CN105372575A - Diode failure analysis device - Google Patents

Diode failure analysis device Download PDF

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CN105372575A
CN105372575A CN201510915805.3A CN201510915805A CN105372575A CN 105372575 A CN105372575 A CN 105372575A CN 201510915805 A CN201510915805 A CN 201510915805A CN 105372575 A CN105372575 A CN 105372575A
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box
cylinder
failure analysis
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reactor
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CN105372575B (en
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魏广乾
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Xi'an Qipu Testing Co ltd
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Chongqing Kaixiyi Electronic Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor

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Abstract

本发明公开了二极管检测领域内的二极管失效分析装置,包括箱体、反应釜,箱体为矩形箱状,箱体的上端设有进料口,箱体内壁的一侧固定有两个并列设置的支撑臂,反应釜的中部铰接在两个支撑臂之间。箱体顶端的内壁上固定有气缸,气缸的输出端连接有伸缩杆,伸缩杆上铰接有连杆,连杆的另一端铰接在反应釜靠上。支撑臂下方的箱体内壁上设有导槽,箱体内部的底部设有废液收集箱,导槽的底端伸入废液收集箱内。本方案能够完成二极管失效分析实验的多次加热腐蚀,不用操作者直接接触反应釜,对废弃的酸液进行集中回收处理,使实验的危险性更低,减少对环境的污染,更加环保,更方便对二极管进行失效分析实验。

The invention discloses a diode failure analysis device in the field of diode detection, which comprises a box body and a reaction kettle. The box body is in the shape of a rectangular box. The support arm, the middle part of the reactor is hinged between the two support arms. A cylinder is fixed on the inner wall of the top of the box body, and the output end of the cylinder is connected with a telescopic rod, and a connecting rod is hinged on the telescopic rod, and the other end of the connecting rod is hinged on the reactor. A guide groove is provided on the inner wall of the box below the support arm, and a waste liquid collection box is provided at the bottom inside the box body, and the bottom end of the guide groove extends into the waste liquid collection box. This scheme can complete the multiple heating and corrosion of the diode failure analysis experiment, without the operator directly contacting the reaction kettle, and the waste acid solution can be recycled and processed in a centralized manner, which makes the experiment less dangerous, reduces environmental pollution, and is more environmentally friendly and more efficient. It is convenient to carry out failure analysis experiments on diodes.

Description

二极管失效分析装置Diode failure analysis device

技术领域 technical field

本发明涉及二极管检测领域,具体涉及一种二极管失效分析装置。 The invention relates to the field of diode detection, in particular to a diode failure analysis device.

背景技术 Background technique

二极管在长期使用过程中会因为各种原因造成失效而无法正常工作,对电子器件的正常使用造成严重的影响。为了减少二极管失效情况的发生,通常对失效的二极管进行失效分析实验查明二极管失效原因,然后对二极管做出针对性的改进。实验过程为搜集二极管使用中短路失效的样品和筛选应力条件或使用条件等失效数据,对这些样品进行电参数测试、开帽、去保护胶、管芯与电极分离、去焊料和显微观察等步骤,找出失效部位,分析引发二极管失效的内在质量因素或使用因素,以及失效的发生过程。 During long-term use, diodes will fail due to various reasons and cannot work normally, which will seriously affect the normal use of electronic devices. In order to reduce the occurrence of diode failure, failure analysis experiments are usually carried out on failed diodes to find out the cause of diode failure, and then make targeted improvements to the diode. The experimental process is to collect samples of short-circuit failures in the use of diodes and screen failure data such as stress conditions or service conditions, and conduct electrical parameter tests, cap removal, protective glue removal, die and electrode separation, solder removal, and microscopic observation of these samples. Steps to find out the failure location, analyze the internal quality factors or use factors that cause the diode failure, and the failure process.

目前二极管失效分析实验通常是将二极管放在烧杯中通过各种强酸对二极管表面进行层层加热腐蚀,最后得到芯片进行分析。现有的实验为人工全程操作,需要人工接触各种强酸,需要通过酒精灯、石棉网对烧杯进行加热,每次腐蚀后都需要操作者手动将烧杯取下排出使用过的酸液,实验人员的劳动强度大容易疲劳,腐蚀过程中挥发的酸液对操作者的眼睛和呼吸道造成刺激性伤害,存在一定的不稳定性和危险性。而且腐蚀后废弃的酸液没有集中处理,排放不规范易对环境造成污染。使得实验人工成本较高,人工失效分析实验效率低,对二极管进行失效分析实验很不方便。 At present, the diode failure analysis experiment usually puts the diode in a beaker and heats and corrodes the surface of the diode layer by layer through various strong acids, and finally obtains the chip for analysis. The existing experiment is a manual operation, which requires manual contact with various strong acids. The beaker needs to be heated through an alcohol lamp and an asbestos net. After each corrosion, the operator needs to manually remove the beaker to discharge the used acid. The labor intensity is high and it is easy to fatigue. The acid liquid volatilized during the corrosion process will cause irritating damage to the operator's eyes and respiratory tract, and there is a certain degree of instability and danger. Moreover, the waste acid liquid after corrosion is not treated centrally, and the discharge is not standardized, which will easily pollute the environment. The labor cost of the experiment is high, the efficiency of the manual failure analysis experiment is low, and it is very inconvenient to carry out the failure analysis experiment on the diode.

发明内容 Contents of the invention

本发明意在提供一种二极管失效分析装置,以方便对二极管进行失效分析,减少实验的危险性,降低对环境的污染。 The invention intends to provide a diode failure analysis device to facilitate the failure analysis of the diode, reduce the risk of the experiment, and reduce the pollution to the environment.

为达到上述目的,本发明的基础技术方案如下:二极管失效分析装置,包括箱体、反应釜,所述箱体为竖向矩形箱,箱体的上端设有进料口,所述箱体内壁的一侧固定有两个横向并列设置的支撑臂,所述反应釜的中部铰接在两个支撑臂的自由端之间。所述箱体顶端的内壁上固定有竖向安装的气缸,气缸的输出端连接有伸缩杆,伸缩杆的自由端铰接有连杆,连杆的另一端铰接在反应釜靠近气缸一侧的底部。所述支撑臂下方的箱体内侧壁上设有向下倾斜设置的导槽,箱体的底部设有废液收集箱,所述导槽的低端延伸到废液收集箱内。 In order to achieve the above object, the basic technical scheme of the present invention is as follows: the diode failure analysis device includes a box body and a reaction kettle, the box body is a vertical rectangular box, and the upper end of the box body is provided with a feed port, and the inner wall of the box body One side of the reactor is fixed with two laterally juxtaposed support arms, and the middle part of the reactor is hinged between the free ends of the two support arms. A vertically installed cylinder is fixed on the inner wall of the top of the box, the output end of the cylinder is connected with a telescopic rod, the free end of the telescopic rod is hinged with a connecting rod, and the other end of the connecting rod is hinged at the bottom of the reactor near the cylinder. . The inner wall of the box below the support arm is provided with a guide groove inclined downward, and the bottom of the box is provided with a waste liquid collection box, and the lower end of the guide groove extends into the waste liquid collection box.

本方案的原理及优点是:操作时,将二极管样品放在反应釜中,将酸液倒入反应釜,给反应釜通电使之生热对酸液加热,二极管样品在反应釜内被加热腐蚀。在进行一次腐蚀后不用人工接触反应釜倾倒酸液,直接通过气缸和伸缩杆将反应釜倾斜即可将反应后的酸液倒出反应釜,使用后的酸液由导槽流进废液收集箱进行集中处理。设置支撑臂对反应釜进行支撑固定,支撑臂内可以设置线槽方便对反应釜供电。设置气缸、伸缩杆、连杆可以对反应釜的平衡状态进行调整,使反应釜在使用时保持平衡,在反应后方便将反应釜倾斜使酸液流出。设置导槽和废液收集箱方便对使用过的酸液进行集中回收处理,避免酸液排放不当对环境造成污染破坏。本方案通过气缸、伸缩杆、支撑臂、反应釜能够完成实验的多次加热腐蚀,不用操作者直接接触反应釜,设置箱体对整体进行支撑保护和隔离,设置废液收集箱对废弃的酸液进行集中回收处理,使实验的危险性更低,减少对环境的污染,更加环保,更方便对二极管进行失效分析实验。 The principle and advantages of this scheme are: during operation, put the diode sample in the reaction kettle, pour the acid solution into the reaction kettle, energize the reaction kettle to generate heat to heat the acid solution, and the diode sample is heated and corroded in the reaction kettle . After a corrosion process, there is no need to manually touch the reactor to pour the acid solution, the reactor can be tilted directly through the cylinder and the telescopic rod to pour the reacted acid solution out of the reactor, and the used acid solution flows into the waste liquid from the guide groove for collection boxes for centralized processing. The support arm is set to support and fix the reactor, and the wire groove can be set in the support arm to facilitate the power supply to the reactor. The balance state of the reactor can be adjusted by setting the cylinder, telescopic rod, and connecting rod, so that the reactor can be kept in balance during use, and it is convenient to tilt the reactor after the reaction to allow the acid to flow out. The guide groove and the waste liquid collection box are set up to facilitate the centralized recovery and treatment of the used acid liquid, so as to avoid pollution and damage to the environment caused by improper discharge of acid liquid. This scheme can complete the repeated heating and corrosion of the experiment through the cylinder, telescopic rod, support arm, and reactor, without the operator directly touching the reactor, setting up a box to support, protect and isolate the whole, and setting up a waste liquid collection box to collect waste acid The liquid is recycled and processed in a centralized manner, which makes the experiment less dangerous, reduces environmental pollution, is more environmentally friendly, and makes it easier to conduct failure analysis experiments on diodes.

优选方案一,作为基础方案的一种改进,所述箱体的顶端设有控制盒,所述控制盒分别与气缸和反应釜信号连接。通过控制盒对气缸、伸缩杆和反应釜内的温度进行控制,操作更加方便,不用手动接触反应釜,更加安全,人为因素对实验结果的影响更小。 In the preferred solution 1, as an improvement of the basic solution, a control box is provided on the top of the box, and the control box is respectively connected to the air cylinder and the reactor for signals. The temperature in the cylinder, telescopic rod and reactor is controlled through the control box, the operation is more convenient, no need to touch the reactor manually, it is safer, and the influence of human factors on the experimental results is less.

优选方案二,作为优选方案一的一种改进,所述气缸通过六角螺栓固定在箱体上。这样使气缸能够稳定可靠的固定在箱体上,使气缸工作更稳定。 The second preferred solution, as an improvement of the first preferred solution, the cylinder is fixed on the box by hexagonal bolts. In this way, the cylinder can be stably and reliably fixed on the box body, so that the work of the cylinder is more stable.

优选方案三,作为优选方案二的一种改进,所述箱体上端铰接有用于遮挡进料口的透明的箱盖。透明的箱盖方便对反应釜内的反应情况进行观察,防止实验过程中挥发的酸液逸散到环境中对操作者造成伤害,进一步降低实验的危险性。 The third preferred option, as an improvement of the second preferred option, the upper end of the box is hinged with a transparent box cover for blocking the feed inlet. The transparent box cover is convenient for observing the reaction in the reactor, preventing the volatilized acid liquid from escaping into the environment during the experiment and causing harm to the operator, further reducing the risk of the experiment.

附图说明 Description of drawings

图1为本发明实施例的结构示意图。 Fig. 1 is a schematic structural diagram of an embodiment of the present invention.

具体实施方式 detailed description

下面通过具体实施方式对本发明作进一步详细的说明: The present invention will be described in further detail below by means of specific embodiments:

说明书附图中的附图标记包括:箱体1、导槽2、支撑臂3、箱盖4、反应釜5、控制盒6、气缸7、伸缩杆8、连杆9、废液收集箱10。 The reference signs in the drawings of the description include: box body 1, guide groove 2, support arm 3, box cover 4, reaction kettle 5, control box 6, cylinder 7, telescopic rod 8, connecting rod 9, waste liquid collection box 10 .

实施例基本如附图1所示:二极管失效分析装置,包括箱体1、反应釜5、反转装置,所述箱体1为竖向矩形箱,箱体1上端的一角开口并铰接有透明的箱盖4,所述箱体1内壁的一侧固定有两个横向并列设置的支撑臂3,所述反应釜5的中部铰接在两个支撑臂3的自由端之间。所述箱体1顶端的内壁上通过六角螺栓固定有竖向安装的气缸7,气缸7的输出端连接有伸缩杆8,伸缩杆8的自由端铰接有连杆9,连杆9的另一端铰接在反应釜5靠近气缸7一侧的底部。所述支撑臂3下方的箱体1内侧壁上设有向下倾斜设置的导槽2,箱体1的底部设有废液收集箱10,所述导槽2的低端延伸到废液收集箱10内。箱体1的顶端设有控制盒6,所述控制盒6分别与气缸7和反应釜5信号连接。所述反应釜5包括本体、端盖,所述本体为上端开口的圆形杯状,所述本体的内壁和内底面上均设有环形的凹槽,所述凹槽内固定有电热丝;所述电热丝的外侧设有反应杯;所述端盖通过铰链铰接在本体上端的一侧,所述端盖的形状与本体相匹配;所述端盖上设有若干排液孔,端盖与铰链相对一侧的下端向下凸起形成卡台,本体上端与铰链相对的一侧设有卡槽,所述卡台和卡槽向配合。 The embodiment is basically shown in Figure 1: a diode failure analysis device, including a box body 1, a reaction kettle 5, and a reversing device. The box cover 4, one side of the inner wall of the box body 1 is fixed with two support arms 3 arranged side by side horizontally, and the middle part of the reaction kettle 5 is hinged between the free ends of the two support arms 3. The inner wall of the top of the box body 1 is fixed with a vertically installed cylinder 7 by a hexagonal bolt, the output end of the cylinder 7 is connected with a telescopic rod 8, the free end of the telescopic rod 8 is hinged with a connecting rod 9, and the other end of the connecting rod 9 Hinged at the bottom of reactor 5 near cylinder 7 one side. The inner wall of the box body 1 below the support arm 3 is provided with a guide groove 2 inclined downward, and the bottom of the box body 1 is provided with a waste liquid collection box 10, and the lower end of the guide groove 2 extends to the waste liquid collection. Inside box 10. The top of the box body 1 is provided with a control box 6, and the control box 6 is respectively connected with the air cylinder 7 and the reaction kettle 5 in signal. The reaction kettle 5 includes a body and an end cover. The body is a circular cup with an open upper end. The inner wall and the inner bottom of the body are provided with annular grooves, and heating wires are fixed in the grooves; The outer side of the heating wire is provided with a cuvette; the end cover is hinged on one side of the upper end of the body through a hinge, and the shape of the end cover matches the body; the end cover is provided with a number of drain holes, and the end cover The lower end on the side opposite to the hinge protrudes downwards to form a card platform, and the upper end of the body is provided with a card slot on the side opposite to the hinge, and the card platform and the card slot are aligned.

本实施例中,操作时,将二极管样品放在反应釜5中,盖上端盖将卡台卡接在卡槽内,通过端盖上的排液孔将酸液倒入反应釜5,给电热丝通电使之生热对反应釜5加热,二极管样品在反应釜5内被腐蚀。在进行一次腐蚀后不用人工打开端盖,直接通过气缸7和伸缩杆8将反应釜5倾斜即可将反应后的酸液从排液孔倒出反应釜5,使用后的酸液由导槽2流进废液收集箱10进行集中处理。本实施例中所述气缸7通过六角螺栓固定在箱体1上,这样使气缸7能够稳定可靠的固定在箱体1上,使气缸7工作更稳定。透明的箱盖4方便对反应釜5内的反应情况进行观察,防止实验过程中挥发的酸液逸散到环境中对操作者造成伤害,降低实验的危险性。设置支撑臂3对反应釜5进行支撑固定,支撑臂3内可以设置线槽方便对反应釜5供电。设置气缸7、伸缩杆8、连杆9可以对反应釜5的平衡状态进行调整,使反应釜5在使用时保持平衡,在反应后方便将反应釜5倾斜使酸液流出。设置导槽2和废液收集箱10方便对使用过的酸液进行集中回收处理,避免酸液排放不当对环境造成污染破坏。通过控制盒6对气缸7、伸缩杆8和反应釜5内的温度进行控制,操作更加方便,不用手动接触反应釜5,更加安全,人为因素对实验结果的影响更小。本方案通过气缸7、伸缩杆8、支撑臂3、反应釜5能够完成实验的多次加热腐蚀,不用操作者直接接触反应釜5,设置箱体1对整体进行支撑保护和隔离,设置废液收集箱10对废弃的酸液进行集中回收处理,使实验的危险性更低,减少对环境的污染,更加环保,更方便对二极管进行失效分析实验。 In this embodiment, during operation, the diode sample is placed in the reaction kettle 5, the end cover is put on to clamp the card table into the card slot, the acid solution is poured into the reaction kettle 5 through the drain hole on the end cover, and the electric heating The wire is energized to generate heat to heat the reactor 5, and the diode sample is corroded in the reactor 5. After the first corrosion, the reaction kettle 5 can be tilted directly through the cylinder 7 and the telescopic rod 8 without manually opening the end cover, and the reacted acid solution can be poured out of the reaction kettle 5 from the drain hole, and the used acid solution can be discharged from the guide groove. 2 into the waste liquid collection tank 10 for centralized treatment. In this embodiment, the cylinder 7 is fixed on the box body 1 by hexagonal bolts, so that the cylinder 7 can be stably and reliably fixed on the box body 1, and the operation of the cylinder 7 is more stable. The transparent box cover 4 is convenient for observing the reaction conditions in the reactor 5, and prevents the volatilized acid liquid from escaping into the environment during the experiment to cause harm to the operator and reduces the risk of the experiment. The support arm 3 is set to support and fix the reaction kettle 5, and a wire groove can be arranged in the support arm 3 to facilitate power supply to the reaction kettle 5. The balance state of the reactor 5 can be adjusted by arranging the cylinder 7, the telescopic rod 8 and the connecting rod 9, so that the reactor 5 can be kept in balance during use, and the reactor 5 can be easily tilted to allow the acid solution to flow out after the reaction. The guide groove 2 and the waste liquid collection box 10 are provided to facilitate the centralized recovery and treatment of the used acid liquid, so as to avoid pollution and damage to the environment caused by improper discharge of the acid liquid. The temperature in the cylinder 7, the telescopic rod 8 and the reactor 5 is controlled by the control box 6, the operation is more convenient, and the reactor 5 is not manually touched, which is safer, and human factors have less influence on the experimental results. This scheme can complete the repeated heating and corrosion of the experiment through the cylinder 7, the telescopic rod 8, the support arm 3, and the reactor 5. The operator does not need to directly contact the reactor 5. The box 1 is set to support, protect and isolate the whole, and the waste liquid is set. The collection box 10 performs centralized recovery and treatment of the waste acid liquid, which makes the experiment less dangerous, reduces environmental pollution, is more environmentally friendly, and is more convenient for failure analysis experiments on diodes.

以上所述的仅是本发明的实施例,方案中公知的具体结构和/或特性等常识在此未作过多描述。应当指出,对于本领域的技术人员来说,在不脱离本发明结构的前提下,还可以作出若干变形和改进,这些也应该视为本发明的保护范围,这些都不会影响本发明实施的效果和专利的实用性。本申请要求的保护范围应当以其权利要求的内容为准,说明书中的具体实施方式等记载可以用于解释权利要求的内容。 What has been described above is only an embodiment of the present invention, and common knowledge such as specific structures and/or characteristics known in the scheme will not be described too much here. It should be pointed out that for those skilled in the art, under the premise of not departing from the structure of the present invention, several modifications and improvements can also be made, and these should also be regarded as the protection scope of the present invention, and these will not affect the implementation of the present invention. Effects and utility of patents. The scope of protection required by this application shall be based on the content of the claims, and the specific implementation methods and other records in the specification may be used to interpret the content of the claims.

Claims (4)

1.二极管失效分析装置,其特征在于,包括箱体、反应釜,所述箱体的上端设有进料口,所述箱体内壁的一侧固定有两个横向并列设置的支撑臂,所述反应釜的中部铰接在两个支撑臂的自由端之间;所述箱体顶端的内壁上固定有竖向安装的气缸,气缸的输出端连接有伸缩杆,伸缩杆的自由端铰接有连杆,连杆的另一端铰接在反应釜靠近气缸一侧的底部;所述支撑臂下方的箱体内侧壁上设有向下倾斜设置的导槽,箱体的底部设有废液收集箱,所述导槽的低端延伸到废液收集箱内。 1. Diode failure analysis device, it is characterized in that, comprise casing, reaction kettle, the upper end of described casing is provided with feed inlet, and one side of described casing inner wall is fixed with two lateral support arms that are arranged side by side, so The middle part of the reaction kettle is hinged between the free ends of the two support arms; a vertically installed cylinder is fixed on the inner wall of the top of the box, the output end of the cylinder is connected with a telescopic rod, and the free end of the telescopic rod is hinged with a connecting rod. Rod, the other end of the connecting rod is hinged on the bottom of the reaction kettle near the cylinder side; the inner wall of the box below the support arm is provided with a guide groove inclined downward, and the bottom of the box is provided with a waste liquid collection box. The lower end of the guide groove extends into the waste liquid collection box. 2.根据权利要求1所述的二极管失效分析装置,其特征在于:所述箱体的顶端设有控制盒,所述控制盒分别与气缸和反应釜信号连接。 2 . The diode failure analysis device according to claim 1 , wherein a control box is provided on the top of the box, and the control box is respectively connected to the cylinder and the reactor for signals. 3 . 3.根据权利要求2所述的二极管失效分析装置,其特征在于:所述气缸通过六角螺栓固定在箱体上。 3. The diode failure analysis device according to claim 2, characterized in that: the cylinder is fixed on the box by hex bolts. 4.根据权利要求3所述的二极管失效分析装置,其特征在于:所述箱体上端铰接有用于遮挡进料口的透明的箱盖。 4. The diode failure analysis device according to claim 3, characterized in that: the upper end of the box is hinged with a transparent box cover for covering the feed inlet.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6502044B1 (en) * 1999-07-12 2002-12-31 Acuity Brands Inc. Self-diagnostic circuitry for emergency lighting fixtures
CN201429770Y (en) * 2009-07-15 2010-03-24 北京京东方光电科技有限公司 Developing solution dumping equipment
CN201717244U (en) * 2010-05-05 2011-01-19 如皋市易达电子有限责任公司 Acid pouring mechanism of diode
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