CN106911264B - Light and small single-piezoelectric stack-driven bidirectional rotary inertial actuator and actuating method - Google Patents

Light and small single-piezoelectric stack-driven bidirectional rotary inertial actuator and actuating method Download PDF

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CN106911264B
CN106911264B CN201710213572.1A CN201710213572A CN106911264B CN 106911264 B CN106911264 B CN 106911264B CN 201710213572 A CN201710213572 A CN 201710213572A CN 106911264 B CN106911264 B CN 106911264B
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output shaft
actuating arm
concave surface
arc concave
piezoelectric stack
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CN106911264A (en
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邵妍
徐明龙
邵恕宝
肖瑞江
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Xi'an Langwei Technology Co ltd
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Xian Jiaotong University
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details

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Abstract

Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method, the actuator are made of pedestal, bearing, output shaft, actuation surface plate and piezoelectric pile；Chassis left side is equipped with installation base, and the pedestal upper right corner is equipped with bearing block, and the Bearing inner interference fit being installed in bearing block has output shaft；The installation base of pedestal is fixedly arranged above the actuation surface plate being integrally machined, the actuation surface plate is made of longitudinal plate, actuating arm, diamond shape ring and flexible hinge, wherein it is connected through horizontal flexibility hinge with longitudinal plate on the left of actuating arm, actuating arm is connected through longitudinal flexible hinge with diamond shape ring upper end close to the lower section of horizontal flexibility hinged end, interference fit has piezoelectric pile inside the diamond shape ring, in addition actuating arm end is equipped with circular arc concave surface, and circular arc concave surface is concentric with output shaft and the two fits closely；Structure of the invention is novel, easy to process, in conjunction with inertial drive and lever amplification principle, has actuation fast accurate, the small and exquisite feature of the light letter of structure.

Description

Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method
Technical field
The invention belongs to inertial piezoelectric Actuator technique fields, and in particular to a kind of small-sized single piezoelectric stack drive-type is double To rotatory inertia actuator and actuation method.
Background technique
Inertia-type piezoelectric actuator is a kind of using asymmetrical driving signal, asymmetrical mechanical clamping structure or non-right Frictional force be referred to as control mode, the mechanism to form driving is moved by inertia impact.
Compared with other kinds of Piezoelectric Driving, inertial piezoelectric actuator simple, fast response time, resolution ratio with structure The major advantages such as high, big stroke, movement velocity be fast and at low cost, it can be achieved that larger stroke and have nanoscale positioning accurate simultaneously Degree.Therefore, inertial piezoelectric actuator is applicable to the occasion of high-resolution, big stroke.Currently, scientific worker successfully will Inertial piezoelectric actuator is applied to high accuracy positioning mechanism, multiple degrees of freedom driver, micromachine person joint and micro-operation hand Equal fields.
Generally, rotary inertia piezoelectric actuator is usually using twin lamella as driving element, and structure is complicated and intensity It is low；It at present in most rotary inertia actuator, only relies on line contact and carries out clamper, be easy clamper due to surface abrasion and lose Effect；In addition, most of rotatory inertia actuator need high voltage that could export small step pitch, efficiency is lower.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of small-sized single piezo stacks Heap drive-type bidirectional rotation inertia actuator and actuation method are enable to respond quickly simultaneously stabilized driving under the conditions of high-frequency drive Load bidirectional rotation；This actuator configurations is novel, easy to process, in conjunction with inertial drive and lever amplification principle, has actuation high Effect is accurate, the small and exquisite feature of the light letter of structure.
In order to achieve the above object, the present invention adopts the following technical scheme:
A kind of small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator, including pedestal 14, bearing 16, output shaft 13, actuation surface plate 1 and piezoelectric pile 9；Installation base 12 is equipped on the left of the pedestal 14,14 upper right corner of pedestal is equipped with bearing block 15, interference fit has output shaft 13 inside the bearing 16 being installed in bearing block 15；12 top of installation base of pedestal 14 is through pacifying Cartridge screw 11 is fixed with the actuation surface plate 1 being integrally machined, the actuation surface plate 1 by longitudinal plate 2, actuating arm 3, diamond shape ring 4 with And flexible hinge 5 forms, wherein 3 left side of actuating arm is connected through horizontal flexibility hinge 5-1 with longitudinal plate 2, and actuating arm 3 is close to horizontal The end flexible hinge 5-1 is connected through longitudinal flexible hinge 5-2 with 4 one end of diamond shape ring, and interference fit has piezoelectric pile 9 inside diamond shape ring 4, 4 other end of diamond shape ring be equipped with installation through-hole 10, mounting screw 11-3 pass through installation through-hole 10 and with the installation base on pedestal 14 12 are threadedly coupled, and in addition 3 end of actuating arm is equipped with circular arc concave surface 6, and the circular arc concave surface 6 is concentric with output shaft 13 and the two is close Fitting.
It is provided at the 2 inside face horizontal flexibility hinge 5-1 of longitudinal plate and adjusts straight trough mouth 7, adjust screw 8 by longitudinal plate 2 left side screw in simultaneously be closely against adjust 7 right wall of straight trough mouth, change adjust screw 8 screw-in amount, 3 circular arc concave surface 6 of actuating arm with it is defeated Normal pressure between shaft 13 changes, and frictional force between the two changes correspondingly, i.e. the clamper torque of actuator is adjusted.It is described Diamond shape ring 4 is set to actuating arm 3 close to the end horizontal flexibility hinge 5-1, and when piezoelectric pile 9 extends, actuating arm 3 is around horizontal flexibility hinge 5-1 rotation, 6 output displacement of circular arc concave surface of 3 end of actuating arm, the displacement are 9 elongation of piezoelectric pile gained after lever amplification.
The actuation method of small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator, it is defeated when being not powered on Shaft 13 is in clamping state；To rotate clockwise output shaft 13, the first step slowly applies voltage, piezoelectric pile to piezoelectric pile 9 9, along its axial slowly elongation, drive actuating arm 3 to rotate counterclockwise around horizontal flexibility hinge 5-1, at this time the circle of 3 end of actuating arm Arc concave surface 6 because stiction and 13 axial plane of output shaft keep opposing stationary, 13 axial plane of output shaft with actuating arm 3 circular arc concave surface 6 It moves together, and opposite Pivot Point Center generates a small tangential displacement clockwise, and output shaft 13 is pushed to rotate clockwise one A minute angle；Second step, to piezoelectric pile 9, drop electricity, piezoelectric pile 9 are axially shunk rapidly along it rapidly, drive actuating arm 3 around level Flexible hinge 5-1 is rotated clockwise, at this time the stiction between 13 axial plane of the circular arc concave surface 6 of 3 end of actuating arm and output shaft without Faville both hold it is opposing stationary, the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3 occur it is opposite slide, dropping, electrode is short In time, output shaft 13 keeps in situ substantially, and thus output shaft 13 retains a clockwise rotation step pitch；Repeat first and second Step can make output shaft 13 that load continuously be driven to rotate clockwise；Similarly, to rotate output shaft 13 counterclockwise, first Step applies rapidly voltage to piezoelectric pile 9, and piezoelectric pile 9 drives actuating arm 3 around horizontal flexibility hinge 5-1 along its axial elongation rapidly Rotation counterclockwise, the stiction between the circular arc concave surface 6 of 3 end of actuating arm and 13 axial plane of output shaft is unable to maintain that the two phase at this time To static, the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3 occur it is opposite slide, within liter electrode short time, output shaft 13 basic holdings are in situ；Second step, to the slow drop electricity of piezoelectric pile 9, piezoelectric pile 9 along its it is axial slowly shorten, drive actuating arm 3 around Horizontal flexibility hinge 5-1 is rotated clockwise, and the circular arc concave surface 6 of 3 end of actuating arm is because of stiction and 13 axial plane of output shaft at this time Keep opposing stationary, 13 axial plane of output shaft is moved with the circular arc concave surface 6 of actuating arm 3, and opposite Pivot Point Center generates one Small tangential displacement counterclockwise pushes one minute angle of rotation counterclockwise of output shaft 13, and thus output shaft 13 retains one Rotation step pitch counterclockwise；The first and second step is repeated, output shaft 13 can be made continuously to drive load rotation counterclockwise.
Compared to the prior art, the present invention has the advantage that
1) diamond shape ring 4 of the invention is set to actuating arm 3 close to the lower section at the end horizontal flexibility hinge 5-1, when piezoelectric pile 9 is stretched Long, actuating arm 3 is rotated around horizontal flexibility hinge 5-1, and the circular arc concave surface 6 of 3 end of actuating arm drives output shaft 13 to generate tangential position It moves, which is that the elongation of piezoelectric pile 9 utilizes obtained by lever amplification principle through actuating arm 3, can effectively increase output shaft 13 The corner of single step, that improves actuator makees efficiency of movement.
2) adjusting screw 8 of the invention adjusts 7 right wall of straight trough mouth by screwing in and being closely against on the left of longitudinal plate 2, by changing The screw-in amount of modified tone section screw 8, the frictional force between 3 circular arc concave surface 6 of actuating arm and output shaft 13 change correspondingly, i.e. actuator Clamper torque can be adjusted as needed.
3) structure of the invention is compact, small in size, light weight, only needs single piezoelectric stack that can drive by inertial drive principle Dynamic load carries out bidirectional rotation actuation.
Detailed description of the invention
Fig. 1 is structure of the invention top view.
Fig. 2 is actuation surface plate perspective view of the present invention.
Fig. 3 is pedestal perspective view of the present invention.
Fig. 4 is the driving voltage timing diagram that the present invention rotates clockwise.
Fig. 5 is the driving voltage timing diagram that the present invention rotates counterclockwise.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, invention is further described in detail.
As shown in Figure 1 to Figure 3, the small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator of the present invention, including bottom Seat 14, bearing 16, output shaft 13, actuation surface plate 1 and piezoelectric pile 9；Installation base 12, pedestal 14 are wherein equipped on the left of pedestal 14 The upper right corner is equipped with bearing block 15, and interference fit has output shaft 13 inside the bearing 16 being installed in bearing block 15；The peace of pedestal 14 12 top of dress boss is fixed with the actuation surface plate 1 being integrally machined through mounting screw 11, and the actuation surface plate 1 is by longitudinal plate 2, work Swing arm 3, diamond shape ring 4 and flexible hinge 5 form, and wherein 3 left side of actuating arm is connected through horizontal flexibility hinge 5-1 with longitudinal plate 2, Actuating arm 3 is connected through longitudinal flexible hinge 5-2 with 4 upper end of diamond shape ring close to the lower section at the end horizontal flexibility hinge 5-1, diamond shape ring 4 Inside interference fit has piezoelectric pile 9, and 4 lower end of diamond shape ring is equipped with installation through-hole 10, and mounting screw 11-3 passes through installation through-hole 10 simultaneously It is threadedly coupled with the installation base 12 on pedestal 14, in addition 3 end of actuating arm is equipped with circular arc concave surface 6, the circular arc concave surface 6 and output Axis 13 is with one heart and the two fits closely.
As the preferred embodiment of the present invention, adjusting is provided at the 2 inside face horizontal flexibility hinge 5-1 of longitudinal plate Straight trough mouth 7 adjusts screw 8 by screwing in and being closely against on the left of longitudinal plate 2 and adjusts 7 right wall of straight trough mouth, changes the rotation for adjusting screw 8 Enter amount, the normal pressure between 3 circular arc concave surface 6 of actuating arm and output shaft 13 changes, and frictional force between the two changes correspondingly, i.e. actuation The clamper torque of device is adjusted.
As the preferred embodiment of the present invention, the diamond shape ring 4 is set to actuating arm 3 close to horizontal flexibility hinge 5-1 The lower section at end, when piezoelectric pile 9 extends, actuating arm 3 is rotated around horizontal flexibility hinge 5-1, and the circular arc concave surface 6 of 3 end of actuating arm is defeated It is displaced out, which is 9 elongation of piezoelectric pile gained after lever amplification.
As shown in Figure 4 and Figure 5, the actuation side of the small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator of the present invention Method, when being not powered on, output shaft 13 is in clamping state；To rotate clockwise output shaft 13, the first step is slow to piezoelectric pile 9 Apply voltage, piezoelectric pile 9 drives actuating arm 3 to rotate counterclockwise around horizontal flexibility hinge 5-1, at this time along its axial slowly elongation The circular arc concave surface 6 of 3 end of actuating arm is because stiction and the holding of 13 axial plane of output shaft are opposing stationary, and 13 axial plane of output shaft is with actuation The circular arc concave surface 6 of arm 3 moves together, and opposite Pivot Point Center generates a small tangential displacement clockwise, pushes output shaft 13 rotate clockwise a minute angle；Second step, to piezoelectric pile 9, drop electricity, piezoelectric pile 9 are axially shunk rapidly along it rapidly, band Movement swing arm 3 is rotated clockwise around horizontal flexibility hinge 5-1, at this time the circular arc concave surface 6 of 3 end of actuating arm and 13 axial plane of output shaft Between stiction both be unable to maintain that opposing stationary, the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3 occurs relatively sliding Dynamic, within the drop electrode short time, output shaft 13 keeps in situ substantially, and thus output shaft 13 retains a clockwise rotation step Away from；The first and second step is repeated, can make output shaft 13 that load continuously be driven to rotate clockwise；Similarly, to keep output shaft 13 inverse Hour hands rotation, the first step apply rapidly voltage to piezoelectric pile 9, and piezoelectric pile 9 drives actuating arm 3 around water along its axial elongation rapidly Flat flexible hinge 5-1 rotates counterclockwise, at this time the stiction between 13 axial plane of the circular arc concave surface 6 of 3 end of actuating arm and output shaft It is unable to maintain that the two is opposing stationary, sliding relatively occurs in the circular arc concave surface 6 of 13 axial plane of output shaft and actuating arm 3, short in liter electrode Time in, output shaft 13 keeps in situ substantially；Second step, to piezoelectric pile 9, slowly drop is electric, and piezoelectric pile 9 is along its axial slowly contracting It is short, drive actuating arm 3 to rotate clockwise around horizontal flexibility hinge 5-1, the circular arc concave surface 6 of 3 end of actuating arm is because of static friction at this time Power keeps opposing stationary with 13 axial plane of output shaft, and 13 axial plane of output shaft is moved with the circular arc concave surface 6 of actuating arm 3, and opposite Pivot Point Center generates a small tangential displacement counterclockwise, pushes one minute angle of rotation counterclockwise of output shaft 13, thus Output shaft 13 retains a rotation step pitch counterclockwise；The first and second step is repeated, output shaft 13 can be made continuously to drive load inverse Hour hands rotation.

Claims (3)

1.一种轻小型单压电叠堆驱动式双向旋转惯性作动器，其特征在于：包括底座(14)、轴承(16)、输出轴(13)、作动平面板(1)及压电堆(9)；其中底座(14)左侧设有安装凸台(12)，底座(14)右上角设有轴承座(15)，安装于轴承座(15)中的轴承(16)内部过盈配合有输出轴(13)；底座(14)的安装凸台(12)上方经安装螺钉(11)固定有一体加工的作动平面板(1)，该作动平面板(1)由纵向板(2)、作动臂(3)、菱形环(4)以及柔性铰链(5)组成，其中作动臂(3)左侧经水平柔性铰链(5-1)与纵向板(2)相连，作动臂(3)靠近水平柔性铰链(5-1)端经纵向柔性铰链(5-2)与菱形环(4)一端相连，菱形环(4)内部过盈配合有压电堆(9)，菱形环(4)另一端设有安装通孔(10)，安装螺钉(11)穿过安装通孔(10)并与底座(14)上的安装凸台(12)螺纹连接，另外作动臂(3)末端设有圆弧凹面(6)，该圆弧凹面(6)与输出轴(13)同心并且两者紧密贴合；1. A light and small-sized single-piezoelectric stack-driven bidirectional rotary inertial actuator is characterized in that: comprising a base (14), a bearing (16), an output shaft (13), an actuating plane plate (1) and a pressure The electric stack (9); wherein a mounting boss (12) is arranged on the left side of the base (14), a bearing seat (15) is arranged at the upper right corner of the base (14), and is installed inside the bearing (16) in the bearing seat (15) An output shaft (13) is provided with interference fit; an integrally processed actuating plane plate (1) is fixed above the mounting boss (12) of the base (14) by means of mounting screws (11). The longitudinal plate (2), the actuating arm (3), the diamond ring (4) and the flexible hinge (5) are composed, wherein the left side of the actuating arm (3) is connected to the longitudinal plate (2) via the horizontal flexible hinge (5-1) Connected, the actuating arm (3) close to the end of the horizontal flexible hinge (5-1) is connected to one end of the diamond ring (4) through the longitudinal flexible hinge (5-2), and the diamond ring (4) is internally fitted with a piezoelectric stack ( 9), the other end of the diamond-shaped ring (4) is provided with a mounting through hole (10), and the mounting screw (11) passes through the mounting through hole (10) and is threadedly connected with the mounting boss (12) on the base (14). The end of the actuating arm (3) is provided with a circular arc concave surface (6), and the circular arc concave surface (6) is concentric with the output shaft (13) and closely fits; 所述纵向板(2)内部正对水平柔性铰链(5-1)处开有调节直槽口(7)，调节螺钉(8)由纵向板(2)左侧旋入并紧抵于调节直槽口(7)右壁面，改变调节螺钉(8)的旋入量，作动臂(3)圆弧凹面(6)与输出轴(13)之间的正压力改变，两者间的摩擦力随之改变，即作动器的钳位力矩得到调节。An adjustment straight slot (7) is opened inside the longitudinal plate (2) facing the horizontal flexible hinge (5-1). Change the screwing amount of the adjusting screw (8) on the right wall surface of the notch (7), the positive pressure between the arc concave surface (6) of the actuating arm (3) and the output shaft (13) changes, and the friction force between the two changes. With this change, the clamping torque of the actuator is adjusted. 2.根据权利要求1所述的轻小型单压电叠堆驱动式双向旋转惯性作动器，其特征在于：所述菱形环(4)设置于作动臂(3)靠近水平柔性铰链(5-1)端，当压电堆(9)伸长，作动臂(3)绕水平柔性铰链(5-1)旋转，作动臂(3)末端的圆弧凹面(6)输出位移，该位移是压电堆(9)伸长量经杠杆放大后所得。2. The light and small-sized single-piezoelectric stack-driven bidirectional rotary inertial actuator according to claim 1, characterized in that: the diamond ring (4) is arranged on the actuating arm (3) close to the horizontal flexible hinge (5) -1) end, when the piezoelectric stack (9) is extended, the actuating arm (3) rotates around the horizontal flexible hinge (5-1), and the arc concave surface (6) at the end of the actuating arm (3) outputs displacement, the The displacement is obtained after the elongation of the piezoelectric stack (9) is amplified by the lever. 3.权利要求1所述的轻小型单压电叠堆驱动式双向旋转惯性作动器的作动方法，其特征在于：未通电时，输出轴(13)处于钳位状态；为使输出轴(13)顺时针旋转，第一步，对压电堆(9)缓慢施加电压，压电堆(9)沿其轴向缓慢伸长，带动作动臂(3)绕水平柔性铰链(5-1)逆时针旋转，此时作动臂(3)末端的圆弧凹面(6)因静摩擦力与输出轴(13)轴面保持相对静止，输出轴(13)轴面随作动臂(3)的圆弧凹面(6)一起运动，并相对自身轴心产生一个微小的顺时针切向位移，推动输出轴(13)顺时针旋转一个微小角度；第二步，对压电堆(9)迅速降电，压电堆(9)沿其轴向迅速收缩，带动作动臂(3)绕水平柔性铰链(5-1)顺时针旋转，此时作动臂(3)末端的圆弧凹面(6)与输出轴(13)轴面间的静摩擦力无法维持两者相对静止，输出轴(13)轴面与作动臂(3)的圆弧凹面(6)出现相对滑动，在降电极短的时间内，输出轴(13)基本保持原位，由此输出轴(13)保留一个顺时针的旋转步距；重复第一、二步，能够使输出轴(13)连续地驱动负载顺时针旋转；类似地，为使输出轴(13)逆时针旋转，第一步，对压电堆(9)迅速施加电压，压电堆(9)沿其轴向迅速伸长，带动作动臂(3)绕水平柔性铰链(5-1)逆时针旋转，此时作动臂(3)末端的圆弧凹面(6)与输出轴(13)轴面间的静摩擦力无法维持两者相对静止，输出轴(13)轴面与作动臂(3)的圆弧凹面(6)出现相对滑动，在升电极短的时间内，输出轴(13)基本保持原位；第二步，对压电堆(9)缓慢降电，压电堆(9)沿其轴向缓慢缩短，带动作动臂(3)绕水平柔性铰链(5-1)顺时针旋转，此时作动臂(3)末端的圆弧凹面(6)因静摩擦力与输出轴(13)轴面保持相对静止，输出轴(13)轴面随作动臂(3)的圆弧凹面(6)一起运动，并相对自身轴心产生一个微小的逆时针切向位移，推动输出轴(13)逆时针旋转一个微小角度，由此输出轴(13)保留一个逆时针的旋转步距；重复第一、二步，能够使输出轴(13)连续地驱动负载逆时针旋转。3. The actuating method of the light and small single piezoelectric stack-driven bidirectional rotary inertial actuator according to claim 1, characterized in that: when the power is not energized, the output shaft (13) is in a clamped state; (13) Rotate clockwise, the first step is to slowly apply voltage to the piezoelectric stack (9), and the piezoelectric stack (9) is slowly elongated along its axial direction, driving the boom (3) around the horizontal flexible hinge (5- 1) Rotate counterclockwise. At this time, the arc concave surface (6) at the end of the actuating arm (3) remains relatively stationary with the axial surface of the output shaft (13) due to static friction, and the axial surface of the output shaft (13) follows the actuating arm (3). ) of the circular arc concave surface (6) move together, and produce a slight clockwise tangential displacement relative to its own axis, pushing the output shaft (13) to rotate clockwise by a slight angle; the second step, to the piezoelectric stack (9) When the power is rapidly reduced, the piezoelectric stack (9) rapidly shrinks along its axial direction, which drives the moving arm (3) to rotate clockwise around the horizontal flexible hinge (5-1). (6) The static friction force between the output shaft (13) and the axial surface of the output shaft (13) cannot keep the two relatively stationary, and the axial surface of the output shaft (13) and the arc concave surface (6) of the actuating arm (3) slide relative to each other. In a short period of time, the output shaft (13) basically remains in place, so the output shaft (13) retains a clockwise rotation step; repeating the first and second steps enables the output shaft (13) to continuously drive the load in the clockwise direction. Clockwise rotation; similarly, in order to make the output shaft (13) rotate counterclockwise, the first step is to quickly apply a voltage to the piezoelectric stack (9), and the piezoelectric stack (9) is rapidly elongated along its axial direction, driving the moving arm (3) Rotate counterclockwise around the horizontal flexible hinge (5-1), at this time, the static friction force between the arc concave surface (6) at the end of the actuating arm (3) and the axial surface of the output shaft (13) cannot keep the two relatively stationary , the axial surface of the output shaft (13) and the arc concave surface (6) of the actuating arm (3) slide relatively, and the output shaft (13) basically remains in place within a short period of time when the electrode is raised; the second step is to press The electric stack (9) is slowly de-energized, the piezoelectric stack (9) is slowly shortened along its axial direction, and the moving arm (3) is driven to rotate clockwise around the horizontal flexible hinge (5-1). At this time, the moving arm (3) is actuated The circular arc concave surface (6) at the end remains relatively stationary with the output shaft (13) axial surface due to static friction, and the output shaft (13) axial surface moves together with the circular arc concave surface (6) of the actuating arm (3), and moves relative to itself. The axis produces a slight counterclockwise tangential displacement, which pushes the output shaft (13) to rotate counterclockwise by a slight angle, so that the output shaft (13) retains a counterclockwise rotation step; repeating the first and second steps can make the The output shaft (13) continuously drives the load to rotate counterclockwise.
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