CN105845708B - flexible integrated touch display panel and manufacturing method thereof - Google Patents
flexible integrated touch display panel and manufacturing method thereof Download PDFInfo
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- CN105845708B CN105845708B CN201610247590.7A CN201610247590A CN105845708B CN 105845708 B CN105845708 B CN 105845708B CN 201610247590 A CN201610247590 A CN 201610247590A CN 105845708 B CN105845708 B CN 105845708B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/40—OLEDs integrated with touch screens
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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Abstract
The application discloses a flexible integrated touch display panel and a manufacturing method thereof. The flexible integrated touch display panel comprises a flexible substrate; a plurality of thin film transistors disposed in the non-display region on the flexible substrate; a light emitting diode device layer disposed on the thin film transistor; the barrier layer is arranged on the light-emitting diode device layer, and a plurality of through holes are formed in the barrier layer; the touch electrode array is arranged on the barrier layer and comprises a plurality of touch electrodes; and each touch electrode is electrically connected with each thin film transistor through each through hole. According to the scheme of this application, the quantity of the flexible circuit board of reducible and integrated circuit chip connection improves flexible integrated touch-control display panel's yield.
Description
Technical Field
The present disclosure relates generally to display technologies, and more particularly, to a flexible integrated touch display panel and a method for fabricating the same.
Background
In the conventional flexible integrated touch display panel, a flexible display panel and a touch film are generally manufactured separately.
Fig. 1 is a schematic structural diagram of a conventional flexible integrated touch display panel. In fig. 1, the touch film 110 is connected to the integrated circuit chip 150 through the first flexible circuit board 130. Similarly, the flexible display panel 120 is connected to the integrated circuit chip 150 through the second flexible circuit board 140. In this way, the touch film 110 can transmit a touch sensing signal to the integrated circuit chip 150 through the first flexible circuit board 130 and receive a touch scanning signal transmitted by the integrated circuit chip 150. The flexible display panel 120 may collect a scan driving signal and a data signal, etc. transmitted by the integrated circuit chip 150 through the second flexible circuit board 140.
However, the flexible integrated touch display panel shown in fig. 1 has a complicated structure due to the two flexible circuit boards (i.e., the first flexible circuit board 130 and the second flexible circuit board 140), and the first flexible circuit board 130 and the second flexible circuit board 140 need to be respectively bonded, which may result in a low yield in the manufacturing process.
Disclosure of Invention
In view of the above-mentioned drawbacks and deficiencies of the prior art, it is desirable to provide a flexible integrated touch display panel and a method for manufacturing the same, so as to solve at least some of the technical problems described in the background.
In a first aspect, the present application provides a flexible integrated touch display panel, including: a flexible substrate; a plurality of thin film transistors disposed in the non-display region on the flexible substrate; a light emitting diode device layer disposed on the thin film transistor array; the barrier layer is arranged on the light-emitting diode device layer and further comprises a plurality of through holes; the touch electrode array is arranged on the barrier layer and comprises a plurality of touch electrodes; and each touch electrode is electrically connected with each thin film transistor through each through hole.
In a second aspect, the present application further provides a method for manufacturing a flexible integrated touch display panel, including: providing a flexible substrate; forming a plurality of thin film transistors on a flexible substrate; forming a light emitting diode device layer on the thin film transistor; forming a barrier layer on the light emitting diode device layer, wherein a touch electrode array is formed on the barrier layer and comprises a plurality of touch electrodes; forming a plurality of via holes penetrating through the barrier layer; and each touch electrode is electrically connected with the thin film transistor through each through hole.
According to the scheme, all touch electrodes in the touch electrode array arranged on the barrier layer are electrically connected with the thin film transistor through the through holes, so that the finally manufactured flexible integrated touch display panel is connected with the integrated circuit chip through only one flexible circuit board to send and/or receive corresponding electric signals to and/or from the integrated circuit chip. Compared with the existing flexible integrated touch display panel, the number of the flexible circuit boards to be bound is reduced, and the manufacturing yield of the flexible integrated touch display panel is improved.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic structural diagram of a conventional flexible integrated touch display panel;
FIG. 2A shows a schematic top view of a flexible integrated touch display panel of one embodiment of the present application;
FIG. 2B is a cross-sectional view taken along line AB of FIG. 2A;
FIG. 3A shows a schematic top view of a flexible integrated touch display panel of another embodiment of the present application;
FIG. 3B is a cross-sectional view taken along line CD of FIG. 3A;
FIG. 4A shows a schematic top view of a flexible integrated touch display panel of yet another embodiment of the present application;
FIG. 4B is a cross-sectional view taken along line EF of FIG. 4A;
FIG. 5 is a schematic circuit diagram of a touch electrode and a thin film transistor according to various embodiments of the present disclosure;
fig. 6 shows a schematic structural diagram of a flexible integrated touch display panel according to still another embodiment of the present application;
fig. 7 shows a schematic flow chart of a method for manufacturing a flexible integrated touch display panel according to an embodiment of the present application.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Referring to fig. 2A, a schematic top view of a flexible integrated touch display panel according to an embodiment of the present disclosure is shown, and fig. 2B is a cross-sectional view along line AB in fig. 2A.
Next, the flexible integrated touch display panel of the present embodiment is described with reference to fig. 2A and 2B.
The flexible integrated touch display panel of the embodiment includes a flexible substrate 210, a plurality of thin film transistors (thin film transistor layers 220) disposed in a non-display area on the flexible substrate 210, and a light emitting diode device layer 230 disposed on the thin film transistors; a barrier layer 240 disposed on the light emitting diode device layer 230, and a touch electrode array disposed on the barrier layer 240.
Optionally, the barrier layer 240 is, for example, a flexible film layer, and the touch electrode array is integrated on the barrier layer 240. The flexible barrier layer 240 may be formed by attaching to the led device layer 230.
In the flexible integrated touch display panel of the present embodiment, the flexible substrate 210 has flexibility, and can be made of a high molecular polymer material with high transmittance, such as PI (Polyimide).
The flexible integrated touch display panel of this embodiment may include a thin-film transistor layer 220 formed on the flexible substrate 210, and a plurality of thin-film transistors as described above may be disposed in the non-display region in the thin-film transistor layer 220.
In addition, in the flexible integrated touch display panel of the embodiment, the barrier layer 240 further includes a plurality of via holes 250, and the touch electrode array further includes a plurality of touch electrodes 241. Each touch electrode 241 is electrically connected to each thin film transistor through each via hole 250.
Those skilled in the art will appreciate that the flexible integrated touch display panel of the present embodiment may further include other structures, such as a pixel array formed in the display area 201 and a thin film transistor array formed in the display area of the thin film transistor layer 220. The thin film transistor array may include a plurality of thin film transistors for applying a control signal to each pixel in the pixel array. Each thin film transistor in the thin film transistor array may be connected to the integrated circuit chip through a Flexible circuit board (FPC) 10, so that a control signal generated by the integrated circuit chip is transmitted to each thin film transistor in the thin film transistor array through the FPC10, thereby controlling display of each pixel.
In addition, the flexible integrated touch display panel of the present embodiment may further include touch signal lines connected to the touch electrodes 241 in the touch electrode array in a one-to-one correspondence. In some alternative implementations, each touch electrode 241 may be electrically connected to each via hole 250 through a touch signal line correspondingly connected thereto, so that each touch electrode 241 may be electrically connected to each thin film transistor.
In the flexible integrated touch display panel of the embodiment, each touch electrode 241 is electrically connected to each thin film transistor in the non-display area through a plurality of vias 250 disposed on the barrier layer 240. Since the tfts in the non-display area and the tft array in the display area may be disposed on the tft layer 220, the tfts in the non-display area may also be connected to the ic chip through the same FPC10 to obtain the touch scan signal generated by the ic chip and transmit the touch sense signal sensed by each touch electrode 241 in the touch electrode array to the ic chip.
Thus, for the flexible integrated touch display panel of the present embodiment, only one FPC10 is required to complete the electrical connection with the integrated circuit chip. Compared with the existing flexible integrated touch display panel, the number of required FPCs is reduced, and therefore the yield of the flexible integrated touch display panel is improved.
Optionally, the flexible integrated touch display panel of this embodiment may further include a plurality of metal pads 260 located in the non-display area, each metal pad 260 is connected to each touch electrode 241 located in the display area in a one-to-one correspondence manner, and each metal pad 260 penetrates through each via hole and is connected to the thin film transistor in a corresponding manner.
For example, each metal pad may be electrically connected through each touch signal line correspondingly connected to each touch electrode 241, and connected to the thin film transistor in the non-display region through the hole 250.
In this way, each touch electrode 241 can be connected to each tft in the non-display area through the touch signal line via the metal pad 260 penetrating through the hole 250 in a one-to-one correspondence manner, and then electrically connected to the ic chip via each tft through the FPC 10.
Each touch electrode 241 is directly electrically connected to each thin film transistor in the non-display region through a metal pad 260, and the resistance between the metal pad and the thin film transistor is small. In addition, since the contact portion between the tft and the metal pad 260 may be made of a titanium-aluminum-titanium alloy material, when each touch electrode 241 is directly electrically connected to each tft located in the non-display region through the metal pad 260, the connection portion between the tft and the metal pad 260 is not easily corroded.
Because the metal pad is formed in the non-display area of the flexible integrated touch display panel, the display effect of the panel can be prevented from being adversely affected. For example, in some application scenarios, the metal pad may be formed in a non-display area near a lower border of the flexible integrated touch display panel. Alternatively, in other application scenarios, the metal pad may also be formed in the non-display region near the left and right borders of the flexible integrated touch display panel, for example, in the vicinity of a shift register for outputting a scan signal.
Referring to fig. 3A, a schematic top view of a flexible integrated touch display panel according to another embodiment of the present application is shown, and fig. 3B is a cross-sectional view along line CD in fig. 3A.
In fig. 3B, the range of the non-display area is adaptively enlarged to make the devices in the non-display area and the relative positional relationship thereof clearer.
Like the embodiment shown in fig. 2A and 2B, the flexible integrated touch display panel of the embodiment shown in fig. 3A and 3B also includes a flexible substrate 310, a thin-film transistor layer 320 disposed on the flexible substrate 310, a light emitting diode device layer disposed on the thin-film transistor, a barrier layer 340 disposed on the light emitting diode device layer, and a touch electrode array disposed on the barrier layer 340. The touch electrode array includes a plurality of touch electrodes 341, and the non-display area of the thin film transistor layer 320 is provided with a plurality of thin film transistors.
The difference from the embodiment shown in fig. 2A and 2B is that the flexible integrated touch display panel of the present embodiment further defines that the light emitting diode device layer includes an anode layer. And the anode layer positioned at the non-display region includes a plurality of anode electrodes 332 insulated from each other. Each metal pad 360 may penetrate through each via hole 350 and be connected to the anode electrodes 332 in a one-to-one correspondence, and each anode electrode 332 is electrically connected to the thin film transistor.
The flexible integrated touch display panel of the present embodiment may also include some other structures. For example, the light emitting diode device layer may further include a pixel defining layer 331. The pixel defining layer 331 covers at least the entire display area 301 and serves to divide the display area 301 into a plurality of pixel regions. In addition, the display area 301 also includes a plurality of anode electrodes 332 ', and a plurality of pixel regions formed by the pixel definition layer 331 may correspond to the respective anode electrodes 332' in the display area 301 one to one. That is, each pixel region has an anode electrode 332'. Here, the anode electrode 332' positioned in the display region 301 may be disposed at the same layer as the anode electrode 332 positioned in the non-display region, and may be fabricated in the same fabrication process step. In addition, the flexible integrated touch display panel of the present embodiment may further include a planarization layer 370 formed on the thin-film transistor layer 320.
The flexible integrated touch display panel of the embodiment can be electrically connected with the integrated circuit chip by only one FPC 20. Compared with the existing flexible integrated touch display panel, the number of required FPCs is reduced, and therefore the yield of the flexible integrated touch display panel is improved.
In addition, in the flexible integrated touch display panel of the embodiment, the metal pad 360 passes through the via hole 350 to be connected to the anode electrodes 332, and each anode electrode 332 is connected to each tft in the non-display region of the tft layer 320 in a one-to-one correspondence manner. In this way, since the anode electrode 332 is located on the thin-film transistor layer 320, and other film layers (e.g., the planarization layer 320) may exist between the anode electrode 332 and the thin-film transistor layer 320, compared with the embodiment shown in fig. 2A and fig. 2B, the length of the metal pad 360 in the vertical direction can be correspondingly reduced, and the material for manufacturing the metal pad 260 can be further saved.
Referring to fig. 4A, a schematic top view of a flexible integrated touch display panel according to still another embodiment of the present disclosure is shown, and fig. 4B is a cross-sectional view taken along a line EF in fig. 4A.
Like the embodiment shown in fig. 2A and 2B, the flexible integrated touch display panel of the embodiment shown in fig. 4A and 4B also includes a flexible substrate 410, a thin-film transistor layer 420 disposed on the flexible substrate 410, a light emitting diode device layer disposed on the thin-film transistor layer 420, a barrier layer 440 disposed on the light emitting diode device layer, and a touch electrode array disposed on the barrier layer 440. The touch electrode array includes a plurality of touch electrodes 441, and a plurality of thin film transistors are disposed in the non-display region of the thin film transistor layer 420.
The difference from the embodiment shown in fig. 2A and 2B is that the flexible integrated touch display panel of the present embodiment further includes a light emitting diode device layer including a cathode layer and an anode layer.
The cathode layer positioned at the non-display area includes a plurality of cathode electrodes 433 insulated from each other, and the anode layer positioned at the non-display area includes a plurality of anode electrodes 432 insulated from each other. In the display region 401, a cathode electrode 433 'and an anode electrode 432' are formed in the same manner. At the time of display, an electric signal may be applied to each anode electrode 432 ' through a thin film transistor array formed in the display region 401 of the thin film transistor layer 420, and the organic light emitting layer 434 may emit light by an electric field formed between each anode electrode 432 ' and the cathode electrode 433 '.
The metal pads 460 penetrate through the through holes 450 and are correspondingly connected with the cathode electrodes 433 one by one, the cathode electrodes 433 are correspondingly connected with the anode electrodes 432 one by one, and the anode electrodes 432 are electrically connected with the tfts in the non-display area of the tft layer 420 in a corresponding manner.
Those skilled in the art will appreciate that the flexible integrated touch display panel of the present embodiment may also include some other structures. For example, the light emitting diode device layer may further include a pixel defining layer 431 and an organic light emitting layer 434. The pixel defining layer 431 covers at least the entire display area 401 and serves to divide the display area 401 into a plurality of pixel regions.
In addition, a thin film encapsulation layer 480 may be further formed between the barrier layer 440 and the light emitting diode device layer, and the thin film encapsulation layer 480 at least covers the display region 401 to block water and oxygen and prevent the organic light emitting layer from being contaminated. In addition, the flexible integrated touch display panel of the present embodiment may further include a planarization layer 470 formed on the thin-film transistor layer 420.
The flexible integrated touch display panel of the embodiment can be electrically connected with the integrated circuit chip by only one FPC 20. Compared with the existing flexible integrated touch display panel, the number of required FPCs is reduced, and therefore the yield of the flexible integrated touch display panel is improved.
In addition, in the flexible integrated touch display panel of the embodiment, the metal pad 460 passes through the via hole 450 to be connected to each cathode electrode 433 located in the non-display region, each cathode electrode 433 is connected to each anode electrode 432 located in the non-display region in a one-to-one correspondence, and each anode electrode 432 is connected to each tft located in the non-display region of the tft layer 420 in a one-to-one correspondence. Thus, since the anode electrode 432 is located on the thin-film transistor layer 420, the cathode electrode 433 is located on the anode electrode 432, and other film layers (e.g., the planarization layer 420) may exist between the anode electrode 432 and the thin-film transistor layer 420, compared with the embodiment shown in fig. 2A and 2B and the embodiment shown in fig. 3A and 3B, the length of the metal pad 460 in the vertical direction can be further reduced, and the material required for manufacturing the metal pad 460 can be further saved.
In some application scenarios, the touch electrode array of the flexible integrated touch display panel according to embodiments of the present application may include m × n touch electrodes arranged in an array.
And each touch electrode in any j-th row in the touch electrode array is correspondingly connected with the source electrode of one thin film transistor one by one, wherein j is more than or equal to 1 and is less than or equal to n. The drains of the thin film transistors electrically connected with the touch electrodes of any jth column are electrically connected with each other, and the gates of the thin film transistors electrically connected with the touch electrodes of any jth column receive control signals respectively so as to conduct the thin film transistors electrically connected with the touch electrodes of any jth column in a time-sharing manner.
Fig. 5 schematically illustrates a connection manner between each touch electrode of each row and the thin film transistor when each row of the touch electrode array includes three touch electrodes.
Each touch electrode may be connected to each tft in a one-to-one correspondence manner through the metal pad 560 in a similar manner to the aforementioned embodiments.
Next, the principle of time-sharing driving will be described by taking the touch electrode 5411, the touch electrode 5412, and the touch electrode 5413 positioned in the first row in the touch electrode array in fig. 5, and the first transistor T1, the second transistor T2, and the third transistor T3 connected thereto as an example. Sources of the first transistor T1, the second transistor T2, and the third transistor T3 are connected to the touch electrode 5411, the touch electrode 5412, and the touch electrode 5413, respectively. Drains of the first, second, and third transistors T1, T2, and T3 are electrically connected to each other, and gates of the first, second, and third transistors T1, T2, and T3 are connected to the first, second, and third clock signals CK1, CK2, and CK3, respectively.
The first clock signal CK1, the second clock signal CK2, and the third clock signal CK3 are time-divisionally enabled to turn on the first transistor T1, the second transistor T2, and the third transistor T3 in a time-divisional manner.
Specifically, when the first clock signal CK1 is enabled, the first transistor T1 is turned on, and the integrated circuit chip may transmit a touch scan signal to the touch electrode 5411 through the FPC via the drain of the first transistor T1 or receive a touch sensing signal transmitted by the touch electrode 5411 through the first transistor T1.
Similarly, when the second clock signal CK2 is enabled, the second transistor T2 is turned on, and the integrated circuit chip may transmit a touch scan signal to the touch electrode 5412 through the FPC via the drain of the second transistor T2 or receive a touch sensing signal transmitted by the touch electrode 5412 through the second transistor T2. When the third clock signal CK3 is enabled, the third transistor T3 is turned on, and the integrated circuit chip may transmit a touch scan signal to the touch electrode 5413 through the FPC via the drain of the third transistor T3 or receive a touch sense signal transmitted by the touch electrode 5413 through the third transistor T3.
In this way, by applying a touch scanning signal to a certain row of touch electrodes in the touch electrode array in a time-sharing manner and receiving a touch sensing signal of the certain row of touch electrodes in a time-sharing manner, the number of channels for providing signals to the thin film transistors and the number of connectors on the FPC to which the thin film transistors are connected with the integrated circuit chip can be correspondingly reduced, so that the number of routing of non-display areas is reduced, the width of a frame is reduced, and the manufacturing cost of the flexible integrated touch display device adopting the flexible integrated touch display panel of each embodiment of the present application is reduced.
The time-sharing driving method shown in fig. 5 is merely illustrative, and is intended to explain the principle of time-sharing driving. Those skilled in the art can understand that, in a specific application, the number of the common drain transistors can be set according to the requirements of an application scenario so as to determine the number of the touch electrodes driven in a time-sharing manner. In addition, in fig. 5, the connection manner between each touch electrode and the corresponding touch signal line is only schematic, and is only used to express that each touch electrode is correspondingly connected to each metal pad 560 through the touch signal line, and is not used to limit the trace position of each touch signal line.
In addition, although in the embodiments shown in fig. 2A to 4B, each touch electrode in the touch electrode array is schematically shown to be distributed in an m × n array, this is merely illustrative.
On the basis of obtaining the technical solution disclosed in the present application, a person skilled in the art may set the arrangement manner of each touch electrode in the touch electrode array according to the needs of practical applications. For example, the m × n array distribution in the embodiments shown in fig. 2A to fig. 4B may be adopted, so that the flexible integrated touch display panel forms a self-contained structure, that is, each touch electrode receives a touch scanning signal sent by the integrated circuit chip and sends a touch sensing signal to the integrated circuit chip.
Alternatively, the touch electrodes in the touch electrode array may be arranged in an arrangement manner as shown in fig. 6.
Specifically, the touch electrode array includes a plurality of touch electrodes 641 arranged along a first direction, and each touch electrode 641 extends along a second direction, wherein the first direction is perpendicular to the second direction. In fig. 6, each touch electrode 641 in the touch electrode array can be used as a touch emitting electrode of a mutual capacitance integrated touch display panel, for example.
In the mutual capacitance architecture shown in fig. 6, each touch electrode may also be connected to each tft through a metal pad 660 in a one-to-one manner in a manner similar to that of the previous embodiments, and may also be driven in a time-sharing manner in a manner similar to that of fig. 5, so as to receive a touch scan signal sent by the integrated circuit chip when the tft is turned on.
Specifically, the touch electrode 6411, the touch electrode 6412, and the touch electrode 6413 are electrically connected to the drains of the thin film transistor T1, the thin film transistor T2, and the thin film transistor T3, respectively, and the sources of the thin film transistors T1 to T3 electrically connected to the touch electrodes 6411 to 6413, respectively, are electrically connected to each other. The gates of the tfts T1 to T3 electrically connected to the touch electrodes 6411 to 6413 receive control signals, respectively, to turn on the tfts T1 to T3 in a time-sharing manner. That is, the first clock signal CK1, the second clock signal CK2, and the third clock signal CK3 are enabled in a time-sharing manner to turn on the first transistor T1, the second transistor T2, and the third transistor T3 in a time-sharing manner, so as to transmit the touch scan signals to the touch electrodes 6411 to 6413.
In addition, fig. 6 may further include a plurality of touch sensing electrodes 642. The touch sensing electrode 642 may also be integrated on the barrier layer. For example, the touch electrode 641 and the touch sensing electrode 642 may be integrated on the upper and lower surfaces of the barrier layer, respectively.
Each of the touch sensing electrodes 642 may be arranged along the second direction and extend along the first direction. Each touch sensing electrode 642 may also be connected to the thin film transistor in a similar connection manner as each touch sensing electrode 641, and is electrically connected to the integrated circuit chip through the FPC connected to the thin film transistor, so that when the thin film transistor is turned on, a touch sensing signal is transmitted to the integrated circuit chip.
Fig. 7 is a schematic flow chart of a manufacturing method of the flexible integrated touch display panel according to the present application.
Specifically, the manufacturing method of the flexible integrated touch display panel of the embodiment includes:
step 710, a flexible substrate is provided.
Step 720, a plurality of thin film transistors are formed on the flexible substrate. The thin film transistors may be formed, for example, in a non-display region of the flexible integrated touch display panel.
Step 730, a light emitting diode device layer is formed on the thin film transistor.
Step 740, forming a barrier layer on the light emitting diode device layer, wherein a touch electrode array is formed on the barrier layer, and the touch electrode array includes a plurality of touch electrodes.
In step 750, a plurality of vias are formed through the barrier layer.
And each touch electrode is electrically connected with the thin film transistor through each through hole.
It should be noted that the step numbers 710 to 750 in this embodiment are not used to limit the sequence of the process steps, but are only used to schematically describe the process steps included in the manufacturing method of the flexible integrated touch display panel in this embodiment.
Optionally, the manufacturing method of the flexible integrated touch display panel of the embodiment may further include:
and forming a plurality of metal pads on the barrier layer of the non-display area, wherein each metal pad is connected with each touch electrode in the touch electrode array in a one-to-one correspondence manner.
For example, in some application scenarios, each metal pad may extend through each via and be connected to a corresponding thin film transistor. In this way, each touch electrode can be connected with the thin film transistor in a one-to-one correspondence manner through the metal pad.
In other application scenarios, the forming a light emitting diode device layer on the thin film transistor array of step 730 may further include:
in step 731, an anode layer is formed over the thin film transistor.
In step 732, a plurality of anode electrodes insulated from each other are formed in a non-display region of the anode layer.
In these application scenarios, each metal pad may penetrate through each via hole and be connected with the anode electrode in a one-to-one correspondence manner, and each anode electrode is electrically connected with the thin film transistor. In this way, each touch electrode can be connected with the thin film transistor in a one-to-one correspondence manner through the metal pad and the anode electrode.
In other application scenarios, the forming the light emitting diode device layer on the thin film transistor array in step 730 may further include, in addition to step 731 and step 732 as above:
in step 733, a cathode layer is formed over the anode layer.
At step 734, a plurality of cathode electrodes are formed on the cathode layer in the non-display area, wherein the cathode electrodes are insulated from each other.
In these application scenarios, each metal pad penetrates through each via hole to be connected with the cathode electrode in a one-to-one correspondence manner, each cathode electrode is connected with each anode electrode in a one-to-one correspondence manner, and each anode electrode is electrically connected with the thin film transistor.
In the integrated touch display panel manufactured as above, the touch electrode array may include m × n touch electrodes arranged in an array, for example, so that the integrated touch display panel forms a self-contained structure. Each touch electrode in any jth column in the touch electrode array can be correspondingly connected with a source electrode of a thin film transistor one by one, wherein j is more than or equal to 1 and is less than or equal to n. The drains of the thin film transistors electrically connected with the touch electrodes of any jth column are electrically connected with each other, and the gates of the thin film transistors electrically connected with the touch electrodes of any jth column receive control signals respectively so as to conduct the thin film transistors electrically connected with the touch electrodes of any jth column in a time-sharing manner.
Alternatively, in the integrated touch display panel manufactured as above, the touch electrode array may include a plurality of touch electrodes arranged along a first direction, and each touch electrode extends along a second direction, where the first direction is perpendicular to the second direction. Each touch electrode may be electrically connected to a drain of one thin film transistor, and a source of each thin film transistor electrically connected to each touch electrode may be electrically connected to each other. And the grid electrode of each thin film transistor electrically connected with each touch electrode respectively receives a control signal so as to enable each thin film transistor to be conducted in a time-sharing mode. The touch electrodes can be used as touch transmitting electrodes or touch sensing electrodes in a mutual capacitance architecture. If the touch electrodes are used as touch emitting electrodes, the touch electrodes can receive touch scanning signals sent by the integrated circuit chip when the thin film transistors connected with the touch electrodes are turned on. If the touch electrodes are used as touch sensing electrodes, when the thin film transistors connected to the touch electrodes are turned on, the touch electrodes may transmit the sensed touch sensing signals to the integrated circuit chip.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the invention herein disclosed is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of the above features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (12)
1. A flexible integrated touch display panel, comprising:
a flexible substrate;
a pixel array disposed in the display region;
a thin-film transistor layer disposed on the flexible substrate;
the thin film transistor layer comprises a thin film transistor which is positioned in the display area and is used for applying a control signal to each pixel;
a light emitting diode device layer disposed on the thin-film transistor layer; a barrier layer disposed on the light emitting diode device layer, the barrier layer further including a plurality of vias in a non-display region;
a touch electrode array disposed on the barrier layer, the touch electrode array including a plurality of touch electrodes;
the thin film transistor layer further comprises a plurality of thin film transistors which are positioned in the non-display area and provide control signals for the touch electrode; each touch electrode is electrically connected with each thin film transistor through each through hole.
2. The flexible integrated touch display panel of claim 1, wherein: the flexible integrated touch display panel further comprises a plurality of metal pads located in the non-display area, and each metal pad is connected with each touch electrode located in the display area in a one-to-one correspondence manner.
3. The flexible integrated touch display panel of claim 2, wherein:
and each metal pad penetrates through each through hole and is correspondingly connected with the thin film transistor.
4. The flexible integrated touch display panel of claim 2, wherein:
the light emitting diode device layer comprises an anode layer;
the anode layer positioned at the non-display region includes a plurality of anode electrodes insulated from each other;
each metal pad penetrates through each through hole and is connected with the anode electrode in a one-to-one correspondence mode;
each of the anode electrodes is electrically connected to the thin film transistor.
5. The flexible integrated touch display panel of claim 2, wherein:
the light emitting diode device layer comprises a cathode layer and an anode layer;
the cathode layer at the non-display region includes a plurality of cathode electrodes insulated from each other, and the anode layer at the non-display region includes a plurality of anode electrodes insulated from each other;
each metal pad penetrates through each through hole and is connected with the cathode electrode in a one-to-one correspondence mode;
each cathode electrode is connected with each anode electrode in a one-to-one correspondence manner;
each of the anode electrodes is electrically connected to the thin film transistor.
6. The flexible integrated touch display panel of any one of claims 3-5, wherein:
the touch electrode array comprises m multiplied by n touch electrodes arranged in an array;
each touch electrode in any j-th row in the touch electrode array is correspondingly connected with a source electrode of a thin film transistor one by one, wherein j is more than or equal to 1 and is less than or equal to n;
the drains of the thin film transistors electrically connected with the touch electrodes of the arbitrary jth row are electrically connected with each other, and the gates of the thin film transistors electrically connected with the touch electrodes of the arbitrary jth row receive control signals respectively so as to turn on the thin film transistors electrically connected with the touch electrodes of the arbitrary jth row in a time-sharing manner.
7. The flexible integrated touch display panel of any one of claims 3-5, wherein:
the touch electrode array comprises a plurality of touch electrodes arranged along a first direction, and each touch electrode extends along a second direction, wherein the first direction is vertical to the second direction;
the touch electrodes are electrically connected with the drain electrode of one thin film transistor respectively, and the source electrodes of the thin film transistors electrically connected with the touch electrodes are electrically connected with each other;
and the grid electrode of each thin film transistor electrically connected with each touch electrode respectively receives a control signal so as to enable each thin film transistor to be conducted in a time-sharing mode.
8. The method for manufacturing the flexible integrated touch display panel according to any one of claims 1 to 7, comprising:
providing a flexible substrate;
forming a plurality of thin film transistors on the flexible substrate;
the thin film transistor comprises a thin film transistor which is positioned in the display area and is used for applying a control signal to each pixel; the thin film transistor layer further comprises a plurality of thin film transistors which are positioned in the non-display area and provide control signals for the touch electrode;
forming a light emitting diode device layer on the thin film transistor;
forming a barrier layer on the light emitting diode device layer, wherein a touch electrode array is formed on the barrier layer in the display area, and the touch electrode array comprises a plurality of touch electrodes;
forming a plurality of vias through the barrier layer;
and each touch electrode is electrically connected with the thin film transistor through each through hole.
9. The method of manufacturing according to claim 8, further comprising:
and forming a plurality of metal pads on the barrier layer of the non-display area, wherein each metal pad is connected with each touch electrode in the touch electrode array in a one-to-one correspondence manner.
10. The method of manufacturing according to claim 9, wherein:
and each metal pad penetrates through each through hole and is correspondingly connected with the thin film transistor.
11. The method of claim 9, wherein the forming a light emitting diode device layer on the thin film transistor comprises:
forming an anode layer on the thin film transistor;
forming a plurality of anode electrodes insulated from each other in a non-display region of the anode layer;
wherein,
each metal pad penetrates through each through hole and is connected with the anode electrode in a one-to-one correspondence mode;
each of the anode electrodes is electrically connected to the thin film transistor.
12. The method of claim 9, wherein the forming a light emitting diode device layer on the thin film transistor comprises:
forming an anode layer on the thin film transistor array;
forming a plurality of anode electrodes insulated from each other on the anode layer positioned in the non-display region;
forming a cathode layer on the anode layer;
forming a plurality of cathode electrodes insulated from each other on the cathode layer positioned in the non-display region;
the metal pads penetrate through the through holes and are connected with the cathode electrodes in a one-to-one corresponding mode;
each cathode electrode is connected with each anode electrode in a one-to-one correspondence manner;
each of the anode electrodes is electrically connected to the thin film transistor.
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