CN106908615A - Metal ingredient detection method and device based on spectral analysis technique - Google Patents
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Abstract
本发明涉及一种基于光谱分析技术的金属成分检测方法及装置,其中采用金属成分检测装置,所述装置包括取样机器人、吹风设备、脉冲激光器、光谱探测设备、光谱分析设备和控制设备,所述脉冲激光器的超短脉冲输出端与样品室相对,其所述脉冲激光器的超短脉冲输出端对准光谱探测设备中的光谱收集透镜组,所述吹风设备的出风口对准所述样品室,所述样品室包括托盘和所述托盘上方的透明外罩,所述取样机器人包括第一机械手臂和第二机械手臂。采用该种方法及装置,实现了采用激光进行非接触式金属成分分析,采用取样机器人实现自动化过程,不必人工参与,采用超短脉冲激光,具有更好的光谱特性,结构简单,应用方便,适用于大规模推广应用。
The present invention relates to a metal component detection method and device based on spectral analysis technology, wherein a metal component detection device is used, and the device includes a sampling robot, a blower device, a pulse laser, a spectral detection device, a spectral analysis device and a control device. The ultrashort pulse output end of the pulse laser is opposite to the sample chamber, the ultrashort pulse output end of the pulse laser is aligned with the spectrum collection lens group in the spectrum detection device, and the air outlet of the blowing device is aligned with the sample chamber, The sample chamber includes a tray and a transparent cover above the tray, and the sampling robot includes a first mechanical arm and a second mechanical arm. Using this method and device, the use of lasers for non-contact metal composition analysis is realized, and the sampling robot is used to realize the automation process without manual participation. The use of ultrashort pulse lasers has better spectral characteristics, simple structure, convenient application, and is applicable for large-scale application.
Description
技术领域technical field
本发明涉及金属检测技术领域,尤其涉及金属成分检测技术领域,具体是指一种基于光谱分析技术的金属成分检测方法及装置。The invention relates to the technical field of metal detection, in particular to the technical field of metal component detection, in particular to a metal component detection method and device based on spectral analysis technology.
背景技术Background technique
随着社会发展,各种金属的应用越来越广泛。而金属的不同成分的分析,一直是社会研究的热点问题。现有技术中,虽然有采用各种方式进行金属成分分析的,但一般都需要与金属进行接触性测试,或者需要将金属与其他物质发生化学反应。采用接触性测试,会造成测试不方便,并且操作均需要人力进行,十分费时费力;采用与其他物质发生化学反应的方法,会造成金属样本的破坏,对于需要保留金属样本的场合十分不适用。因此,急需一种新的金属成分分析的方法。现有技术中,已经出现了采用激光进行产品分析的方法,但主要应用于纤维制品、纺织制品等,还没有应用到金属成分的分析。With the development of society, various metals are used more and more widely. The analysis of different components of metals has always been a hot issue in social research. In the prior art, although various methods are used to analyze metal components, it is generally necessary to conduct a contact test with the metal, or to chemically react the metal with other substances. The use of contact testing will cause inconvenient testing, and the operation requires manpower, which is very time-consuming and laborious; the method of chemical reaction with other substances will cause damage to the metal sample, which is not suitable for occasions where metal samples need to be preserved. Therefore, a new method for metal composition analysis is urgently needed. In the prior art, there has been a method of product analysis using laser, but it is mainly used in fiber products, textile products, etc., and has not been applied to the analysis of metal components.
脉冲工作的半导体激光器已在众多领域得到了广泛应用。在许多应用领域,激光脉冲需要短至数十纳秒至数纳秒量级,甚至更低,如激光雷达、激光测距、激光气体检测、物理学研究中的激光激发和探测等等。此类应用有别于传统的在高速连续调制状态下的通讯类激光器应用。在短脉冲工作条件下,一般需要对激光器提供较大的脉冲驱动电流,瞬态功耗很大,,但由于占空比一般较小,因此平均功耗一般并不大。对于一些特殊类型的半导体激光器,如量子级联激光器,由于其驱动电压也较高,平均功耗会相应增加,但仍保持在较低水平。Pulsed semiconductor lasers have been widely used in many fields. In many application fields, laser pulses need to be as short as tens of nanoseconds to several nanoseconds, or even lower, such as lidar, laser ranging, laser gas detection, laser excitation and detection in physics research, etc. Such applications are different from traditional communication laser applications under high-speed continuous modulation. Under short-pulse working conditions, it is generally necessary to provide a large pulse driving current to the laser, and the transient power consumption is large, but because the duty cycle is generally small, the average power consumption is generally not large. For some special types of semiconductor lasers, such as quantum cascade lasers, because their driving voltage is also high, the average power consumption will increase accordingly, but it will still remain at a low level.
超短脉冲激光器是一种应用十分广泛的激光器类型,其主要特征是输出激光的脉冲宽度非常窄,通常在皮秒和飞秒量级。目前,能够产生超短脉冲激光的方法主要有锁模激光器技术、增益开关半导体激光器技术以及激光强度调制技术。锁模激光器技术是获取超短脉冲激光输出最常见的技术,其通过对激光器腔内的具有固定相位关系的纵模进行锁定从而获得强度上的超短脉冲输出,能够获得极窄的脉冲宽度,但是这种方式输出的激光脉冲的重复频率不能轻易改变,并且锁模需要较为苛刻的环境条件,温度变化、振动都会影响锁模激光脉冲的输出。增益开关半导体激光器技术是通过电脉冲对半导体激光器进行调制,选择半导体激光器输出驰豫振荡的第一个尖峰,从而获得超短脉冲输出,这种技术可以获得重复频率可调的超短脉冲输出,但是输出激光脉冲的脉冲宽度较宽,功率很低。激光强度调制技术是采用高速强度调制器对连续输出的激光进行强度调制从而获得超短脉冲输出,这种技术获得的激光脉冲重复频可调,但是脉冲宽度较宽,输出功率较低。可以看出,上述三种现有的技术不能同时实现重复频率任意可调、高功率、高稳定度的超短脉冲激光输出。Ultrashort pulse laser is a type of laser that is widely used. Its main feature is that the pulse width of the output laser is very narrow, usually on the order of picoseconds and femtoseconds. At present, the methods that can generate ultrashort pulse laser mainly include mode-locked laser technology, gain-switched semiconductor laser technology and laser intensity modulation technology. Mode-locked laser technology is the most common technology for obtaining ultrashort pulse laser output. It locks the longitudinal mode with a fixed phase relationship in the laser cavity to obtain ultrashort pulse output in terms of intensity, and can obtain extremely narrow pulse width. However, the repetition frequency of the laser pulse output in this way cannot be easily changed, and the mode-locking requires relatively harsh environmental conditions. Temperature changes and vibrations will affect the output of the mode-locked laser pulse. Gain-switched semiconductor laser technology is to modulate the semiconductor laser with electrical pulses, and select the first peak of the relaxation oscillation of the semiconductor laser to obtain ultrashort pulse output. This technology can obtain ultrashort pulse output with adjustable repetition rate. But the pulse width of the output laser pulse is wide and the power is very low. The laser intensity modulation technology uses a high-speed intensity modulator to modulate the intensity of the continuous output laser to obtain ultrashort pulse output. The laser pulse repetition frequency obtained by this technology is adjustable, but the pulse width is wider and the output power is lower. It can be seen that the above three existing technologies cannot simultaneously realize ultrashort pulse laser output with arbitrarily adjustable repetition frequency, high power, and high stability.
发明内容Contents of the invention
本发明的目的是克服了上述现有技术的缺点,提供了一种基于光谱分析技术的金属成分检测方法及装置,实现了采用激光进行非接触式金属成分分析,采用取样机器人实现自动化过程,不必人工参与,采用超短脉冲激光,具有更好的光谱特性,结构简单,应用方便,适用于大规模推广应用。The purpose of the present invention is to overcome the above-mentioned shortcoming of prior art, provide a kind of metal component detection method and device based on spectral analysis technology, realize adopting laser to carry out non-contact metal component analysis, adopt sampling robot to realize automation process, need not Artificial participation, using ultra-short pulse laser, has better spectral characteristics, simple structure, convenient application, and is suitable for large-scale promotion and application.
为了实现上述目的,本发明具有如下构成:In order to achieve the above object, the present invention has the following constitutions:
该基于光谱分析技术的金属成分检测方法,所述的方法采用金属成分检测装置,所述装置包括取样机器人、吹风设备、脉冲激光器、光谱探测设备、光谱分析设备和控制设备,所述脉冲激光器的超短脉冲输出端与样品室相对,其所述脉冲激光器的超短脉冲输出端对准光谱探测设备中的光谱收集透镜组,所述吹风设备的出风口对准所述样品室,所述样品室包括托盘和所述托盘上方的透明外罩,所述取样机器人包括第一机械手臂和第二机械手臂,所述的方法包括以下步骤:The metal component detection method based on spectral analysis technology, the method adopts a metal component detection device, and the device includes a sampling robot, a blower device, a pulsed laser, a spectral detection device, a spectral analysis device and a control device, and the pulsed laser is The ultrashort pulse output end is opposite to the sample chamber, and the ultrashort pulse output end of the pulse laser is aligned with the spectrum collection lens group in the spectrum detection device, the air outlet of the blowing device is aligned with the sample chamber, and the sample The chamber includes a tray and a transparent cover above the tray, the sampling robot includes a first mechanical arm and a second mechanical arm, and the method includes the following steps:
采集已知成分组成的校正金属样本,所述取样机器人的第一机械手臂将所述样品室的透明外罩提升至预设高度,通过所述取样机器人的第二机械手臂将所述校正金属样本放置于样品室,所述取样机器人的第一机械手臂将所述样品室的透明外罩放置回原位;Collecting a corrected metal sample with a known composition, the first mechanical arm of the sampling robot lifts the transparent cover of the sample chamber to a preset height, and places the corrected metal sample through the second mechanical arm of the sampling robot In the sample chamber, the first mechanical arm of the sampling robot puts the transparent cover of the sample chamber back to its original position;
所述控制设备控制所述脉冲激光器向所述样本室发射短波脉冲激光;The control device controls the pulse laser to emit short-wave pulse laser to the sample chamber;
所述控制设备控制所述光谱探测设备采集经所述光路系统后的光谱,并将校正金属样本的光谱数据发送至所述光谱分析设备;The control device controls the spectrum detection device to collect the spectrum after passing through the optical path system, and sends the spectral data of the corrected metal sample to the spectrum analysis device;
采用所述光谱分析设备对所述校正金属样本的光谱数据进行降噪处理;Using the spectral analysis equipment to perform noise reduction processing on the spectral data of the corrected metal sample;
所述光谱分析设备基于所述校正金属样本的光谱数据用化学计量学软件进行建模,得到金属成分测定模型;The spectral analysis equipment is based on the spectral data of the corrected metal sample and is modeled with chemometrics software to obtain a metal composition determination model;
所述取样机器人的第一机械手臂将所述样品室的透明外罩提升至预设高度,通过所述取样机器人的第二机械手臂将所述校正金属样本取出;The first mechanical arm of the sampling robot lifts the transparent cover of the sample chamber to a preset height, and the calibration metal sample is taken out by the second mechanical arm of the sampling robot;
开启所述吹风设备,吹去所述托盘表面的残留物;Turn on the blowing device to blow off the residue on the tray surface;
采集待测定的检测金属样本,并通过所述取样机器人的第二机械手臂将所述检测金属样本放置于样品室,所述取样机器人的第一机械手臂将所述样品室的透明外罩放置回原位;Collect the detection metal sample to be determined, and place the detection metal sample in the sample chamber through the second mechanical arm of the sampling robot, and place the transparent outer cover of the sample chamber back to the original state by the first mechanical arm of the sampling robot bit;
所述控制设备控制所述脉冲脉冲激光器向所述样本室发射短波脉冲激光;The control device controls the pulse pulse laser to emit short-wave pulse laser light to the sample chamber;
所述控制设备控制所述光谱探测设备采集经所述光路系统后的光谱,并将光谱数据发送至所述光谱分析设备;The control device controls the spectrum detection device to collect the spectrum after passing through the optical path system, and sends the spectrum data to the spectrum analysis device;
采用所述光谱分析设备对所述检测金属样本的光谱数据进行降噪处理;Using the spectral analysis equipment to perform noise reduction processing on the spectral data of the detected metal sample;
所述光谱分析设备采用所述金属成分测定模型和所述检测金属样本的光谱数据,分析得到所述检测金属样本的成分分析数据;The spectral analysis device uses the metal composition measurement model and the spectral data of the detected metal sample to analyze and obtain the composition analysis data of the detected metal sample;
所述控制设备获取所述光谱分析设备的分析数据,判断分析数据是否异常;The control device acquires the analysis data of the spectrum analysis device, and judges whether the analysis data is abnormal;
如果分析结果异常,则停止金属成分检测,并进行报警;If the analysis result is abnormal, the detection of metal components will be stopped and an alarm will be issued;
如果分析结果正常,所述控制设备控制所述取样机器人的第一机械手臂将所述透明外罩提升至预设高度,所述取样机器人的第二机械手臂将所述样品室中的检测金属样品取出,采用所述吹风设备清理所述托盘之后,采用所述取样机器人的第二机械手臂在所述托盘中放置新的检测金属样本。If the analysis result is normal, the control device controls the first mechanical arm of the sampling robot to lift the transparent cover to a preset height, and the second mechanical arm of the sampling robot takes out the detected metal sample in the sample chamber , after using the air blowing device to clean the tray, using the second mechanical arm of the sampling robot to place a new detection metal sample in the tray.
较佳地,采用所述光谱分析设备对所述校正金属样本的光谱数据根据如下算法进行降噪处理:Preferably, the spectral analysis equipment is used to perform noise reduction processing on the spectral data of the corrected metal sample according to the following algorithm:
(Savitzky-Golay平滑,平滑窗口数为21)+归一化+(Savitzky-Golay一阶微分,窗口数为17,多项式次数为3);(Savitzky-Golay smoothing, the number of smoothing windows is 21) + normalization + (Savitzky-Golay first-order differential, the number of windows is 17, and the polynomial degree is 3);
采用所述光谱分析设备对所述检测金属样本的光谱数据根据如下算法进行降噪处理:Using the spectral analysis equipment to perform noise reduction processing on the spectral data of the detected metal sample according to the following algorithm:
(Savitzky-Golay平滑,平滑窗口数为21)+归一化+(Savitzky-Golay一阶微分,窗口数为17,多项式次数为3)。(Savitzky-Golay smoothing, number of smoothing windows is 21) + normalization + (Savitzky-Golay first differential, number of windows is 17, polynomial degree is 3).
较佳地,所述取样机器人还包括第三机械手臂,所述第三机械手臂的表面环绕设置有擦洗毛刷,所述取样机器人的第一机械手臂将所述透明外罩提升至预设高度时,且所述托盘中没有金属样品时,所述取样机器人的第三手臂对所述托盘进行擦洗。Preferably, the sampling robot also includes a third mechanical arm, the surface of the third mechanical arm is surrounded by scrubbing brushes, when the first mechanical arm of the sampling robot lifts the transparent cover to a preset height , and when there is no metal sample in the tray, the third arm of the sampling robot scrubs the tray.
本发明还涉及一种应用于所述的方法的基于光谱分析技术的金属成分分析装置,所述装置包括:The present invention also relates to a metal component analysis device based on spectral analysis technology applied to the method, the device comprising:
取样机器人,用于将金属样品放置于样品室内;所述取样机器人包括第一机械手臂、第二机械手臂和底座,所述第一机械手臂和所述第二机械手臂的一端均活动连接于所述底座,所述样品室位于所述第一机械手臂的另一端的活动范围之内,且所述样品室位于所述第二机械手臂的另一端的活动范围之内;The sampling robot is used to place the metal sample in the sample chamber; the sampling robot includes a first mechanical arm, a second mechanical arm and a base, and one end of the first mechanical arm and the second mechanical arm is movably connected to the The base, the sample chamber is located within the range of motion of the other end of the first mechanical arm, and the sample chamber is located within the range of motion of the other end of the second mechanical arm;
脉冲激光器,用于向所述样品室发射脉冲激光,所述脉冲激光器的超短脉冲输出端对准光谱探测设备中的光谱收集透镜组;A pulsed laser is used to emit a pulsed laser to the sample chamber, and the ultrashort pulse output end of the pulsed laser is aligned with the spectrum collection lens group in the spectrum detection device;
光谱探测设备,用于接收激光经所述样品室后的光谱,并将光谱数据发送至控制设备;Spectrum detection equipment, used to receive the spectrum of the laser light passing through the sample chamber, and send the spectrum data to the control equipment;
光谱分析设备,用于从所述控制设备接收所述光谱数据,并根据所述光谱数据分析金属样品的成分;a spectroscopic analysis device, configured to receive said spectral data from said control device, and analyze the composition of the metal sample according to said spectral data;
控制设备,用于控制所述取样机器人放置样品后,依次触发所述脉冲激光器和光谱探测设备,接收所述光谱探测设备发送的光谱数据,并将所述光谱数据发送至所述光谱分析设备。The control device is used to control the sampling robot to sequentially trigger the pulse laser and the spectral detection device after placing the sample, receive the spectral data sent by the spectral detection device, and send the spectral data to the spectral analysis device.
较佳地,所述光谱探测设备包括光谱收集透镜组、光纤接口、激光激发透镜组和角度调节器,所述光谱收集透镜组与所述光纤接口相连接,所述光谱收集透镜组的前端与所述角度调节器相连接,所述激光激发透镜组与所述角度调节器相连接;所述激光激发透镜组的内透镜位置可调节;所述角度调节器的角度可配合所述光谱收集透镜组在10~80度范围内调整。Preferably, the spectrum detection device includes a spectrum collection lens group, an optical fiber interface, a laser excitation lens group and an angle adjuster, the spectrum collection lens group is connected to the optical fiber interface, and the front end of the spectrum collection lens group is connected to the The angle adjuster is connected, and the laser excitation lens group is connected with the angle adjuster; the position of the inner lens of the laser excitation lens group can be adjusted; the angle of the angle adjuster can match the spectrum collection lens The group is adjusted within the range of 10 to 80 degrees.
更佳地,所述脉冲激光器包括驱动供电模块和激光器模块,所述驱动供电模块包括供电电源单元和脉冲产生单元,所述供电电源单元与所述脉冲产生单元相连接,所述脉冲产生单元用于产生所需脉冲参数的电脉冲;所述激光器模块包括脉冲电平转换单元、脉冲电流开关和脉冲激光器单元,所述脉冲电平转换单元用于将所述脉冲产生单元产生的电脉冲升高至所需电平以满足所述脉冲电流开关的驱动要求,所述脉冲产生单元通过同轴电缆与所述脉冲电平转换单元相连接,所述脉冲电流开关的输出端与所述脉冲激光器单元相连接;More preferably, the pulse laser includes a drive power supply module and a laser module, the drive power supply module includes a power supply unit and a pulse generation unit, the power supply unit is connected to the pulse generation unit, and the pulse generation unit uses The electrical pulse used to generate the required pulse parameters; the laser module includes a pulse level conversion unit, a pulse current switch and a pulse laser unit, and the pulse level conversion unit is used to increase the electrical pulse generated by the pulse generation unit To the required level to meet the driving requirements of the pulse current switch, the pulse generating unit is connected to the pulse level conversion unit through a coaxial cable, the output end of the pulse current switch is connected to the pulse laser unit connected;
所述脉冲激光器单元包括半导体激光器、光纤预放大器、光纤主放大器、脉冲选择器以及超短脉冲输出端;所述脉冲电流开关与所述半导体激光器相连接,所述半导体激光器依次通过所述光纤预放大器、光纤主放大器以及脉冲选择器接入超短脉冲输出端;所述半导体激光器与脉冲选择器相连接,所述半导体激光器是光纤耦合输出的半导体激光器。The pulse laser unit includes a semiconductor laser, an optical fiber pre-amplifier, an optical fiber main amplifier, a pulse selector, and an ultrashort pulse output terminal; the pulse current switch is connected to the semiconductor laser, and the semiconductor laser passes through the optical fiber pre-amplifier in turn. The amplifier, the fiber main amplifier and the pulse selector are connected to the ultrashort pulse output end; the semiconductor laser is connected with the pulse selector, and the semiconductor laser is a fiber-coupled output semiconductor laser.
更佳地,所述光纤预放大器包括光纤波分复用器、抽运半导体激光器、第一增益光纤、光纤滤波器以及第一光纤隔离器;所述半导体激光器以及抽运半导体激光器分别通过所述光纤波分复用器接入所述第一增益光纤,所述第一增益光纤通过所述光纤滤波器接入所述第一光纤隔离器;More preferably, the fiber pre-amplifier includes a fiber wavelength division multiplexer, a pumped semiconductor laser, a first gain fiber, a fiber filter, and a first fiber isolator; the semiconductor laser and the pumped semiconductor laser pass through the A fiber optic wavelength division multiplexer is connected to the first gain fiber, and the first gain fiber is connected to the first fiber isolator through the fiber filter;
所述光纤主放大器包括高功率抽运光源、光纤合波器、第二增益光纤以及第二光纤隔离器;所述第一光纤隔离器依次通过所述光纤合波器和第二增益光纤接入第二光纤隔离器;所述高功率抽运光源接入所述光纤合波器。The optical fiber main amplifier includes a high-power pumping light source, an optical fiber multiplexer, a second gain fiber and a second optical fiber isolator; the first optical fiber isolator is sequentially connected through the optical fiber multiplexer and the second gain optical fiber A second optical fiber isolator; the high-power pumping light source is connected to the optical fiber multiplexer.
更进一步地,所述脉冲选择器包括强度调制器、可调延时器以及强度调制器驱动电源;所述脉冲电流开关通过所述可调延时器和强度调制器驱动电源接入所述强度调制器,所述第二光纤隔离器通过所述强度调制器接入所述超短脉冲输出端。Furthermore, the pulse selector includes an intensity modulator, an adjustable delayer, and an intensity modulator driving power; the pulse current switch accesses the intensity through the adjustable delayer and the intensity modulator driving power A modulator, the second optical fiber isolator is connected to the ultrashort pulse output terminal through the intensity modulator.
更佳地,所述供电电源单元通过供电导线与所述脉冲激光器单元相连接,所述供电导线与所述同轴电缆组合成复合电缆,所述同轴电缆的特性阻效为80欧姆。More preferably, the power supply unit is connected to the pulse laser unit through a power supply wire, and the power supply wire and the coaxial cable are combined to form a composite cable, and the characteristic impedance of the coaxial cable is 80 ohms.
较佳地,所述光谱分析设备包括:Preferably, the spectroscopic analysis equipment includes:
降噪处理模块,用于对校正金属样本的光谱数据进行降噪处理,以及对检测金属样本的光谱数据进行降噪处理;The noise reduction processing module is used to perform noise reduction processing on the spectral data of the calibrated metal sample, and perform noise reduction processing on the spectral data of the detected metal sample;
校正建模模块,用于基于所述校正金属样本的光谱数据用化学计量学软件进行建模,得到金属成分测定模型;A correction modeling module, used for modeling with chemometrics software based on the spectral data of the correction metal sample, to obtain a metal composition determination model;
检测分析模块,用于采用所述金属成分测定模型和所述检测金属样本的光谱数据,分析得到所述检测金属样本的成分分析数据;The detection and analysis module is used to analyze and obtain the composition analysis data of the detection metal sample by using the metal composition measurement model and the spectral data of the detection metal sample;
通信模块,用于与所述控制设备进行通信。The communication module is used for communicating with the control device.
采用了该发明中的基于光谱分析技术的金属成分检测方法及装置,具有如下有益效果:Adopting the metal component detection method and device based on spectral analysis technology in this invention has the following beneficial effects:
(1)采用激光对金属成分进行分析,实现了非接触式测量金属成分,进一步采用取样机器人,可以保障整个金属成分分析过程中的自动化,工作人员全程不必实时盯着金属成分分析过程,可以快速方便地对多个金属样本进行自动化检测分析;(1) The laser is used to analyze the metal composition, which realizes the non-contact measurement of the metal composition. The further use of the sampling robot can ensure the automation of the entire metal composition analysis process. The staff do not need to stare at the metal composition analysis process in real time, and can quickly Convenient automatic detection and analysis of multiple metal samples;
(2)增加吹风设备和第三机械臂,可以对盛放金属样品的托盘进行自动清洗,防止前一个金属样品在托盘上留下金属碎屑等其他残留物,影响下一个金属样品实际的成分分析,整个过程实现了自动化控制;(2) Increase the blowing equipment and the third mechanical arm, which can automatically clean the tray holding the metal sample, preventing the previous metal sample from leaving metal debris and other residues on the tray, which will affect the actual composition of the next metal sample Analysis, the whole process realizes automatic control;
(3)采用本发明的激光器的驱动结构可以显著改善对短脉冲激光器的脉冲驱动质量,降低对连接驱动模块和激光模块间的电缆的特殊要求,并使其长度可以显著增加,最大限度地降低此方面应用的难度要求,促进技术的进步;(3) Adopting the driving structure of the laser of the present invention can significantly improve the pulse driving quality of the short-pulse laser, reduce the special requirements for the cables connecting the driving module and the laser module, and make its length significantly increase, reducing the Difficulty requirements for applications in this area promote technological progress;
(4)超短脉冲激光器包括半导体激光器、单模光纤放大器、双包层光纤放大器以及脉冲选择器,由于半导体激光器产生的纳秒脉冲激光峰值功率比较低,先通过单模光纤放大器进行预放大,获得一定功率的输出,再通过双包层单模光纤放大器进行功率放大,在功率放大时,纳秒激光脉冲的峰值功率超过一定的阈值后,受到光纤非线性效应的调制,会发生分裂,形成多个子脉冲,可以采用纳秒量级的光脉冲选择器选出分裂脉冲的第一个子脉冲,从而获得单个的超短脉冲激光输出。(4) Ultrashort pulse lasers include semiconductor lasers, single-mode fiber amplifiers, double-clad fiber amplifiers, and pulse selectors. Since the peak power of nanosecond pulse lasers generated by semiconductor lasers is relatively low, they are pre-amplified through single-mode fiber amplifiers. Obtain a certain power output, and then perform power amplification through a double-clad single-mode fiber amplifier. During power amplification, when the peak power of the nanosecond laser pulse exceeds a certain threshold, it will be modulated by the nonlinear effect of the fiber and will split to form For multiple sub-pulses, a nanosecond-level optical pulse selector can be used to select the first sub-pulse of the split pulse, thereby obtaining a single ultrashort pulse laser output.
附图说明Description of drawings
图1为本发明的基于光谱分析技术的金属成分检测方法的流程图;Fig. 1 is the flow chart of the metal component detection method based on spectral analysis technology of the present invention;
图2为本发明的基于光谱分析技术的金属成分检测装置的结构框图;Fig. 2 is the structural block diagram of the metal component detection device based on spectral analysis technology of the present invention;
图3为本发明的脉冲激光器的驱动供电模块的结构示意图;Fig. 3 is the structural representation of the driving power supply module of the pulsed laser of the present invention;
图4为本发明的脉冲激光器的激光器模块的结构示意图;Fig. 4 is the structural representation of the laser module of pulsed laser of the present invention;
图5为本发明的光纤预放大器的结构示意图;Fig. 5 is the structural representation of optical fiber pre-amplifier of the present invention;
图6为本发明的光纤主放大器的结构示意图;Fig. 6 is the structural representation of optical fiber main amplifier of the present invention;
图7为本发明的脉冲选择器的结构示意图;Fig. 7 is the structural representation of the pulse selector of the present invention;
图8为本发明的光谱探测设备的结构示意图;Fig. 8 is a schematic structural view of the spectral detection device of the present invention;
图9为本发明的光谱分析设备的结构示意图。Fig. 9 is a schematic structural diagram of a spectral analysis device of the present invention.
具体实施方式detailed description
为了能够更清楚地描述本发明的技术内容,下面结合具体实施例来进行进一步的描述。In order to describe the technical content of the present invention more clearly, further description will be given below in conjunction with specific embodiments.
如图1所示为本发明的基于光谱分析技术的金属成分检测方法的流程图。FIG. 1 is a flow chart of the metal component detection method based on spectral analysis technology of the present invention.
所述基于光谱分析技术的金属成分检测方法,所述的方法采用金属成分检测装置,所述装置包括取样机器人、吹风设备、脉冲激光器、光谱探测设备、光谱分析设备和控制设备,所述脉冲激光器的超短脉冲输出端与样品室相对,其所述脉冲激光器的超短脉冲输出端对准光谱探测设备中的光谱收集透镜组,所述吹风设备的出风口对准所述样品室,所述样品室包括托盘和所述托盘上方的透明外罩,所述取样机器人包括第一机械手臂和第二机械手臂,所述的方法包括以下步骤:In the metal component detection method based on spectral analysis technology, the method adopts a metal component detection device, and the device includes a sampling robot, a blower device, a pulse laser, a spectral detection device, a spectral analysis device and a control device, and the pulse laser The ultrashort pulse output end of the pulse laser is opposite to the sample chamber, the ultrashort pulse output end of the pulse laser is aligned with the spectrum collection lens group in the spectrum detection device, the air outlet of the blowing device is aligned with the sample chamber, the The sample chamber includes a tray and a transparent cover above the tray, the sampling robot includes a first mechanical arm and a second mechanical arm, and the method includes the following steps:
采集已知成分组成的校正金属样本,所述取样机器人的第一机械手臂将所述样品室的透明外罩提升至预设高度,通过所述取样机器人的第二机械手臂将所述校正金属样本放置于样品室,所述取样机器人的第一机械手臂将所述样品室的透明外罩放置回原位;Collecting a corrected metal sample with a known composition, the first mechanical arm of the sampling robot lifts the transparent cover of the sample chamber to a preset height, and places the corrected metal sample through the second mechanical arm of the sampling robot In the sample chamber, the first mechanical arm of the sampling robot puts the transparent cover of the sample chamber back to its original position;
所述控制设备控制所述脉冲激光器向所述样本室发射短波脉冲激光;The control device controls the pulse laser to emit short-wave pulse laser to the sample chamber;
所述控制设备控制所述光谱探测设备采集经所述光路系统后的光谱,并将校正金属样本的光谱数据发送至所述光谱分析设备;The control device controls the spectrum detection device to collect the spectrum after passing through the optical path system, and sends the spectral data of the corrected metal sample to the spectrum analysis device;
采用所述光谱分析设备对所述校正金属样本的光谱数据进行降噪处理;Using the spectral analysis equipment to perform noise reduction processing on the spectral data of the corrected metal sample;
所述光谱分析设备基于所述校正金属样本的光谱数据用化学计量学软件进行建模,得到金属成分测定模型;The spectral analysis equipment is based on the spectral data of the corrected metal sample and is modeled with chemometrics software to obtain a metal composition determination model;
所述取样机器人的第一机械手臂将所述样品室的透明外罩提升至预设高度,通过所述取样机器人的第二机械手臂将所述校正金属样本取出;The first mechanical arm of the sampling robot lifts the transparent cover of the sample chamber to a preset height, and the calibration metal sample is taken out by the second mechanical arm of the sampling robot;
开启所述吹风设备,吹去所述托盘表面的残留物;Turn on the blowing device to blow off the residue on the tray surface;
采集待测定的检测金属样本,并通过所述取样机器人的第二机械手臂将所述检测金属样本放置于样品室,所述取样机器人的第一机械手臂将所述样品室的透明外罩放置回原位;Collect the detection metal sample to be determined, and place the detection metal sample in the sample chamber through the second mechanical arm of the sampling robot, and place the transparent outer cover of the sample chamber back to the original state by the first mechanical arm of the sampling robot bit;
所述控制设备控制所述脉冲脉冲激光器向所述样本室发射短波脉冲激光;The control device controls the pulse pulse laser to emit short-wave pulse laser light to the sample chamber;
所述控制设备控制所述光谱探测设备采集经所述光路系统后的光谱,并将光谱数据发送至所述光谱分析设备;The control device controls the spectrum detection device to collect the spectrum after passing through the optical path system, and sends the spectrum data to the spectrum analysis device;
采用所述光谱分析设备对所述检测金属样本的光谱数据进行降噪处理;Using the spectral analysis equipment to perform noise reduction processing on the spectral data of the detected metal sample;
所述光谱分析设备采用所述金属成分测定模型和所述检测金属样本的光谱数据,分析得到所述检测金属样本的成分分析数据;The spectral analysis device uses the metal composition measurement model and the spectral data of the detected metal sample to analyze and obtain the composition analysis data of the detected metal sample;
所述控制设备获取所述光谱分析设备的分析数据,判断分析数据是否异常;The control device acquires the analysis data of the spectrum analysis device, and judges whether the analysis data is abnormal;
如果分析结果异常,则停止金属成分检测,并进行报警;If the analysis result is abnormal, the detection of metal components will be stopped and an alarm will be issued;
如果分析结果正常,所述控制设备控制所述取样机器人的第一机械手臂将所述透明外罩提升至预设高度,所述取样机器人的第二机械手臂将所述样品室中的检测金属样品取出,采用所述吹风设备清理所述托盘之后,采用所述取样机器人的第二机械手臂在所述托盘中放置新的检测金属样本。If the analysis result is normal, the control device controls the first mechanical arm of the sampling robot to lift the transparent cover to a preset height, and the second mechanical arm of the sampling robot takes out the detected metal sample in the sample chamber , after using the air blowing device to clean the tray, using the second mechanical arm of the sampling robot to place a new detection metal sample in the tray.
在一种较佳的实施方式中,采用所述光谱分析设备对所述校正金属样本的光谱数据根据如下算法进行降噪处理:In a preferred embodiment, the spectral analysis equipment is used to perform noise reduction processing on the spectral data of the corrected metal sample according to the following algorithm:
(Savitzky-Golay平滑,平滑窗口数为21)+归一化+(Savitzky-Golay一阶微分,窗口数为17,多项式次数为3);(Savitzky-Golay smoothing, the number of smoothing windows is 21) + normalization + (Savitzky-Golay first-order differential, the number of windows is 17, and the polynomial degree is 3);
采用所述光谱分析设备对所述检测金属样本的光谱数据根据如下算法进行降噪处理:Using the spectral analysis equipment to perform noise reduction processing on the spectral data of the detected metal sample according to the following algorithm:
(Savitzky-Golay平滑,平滑窗口数为21)+归一化+(Savitzky-Golay一阶微分,窗口数为17,多项式次数为3)。(Savitzky-Golay smoothing, number of smoothing windows is 21) + normalization + (Savitzky-Golay first differential, number of windows is 17, polynomial degree is 3).
建模方法具体可以为:每个样品随机挑选15条作为校正集,其余作为验证集。预处理:截取数据50-500,移动平滑、窗口数为25+归一化。采用PCA降维,选取主成分数为10,采用Fisher分类算法。对于校正金属样品进行二级建模。截取数据50-500,移动平滑、窗口数25+归一化+一阶微分、三次多项式、窗口数11。此处建模方法和分析方法仅为示例,在实际应用中,也可以采用其他的现有的建模方法和测定方法。The specific modeling method can be as follows: each sample randomly selects 15 pieces as the calibration set, and the rest as the verification set. Preprocessing: Intercept data 50-500, move smooth, and the number of windows is 25+normalized. Using PCA to reduce dimensionality, select the number of principal components as 10, and use Fisher classification algorithm. Secondary modeling was performed for calibrated metal samples. Intercept data 50-500, moving smooth, window number 25+normalization+first order differential, cubic polynomial, window number 11. The modeling method and analysis method here are only examples, and other existing modeling methods and measurement methods may also be used in practical applications.
化学计量学(Chemometrics)是一门应用数学统计学与计算机科学的工具,设计或选择最优量测程序和试验方法,并通过解析化学量测数据最大限度地获取信息的化学分支学科。化学计量学方法不可或缺,其主要作用是建立激光光谱和组分(性质)之间的数学桥梁,建立校正模型对未知样品实现预测。因此,激光技术的化学计量学方法主要涉及三方面内容:一是光谱预处理方法研究,对样本光谱进行预处理,减少以至于消除各种非目标因素对光谱造成的影响;二是光谱特征波长的选择与提取,有选择性地提取与分类目标有关的信息并抑制非相关特征和噪声的影响;三是激光光谱校正方法研究,以期建立稳健、可靠、灵敏度高的校正模型。Chemometrics is a branch of chemistry that applies the tools of mathematical statistics and computer science, designs or selects optimal measurement procedures and test methods, and obtains information to the maximum extent by analyzing chemical measurement data. Chemometric methods are indispensable, and its main function is to establish a mathematical bridge between laser spectra and components (properties), and to establish a calibration model to realize predictions for unknown samples. Therefore, the chemometric method of laser technology mainly involves three aspects: one is the study of spectral preprocessing method, which preprocesses the sample spectrum to reduce or even eliminate the influence of various non-target factors on the spectrum; the other is the spectral characteristic wavelength The selection and extraction of the laser spectrum can selectively extract the information related to the classification target and suppress the influence of non-correlated features and noise; the third is the research on the laser spectrum correction method, in order to establish a robust, reliable and highly sensitive correction model.
在一种较佳的实施方式中,所述取样机器人还包括第三机械手臂,所述第三机械手臂的表面环绕设置有擦洗毛刷,所述取样机器人的第一机械手臂将所述透明外罩提升至预设高度时,且所述托盘中没有金属样品时,所述取样机器人的第三手臂对所述托盘进行擦洗。In a preferred embodiment, the sampling robot also includes a third mechanical arm, the surface of the third mechanical arm is surrounded by scrubbing brushes, and the first mechanical arm of the sampling robot covers the transparent cover When it is lifted to a preset height and there is no metal sample in the tray, the third arm of the sampling robot scrubs the tray.
本发明还涉及一种应用于所述的方法的基于光谱分析技术的金属成分分析装置,所述装置包括:The present invention also relates to a metal component analysis device based on spectral analysis technology applied to the method, the device comprising:
取样机器人,用于将金属样品放置于样品室内;所述取样机器人包括第一机械手臂、第二机械手臂和底座,所述第一机械手臂和所述第二机械手臂的一端均活动连接于所述底座,所述样品室位于所述第一机械手臂的另一端的活动范围之内,且所述样品室位于所述第二机械手臂的另一端的活动范围之内;The sampling robot is used to place the metal sample in the sample chamber; the sampling robot includes a first mechanical arm, a second mechanical arm and a base, and one end of the first mechanical arm and the second mechanical arm is movably connected to the The base, the sample chamber is located within the range of motion of the other end of the first mechanical arm, and the sample chamber is located within the range of motion of the other end of the second mechanical arm;
脉冲激光器,用于向所述样品室发射脉冲激光,所述脉冲激光器的超短脉冲输出端对准光谱探测设备中的光谱收集透镜组;A pulsed laser is used to emit a pulsed laser to the sample chamber, and the ultrashort pulse output end of the pulsed laser is aligned with the spectrum collection lens group in the spectrum detection device;
光谱探测设备,用于接收激光经所述样品室后的光谱,并将光谱数据发送至控制设备;Spectrum detection equipment, used to receive the spectrum of the laser light passing through the sample chamber, and send the spectrum data to the control equipment;
光谱分析设备,用于从所述控制设备接收所述光谱数据,并根据所述光谱数据分析金属样品的成分;a spectroscopic analysis device, configured to receive said spectral data from said control device, and analyze the composition of the metal sample according to said spectral data;
控制设备,用于控制所述取样机器人放置样品后,依次触发所述脉冲激光器和光谱探测设备,接收所述光谱探测设备发送的光谱数据,并将所述光谱数据发送至所述光谱分析设备。The control device is used to control the sampling robot to sequentially trigger the pulse laser and the spectral detection device after placing the sample, receive the spectral data sent by the spectral detection device, and send the spectral data to the spectral analysis device.
在一种较佳的实施方式中,所述光谱探测设备包括光谱收集透镜组、光纤接口、激光激发透镜组和角度调节器,所述光谱收集透镜组与所述光纤接口相连接,所述光谱收集透镜组的前端与所述角度调节器相连接,所述激光激发透镜组与所述角度调节器相连接;所述激光激发透镜组的内透镜位置可调节;所述角度调节器的角度可配合所述光谱收集透镜组在10~80度范围内调整。In a preferred embodiment, the spectrum detection device includes a spectrum collection lens group, an optical fiber interface, a laser excitation lens group and an angle adjuster, the spectrum collection lens group is connected with the optical fiber interface, and the spectrum The front end of the collection lens group is connected with the angle regulator, and the laser excitation lens group is connected with the angle regulator; the position of the inner lens of the laser excitation lens group can be adjusted; the angle of the angle regulator can be adjusted Cooperate with the spectrum collection lens group to adjust within the range of 10-80 degrees.
在一种较佳的实施方式中,所述脉冲激光器包括驱动供电模块和激光器模块,所述驱动供电模块包括供电电源单元和脉冲产生单元,所述供电电源单元与所述脉冲产生单元相连接,所述脉冲产生单元用于产生所需脉冲参数的电脉冲;所述激光器模块包括脉冲电平转换单元、脉冲电流开关和脉冲激光器单元,所述脉冲电平转换单元用于将所述脉冲产生单元产生的电脉冲升高至所需电平以满足所述脉冲电流开关的驱动要求,所述脉冲产生单元通过同轴电缆与所述脉冲电平转换单元相连接,所述脉冲电流开关的输出端与所述脉冲激光器单元相连接;In a preferred embodiment, the pulsed laser includes a drive power supply module and a laser module, the drive power supply module includes a power supply unit and a pulse generation unit, the power supply unit is connected to the pulse generation unit, The pulse generation unit is used to generate the electrical pulse of the required pulse parameters; the laser module includes a pulse level conversion unit, a pulse current switch and a pulse laser unit, and the pulse level conversion unit is used to convert the pulse generation unit to The generated electrical pulse is raised to the required level to meet the driving requirements of the pulse current switch, the pulse generating unit is connected to the pulse level conversion unit through a coaxial cable, and the output terminal of the pulse current switch connected to the pulsed laser unit;
所述脉冲激光器单元包括半导体激光器、光纤预放大器、光纤主放大器、脉冲选择器以及超短脉冲输出端;所述脉冲电流开关与所述半导体激光器相连接,所述半导体激光器依次通过所述光纤预放大器、光纤主放大器以及脉冲选择器接入超短脉冲输出端;所述半导体激光器与脉冲选择器相连接,所述半导体激光器是光纤耦合输出的半导体激光器。The pulse laser unit includes a semiconductor laser, an optical fiber pre-amplifier, an optical fiber main amplifier, a pulse selector, and an ultrashort pulse output terminal; the pulse current switch is connected to the semiconductor laser, and the semiconductor laser passes through the optical fiber pre-amplifier in turn. The amplifier, the fiber main amplifier and the pulse selector are connected to the ultrashort pulse output end; the semiconductor laser is connected with the pulse selector, and the semiconductor laser is a fiber-coupled output semiconductor laser.
在一种较佳的实施方式中,所述光纤预放大器包括光纤波分复用器、抽运半导体激光器、第一增益光纤、光纤滤波器以及第一光纤隔离器;所述半导体激光器以及抽运半导体激光器分别通过所述光纤波分复用器接入所述第一增益光纤,所述第一增益光纤通过所述光纤滤波器接入所述第一光纤隔离器;In a preferred embodiment, the fiber pre-amplifier includes a fiber wavelength division multiplexer, a pumping semiconductor laser, a first gain fiber, a fiber filter, and a first fiber isolator; the semiconductor laser and the pumping The semiconductor lasers are respectively connected to the first gain fiber through the fiber wavelength division multiplexer, and the first gain fiber is connected to the first fiber isolator through the fiber filter;
所述光纤主放大器包括高功率抽运光源、光纤合波器、第二增益光纤以及第二光纤隔离器;所述第一光纤隔离器依次通过所述光纤合波器和第二增益光纤接入第二光纤隔离器;所述高功率抽运光源接入所述光纤合波器。The optical fiber main amplifier includes a high-power pumping light source, an optical fiber multiplexer, a second gain fiber and a second optical fiber isolator; the first optical fiber isolator is sequentially connected through the optical fiber multiplexer and the second gain optical fiber A second optical fiber isolator; the high-power pumping light source is connected to the optical fiber multiplexer.
在一种较佳的实施方式中,所述脉冲选择器包括强度调制器、可调延时器以及强度调制器驱动电源;所述脉冲电流开关通过所述可调延时器和强度调制器驱动电源接入所述强度调制器,所述第二光纤隔离器通过所述强度调制器接入所述超短脉冲输出端。In a preferred embodiment, the pulse selector includes an intensity modulator, an adjustable delayer, and an intensity modulator driving power; the pulse current switch is driven by the adjustable delayer and the intensity modulator The power supply is connected to the intensity modulator, and the second optical fiber isolator is connected to the ultrashort pulse output terminal through the intensity modulator.
在一种较佳的实施方式中,所述第一增益光纤和所述第二增益光纤为掺镱双包层单模光纤,所述短脉冲激光器还包括回光消除部件,所述回光消除部件与所述强度调制器相连接,所述回光消除部件包括光纤和涂覆在所述光纤的一端表面上的折射率匹配层。In a preferred embodiment, the first gain fiber and the second gain fiber are ytterbium-doped double-clad single-mode fibers, and the short-pulse laser further includes a return light elimination component, and the return light elimination A component is connected to the intensity modulator, and the return light elimination component includes an optical fiber and a refractive index matching layer coated on one end surface of the optical fiber.
在一种较佳的实施方式中,所述短脉冲激光器还设置有底座,所述驱动供电模块和所述激光器模块均设置于所述底座上方,所述底座的内部设置有散热通道,所述散热通道为贯穿于所述底座内部的圆柱形通道,所述散热通道的直径小于所述底座的高度。In a preferred embodiment, the short-pulse laser is also provided with a base, the driving power supply module and the laser module are both arranged above the base, and a heat dissipation channel is provided inside the base, and the The cooling channel is a cylindrical channel penetrating inside the base, and the diameter of the cooling channel is smaller than the height of the base.
在一种较佳的实施方式中,所述供电电源单元通过供电导线与所述脉冲激光器单元相连接,所述供电导线与所述同轴电缆组合成复合电缆,所述同轴电缆的特性阻效为80欧姆。In a preferred embodiment, the power supply unit is connected to the pulse laser unit through a power supply wire, and the power supply wire and the coaxial cable are combined to form a composite cable, and the characteristic resistance of the coaxial cable is The effect is 80 ohms.
在一种较佳的实施方式中,所述光谱分析设备包括:In a preferred embodiment, the spectroscopic analysis equipment includes:
降噪处理模块,用于对校正金属样本的光谱数据进行降噪处理,以及对检测金属样本的光谱数据进行降噪处理;The noise reduction processing module is used to perform noise reduction processing on the spectral data of the calibrated metal sample, and perform noise reduction processing on the spectral data of the detected metal sample;
校正建模模块,用于基于所述校正金属样本的光谱数据用化学计量学软件进行建模,得到金属成分测定模型;A correction modeling module, used for modeling with chemometrics software based on the spectral data of the correction metal sample, to obtain a metal composition determination model;
检测分析模块,用于采用所述金属成分测定模型和所述检测金属样本的光谱数据,分析得到所述检测金属样本的成分分析数据;The detection and analysis module is used to analyze and obtain the composition analysis data of the detection metal sample by using the metal composition measurement model and the spectral data of the detection metal sample;
通信模块,用于与所述控制设备进行通信。The communication module is used for communicating with the control device.
采用了该发明中的基于光谱分析技术的金属成分检测方法及装置,具有如下有益效果:Adopting the metal component detection method and device based on spectral analysis technology in this invention has the following beneficial effects:
(1)采用激光对金属成分进行分析,实现了非接触式测量金属成分,进一步采用取样机器人,可以保障整个金属成分分析过程中的自动化,工作人员全程不必实时盯着金属成分分析过程,可以快速方便地对多个金属样本进行自动化检测分析;(1) The laser is used to analyze the metal composition, which realizes the non-contact measurement of the metal composition. The further use of the sampling robot can guarantee the automation of the entire metal composition analysis process. Convenient automatic detection and analysis of multiple metal samples;
(2)增加吹风设备和第三机械臂,可以对盛放金属样品的托盘进行自动清洗,防止前一个金属样品在托盘上留下金属碎屑等其他残留物,影响下一个金属样品实际的成分分析,整个过程实现了自动化控制;(2) Increase the blowing equipment and the third mechanical arm, which can automatically clean the tray holding the metal sample, preventing the previous metal sample from leaving metal debris and other residues on the tray, which will affect the actual composition of the next metal sample Analysis, the whole process realizes automatic control;
(3)采用本发明的激光器的驱动结构可以显著改善对短脉冲激光器的脉冲驱动质量,降低对连接驱动模块和激光模块间的电缆的特殊要求,并使其长度可以显著增加,最大限度地降低此方面应用的难度要求,促进技术的进步;(3) Adopting the driving structure of the laser of the present invention can significantly improve the pulse driving quality of the short-pulse laser, reduce the special requirements for the cables connecting the driving module and the laser module, and make its length significantly increase, reducing the Difficulty requirements for applications in this area promote technological progress;
(4)超短脉冲激光器包括半导体激光器、单模光纤放大器、双包层光纤放大器以及脉冲选择器,由于半导体激光器产生的纳秒脉冲激光峰值功率比较低,先通过单模光纤放大器进行预放大,获得一定功率的输出,再通过双包层单模光纤放大器进行功率放大,在功率放大时,纳秒激光脉冲的峰值功率超过一定的阈值后,受到光纤非线性效应的调制,会发生分裂,形成多个子脉冲,可以采用纳秒量级的光脉冲选择器选出分裂脉冲的第一个子脉冲,从而获得单个的超短脉冲激光输出。(4) Ultrashort pulse lasers include semiconductor lasers, single-mode fiber amplifiers, double-clad fiber amplifiers, and pulse selectors. Since the peak power of nanosecond pulse lasers generated by semiconductor lasers is relatively low, they are pre-amplified through single-mode fiber amplifiers. Obtain a certain power output, and then perform power amplification through a double-clad single-mode fiber amplifier. During power amplification, when the peak power of the nanosecond laser pulse exceeds a certain threshold, it will be modulated by the nonlinear effect of the fiber and will split to form For multiple sub-pulses, a nanosecond-level optical pulse selector can be used to select the first sub-pulse of the split pulse, thereby obtaining a single ultrashort pulse laser output.
在此说明书中,本发明已参照其特定的实施例作了描述。但是,很显然仍可以作出各种修改和变换而不背离本发明的精神和范围。因此,说明书和附图应被认为是说明性的而非限制性的。In this specification, the invention has been described with reference to specific embodiments thereof. However, it is obvious that various modifications and changes can be made without departing from the spirit and scope of the invention. Accordingly, the specification and drawings are to be regarded as illustrative rather than restrictive.
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