CN106123793A - A kind of portable optical interferometric method sphere diameter sphericity fast detector - Google Patents

A kind of portable optical interferometric method sphere diameter sphericity fast detector Download PDF

Info

Publication number
CN106123793A
CN106123793A CN201610497687.3A CN201610497687A CN106123793A CN 106123793 A CN106123793 A CN 106123793A CN 201610497687 A CN201610497687 A CN 201610497687A CN 106123793 A CN106123793 A CN 106123793A
Authority
CN
China
Prior art keywords
optical glass
sphericity
spherical
reference optical
glass sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610497687.3A
Other languages
Chinese (zh)
Other versions
CN106123793B (en
Inventor
段荣
汪雪
董清宇
焦国涛
闫珺
岳春国
葛新伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Aerospace Times Electronics Corp
Original Assignee
China Aerospace Times Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Aerospace Times Electronics Corp filed Critical China Aerospace Times Electronics Corp
Priority to CN201610497687.3A priority Critical patent/CN106123793B/en
Publication of CN106123793A publication Critical patent/CN106123793A/en
Application granted granted Critical
Publication of CN106123793B publication Critical patent/CN106123793B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

一种便携式光学干涉法球径球度快速检测仪,包括手持测头、主机和显示器;手持测头的前端为一基准光学玻璃样板,周围自带单色光照明,检测时将基准光学玻璃样板与被测球或球碗零件贴合,因球径差产生的干涉条纹图形经CCD系统成像并输出,基于光学干涉原理和已知单色光波长、光圈数、光圈形状及其相互关系对该干涉条纹进行图像处理及计算,由显示器输出球径球度值及简化后的干涉条纹图形。本发明携带方便,使用灵活,可实现零件加工时的在线检测,极大地提高了高精度球形零件的检测效率。

A portable optical interferometry spherical diameter and sphericity rapid detector, including a hand-held measuring head, a host computer and a display; the front end of the hand-held measuring head is a reference optical glass sample, and the surrounding is illuminated by monochromatic light. When testing, the reference optical glass sample is Fitted with the measured ball or bowl parts, the interference fringe pattern generated by the ball diameter difference is imaged and output by the CCD system. Interference fringes are image processed and calculated, and the display outputs the spherical diameter and sphericity value and the simplified interference fringe pattern. The invention is easy to carry and flexible to use, can realize on-line detection during part processing, and greatly improves the detection efficiency of high-precision spherical parts.

Description

一种便携式光学干涉法球径球度快速检测仪A Portable Optical Interferometry Spherical Rapid Detector

技术领域technical field

本发明涉及机械加工及测量行业。具体为一种能够方便、快速、准确地对球形零件进行球径和球度检测的装置。The invention relates to machining and measuring industries. Specifically, it is a device capable of conveniently, rapidly and accurately detecting the spherical diameter and degree of spherical parts.

背景技术Background technique

高精度球形零件(包括球和球碗)的最终精度是靠球研机或手工精研实现的。目前这类零件的生产效率低,其中的一个重要原因是检测效率低。要实现微米或亚微米级的球径和球度检测,工程上采用高精度光学复合三坐标仪和圆度仪来完成。在使用这些设备进行球径和球度检测时,存在以下几方面的弊端:1.被检测零件需从其加工设备上取下,送至上述检测设备处进行检测,检测完毕后,如尚未达到尺寸要求,则需再安装回加工设备上继续加工;2.检测值为近似值,因为零件精度已接近设备精度,且是多点拟合值;3.检测过程时间长,大量占用设备资源;4.需依赖专业技能人员配合完成。很显然,这种检测方法过程繁琐、耗时长、效率低,极大地制约了生产效率。The final accuracy of high-precision spherical parts (including balls and bowls) is achieved by ball grinding machine or manual lapping. At present, the production efficiency of such parts is low, and one of the important reasons is the low detection efficiency. In order to realize micron or submicron sphere diameter and sphericity detection, high-precision optical compound three-coordinate instrument and roundness instrument are used in engineering to complete. When using these equipment to test the ball diameter and sphericity, there are the following disadvantages: 1. The parts to be tested need to be removed from the processing equipment and sent to the above-mentioned testing equipment for testing. If the size is required, it needs to be installed back on the processing equipment to continue processing; 2. The detection value is an approximate value, because the accuracy of the part is close to the accuracy of the equipment, and it is a multi-point fitting value; 3. The detection process takes a long time and consumes a lot of equipment resources; 4 .It needs to rely on the cooperation of professional and skilled personnel. Obviously, this detection method is cumbersome, time-consuming, and inefficient, which greatly restricts production efficiency.

发明内容Contents of the invention

本发明提供了一种便携式光学干涉法球径球度快速检测仪,可实现球形零件在加工时其球径和球度的在线快速检测。The invention provides a portable optical interferometry rapid detection instrument for spherical diameter and sphericity, which can realize online rapid detection of the spherical diameter and sphericity of spherical parts during processing.

本发明的技术方案是:Technical scheme of the present invention is:

一种便携式光学干涉法球径球度快速检测仪,包括手持测头、主机和显示器;手持测头由基准光学玻璃样板、激光照明系统、成像系统及按钮开关构成;基准光学玻璃样板插装在通光套筒上,位于手持测头的前端,目的是方便不同球径基准光学玻璃样板间的快速更换,并与被测球形零件接触;激光照明系统为基准光学玻璃样板提供激光单色光照明,激光单色光是通过通体发亮光纤将激光从发射端导入,并将该通体发亮光纤缠绕在通光套筒上,实现对基准光学玻璃样板进行照明;按钮开关用于控制激光照明系统的激光单色光照明;基准光学玻璃样板后方是成像系统,成像系统对基准光学玻璃样板与被测零件接触之间的球径差产生的干涉条纹图像成像,成像后的图像被传送至主机中图像处理器,图像处理器经图像处理和软件计算得出的被测球形零件的球径和球度值在显示器上输出。A portable optical interferometry spherical diameter and sphericity rapid detector, including a hand-held measuring head, a host and a display; the hand-held measuring head is composed of a reference optical glass sample, a laser lighting system, an imaging system and a button switch; the reference optical glass sample is inserted in the On the light-transmitting sleeve, it is located at the front end of the hand-held measuring head. The purpose is to facilitate the quick replacement of reference optical glass samples with different spherical diameters and to be in contact with the spherical parts to be tested; the laser lighting system provides laser monochromatic light illumination for the reference optical glass samples. , the laser monochromatic light is introduced from the emitting end through the whole body bright fiber, and the whole body bright fiber is wound on the light sleeve to realize the illumination of the reference optical glass sample; the button switch is used to control the laser lighting system Laser monochromatic light illumination; behind the reference optical glass sample is an imaging system, the imaging system images the interference fringe image generated by the spherical diameter difference between the reference optical glass sample and the measured part, and the imaged image is sent to the host The image processor, the spherical diameter and sphericity value of the measured spherical part calculated by the image processor through image processing and software, is output on the display.

所述图像处理器经图像处理和软件计算还在显示器上直接输出简化后的干涉条纹图形。The image processor also directly outputs the simplified interference fringe pattern on the display after image processing and software calculation.

所述成像系统由镜头、CCD组件构成,尾端有调焦旋钮,调节CCD与镜头之间的距离,实现调焦。The imaging system is composed of a lens and a CCD assembly. There is a focusing knob at the end to adjust the distance between the CCD and the lens to achieve focusing.

本发明的原理:一种便携式光学干涉法球径球度快速检测仪,包括手持测头、主机和显示器;手持测头由基准光学玻璃样板、激光照明系统、成像系统及按钮开关构成;基准光学玻璃样板插装在通光套筒上,位于手持测头的前端,目的是方便不同球径基准光学玻璃样板间的快速更换,并与被测零件接触;激光照明系统为基准光学玻璃样板提供激光单色光照明,提高干涉条纹清晰度,激光单色光是通过通体发亮光纤将激光从发射端导入,并将该通体发亮光纤缠绕在通光套筒上,实现对基准光学玻璃样板进行照明的;按钮开关用于控制激光照明系统的激光单色光照明,节省电能;基准光学玻璃样板后方是成像系统,成像系统对基准光学玻璃样板与被测零件接触之间的球径差产生的干涉条纹图像成像,成像后的图像被传送至主机中的图像处理器,经处理后的干涉条纹图形及计算得出的被测球形零件的球径和球度值在显示器上输出。The principle of the present invention: a portable optical interferometry sphericity rapid detector, including a hand-held probe, a host and a display; the hand-held probe is composed of a reference optical glass model, a laser lighting system, an imaging system and a button switch; The glass sample is inserted on the optical sleeve and is located at the front end of the hand-held probe. The purpose is to facilitate the quick replacement of reference optical glass samples with different spherical diameters and to be in contact with the measured part; the laser lighting system provides laser light for the reference optical glass sample. Monochromatic light illumination improves the clarity of interference fringes. The laser monochromatic light is introduced from the emission end through the whole body bright fiber, and the whole body bright fiber is wound on the light sleeve to realize the reference optical glass sample Illuminated; the button switch is used to control the laser monochromatic light illumination of the laser lighting system to save power; the imaging system is behind the reference optical glass sample, and the imaging system produces the difference in spherical diameter between the reference optical glass sample and the measured part. Interference fringe image imaging, the imaged image is sent to the image processor in the host computer, the processed interference fringe pattern and the calculated spherical diameter and sphericity value of the measured spherical part are output on the display.

本发明的优点在于:The advantages of the present invention are:

(1)本发明直接显示球径和球度数值。此外,简化处理后的干涉条纹具有简洁、直观、易懂的特点,利于分析判断球貌误差,摆脱了对高精度三坐标仪及圆度仪的依赖;(1) The present invention directly displays the sphere diameter and sphericity values. In addition, the interference fringes after simplified processing are concise, intuitive, and easy to understand, which is conducive to the analysis and judgment of spherical appearance errors, and gets rid of the dependence on high-precision three-coordinate instruments and roundness instruments;

(2)本发明检测精度高。本发明激光单色光是通过通体发亮光纤将激光从发射端导入,并将该通体发亮光纤缠绕在通光套筒上,实现对基准光学玻璃样板进行照明,反映球径和球度的干涉条纹图形是基于单色光波长单位(纳米级)工作的,因此检测精度高。(2) The detection precision of the present invention is high. The laser monochromatic light of the present invention introduces the laser from the emitting end through the whole-body bright optical fiber, and winds the whole-body bright optical fiber on the light-transparent sleeve to realize the illumination of the reference optical glass sample and reflect the spherical diameter and sphericity. The interference fringe pattern is based on the monochromatic light wavelength unit (nanoscale), so the detection accuracy is high.

(3)本发明集成一体化设计,体积小,重量轻,携带方便,使用灵活,可实现零件加工时的在线检测,极大地提高了零件的检测效率。(3) The integrated design of the present invention is small in size, light in weight, easy to carry and flexible to use, and can realize on-line detection during part processing, greatly improving the detection efficiency of parts.

附图说明Description of drawings

图1为本发明的总体三维示意图,其中1为手持测头,2为主机,3为显示器。Fig. 1 is an overall three-dimensional schematic diagram of the present invention, wherein 1 is a hand-held measuring head, 2 is a host computer, and 3 is a display.

图2为手持测头1的剖面图,其中:4为基准光学玻璃样板,5为前端套筒,6为钢珠,7为弹性压圈,8为通光套筒,9为通体发光光纤,10为光纤导向管,11为激光模组,12为按钮开关,13为主壳体;14为镜头,15为CCD,16为CCD套筒,17为顶丝,18为尾端套筒;19为调焦底座,20为螺纹悬块,21为调焦钮,22为顶丝。Fig. 2 is a cross-sectional view of the hand-held measuring head 1, in which: 4 is a reference optical glass sample, 5 is a front sleeve, 6 is a steel ball, 7 is an elastic pressure ring, 8 is a transparent sleeve, 9 is a whole-body light-emitting optical fiber, 10 11 is the laser module, 12 is the button switch, 13 is the main casing; 14 is the lens, 15 is the CCD, 16 is the CCD sleeve, 17 is the top wire, 18 is the tail sleeve; 19 is Focusing base, 20 is a thread suspension block, 21 is a focusing button, and 22 is a top wire.

具体实施方式detailed description

下面结合附图对本发明的具体实施方式作详细说明。The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

如图1所示,本发明一种便携式光学干涉法球径球度快速检测仪包括手持测头1、主机2和显示器3。As shown in FIG. 1 , a portable optical interferometry sphericity rapid detector of the present invention includes a hand-held probe 1 , a host 2 and a display 3 .

如图2所示,手持测头1前端的基准光学玻璃样板4插在前端套筒5内,由钢珠6和弹性压圈7构成的弹性顶珠机构将其固定,既可防止基准光学玻璃样板4松脱,又可实现不同球径基准光学玻璃样板4的快速更换;通光套筒8与前端套筒5之间缠绕有通体发光光纤9,该通体发光光纤9的另一端经过光纤导向管10对准激光模组11的激光发射端口,构成激光照明系统,按钮开关12用于控制激光照明;基准光学玻璃样板4的后方有镜头14,与其后面的CCD15构成成像系统,CCD15固定在CCD套筒16中,CCD套筒16由主壳体13上的四个顶丝17定位,通过微调顶丝17可实现CCD15屏幕中心的精确定位;尾端套筒18、调焦底座19、螺纹悬块20、调焦钮21构成了调焦机构,调焦底座19由顶丝22固定在主壳体13尾端,调焦钮21与调焦底座19为可旋转连接结构,调焦钮21与螺纹悬块20为啮合关系,旋动调焦钮21,可调节螺纹悬块20前进或后退,螺纹悬块20与CCD15的导线固连,于是通过调节螺纹悬块20的方式实现了CCD15位置的调节(即调焦)。上述的结构具有简单,调节精度高的优点。As shown in Figure 2, the reference optical glass sample 4 at the front end of the hand-held measuring head 1 is inserted into the front sleeve 5, and is fixed by the elastic bead mechanism composed of the steel ball 6 and the elastic pressure ring 7, which can prevent the reference optical glass sample 4 from Loose, and can realize the rapid replacement of reference optical glass samples 4 with different spherical diameters; the whole body light-emitting optical fiber 9 is wound between the light-transmitting sleeve 8 and the front-end sleeve 5, and the other end of the whole-body light-emitting optical fiber 9 passes through the fiber guide tube 10 Aim at the laser emission port of the laser module 11 to form a laser lighting system, and the button switch 12 is used to control the laser lighting; there is a lens 14 behind the reference optical glass model 4, which forms an imaging system with the CCD15 behind it, and the CCD15 is fixed on the CCD sleeve In 16, the CCD sleeve 16 is positioned by the four top screws 17 on the main housing 13, and the precise positioning of the center of the CCD15 screen can be realized by fine-tuning the top screws 17; 1. The focus adjustment knob 21 constitutes the focus adjustment mechanism, the focus adjustment base 19 is fixed on the tail end of the main housing 13 by the top screw 22, the focus adjustment knob 21 and the focus adjustment base 19 are rotatable connection structures, the focus adjustment knob 21 and the thread suspension Block 20 is the meshing relationship, and the focus knob 21 is rotated to adjust the threaded suspension block 20 to advance or retreat, and the threaded suspension block 20 is fixedly connected with the lead of the CCD15, so the adjustment of the CCD15 position is realized by adjusting the threaded suspension block 20 ( i.e. focusing). The above structure has the advantages of simplicity and high adjustment accuracy.

使用时,按下按钮开关12,激光模组11发出激光单色光,该激光经通体发光光纤9导入,将通光套筒8照亮,为基准光学玻璃样板4提供单色光照明。When in use, press the button switch 12, the laser module 11 emits laser monochromatic light, the laser is introduced through the whole body light-emitting optical fiber 9, illuminates the light-transmitting sleeve 8, and provides monochromatic light illumination for the reference optical glass sample 4.

检测时,将基准光学玻璃样板4与被测球形零件的球面贴合,因二者球径差产生的干涉条纹图像经镜头14成像在CCD15上,图像信息传输至图像处理器,图像处理程序对采集的图像进行灰度化、去噪声、边缘检测等处理,提取出干涉条纹的边界,再经过霍夫变换获得各干涉条纹的半径参数,最后根据被测球形零件与干涉条纹半径之间的相关公式计算出其球径球度值,并在显示器2上输出球径球度值和简化后的干涉条纹图形。During detection, the reference optical glass sample 4 is bonded to the spherical surface of the measured spherical part, and the interference fringe image generated by the spherical diameter difference between the two is imaged on the CCD15 through the lens 14, and the image information is transmitted to the image processor, and the image processing program The collected image is grayscaled, denoised, and edge detected, and the boundary of the interference fringe is extracted, and then the radius parameters of each interference fringe are obtained through the Hough transform. Finally, according to the correlation between the measured spherical part and the radius of the interference fringe The formula calculates the spherical diameter sphericity value, and outputs the spherical diameter sphericity value and the simplified interference fringe figure on the display 2.

主机内含有PC104嵌入式主板图像处理模块、基于MATLAB的GUI图像处理程序、若干个DC/DC降压模块及电源,DC/DC降压模块分别为激光模组、CCD组件和显示器提供不同的电压,总电压为12V,可充电锂电池供电。The host computer contains PC104 embedded motherboard image processing module, MATLAB-based GUI image processing program, several DC/DC step-down modules and power supplies, and the DC/DC step-down modules provide different voltages for laser modules, CCD components and displays , the total voltage is 12V, powered by a rechargeable lithium battery.

本发明未详细阐述属于本领域公知技术。The present invention is not described in detail and belongs to the known technology in the art.

Claims (3)

1.一种便携式光学干涉法球径球度快速检测仪,其特征在于:包括手持测头、主机和显示器;手持测头由基准光学玻璃样板、激光照明系统、成像系统及按钮开关构成;基准光学玻璃样板插装在通光套筒上,位于手持测头的前端,目的是方便不同球径基准光学玻璃样板间的快速更换,并与被测球形零件接触;激光照明系统为基准光学玻璃样板提供激光单色光照明,激光单色光是通过通体发亮光纤将激光从发射端导入,并将该通体发亮光纤缠绕在通光套筒上,实现对基准光学玻璃样板进行照明;按钮开关用于控制激光照明系统的激光单色光照明;基准光学玻璃样板后方是成像系统,成像系统对基准光学玻璃样板与被测零件接触之间的球径差产生的干涉条纹图像成像,成像后的图像被传送至主机中图像处理器,图像处理器经图像处理和软件计算得出的被测球形零件的球径和球度值在显示器上输出。1. A portable optical interferometry spherical diameter and sphericity rapid detector is characterized in that: it comprises a hand-held measuring head, a host computer and a display; the hand-holding measuring head is made of a reference optical glass template, a laser lighting system, an imaging system and a button switch; the reference The optical glass sample is inserted on the light-transmitting sleeve and is located at the front end of the hand-held probe. The purpose is to facilitate the quick replacement of reference optical glass samples with different spherical diameters and to contact with the spherical parts to be tested; the laser lighting system is the reference optical glass sample. Provide laser monochromatic light illumination. The laser monochromatic light is introduced from the emitting end through the whole body bright fiber, and the whole body bright fiber is wound on the light sleeve to realize the illumination of the reference optical glass sample; button switch It is used to control the laser monochromatic light illumination of the laser lighting system; the imaging system is behind the reference optical glass sample, and the imaging system images the interference fringe image generated by the spherical diameter difference between the reference optical glass sample and the measured part. The image is sent to the image processor in the host, and the image processor calculates the spherical diameter and sphericity value of the measured spherical part through image processing and software, and outputs it on the display. 2.根据权利要求1所述的便携式光学干涉法球径球度快速检测仪,其特征还在于:所述图像处理器经图像处理和软件计算还在显示器上直接输出简化后的干涉条纹图形。2. The portable optical interferometry sphericity rapid detector according to claim 1, further characterized in that: the image processor directly outputs the simplified interference fringe pattern on the display after image processing and software calculation. 3.根据权利要求1所述的便携式光学干涉法球径球度快速检测仪,其特征还在于:所述成像系统由镜头、CCD组件构成,尾端有调焦旋钮,调节CCD与镜头之间的距离,实现调焦。3. The portable optical interferometry spherical diameter and sphericity rapid detector according to claim 1, further characterized in that: the imaging system is composed of a lens and a CCD assembly, and there is a focusing knob at the tail end to adjust the distance between the CCD and the lens. distance to achieve focus.
CN201610497687.3A 2016-06-29 2016-06-29 A kind of portable optical interferometry sphere diameter sphericity fast detector Active CN106123793B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610497687.3A CN106123793B (en) 2016-06-29 2016-06-29 A kind of portable optical interferometry sphere diameter sphericity fast detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610497687.3A CN106123793B (en) 2016-06-29 2016-06-29 A kind of portable optical interferometry sphere diameter sphericity fast detector

Publications (2)

Publication Number Publication Date
CN106123793A true CN106123793A (en) 2016-11-16
CN106123793B CN106123793B (en) 2018-11-02

Family

ID=57285447

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610497687.3A Active CN106123793B (en) 2016-06-29 2016-06-29 A kind of portable optical interferometry sphere diameter sphericity fast detector

Country Status (1)

Country Link
CN (1) CN106123793B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110030945A (en) * 2019-04-12 2019-07-19 北京航天控制仪器研究所 A kind of quick sphere diameter sphericity detection system of abnormity bulb
CN111351425A (en) * 2020-03-10 2020-06-30 南通大学 Method for determining dynamic range of interferometer during spherical defocus detection

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60242304A (en) * 1984-05-17 1985-12-02 Agency Of Ind Science & Technol Hologram interferometer for measuring surface shape of large-aperture plane mirror
JPH08145619A (en) * 1994-11-24 1996-06-07 Olympus Optical Co Ltd Laser interferometer
CN201903332U (en) * 2010-12-10 2011-07-20 西安科技大学 Laser Newton ring apparatus measuring device
CN102128600A (en) * 2010-12-10 2011-07-20 西安科技大学 Method and device for measuring curvature radius of lens by use of laser
CN203325305U (en) * 2013-05-29 2013-12-04 湖南工业大学 Light interference experiment instrument
CN104064092A (en) * 2014-06-04 2014-09-24 黄河科技学院 Auxiliary experiment device for measuring radius of curvature of lens through Newton ring
CN105448168A (en) * 2015-12-23 2016-03-30 天津城建大学 Portable multi-light source Newton's ring demonstration instrument

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60242304A (en) * 1984-05-17 1985-12-02 Agency Of Ind Science & Technol Hologram interferometer for measuring surface shape of large-aperture plane mirror
JPH08145619A (en) * 1994-11-24 1996-06-07 Olympus Optical Co Ltd Laser interferometer
CN201903332U (en) * 2010-12-10 2011-07-20 西安科技大学 Laser Newton ring apparatus measuring device
CN102128600A (en) * 2010-12-10 2011-07-20 西安科技大学 Method and device for measuring curvature radius of lens by use of laser
CN203325305U (en) * 2013-05-29 2013-12-04 湖南工业大学 Light interference experiment instrument
CN104064092A (en) * 2014-06-04 2014-09-24 黄河科技学院 Auxiliary experiment device for measuring radius of curvature of lens through Newton ring
CN105448168A (en) * 2015-12-23 2016-03-30 天津城建大学 Portable multi-light source Newton's ring demonstration instrument

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
周学海: "光学球面曲率半径的测量", 《光学机械》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110030945A (en) * 2019-04-12 2019-07-19 北京航天控制仪器研究所 A kind of quick sphere diameter sphericity detection system of abnormity bulb
CN111351425A (en) * 2020-03-10 2020-06-30 南通大学 Method for determining dynamic range of interferometer during spherical defocus detection
CN111351425B (en) * 2020-03-10 2022-06-03 南通大学 A method for determining the dynamic range of an interferometer in spherical defocus detection

Also Published As

Publication number Publication date
CN106123793B (en) 2018-11-02

Similar Documents

Publication Publication Date Title
CN101509878A (en) Part vision detection device
CN101886917B (en) Carbonation depth detector
CN101561249A (en) Device and method for automatically detecting fit dimension of surgical knife blade
CN102607361B (en) Automatic detection device for double-row-graduated-line measuring instrument
CN104019964B (en) Method for detecting quality of focused light spot of mini-type self-focusing lens
CN106123793A (en) A kind of portable optical interferometric method sphere diameter sphericity fast detector
CN205300516U (en) Rotating device for adjusting iris diaphragm and measuring mechanism of iris diaphragm
CN102645159A (en) Image measuring device
CN106052577B (en) A kind of Through Optical Interference Spectra sphere diameter sphericity detector and detection method
CN205246966U (en) Newton rings image acquisition device
CN101566464B (en) Surgical instrument detector
CN203858199U (en) Solid sample measuring and positioning device of portable type laser Raman spectrometer
CN205483872U (en) Novel light path binary channels is measured device
CN201184788Y (en) Image acquisition and illumination device for alignment and detection of target object
CN110823924A (en) Circuit board hole defect detection device and method of dot matrix infrared light imaging technology
CN204359269U (en) Can the measuring instrument of rapid focus
CN204202978U (en) A kind of Brinell tester reading microscope lighting device
CN204269088U (en) A kind of strain line zeroing fixture
CN105699388B (en) A kind of instrument for testing end of optical fiber connector
CN205506704U (en) Fiber optic connector end face detector
CN207923157U (en) A kind of instrumented data harvester
CN204214406U (en) A kind of portable diameter measurer
CN101691996A (en) System for detecting roundness of sheath
CN107238348A (en) A kind of high-precision part online test method and detection means
CN206339184U (en) Photodiode focal length test fixture

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant