneedles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Forests & Forestry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Robotics (AREA)
  • Micromachines (AREA)
CN201180009435.7A 2010-02-11 2011-02-11 一种用于制造微型结构的系统和方法 Expired - Fee Related CN102858512B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610973868.9A CN106945202A (zh) 2010-02-11 2011-02-11 一种用于制造微型结构的系统和方法

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US30361310P 2010-02-11 2010-02-11
US30360510P 2010-02-11 2010-02-11
US61/303,605 2010-02-11
US61/303,613 2010-02-11
US32570110P 2010-04-19 2010-04-19
US61/325,701 2010-04-19
US40979910P 2010-11-03 2010-11-03
US61/409,799 2010-11-03
PCT/US2011/024566 WO2011100576A1 (en) 2010-02-11 2011-02-11 Systems for and methods of manufacturing micro-structures

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201610973868.9A Division CN106945202A (zh) 2010-02-11 2011-02-11 一种用于制造微型结构的系统和方法

Publications (2)

Publication Number Publication Date
CN102858512A CN102858512A (zh) 2013-01-02
CN102858512B true CN102858512B (zh) 2016-12-07

Family

ID=44353075

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201180009435.7A Expired - Fee Related CN102858512B (zh) 2010-02-11 2011-02-11 一种用于制造微型结构的系统和方法
CN201610973868.9A Pending CN106945202A (zh) 2010-02-11 2011-02-11 一种用于制造微型结构的系统和方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201610973868.9A Pending CN106945202A (zh) 2010-02-11 2011-02-11 一种用于制造微型结构的系统和方法

Country Status (4)

Country Link
US (2) US20110193270A1 (de)
EP (1) EP2533963A4 (de)
CN (2) CN102858512B (de)
WO (1) WO2011100576A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2488353B1 (de) * 2009-10-16 2018-05-23 Novartis AG Verfahren und kombination eines behälters mit einer vorrichtung zur entfernung einer kontaktlinse aus einem behälter
US11110375B2 (en) * 2014-09-05 2021-09-07 Imagine Tf, Llc Microstructure separation filters
KR102205435B1 (ko) * 2016-03-21 2021-01-21 온테라 인크. 나노기공 감지를 위한 절연체-막-절연체 장치의 웨이퍼-척도 어셈블리
CA3103691C (en) 2018-06-19 2021-09-28 Metakine Inc. Self-replicating fused deposition modeling printer using granules
CN110355825A (zh) * 2019-07-08 2019-10-22 湖南城市学院 一种pc装配式建筑用板材切割装置
CN111229719B (zh) * 2020-02-20 2021-02-09 西安交通大学 激光清洗辅助激光烧蚀制备多尺度微纳米复合结构的方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2106808A (en) * 1934-12-22 1938-02-01 Dunlop Rubber Co Process for producing porous sheets of rubber
US3429957A (en) * 1965-07-06 1969-02-25 Gulf General Atomic Inc Process for continuously casting a semi-permeable membrane
NL8603278A (nl) * 1986-12-23 1988-07-18 Stork Veco Bv Membraan met perforaties en werkwijze voor het vervaardigen van een dergelijk membraan.
DE3704546A1 (de) * 1987-02-13 1988-08-25 Kernforschungsz Karlsruhe Verfahren zur herstellung eines filters und danach hergestelltes filter
US5066450A (en) * 1989-07-28 1991-11-19 Rohr Industries, Inc. Method for making preformed maskant sheets
DE4125931A1 (de) * 1991-08-05 1993-02-11 Gerhardt Int As Verfahren zur herstellung eines walzenfoermigen praegewerkzeugs
US5256360A (en) * 1992-03-25 1993-10-26 Panasonic Technologies, Inc. Method of manufacturing a precision micro-filter
DE4300765C1 (de) * 1993-01-14 1993-12-23 Bosch Gmbh Robert Verfahren zum Planarisieren grabenförmiger Strukturen
JPH06238644A (ja) * 1993-02-15 1994-08-30 Taiyo Yuden Co Ltd セラミックグリーンシートの加工方法
US5660680A (en) * 1994-03-07 1997-08-26 The Regents Of The University Of California Method for fabrication of high vertical aspect ratio thin film structures
US5658515A (en) * 1995-09-25 1997-08-19 Lee; Abraham P. Polymer micromold and fabrication process
CN1081132C (zh) * 1999-08-20 2002-03-20 威硕科技股份有限公司 喷墨头的加热元件的形成方法及其结构
US6423252B1 (en) * 2000-06-23 2002-07-23 Ethicon, Inc. Methods of making micropatterned foams
NL1016779C2 (nl) * 2000-12-02 2002-06-04 Cornelis Johannes Maria V Rijn Matrijs, werkwijze voor het vervaardigen van precisieproducten met behulp van een matrijs, alsmede precisieproducten, in het bijzonder microzeven en membraanfilters, vervaardigd met een dergelijke matrijs.
CN1165428C (zh) * 2001-04-03 2004-09-08 明基电通股份有限公司 具有驱动电路的微喷射头
US6732943B2 (en) * 2001-04-05 2004-05-11 Aradigm Corporation Method of generating uniform pores in thin polymer films
US7141812B2 (en) * 2002-06-05 2006-11-28 Mikro Systems, Inc. Devices, methods, and systems involving castings
CA2448736C (en) * 2001-06-05 2010-08-10 Mikro Systems, Inc. Methods for manufacturing three-dimensional devices and devices created thereby
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
WO2004086938A2 (en) * 2003-03-25 2004-10-14 Herndon Terry O Drill device and method for forming microconduits
US7572405B2 (en) * 2003-06-02 2009-08-11 Corium International Inc. Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation
US7708544B2 (en) * 2003-07-21 2010-05-04 10X Technology Llc Apparatus and method for manufacturing microneedles
KR100693036B1 (ko) * 2004-08-19 2007-03-12 삼성전자주식회사 고효율 히터를 갖는 잉크젯 프린트 헤드 및 그 제조 방법
JP4775881B2 (ja) * 2004-12-10 2011-09-21 東洋ゴム工業株式会社 研磨パッド
KR100953928B1 (ko) * 2004-12-10 2010-04-23 도요 고무 고교 가부시키가이샤 연마 패드 및 연마 패드의 제조 방법
JP2008539090A (ja) * 2005-04-26 2008-11-13 アビザ テクノロジー リミティド マイクロ流体構造およびその製造方法
NL1030081C2 (nl) * 2005-09-30 2007-04-02 Stork Veco Bv Zeefmateriaal uit metaal en werkwijze voor de vervaardiging daarvan.
US7464466B2 (en) * 2005-10-11 2008-12-16 Silverbrook Research Pty Ltd Method of fabricating inkjet nozzle chambers having filter structures
KR20080114358A (ko) * 2007-06-27 2008-12-31 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
GB0712861D0 (en) * 2007-07-03 2007-08-08 Eastman Kodak Co Continuous ink jet printing of encapsulated droplets

Also Published As

Publication number Publication date
US20110193270A1 (en) 2011-08-11
CN102858512A (zh) 2013-01-02
EP2533963A1 (de) 2012-12-19
US20160009008A1 (en) 2016-01-14
EP2533963A4 (de) 2015-01-21
WO2011100576A1 (en) 2011-08-18
US9855687B2 (en) 2018-01-02
CN106945202A (zh) 2017-07-14

Similar Documents

Publication Publication Date Title
CN102858512B (zh) 一种用于制造微型结构的系统和方法
Huang et al. A monolithically three-dimensional flow-focusing device for formation of single/double emulsions in closed/open microfluidic systems
Sato et al. An all SU-8 microfluidic chip with built-in 3D fine microstructures
US20240375055A1 (en) Features on a porous membrane
KR102168053B1 (ko) 고속 온 디맨드 미세유체 액적 생성 및 조작
EP1510251B1 (de) Vorrichtung und Verfahren zum Herstellen von Mikrokapseln
Deng et al. Simple and cheap microfluidic devices for the preparation of monodisperse emulsions
US9566398B2 (en) Atomising body, atomising device, inhaler, manufacturing method of manufacturing an atomising body and assembly method for assembling an atomising device
MXPA06009571A (es) Implante de glaucoma con modulo de filtracion mems.
US20130175171A1 (en) Nano and microfluidic device for separating and concentrating particles present in a fluid
Chang et al. Controlled double emulsification utilizing 3D PDMS microchannels
Lee et al. A droplet-based microfluidic system capable of droplet formation and manipulation
CN112138731A (zh) 微流控器件以及其制造方法、制造装置
KR101833610B1 (ko) 미세 입자 제조 장치
Cai et al. Printing on liquid elastomers
US11453005B2 (en) Anchored-liquid stationary phase for separation and filtration systems
JP2022528471A (ja) エマルション製造マイクロ流体デバイス
Ou et al. Microspheres as resistive elements in a check valve for low pressure and low flow rate conditions
US9103360B2 (en) Microactuator using bubble growth and destruction
JP2017000921A (ja) 曲げ弾性係数が小さい粒子の分離捕捉装置
KR20140052366A (ko) 다공질 멤브레인을 채용하는 막유화 장치 및 구조
Abate et al. Microfluidic techniques for synthesizing particles
Su Packaging of Membrane-Based Polymer Microfluidic Systems
Rajasekaran et al. Fabrication and characterization of non-linear parabolic microporous membranes
Prevot et al. Microfluidic system incorporating layer-by-layer nanofabricated capsules

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161207

CF01 Termination of patent right due to non-payment of annual fee