CN103802476A - Piezoelectric ink jet head - Google Patents

Abstract

The invention relates to a piezoelectric ink jet head, which comprises at least one ink jet unit and a liquid supply flow channel, wherein the ink jet unit comprises a pressure cavity and a vibrating plate, the pressure cavity is communicated with the liquid supply flow channel, and the vibrating plate is adjacently arranged in the pressure cavity; the jet orifice plate is provided with jet orifices corresponding to the ink jet units respectively, and the jet orifices are communicated with the pressure cavity and the liquid supply flow channel and used for jetting and printing liquid drops; the actuating unit is arranged on the vibrating plate and corresponds to the pressure cavity, and comprises a plurality of actuating sheets formed by cutting, and each actuating sheet receives a driving signal to act; each actuating sheet selectively receives a driving signal to drive the actuating sheets to act at a plurality of frequencies, and the driving signal is adjusted according to the aperture and the droplet characteristics of the jet orifice, so that the jet orifice jets droplets with different sizes and viscosities.

Description

piezoelectric inkjet head

technical field

The invention relates to a piezoelectric inkjet head, especially a piezoelectric inkjet head with a plurality of actuating plates.

Background technique

With the advancement of inkjet technology, inkjet technology is no longer only used in the traditional printing market, but has been used in the process technology of flat panel displays and the semiconductor industry in recent years. However, in order to reduce costs and save process time, new inkjet technology has been sought Ink technology, the most widely used of which is piezoelectric inkjet technology.

Please refer to Figures 1A and 1B, wherein Figure 1A is a schematic plan view of a conventional piezoelectric inkjet head, and Figure 1B is a cross-sectional view of A-A of Figure 1A, as shown in Figure 1A, a conventional piezoelectric inkjet head 1 series It has a liquid supply channel 11 for the fluid to flow in, a single actuating plate 12, and as shown in FIG. Microstructures such as the spray orifice plate 15, and a vibrating plate 16 is arranged above the microstructures such as the pressure chamber 13, the liquid outlet flow channel 14 and the nozzle hole 151, and above the vibrating plate 16, and corresponding to the pressure chamber. The position of 13 sets the single actuating piece 12.

When a voltage acts on the upper and lower poles of the actuating piece 12, an electric field will be generated, causing the actuating piece 12 to bend and deform under the action of the electric field. Since the actuating piece 12 is arranged on the vibrating plate 16, the actuating The suction and thrust generated by the sheet 12 will be transmitted to the vibrating plate 16, so that the vibrating plate 16 will also be squeezed and deformed. When the actuating sheet 12 generates suction, the fluid will enter the piezoelectric inkjet head through the liquid supply channel 11 1, in the internal pressure chamber 13, when the actuating plate 12 produces a thrust, the fluid stored in the pressure chamber 13 will be sent to the outlet flow channel 14 due to the pressure chamber 13 being squeezed to pass through the nozzle hole 151 squirt.

Please refer to Figures 1A and 1B again. The size of the actuating sheet 12 used in the conventional piezoelectric inkjet head 1 is 2700umx2700um, and the orifice plate 15 is only equipped with one nozzle hole 151, and the nozzle hole 151 is in the shape of the actuating sheet 12. Symmetrical or centered, the pore size is between 30 and 120um. Please refer to Fig. 2, which is a schematic diagram of a driving signal of a conventional piezoelectric inkjet head, wherein the driving signal V used by the conventional piezoelectric inkjet head 1 is mainly 30V, that is, the peak is +30V, and the valley is -30V.

The conventional piezoelectric inkjet head 1 uses a single pressure chamber 13 and a single actuating sheet 12, that is, one pressure chamber 13 is equipped with one actuating sheet 12, although it is possible to print different sizes and sizes by adjusting the driving signal. Viscosity of the fluid, but the lack of versatility, so that the applicable fluid is limited. It is known that the piezoelectric inkjet head 1 can print low-viscosity fluids such as pure water when the size and area of the actuator plate 12 is about ^1400000um2. The movable piece 12 is used to solve the above-mentioned conventional deficiencies, such as using the size of the actuating piece 12 of 3750um x 3750um, which is about 10 times the printable area of the aforementioned ^1400000um2 , so that the actuating piece 12 can be applied to various Viscosity of the fluid for printing, but this solution requires a relatively large drive signal to drive the actuator plate 12 to operate, so that when printing low-viscosity fluid or small-sized droplets originally only need to use low voltage However, it is known to output an excessively large driving signal to drive the actuating plate 12 to print low-viscosity fluid, which will cause unnecessary waste of energy.

Therefore, how to develop a piezoelectric inkjet head with a plurality of actuating plates that can improve the lack of the above-mentioned conventional technology is an urgent problem to be solved at present.

Contents of the invention

The main purpose of the present invention is to provide a piezoelectric inkjet head with a plurality of actuating pieces, so as to solve the problem that the conventional piezoelectric inkjet head is equipped with a large-sized actuating piece to be suitable for printing various fluids with different viscosities. , but it requires a relatively large driving signal to drive the actuating plate to operate, so that an excessively large driving signal will cause redundant energy waste and other disadvantages when printing low-viscosity droplets.

In order to achieve the above object, a broader embodiment of the present invention provides a piezoelectric inkjet head, comprising at least one inkjet unit and a liquid supply channel, the inkjet unit includes a pressure chamber and a vibrating plate , wherein, the pressure chamber communicates with the liquid supply channel, the vibrating plate is adjacent to the pressure chamber; an orifice plate, the orifice plate forms a nozzle hole corresponding to each inkjet unit, and the nozzle hole communicated with the pressure chamber and the liquid supply flow channel, and is used for printing droplets; actuating pieces, each of which respectively receives a driving signal to act; wherein, each actuating piece selectively receives the driving signal to drive the plurality of actuating pieces to move at multiple frequencies, and the driving signal depends on the The aperture of the nozzle hole and the droplet characteristics are adjusted so that the nozzle hole prints droplets of different sizes and different viscosities.

Description of drawings

FIG. 1A is a schematic plan view of a conventional piezoelectric inkjet head.

FIG. 1B is a cross-sectional view along line A-A of FIG. 1A.

FIG. 2 is a schematic diagram of driving signals of a conventional piezoelectric inkjet head.

3A is a schematic plan view of a piezoelectric inkjet head according to a first preferred embodiment of the present invention.

FIG. 3B is a B-B sectional view of FIG. 3A.

4A-4E are schematic diagrams of driving signals of the piezoelectric inkjet head shown in FIG. 3A.

5A is a schematic plan view of a piezoelectric inkjet head according to a second preferred embodiment of the present invention.

FIG. 5B is a sectional view along line C-C of FIG. 5A.

6A-6I are schematic diagrams of driving signals of the piezoelectric inkjet head shown in FIG. 5A.

FIG. 7A is a schematic cut diagram of a piezoelectric inkjet head according to a third preferred embodiment of the present invention.

FIG. 7B is a flow chart of the cutting method of the piezoelectric inkjet head actuating sheet according to the third preferred embodiment of the present invention.

FIG. 7C is a schematic diagram of a piezoelectric inkjet head according to a third preferred embodiment of the present invention.

FIG. 8A is a schematic cut diagram of a piezoelectric inkjet head according to a fourth preferred embodiment of the present invention.

FIG. 8B is a flow chart of the cutting method of the piezoelectric inkjet head actuating sheet according to the fourth preferred embodiment of the present invention.

FIG. 8C is a schematic diagram of a piezoelectric inkjet head according to a fourth preferred embodiment of the present invention.

FIG. 9A is a schematic cut diagram of a piezoelectric inkjet head according to a fifth preferred embodiment of the present invention.

FIG. 9B is a flow chart of the cutting method of the piezoelectric inkjet head actuator sheet according to the fifth preferred embodiment of the present invention.

FIG. 9C is a schematic diagram of a piezoelectric inkjet head according to a fifth preferred embodiment of the present invention.

[Description of main component symbols]

Piezoelectric inkjet head: 1, 2, 3, 7, 8, 9

Actuation pieces: 12

Pressure chamber: 13, 23

Outlet channel: 14, 24

Orifice plate: 15, 25

Orifice: 151, 251, 74, 83, 93

Vibration plate: 16, 26

Actuation unit: 22, 32, 73, 82, 92

The first action film: 221, 321

Second actuator: 222, 322

The third actuator piece: 323

Liquid supply channel: 11, 21, 71

Inkjet unit: 72, 811, 812, 813, 814, 911, 912, 913, 914

Actuation piece: 731, 732, 733, 734, 821, 822, 823, 824, 921, 922, 923, 924

Locating mark: 75

Length: X1, X2, X3, X4

Width: Y1, Y2, Y3

Drive signal: V

Cutting distance: X5, X6, X8, Y4, Y6, Y8, Y10, Y11, Y13

Grid distance: X7, Y5, Y7, Y9, Y12

Cutting line: L1~L10, C1~C8

S71-S75, S81-S86, S91-96: Cutting steps of piezoelectric inkjet head actuator sheet

Detailed ways

Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the description in the following paragraphs. It should be understood that the invention is capable of various changes in different aspects without departing from the scope of the invention, and that the description and illustrations therein are illustrative in nature and not limiting. this invention.

Please refer to Fig. 3A and 3B, wherein Fig. 3A is a schematic plan view of the piezoelectric inkjet head of the first preferred embodiment of the present invention, and Fig. 3B is a B-B sectional view of Fig. 3A, as shown in the figure, the present embodiment The piezoelectric inkjet head 2 has a liquid supply channel 21 for fluid to flow in, at least one inkjet unit, a liquid outlet channel 24, an orifice plate 25, and an actuating unit 22. In this embodiment, the actuating unit 22 includes The formed first actuating piece 221 and the second actuating piece 222 are cut, and the orifice plate 25 forms an orifice 251 corresponding to each inkjet unit for printing droplets, and the inkjet unit includes a pressure chamber body 23 and vibrating plate 26, the pressure chamber 23 is in communication with the nozzle hole 251 and the liquid supply channel 21, and the vibration plate 26 is arranged above the microstructures such as the pressure chamber 23, the liquid outlet channel 24 and the nozzle hole 251 The vibrating plate 26 is adjacent to the pressure cavity 23 , and the first actuating piece 221 and the second actuating piece 222 are disposed above the vibrating plate 26 and corresponding to the position of the pressure cavity 23 .

Please refer to FIG. 3A again. The first actuating piece 221 and the second actuating piece 222 of this preferred embodiment are formed by cutting the actuating piece such as shown in FIG. The length X1 of them is the same, and the widths Y1 and Y2 are also the same. In this embodiment, the length X can be but not limited to 3800um, and the widths Y1 and Y2 can be but not limited to 1900um. Of course, the first actuating piece 221 and The size of the second actuating piece 222 is not limited thereto, and the size of the two can also be different, and a chip cutting device can be used to cut out the required size according to the requirement.

The first actuating piece 221 and the second actuating piece 222 of the present invention are piezoelectric plates, which can be made of lead zirconate titanate (PZT) series piezoelectric powder with high piezoelectric coefficient.

Please refer to FIG. 3B again, the first actuating piece 221 and the second actuating piece 222 can respectively receive a driving signal V to act, and the mode of operation is to apply a driving signal V to the first actuating piece respectively. 221 and the upper and lower poles of the second actuating piece 222 to generate an electric field, so that the first actuating piece 221 and the second actuating piece 222 are bent and deformed under the action of the electric field, because the first actuating piece 221 and the second actuating piece 221 The two actuating pieces 222 are arranged on the vibrating plate 26, so the suction and thrust generated by the first actuating piece 221 and the second actuating piece 222 will be transmitted to the vibrating plate 26, so that the vibrating plate 26 is also squeezed and deformed. , when the first actuating piece 221 and the second actuating piece 222 generate suction, that is, upward expansion and deformation, the fluid will enter the pressure cavity 23 inside the piezoelectric inkjet head 2 through the liquid supply channel 21, when the second When the first actuating piece 221 and the second actuating piece 222 generate thrust, they are squeezed downwards and deformed, and the fluid stored in the pressure chamber 23 will be sent to the liquid outlet channel 24 due to the pressure chamber 23 being squeezed to be ejected through the nozzle hole 251.

3A and 3B, the first actuating piece 221 and the second actuating piece 222 of the present invention are set up and down correspondingly, so the first actuating piece 221 and the second actuating piece 222 can be selectively received. The driving signal V is used to drive the first actuating piece 221 and the second actuating piece 222 to operate at multiple frequencies, and the driving signal V is adjusted according to the aperture and droplet characteristics of the nozzle hole 251, so that the nozzle hole 251 prints Droplets of different sizes and different viscosities, that is, selectively drive at least one of the first actuating piece 221 and the second actuating piece 222 to operate through different driving signals V, so as to respond to different sprays. Print sizes, fluids with different viscosities and different printing speed requirements, the following will illustrate using different driving signals V to drive at least one of the first actuating piece 221 and the second actuating piece 222 to operate, and achievable effects.

Please refer to FIG. 3B and FIGS. 4A and 4B. In this embodiment, one of the first actuating piece 221 and the second actuating piece 222 can receive the driving signal V independently to control the movement of only one actuating piece. , that is, the first actuating piece 221 is driven alone while the second actuating piece 222 is not in operation (as shown in FIG. 4B), it is possible to make the spray hole 251 spray small-sized or low-viscosity liquid droplets.

3B and 4C, in this embodiment, the first actuating piece 221 and the second actuating piece 222 can simultaneously receive the driving signal V of the same phase displacement, so that the two move in the same phase, which can achieve The nozzle hole 251 ejects large-sized or high-viscosity liquid droplets.

3B and 4D, in this embodiment, the first actuating piece 221 and the second actuating piece 222 can receive the driving signal V of the opposite phase displacement at the same time, so that the two move in opposite phases, that is, the first The first actuating piece 221 and the second actuating piece 222 move up and down in opposite phases, so that the spray holes 251 can spray droplets of required size or viscosity according to the user's needs.

3B and 4E, in this embodiment, the first actuating piece 221 and the second actuating piece 222 can receive the drive signal V in turn, so that the two act in turn to increase the injection rate of the single nozzle hole 251. The ink frequency is doubled to achieve the effect of increasing the inkjet speed.

The diameter of the nozzle hole 251 mentioned above is between 30 and 120um, and the voltage value of the above driving signal V can be +/-30V, but it is not limited to this and can also be adjusted to +/-50V according to the demand, of course The voltage value of the driving signal V is not limited to the above +/-30V or +/-50V and can be adjusted according to requirements.

Please refer to Fig. 5A and 5B, wherein Fig. 5A is a schematic plan view of the piezoelectric inkjet head of the second preferred embodiment of the present invention, and Fig. 5B is a C-C sectional view of Fig. 5A, as shown in Fig. 5A, this embodiment The piezoelectric inkjet head 3 has a liquid supply channel 21 and an actuating unit 32. In this embodiment, the actuating unit 32 includes a first actuating piece 321, a second actuating piece 322 and a third actuating piece formed by cutting. Actuating plate 323, and as shown in Figure 5B, piezoelectric inkjet head 3 further includes microstructures such as pressure cavity 23, liquid outlet channel 24, nozzle hole plate 25 with nozzle hole 251, and vibration plate 26, among which , the setting positions of the liquid supply channel 21, the single pressure chamber 23, the liquid outlet channel 24, the nozzle hole plate 25 with the nozzle hole 251 and the vibrating plate 26 and the purpose and effect that can be achieved have been described in detail in the first In a preferred embodiment, therefore no more details are given.

Compared with the first embodiment, the piezoelectric inkjet head 3 of this embodiment includes a first actuation piece 321, a second actuation piece 322 and a third actuation piece 323, and as shown in FIG. 5B, the first actuation piece The moving piece 321, the second actuating piece 322 and the third actuating piece 323 are arranged above the vibrating plate 26 and corresponding to the position of the pressure chamber 23, and the three are adjacently arranged in pairs on the left and right and the third The second actuating piece 322 is arranged between the first actuating piece 321 and the third actuating piece 323, so that the nozzle hole 251 is correspondingly arranged on the second actuating piece 322, and can be cut in a slitting manner by using a laser cutting device. For example, the actuator plate shown in Figure 1A is formed, and the lengths X2, X3, and X4 of the three can be similar, and the width Y3 can be the same. In this embodiment, the lengths X2, X3, and X4 can be 1266um, 1268um, respectively. 1266um, the width Y3 can be but not limited to 3800um, of course, the size of the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 is not limited to this, and the size can also be different, Die cutting equipment can be used to cut out the required size according to requirements.

As for, the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 can be a piezoelectric plate, which can be made of lead zirconate titanate (PZT) series piezoelectric powder with high piezoelectric coefficient. , and its mode of operation and the purpose and effect it can achieve have been described in detail in the first preferred embodiment, so it will not be described again.

Please refer to FIGS. 5A and 5B again. Since the present invention only includes a single pressure cavity 23, and the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 are adjacently arranged in pairs on the left and right, And the second actuating piece 322 is arranged between the first actuating piece 321 and the third actuating piece 323, so that the nozzle hole 251 is correspondingly arranged on the second actuating piece 322, so the first actuating piece 321 can be , the second actuating piece 322 and the third actuating piece 323 selectively receive the drive signal V to drive the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 to move at multiple frequencies, Make the nozzle hole 251 print droplets of different sizes and different viscosities, that is, selectively drive the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 by different driving signals V The operation of at least one actuating piece can meet the needs of different printing sizes, fluids of different viscosities and different printing speeds. The following will illustrate the use of different driving signals V to drive the first actuating piece 321 and the second actuating piece. 322 and the third actuating piece 323 at least one actuating piece operates, and the effect that can be achieved.

Please refer to Fig. 5B and Fig. 6A, 6B and 6C, in this embodiment, one of the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 alone receives the driving signal V to control Only a single actuation piece acts in the vibration area, that is, the first actuation piece 321 is driven alone, the second actuation piece 322 and the third actuation piece 323 are not in operation (as shown in Figure 6A), and the second actuation piece 323 is driven independently. The moving piece 322 and the first actuating piece 321 and the third actuating piece 323 are not in operation (as shown in Figure 6B) or the third actuating piece 323 is driven independently while the first actuating piece 321 and the second actuating piece 322 does not work (as shown in the 6th figure), it can reach the nozzle hole 251 to eject small-size or low-viscosity droplets, but if the nozzle hole 251 is relatively to the first actuating piece 321, the second actuating piece 322 and If the area formed by the third actuating piece 323 is centered, it is better to drive the second actuating piece 322 .

Please refer to Fig. 5B and Fig. 6D, in this embodiment, the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 can simultaneously receive the driving signal V of the same phase displacement, so that the three become The same phase shifting can make the nozzle hole 251 eject large-size or high-viscosity liquid droplets.

Please refer to Fig. 5B and Fig. 6E, 6F and 6G, in this embodiment, two of the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 receive the drive signal V, so that the Some of the actuating pieces in the plurality of actuating pieces act, that is, the first actuating piece 321 and the second actuating piece 322 are simultaneously driven while the third actuating piece 323 is not in operation (as shown in Figure 6E), or simultaneously Drive the second actuating piece 322 and the third actuating piece 323 while the first actuating piece 321 is not in operation (as shown in Figure 6F), or drive the first actuating piece 321 and the third actuating piece 323 simultaneously while the first actuating piece 321 is inactive. The two actuating pieces 322 are not in operation (as shown in FIG. 6F ), so that the spray hole 251 can spray medium-sized or medium-viscosity liquid droplets.

Please refer to FIG. 5B and FIG. 6H. In this embodiment, the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 receive the driving signal V at the same time, and make two adjacent actuating pieces The opposite phase movement between two adjacent actuating pieces, that is, a reverse displacement action between two adjacent actuating pieces, wherein the first actuating piece 321 and the third actuating piece 323 have the same displacement direction, and the second actuating piece The direction of displacement of 322 is opposite, so as to make the nozzle hole 251 eject liquid droplets of required size or viscosity according to user's requirements.

Please refer to FIG. 5B and FIG. 6I. In this embodiment, the first actuating piece 321, the second actuating piece 322 and the third actuating piece 323 receive the drive signal V in turn, so that the three act in turn. By increasing the ink ejection frequency of the single nozzle hole 251 to three times, the effect of increasing the ink ejection speed can be achieved.

The above-mentioned voltage value of the drive signal V can be +/-30V, but it is not limited to this and can be adjusted to, for example, +/-50V according to the needs. Of course, the voltage value of the drive signal V is not limited to the above-mentioned +/-30V Or +/-50V can be adjusted according to needs.

The size of the plurality of actuating sheets included in the piezoelectric inkjet head of the present invention is not limited to being substantially the same, and can also be cut into different sizes by a chip cutting device. Taking the three blocks of the moving piece 321, the second actuating piece 322 and the third actuating piece 323 as an example, the volume of the second actuating piece 322 arranged in the middle area can be larger than that of the first actuating piece 321 and the third actuating piece 321. sheet 323, and at this time only the second actuating sheet 322 arranged in the middle block can be individually driven to eject ink.

Similarly, the number of actuating pieces included in the piezoelectric inkjet heads 2 and 3 of the present invention is not limited to 2 or 3 as shown in Figures 3A and 5A, and chip cutting equipment can be used to cut out the required pieces according to requirements. The number of blocks is only required to drive the actuating sheet closer to the nozzle hole to be able to eject ink, and the actuating sheet arranged in other blocks is only required to increase the total area of the effectively driven actuating sheet to eject various inks. droplet size or viscosity.

As can be seen from the above, the piezoelectric inkjet head of the present invention configures multiple actuating plates in a single pressure chamber, and adjusts the driving signal according to different needs to simultaneously drive one or more of the actuating plates, that is, for printing Droplets of different sizes, different viscosities, and different inkjet frequency requirements enable the present invention to flexibly adjust the number of drive actuators and the voltage value of the drive signal to achieve the goal. For example, when printing low-viscosity droplets, only Reducing the number of actuating pieces and reducing the voltage value of the driving signal can meet the requirements, and the method of reducing the voltage value of the driving signal can avoid unnecessary waste of energy. Moreover, using the same total actuating area for comparison, The conventional technology only uses a single actuator to limit the size of the droplets that can be printed. On the other hand, the present invention can control the number of drives of the actuator to meet the needs of printing more droplets of different sizes. to improve versatility.

Please refer to FIG. 7A and FIG. 7B, wherein FIG. 7A is a structural schematic diagram of a piezoelectric inkjet head according to a third preferred embodiment of the present invention, and FIG. 7B is an actuation diagram of a piezoelectric inkjet head according to a third preferred embodiment of the present invention. The flow chart of the sheet cutting method, as shown in Figure 7A, the piezoelectric inkjet head 7 of the present invention is a multi-layer structure, mainly composed of a vibrating plate and a plurality of plates (not shown) stacked, and The piezoelectric inkjet head 7 has a liquid supply channel 71 and a plurality of inkjet units 72, wherein, in this embodiment, the actuation areas of the plurality of inkjet units 72 are distributed in four different quadrants but mutually Not arranged symmetrically, each inkjet unit 72 has a pressure chamber (not shown), and the piezoelectric inkjet head 7 further includes an orifice plate (not shown) with the plurality of nozzle holes 74 Each inkjet unit 72 is respectively provided with a nozzle hole 74, and the pressure chamber of each inkjet unit 72 is connected with the liquid supply channel 71, so that the printing fluid can flow into each inkjet unit from the liquid supply channel 71. In the pressure cavity, an actuating unit 73 is arranged at the pressure cavity of a plurality of inkjet units 72, wherein the actuating unit 73 can be made of, but not limited to, lead zirconate titanate (Lead Zirconate Titanate, PZT) piezoelectric The material is formed, and the actuating unit 73 can be cut by a cutting device, so that the actuating unit 73 corresponding to the pressure cavity of each inkjet unit 72 produces an actuating piece, that is, the actuating piece shown in FIG. 7A The moving pieces 731, 732, 733, 734 and the actuating pieces 731, 732, 733, 734 are respectively formed on the pressure chambers of the plurality of inkjet units 72, and selectively receive a driving signal V to act, and each The nozzle holes 74 are respectively formed at relative positions corresponding to the corresponding actuating pieces 731 , 732 , 733 , and 734 . Wherein, the volume of each pressure cavity is roughly proportional to the size of the actuating pieces 731, 732, 733, 734 and the diameters of the nozzle holes 74, whereby each actuating pieces 731, 732, 733, 734 selectively receive The driving signal V, the driving signal V is adjusted according to the aperture and droplet characteristics of each nozzle hole 74, so as to drive the plurality of actuating plates 731, 732, 733, 734 to operate at multiple frequencies, so that the nozzle holes 74 are sprayed. droplets of different sizes and viscosities.

Please refer to Fig. 7B, which is a flow chart of the cutting method of the piezoelectric inkjet head actuating sheet of the third preferred embodiment of the present invention, as shown in the figure, the piezoelectric inkjet head actuating sheet of the present embodiment The cutting method comprises the following steps: first, the piezoelectric inkjet head 7 is provided, which has a liquid supply flow path 71 and a plurality of inkjet units 72, wherein the plurality of inkjet units 72 have respectively connected to the liquid supply flow path 71. A pressure chamber through which each inkjet unit 72 forms a nozzle hole 74 (as shown in step S71), and in this embodiment, a plurality of inkjet units 72 can be, but not limited to, respectively Arranged in four quadrants, then, an actuation unit 73 is arranged above the pressure chambers of a plurality of inkjet units 72, the actuation unit 73 includes a plurality of actuation pieces 731, 732, 733, 734, and the actuation piece 731 . 734 is approximately in the relative position of the center (as shown in step S72), and subsequently the actuation areas of the actuation pieces 731, 732, 733, 734 are set, and multiple positions can be marked on the piezoelectric inkjet head 7 The mark 75, for example: marking the positioning mark 75 presenting an L shape in a dashed manner, the actuating unit 73 is fixed in the range formed by the multiple positioning marks 75, so that the actuating unit 73 can be correspondingly arranged on a plurality of positioning marks 75 Above the pressure chamber of the inkjet unit 72 (as shown in step S73), of course, the positioning method of the actuating unit 73 of the present invention is not limited to marking the positioning mark 75 in a scribed manner, and the positioning mark 75 is not limited to It is L-shaped, and any method that can achieve the actuation unit 73 being fixed above the pressure chambers of the plurality of inkjet units 72 is within the protection scope of the present invention.

Next, the actuating unit 73 is cut with a cutting device according to the area of each actuating piece set in step S73 (as shown in step S74), so that the actuating unit 73 corresponds to each pressure chamber Each of the pressure chambers has an actuating piece, that is, the actuating piece 731, 732, 733, 734 shown in FIG. 732, 733, 734, and selectively receive the driving signal V to act, the driving signal V is adjusted according to the aperture of each nozzle hole 74 and the droplet characteristics, so as to drive the actuating pieces 731, 732, 733, 734 to operate at multiple frequencies, The actuating pieces 731 , 732 , 733 , 734 are selected to act corresponding to liquid droplets of different sizes and different viscosities.

Among them, the cutting equipment used in this embodiment can be but not limited to a wafer cutting equipment, such as: laser machine, finally, the waste materials in the actuating unit 73 except the actuating pieces 731, 732, 733, 734 After removal, the piezoelectric inkjet head 7 as shown in FIG. 7C can be formed.

In this embodiment, the actuating pieces 731, 732, 733, 734 can be of different sizes and all have a square structure and are distributed in four different quadrants. For example: if the actuating piece 12 shown in FIG. 1A If the actuating area is 10 units, the actuating areas of the actuating pieces 731, 732, 733, and 734 shown in FIG. 7A can be about 3, 5, 8, and 10 units respectively. The aperture of the hole 74 is approximately proportional to the volume of the corresponding pressure chamber and the actuation area of the inkjet unit 72, that is, the aperture of the nozzle hole 74 of each inkjet unit 72 is approximately the same as the actuation plate 731, 732, 733, 734 The size of the pressure chamber and the volume of the pressure chamber are proportional to each other. The diameters of the nozzle holes 74 corresponding to the actuation pieces 731, 732, 733, and 734 can be, for example, 30, 45, 60, and 90um respectively. Of course, the actuation pieces 731, 732, The actuating areas of 733 and 734 and the size of the corresponding nozzle holes 74 are not limited thereto, and can be changed according to actual needs.

Please refer to Fig. 8A and Fig. 8B, wherein Fig. 8A is the cutting diagram of the piezoelectric inkjet head of the fourth preferred embodiment of the present invention, and Fig. 8B is the actuation of the piezoelectric inkjet head of the fourth preferred embodiment of the present invention The flow chart of the sheet cutting method, as shown in Figure 8A, the piezoelectric inkjet head 8 of the present embodiment is a multi-layer structure, which is also formed by stacking a vibrating plate and a plurality of plates (not shown). , and the piezoelectric inkjet head 8 has a liquid supply channel 71 and a plurality of inkjet units 811, 812, 813, 814, wherein, in this embodiment, the plurality of inkjet units 811, 812, 813, 814 They are symmetrically arranged in a vertical arrangement, but not limited thereto, and can also be arranged symmetrically in a horizontal arrangement according to requirements. The inkjet units 811, 812, 813, and 814 each have a pressure chamber (not shown), the pressure chambers are arranged equidistantly in one direction and unequal in the other direction, and the piezoelectric inkjet head 8 further includes an orifice plate (not shown) with the plurality of nozzle holes 83 Icon), a spray hole 83 is set in the inkjet units 811, 812, 813, 814 respectively, and the pressure chambers of the inkjet units 811, 812, 813, 814 are connected with the liquid supply channel 71, so that the inkjet Fluid can flow into each pressure cavity from the liquid supply channel 71, and an actuation unit 82 is provided at the pressure cavity of the inkjet units 811, 812, 813, 814, wherein the actuation unit 82 can be controlled by but not limited to Formed from lead zirconate titanate (Lead Zirconate Titanate, PZT) piezoelectric material, the actuating unit 82 can be cut by a cutting device, so that the actuating unit 82 corresponds to each inkjet unit 811, 812, 813, The place of the pressure chamber body of 814 produces an actuating sheet respectively, namely the actuating sheet 821,822,823,824 shown in Figure 8A and 8C, and the actuating sheet 821,822,823,824 is respectively formed in the inkjet unit 811 , 812, 813, 814 on the pressure chamber body, and the aspect ratio of the actuating piece 821, 822, 823, 824 is 2 or less, and selectively receive a driving signal V to act respectively, and each nozzle hole 83 is respectively It is formed at relative positions corresponding to the actuation pieces 821 , 822 , 823 , and 824 which are approximately centered.

Wherein, the volume of each pressure cavity is roughly proportional to the size of the actuator plates 821, 822, 823, 824 and the diameters of the nozzle holes 83, whereby each actuator plate 821, 822, 823, 824 selectively receives The drive signal V, the drive signal V is adjusted according to the aperture and droplet characteristics of each nozzle hole 83, so as to drive the plurality of actuating plates 821, 822, 823, 824 to operate at multiple frequencies, so that the nozzle holes 83 print droplets of different sizes and viscosities.

Please refer to FIGS. 8A and 8B, wherein FIG. 8B is a flow chart of the cutting method of the piezoelectric inkjet head actuating sheet of the fourth preferred embodiment of the present invention. As shown in the figure, the piezoelectric inkjet head of this embodiment The cutting method of the actuating sheet comprises the following steps: First, the piezoelectric inkjet head 8 is provided, which has a liquid supply channel 71 and inkjet units 811, 812, 813, 814, wherein the inkjet units 811, 812, 813, 814 respectively have a pressure cavity communicated with the liquid supply channel 71, and respectively form a nozzle hole 83 in the inkjet unit 811, 812, 813, 814 (as shown in step S81), and in this embodiment Among them, the inkjet units 811, 812, 813, and 814 are symmetrically arranged in a vertical arrangement, but it is not limited to this, and can also be changed to be symmetrical in a horizontal arrangement according to requirements. An actuation unit 82 is arranged above the pressure chambers of the ink units 811, 812, 813, 814. The actuation unit 82 includes a plurality of actuation pieces 821, 822, 823, 824, and the actuation pieces 821, 822, 823, 824 are respectively Formed on the pressure chambers of the inkjet units 811, 812, 813, 814, and selectively receive the drive signal V to act (as shown in step S82), and then set each inkjet unit 811, 812, 813 , the actuation area of 814, the cutting distance in a first direction and the distance between the plurality of inkjet units 811, 812, 813, 814 (as shown in step S83), wherein the first direction can be but not is limited to the X direction, and the cutting distance of each inkjet unit 811, 812, 813, 814 in the first direction is equal, that is, the inkjet units 811, 812, 813, 814 in the X direction as shown in FIG. 8A The cutting distance X5 is equal, and the distances between the inkjet units 811 , 812 , 813 , 814 are the distances Y5 , Y7 , and Y9 as shown in FIG. 8A .

Next, calculate each inkjet unit 811 according to the actuation area of each inkjet unit 811, 812, 813, 814 set in step S83 and the cutting distance in the first direction, that is, the cutting distance X5 in the X direction , 812, 813, 814 in a second direction of the cutting distance, the second direction can be but not limited to the Y direction, that is, the cutting distance Y4 of the inkjet unit 811 in the Y direction as shown in Figure 8A, the inkjet unit 812 The cutting distance Y3 in the Y direction, the cutting distance Y8 of the inkjet unit 813 in the Y direction, and the cutting distance Y10 of the inkjet unit 814 in the Y direction (shown in step S84 ).

Subsequently, a plurality of positioning marks 75 can be marked on the piezoelectric inkjet head 8, for example, an L-shaped positioning mark 75 can be marked in a scribed manner, so that the actuating unit 82 can be fixed on the position of the plurality of positioning marks 25. within the range formed so that the actuating unit 82 can be correspondingly arranged above the pressure chambers of a plurality of inkjet units 811, 812, 813, 814 (as shown in step S85), of course, the positioning of the actuating unit 82 of the present invention The method is not limited to marking the positioning mark 75 in a scribing manner, and the positioning mark 75 is not limited to an L shape. The methods above the pressure chamber are all within the protection scope of the present invention.

Next, using a cutting device according to the cutting distance of the plurality of inkjet units 811, 812, 813, 814 in the first direction set in step S83, the distance between the plurality of inkjet units 811, 812, 813, 814 The separation distance and the cutting distance of each inkjet unit 811, 812, 813, 814 calculated in step S84 in the second direction cut the actuating unit 82, that is, the plurality of inkjet units 811, 812, 813, The cutting distance X5 of 814 in the X direction, the spacing distances Y5, Y7, and Y9 between the plurality of inkjet units 811, 812, 813, and 814, the cutting distance Y4 of the inkjet unit 811 in the Y direction, and the inkjet unit 812 The cutting distance Y6 in the Y direction, the cutting distance Y8 of the inkjet unit 813 in the Y direction, and the cutting distance Y10 of the inkjet unit 814 in the Y direction are used to cut the actuating unit 82, so that the actuating unit 82 is cut in each An actuating piece is correspondingly formed at a position of the pressure chamber, that is, the actuating piece 821, 822, 823, 824 shown in FIG. Relative position (as shown in step S86), whereby each pressure cavity has a predetermined area of the actuating plate 821, 822, 823, 824, and selectively receives the driving signal V to act, and the driving signal V depends on each nozzle hole The aperture of 83 and the droplet characteristics are adjusted to drive the actuating pieces 821, 822, 823, and 824 to operate at multiple frequencies, so that the actuating pieces 821, 822, 823, and 824 can select actions corresponding to liquid droplets of different sizes and different viscosities .

In this embodiment, the cutting lines L1-L8 can be marked on the actuating unit 82 according to the cutting distances Y4, Y6, Y8, Y10 and the spacing distances Y5, Y7, Y9, and the cutting can be marked on the actuating unit 82 according to the cutting distance X1. line L9~L10, so that the cutting equipment can cut the actuating unit 82 along the cutting line L1~L10, that is, the actuating piece 821, 822, 823, 824 can be cut on the actuating unit 82 and correspond to each nozzle respectively. The pressure chambers of the ink units 811, 812, 813, 814, of course, the cutting order of the cutting equipment is not limited to cutting according to the order of the cutting lines L1~L10, the cutting order can be changed according to actual needs, and the cutting order that can be used in the present invention The method is not limited to marking the cutting line by scribing, any method can be implemented according to the cutting distance of the plurality of inkjet units 811, 812, 813, 814 in the first direction, the plurality of inkjet units 811, 812, 813, 814 The spacing distance between them, and the cutting distance of each inkjet unit 811, 812, 813, 814 in the second direction and the way of cutting and forming the actuating piece 821, 822, 823, 824 on the actuating unit 82 are all in this scope of protection for the invention.

Wherein, the cutting equipment used in this embodiment can be but not limited to a wafer cutting equipment, for example: a laser machine, finally, except the actuating piece in the actuating unit 82, that is, the actuating piece 821 shown in FIG. 8A , 822 , 823 , and 824 are removed to form the piezoelectric inkjet head 8 as shown in FIG. 8C .

In this embodiment, the actuating pieces 821, 822, 823, 824 can be of different sizes and arranged symmetrically with each other in a longitudinal arrangement, and the dimensions of the actuating pieces 821, 822, 823, 824 in the first direction are the same , that is, the cutting distance X5 in the X direction is the same, so common cutting equipment can be used to cut out the actuator unit 82, which can reduce the manufacturing cost, and the waste is less than that of the first embodiment using the laser cutting process. For example: if the actuation area of the actuation plate 12 shown in FIG. 1A is 10 units, the actuation areas of the actuation plates 821, 822, 823, and 824 shown in FIG. 8A can be about 10, 3 units, respectively. , 5, 8 units, since the size of the first direction of the actuating piece 821, 822, 823, 824 is the same, that is, the size of the X direction is the same, so the actuating piece 821, 822, 823, 824 in the second direction The size, that is, the size in the Y direction, will have a ratio of 10:3:5:8, so that the actuating pieces 821, 822, 823, 824 are rectangular rather than square. In this case, the actuating pieces 821, The dimensions in the X and Y directions of 822, 823, 824 still need to be adjusted carefully, so as not to affect the action due to the excessive length of the actuating piece 821, 822, 823, 824. Therefore, please refer to the following table 1 to actuate in this embodiment The aspect ratios (X/Y) of the slices 821, 822, 823, 824 are all controlled to be about 2 or below.

Table I:

And the diameter of the nozzle hole 83 of each inkjet unit 811, 812, 813, 814 is roughly proportional to the size of the corresponding actuating piece 821, 822, 823, 824 and the area of the pressure chamber, that is, the actuating piece 821 , 822, 823, 824 corresponding to the aperture of the nozzle hole 83 can be, for example, 90, 30, 45, 60um respectively, of course, the actuation area of the actuation plate 821, 822, 823, 824 and the aperture of the corresponding nozzle hole 83 The size is not limited thereto, and can be changed according to actual needs.

In addition, the order in which the actuating pieces 821, 822, 823, and 824 are placed is not limited to that shown in FIG. In the embodiment, the actuating pieces 822 and 823 with relatively frequently used 3 and 5 actuating area units are placed in the middle. Of course, this position can also be changed to 8 or 10 actuating areas with high viscosity or large flow requirements. The actuator pieces 824 and 821 of the unit.

Please refer to FIG. 9A and FIG. 9B, wherein FIG. 9A is a schematic diagram of the cutting of the piezoelectric inkjet head of the fifth preferred embodiment of the present invention, and FIG. 9B is the actuation of the piezoelectric inkjet head of the fifth preferred embodiment of the present invention. The flow chart of the sheet cutting method, as shown in Figure 9A, the piezoelectric inkjet head 9 of the present embodiment is a multi-layer structure, which is also formed by stacking a vibrating plate and a plurality of plates (not shown). , and the piezoelectric inkjet head 9 has a liquid supply channel 71 and a plurality of inkjet units 911, 912, 913, 914, wherein, in this embodiment, the plurality of inkjet units 911, 912, 913, 914 They are distributed in four different quadrants and arranged symmetrically with each other. The inkjet units 911, 912, 913, and 914 each have a pressure chamber (not shown), and the piezoelectric inkjet head 9 further includes the plurality of nozzle holes. An orifice plate (not shown) of 93 is provided with an orifice 93 corresponding to the inkjet units 911, 912, 913, 914 respectively, and the pressure chambers of the inkjet units 911, 912, 913, 914 are all connected to the liquid supply flow The channels 71 are connected so that the printing fluid can flow into each pressure chamber from the liquid supply channel 71, and an actuation unit 92 is arranged at the pressure chambers of the inkjet units 911, 912, 913, 914, wherein the The actuating unit 92 can be formed by but not limited to lead zirconate titanate (Lead Zirconate Titanate, PZT) piezoelectric material, and the actuating unit 92 can be cut by a cutting device, so that the actuating unit 92 corresponds to each nozzle. The places of the pressure chambers of the ink units 911, 912, 913, 914 respectively produce an actuating sheet, namely the actuating sheet 921, 922, 923, 924 shown in Figures 9A and 9C, the actuating sheet 921, 922, 923, 924 are respectively formed on the pressure chambers of the inkjet units 911, 912, 913, 914 and are arranged in different quadrants and are arranged corresponding to each other, and the aspect ratio of the size of each actuating piece 921, 922, 923, 924 is 2 or below, and selectively receive a driving signal V to act, and each nozzle hole 93 is respectively formed in the relative position corresponding to the actuating piece 921 , 922 , 923 , 924 which is roughly centered.

Wherein, the volume of each pressure chamber is roughly proportional to the size of the actuating pieces 921, 922, 923, 924 and the diameter of each nozzle hole 93, whereby each actuating piece 921, 922, 923, 924 selectively receives The driving signal V, the driving signal V is adjusted according to the aperture and droplet characteristics of each nozzle hole 93, so as to drive the multiple actuating pieces 921, 922, 923, 924 to operate at multiple frequencies, so that the nozzle holes 93 can print different sizes. Droplets with different viscosities.

Please refer to FIGS. 9A and 9B, wherein FIG. 9B is a flow chart of the cutting method of the piezoelectric inkjet head actuating sheet of the fifth preferred embodiment of the present invention. As shown in the figure, the piezoelectric inkjet head of this embodiment The cutting method of the actuating sheet comprises the following steps: First, the piezoelectric inkjet head 9 is provided, which has a liquid supply channel 71 and a plurality of inkjet units 911, 912, 913, 914, wherein each inkjet unit 911, 912, 913, 914 respectively have a pressure cavity communicated with the liquid supply channel 71 (as shown in step S91), and in this embodiment, the plurality of inkjet units 911, 912, 913, 914 They are distributed in four different quadrants and arranged symmetrically with each other. Then, an actuation unit 92 is arranged above the pressure chambers of the inkjet units 911, 912, 913, and 914. The actuation unit 92 includes a plurality of actuation pieces 921, 922 , 923, 924, and the actuating pieces 921, 922, 923, 924 are respectively formed on the pressure chambers of the inkjet units 911, 912, 913, 914, and selectively receive the driving signal V to act (as shown in step S92 Show).

Then set the actuation area of each inkjet unit 911, 912, 913, 914, the cutting distance in a first direction and the distance between the plurality of inkjet units 911, 912, 913, 914 (as in step S93), wherein the first direction can be but not limited to the X direction, and the cutting distance in the first direction of the vertically adjacent inkjet units among the plurality of inkjet units 911, 912, 913, 914 The systems are equal, and the inkjet units 911 and 912 shown in FIG. 9A are arranged in a vertical relationship, that is, arranged symmetrically to each other in a longitudinal arrangement, so the cutting distance X6 of the inkjet units 911 and 912 in the X direction is equal. In addition, the inkjet units 913 and 914 are also arranged in a vertical relationship, that is, they are symmetrically arranged in a vertical arrangement, so the cutting distance X8 of the inkjet units 913 and 914 in the X direction is equal. As for the plurality of inkjet units The distances between the units 911 , 912 , 913 , and 914 are the distances X7 and Y12 as shown in FIG. 9A . In addition, among the plurality of inkjet units 911, 912, 913, 914, the actuation area of the inkjet unit 914 is the largest and the actuation area of the inkjet unit 911 is the smallest, so the actuation area of the inkjet unit 914 and the inkjet unit The multiplication of the actuation areas of the unit 911 is equal to the multiplication of the actuation areas of the inkjet units 912,913.

Then, according to the actuation area of each inkjet unit 911, 912, 913, 914 set in step S93 and the cutting distance in the first direction, that is, the cutting distance X6, X8 in the X direction to calculate each inkjet The cutting distance of the units 911, 912, 913, 914 in the second direction, wherein the second direction can be but not limited to the Y direction, and the left and right adjacent of the plurality of inkjet units 911, 912, 913, 914 The cutting distances in the second direction of the inkjet units are equal, and the multiplication of the largest actuation area and the smallest actuation area among the plurality of inkjet units 911, 912, 913, 914 is equal to the multiplication of other actuation areas (As shown in step S94), the inkjet units 911 and 913 as shown in FIG. The distance Y13 is equal, and the inkjet units 912 and 914 are also arranged in a left-right relationship, that is, they are symmetrically arranged in a horizontal arrangement, so the cutting distance Y11 of the inkjet units 912 and 914 in the Y direction is equal.

Subsequently, a plurality of positioning marks 75 can be marked on the piezoelectric inkjet head 9, for example, an L-shaped positioning mark 75 can be marked in a scribed manner, so that the actuating unit 92 can be fixed on the position of the plurality of positioning marks 75. within the range formed so that the actuating unit 92 can be correspondingly arranged above the pressure chambers of a plurality of inkjet units 911, 912, 913, 914 (as shown in step S95), of course, the positioning of the actuating unit 92 of the present invention The method is not limited to marking the positioning mark 75 in a scribing manner, and the positioning mark 75 is not limited to an L shape. The methods above the pressure chamber of 914 are all within the protection scope of the present invention.

Next, using a cutting device according to the cutting distance of the plurality of inkjet units 911, 912, 913, 914 in the first direction set in step S93, the distance between the plurality of inkjet units 911, 912, 913, 914 The separation distance, and the cutting distance of each inkjet unit 911, 912, 913, 914 calculated in step S94 in a second direction cut the actuating unit 92, that is, according to the inkjet unit 911, 912 in the X direction The cutting distance 62, the cutting distance X8 of the inkjet units 913, 914 in the X direction, the distance X7, Y12 between the plurality of inkjet units 911, 912, 913, 914, and the distances X7, Y12 between the inkjet units 911, 913 in the Y direction The cutting distance Y13 of the inkjet unit 912, 914 cuts the actuating unit 92 at the cutting distance Y11 in the Y direction, so that the actuating unit 92 forms an actuating sheet correspondingly at each of the pressure chambers, That is, the actuating pieces 921, 922, 923, 924 shown in Figures 9A and 9C, and each of the injection holes is formed in a relative position corresponding to each of the actuating pieces, which is roughly centered (as shown in step S96), In this way, each pressure chamber has an actuating piece 921, 922, 923, 924 with a predetermined area, and selectively receives the driving signal V to act, and the driving signal V is adjusted according to the aperture and droplet characteristics of each nozzle hole 93, so as to The actuating pieces 921 , 922 , 923 , 924 are driven to move at multiple frequencies, so that the actuating pieces 921 , 922 , 923 , 924 act selectively corresponding to liquid droplets of different sizes and different viscosities.

In this embodiment, the cutting lines C1-C4 can be marked on the actuating unit 92 according to the cutting distances Y11, Y13 and the spacing distance Y12, and the cutting lines can be marked on the actuating unit 92 according to the cutting distances X6, X8 and the spacing distance X7 C5-C8, make the wafer cutting equipment cut the actuating unit 92 along the cutting lines C1-C8, that is, cut and form the actuating pieces 921, 922, 923, 924 on the actuating unit 92, of course the wafer cutting equipment The order of cutting is not limited to cutting according to the order of cutting lines C1-C8, the cutting order can be changed according to actual needs, and the cutting method that can be used in the present invention is not limited to marking the cutting line by scribing. According to the cutting distance of the plurality of inkjet units 911, 912, 913, 914 in the first direction, the distance between the plurality of inkjet units 911, 912, 913, 914, and each of the plurality of inkjet units 911, 912 , 913 , 914 cut the actuating unit 92 with a cutting distance in a second direction to form the actuating pieces 921 , 922 , 923 , 924 are within the protection scope of the present invention.

Wherein, the cutting equipment used in this embodiment can be but not limited to a wafer cutting equipment, such as: a laser machine, finally, except the actuating piece in the actuating unit 92, that is, the actuating piece 921 shown in FIG. 9A , 922 , 923 , and 924 are removed to form the piezoelectric inkjet head 9 as shown in FIG. 9C .

In this embodiment, the actuating pieces 921, 922, 923, 924 can be of different sizes and distributed in four different quadrants and arranged symmetrically with each other, and the actuating pieces 921, 922, 923, 924 adjacent up and down The size of the first direction of the moving plate is the same, the size of the second direction of the left and right adjacent actuating plates is the same, and the multiplication of the largest actuating area and the smallest actuating area is equal to the multiplication of other actuating areas Therefore, general chip cutting equipment can be used to cut out the actuating unit 92, which can reduce the manufacturing cost, and its waste is less than the laser cutting process used in the first embodiment, and the configuration of this embodiment has another space to utilize The advantage of optimization is that the distance between the inkjet units can be larger than that of the second preferred embodiment, and the occurrence of improper cross-talk between fluids and pressure chambers can be reduced. For example: if the actuation area of the actuation plate 12 shown in FIG. 1A is 10 units, the actuation areas of the actuation plates 921, 922, 923, and 924 shown in FIG. 9A can be about 3, 5 units, respectively. , 7.5, and 12.5 units, and the dimensions in the X and Y directions are shown in Table 2 below, which satisfies the relationship that the multiplication of 3 and 12.5 unit areas equals the multiplication of 5 and 7.5 unit areas. Similarly, the aspect ratios of the actuating pieces 921, 922, 923, 924 are all controlled at about 2 or less, so as to prevent the actuating pieces 921, 922, 923, 924 from being too long and affecting the action.

Table II

And the aperture of the nozzle hole 93 of each inkjet unit 911, 912, 913, 914 is roughly proportional to the size of the corresponding actuating piece 921, 922, 923, 924 and the area of the pressure chamber, that is, the actuating piece 921 , 922, 923, 924 corresponding to the hole diameter of the nozzle hole 93 can be, for example, 30, 50, 75, 120um respectively, of course, the actuation area of the actuation piece 921, 922, 923, 924 and the corresponding nozzle hole 93 The aperture size is not limited thereto, and can be changed according to actual needs. In addition, each actuating piece 921, 922, 923, 924 is correspondingly matched with a nozzle hole 93, and the nozzle hole 93 is generally symmetrical or centered with respect to the corresponding actuating piece 921, 922, 923, 924, and In this case, the distances between the individual nozzle holes 93 are generally not equal. Therefore, if the piezoelectric inkjet head 9 has the consideration of supplementary dots or multi-jetholes 93 printing simultaneously, the distance between the nozzle holes 93 can also be designed to be equal, that is, the position of the nozzle holes 93 shown in FIG. 9A is changed to In the position shown in 9C, the distance between two adjacent nozzle holes 93 may be 4064um, but it is not limited thereto.

In addition, the arrangement order of the actuating pieces 921 , 922 , 923 , 924 is not limited to that shown in FIG. 9C , and can be adjusted according to actual printing requirements.

Furthermore, the number of actuating pieces configured on the piezoelectric inkjet head of the present invention is not limited to four, and more than four or less can also be configured, depending on the space of the piezoelectric inkjet head and the area of the actuating pieces. And its X, Y direction size distribution status to adjust.

To sum up, the piezoelectric inkjet head with multiple actuating slices of the present invention sets a single pressure cavity and multiple actuating slices, and adjusts the driving signal according to different requirements to simultaneously drive one or more of them. The actuating sheet can achieve the effects of printing droplets of different sizes and different viscosities and increasing the inkjet frequency. When printing low-viscosity droplets, the voltage value of the driving signal can be adjusted.

Furthermore, the cutting method of the piezoelectric actuator unit of the inkjet head of the present invention mainly utilizes setting the actuation area of each inkjet unit, so that each inkjet unit in the piezoelectric inkjet head of the present invention is set An actuating sheet is generated at each pressure chamber, and the appropriate actuating sheet can be selected and driven according to different printing requirements to print droplets of different sizes and different viscosities. The present invention can flexibly select and drive the appropriate actuating sheet and To achieve the goal with an appropriate drive signal voltage value, for example, when printing low-viscosity droplets, you only need to select the actuation piece with a smaller actuation area to operate and reduce the voltage value of the drive voltage to meet the requirements. The way of the voltage value of the signal can avoid unnecessary waste of energy, so as to solve the problem that the conventional piezoelectric inkjet head is equipped with a large-sized actuating sheet to be suitable for various fluids with different viscosities. Only the driving signal can drive the actuating plate to operate, so that when the low-viscosity liquid droplets are printed, an excessively large driving signal will cause redundant energy waste and other disadvantages.

The present invention can be modified in various ways by those who are familiar with this technology, but all of them do not break away from the intended protection of the scope of the appended patent application.

Claims (17)

1. A piezoelectric inkjet head comprising at least one inkjet unit and a liquid supply channel, the inkjet unit comprising a pressure chamber and a vibrating plate, wherein the pressure chamber communicates with the liquid supply channel , the vibrating plate is adjacent to the pressure chamber; an orifice plate, the orifice plate forms an orifice corresponding to each of the inkjet units, and the orifice communicates with the pressure chamber and the liquid supply channel for printing droplets; and An actuation unit is arranged on the vibrating plate and corresponds to the pressure cavity, the actuation unit includes a plurality of actuation pieces formed by cutting, and each actuation piece receives a driving signal to act; Wherein, each actuating piece selectively receives the driving signal to drive the multiple actuating pieces to operate at multiple frequencies, and the driving signal is adjusted according to the aperture and droplet characteristics of the nozzle hole to make the nozzle hole print Droplets of different sizes and viscosities. 2. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece and a second actuating piece, and the first actuating piece and the second actuating piece One of the two actuating pieces receives the driving signal independently to control the action of the single actuating piece. 3. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece and a second actuating piece, and the first actuating piece and the second actuating piece The two actuating plates simultaneously receive the driving signal of the same phase displacement, so that they move in the same phase. 4. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece and a second actuating piece, and the first actuating piece and the second actuating piece The two actuating pieces simultaneously receive the drive signal of antiphase displacement, so that they move in antiphase. 5. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece and a second actuating piece, and the first actuating piece and the second actuating piece The two actuating pieces receive the drive signal in turn, so that they act in turn. 6. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece, a second actuating piece and a third actuating piece, the second actuating piece The actuating piece is located between the first actuating piece and the third actuating piece, so that the spray hole is correspondingly arranged on the second actuating piece, and the first actuating piece, the second actuating piece and the first actuating piece One of the three actuating pieces alone receives the driving signal to control the action of the single actuating piece in the vibration area. 7. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece, a second actuating piece and a third actuating piece, the second actuating piece The actuating piece is located between the first actuating piece and the third actuating piece, so that the spray hole is correspondingly arranged on the second actuating piece, and the first actuating piece, the second actuating piece and the first actuating piece The three actuating plates simultaneously receive the driving signals of the same phase displacement, so that the three actuating pieces move in the same phase. 8. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece, a second actuating piece and a third actuating piece, the second actuating piece The actuating piece is located between the first actuating piece and the third actuating piece, so that the spray hole is correspondingly arranged on the second actuating piece, and the first actuating piece, the second actuating piece and the first actuating piece Two of the three actuating pieces receive the driving signal to make some of the actuating pieces act. 9. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece, a second actuating piece and a third actuating piece, the second actuating piece The actuating piece is located between the first actuating piece and the third actuating piece, so that the spray hole is correspondingly arranged on the second actuating piece, and the first actuating piece, the second actuating piece and the first actuating piece The three actuating pieces receive the driving signal at the same time, so that two adjacent actuating pieces move in opposite phases. 10. The piezoelectric inkjet head according to claim 1, wherein the plurality of actuating pieces comprise a first actuating piece, a second actuating piece and a third actuating piece, the second actuating piece The actuating piece is located between the first actuating piece and the third actuating piece, so that the spray hole is correspondingly arranged on the second actuating piece, and the first actuating piece, the second actuating piece and the first actuating piece The three actuating pieces receive the drive signal in turn, so that the three act in turn. 11 . The piezoelectric inkjet head according to claim 1 , wherein the diameter of the orifice is between 30 and 120 um, and the voltage value of the driving signal is preferably +/-30 volts. 12. A piezoelectric inkjet head comprising: A plurality of inkjet units and a liquid supply channel, each of the inkjet units has a pressure cavity communicated with the liquid supply channel; an orifice plate, the orifice plate forms an orifice corresponding to each of the inkjet units for printing droplets; and An actuation unit, the actuation unit includes a plurality of actuation pieces formed by cutting, each of the actuation pieces corresponds to each of the pressure chambers, and respectively receives a driving signal to act; Wherein, the volume of each pressure cavity is roughly proportional to the size of the actuator piece and the aperture of the nozzle hole, whereby each actuator piece selectively receives the driving signal, and the driving signal depends on the aperture of the nozzle hole. The characteristics of the droplets are adjusted to drive the plurality of actuating pieces to operate at multiple frequencies, so that the nozzle holes print out droplets of different sizes and different viscosities. 13. The piezoelectric inkjet head as claimed in claim 12, wherein the actuating unit comprises cutting and forming the plurality of actuating pieces by a laser cutting device. 14. A piezoelectric inkjet head comprising: A plurality of inkjet units and a liquid supply flow path, each of the inkjet units has a pressure chamber connected to the liquid supply flow path, and the pressure chambers are equal in length and equidistant in one direction and in the other direction Unequally spaced arrangement; an orifice plate, the orifice plate forms an orifice corresponding to each of the inkjet units for printing droplets; and An actuation unit, the actuation unit includes a plurality of actuation pieces formed by cutting, each of the actuation pieces is respectively arranged at each of the pressure chambers, and the aspect ratio of each of the actuation pieces is 2 or less, so as to respectively Receive a drive signal action; Wherein, the volume of each pressure chamber is roughly proportional to the size of the actuating plate and the diameter of the nozzle hole, whereby each of the actuating plates selectively receives the driving signal, and the driving signal depends on the size of the nozzle hole. The hole diameter and droplet characteristics are adjusted to drive the multiple actuating pieces to operate at multiple frequencies, so that the nozzle hole prints out droplets of different sizes and different viscosities. 15. The piezoelectric inkjet head as claimed in claim 14, wherein the actuating unit comprises the plurality of actuating pieces cut by a wafer dicing device. 16. A piezoelectric inkjet head comprising: A plurality of inkjet units and a liquid supply channel, each of the inkjet units has a pressure cavity communicated with the liquid supply channel; an orifice plate, the orifice plate forms an orifice corresponding to each of the inkjet units for printing droplets; and An actuation unit, the actuation unit includes a plurality of actuation pieces formed by cutting, each of the actuation pieces is respectively arranged in each pressure cavity and arranged in different quadrants and is arranged in correspondence with each other, and the size of each actuation piece is The aspect ratio is 2 or less, so as to receive a driving signal action respectively; Wherein, the volume of each pressure chamber is roughly proportional to the size of the actuating plate and the diameter of the nozzle hole, whereby each of the actuating plates selectively receives the driving signal, and the driving signal depends on the size of the nozzle hole. The hole diameter and droplet characteristics are adjusted to drive the multiple actuating pieces to operate at multiple frequencies, so that the nozzle hole prints out droplets of different sizes and different viscosities. 17. The piezoelectric inkjet head as claimed in claim 16, wherein the actuating unit comprises cutting and forming the plurality of actuating pieces by a wafer dicing device.

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