CN106919190A - A kind of new micrometeor gas mass flow controller - Google Patents
A kind of new micrometeor gas mass flow controller Download PDFInfo
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- CN106919190A CN106919190A CN201710077778.6A CN201710077778A CN106919190A CN 106919190 A CN106919190 A CN 106919190A CN 201710077778 A CN201710077778 A CN 201710077778A CN 106919190 A CN106919190 A CN 106919190A
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- sleeve
- push rod
- sealing ring
- valve element
- access cover
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
A kind of new micrometeor gas mass flow controller, including access cover, sealing ring 1, fastener, spring, valve element, sleeve, steel ball, sealing ring 2, push rod and locking nut.Throttling circumferential weld is constituted by 4 μm~10 μm radial clearances formed between sleeve and valve element, after gaseous working medium enters controller by air inlet, micrometeor control is realized by the throttling circumferential weld, the accurate output of 20 μ g/s~2mg/s tiny flow quantities under specified pressure is realized.The present invention uses valve element with valve pocket for hole axle coordinates, and throttling control is realized by circumferential weld, and processing technology is simple, and reliability is high, and contamination resistance is strong.Using adjusting means adjusting spool position, adjustable range is big, the flow output of controller under energy accurate adjustment specified pressure.By adjusting inlet pressure, flow output area changes greatly, and flow-control scope is applicable to system multi-mode working state and needs the occasion of working medium flow continuous variable up to more than 100 times.
Description
Technical field
The present invention relates to a kind of new micrometeor gas mass flow controller, for carrying out micrometeor control to gaseous working medium
System, it is adaptable to the field such as space electric propulsion system.
Technical background
The features such as space electric propulsion technology has high specific impulse, low thrust, long-life, is the space flight such as satellite, deep space probe
The focus and trend of device push technological development.Micrometeor gas mass flow controller be critical product in electric propulsion system it
One, its throttle style is the emphasis and difficult point of design.At present, the throttling of domestic micrometeor gas mass flow controller product
Mode mainly has three kinds：
Restricting orifice flow controller is overlapped by the restricting orifice that multilayer opens aperture and formed, and it is insensitive to temperature change,
Flow can be adjusted by adjusting inlet pressure.In the case where pressure is certain, orifice flow output is relevant with hole diameter, right
In the very small occasion of flow, the large and small hole of its difficulty of processing easily blocks.
The flow of capillary flow rate controller vary with temperature it is more apparent, electrical heating governing response is fast but its complex process,
Easily block, welding position is easily broken off gas leakage.
Porous material flow controller flow is insensitive to inlet pressure, and electrical heating regulative mode, its flow can be used to adjust
Adjusting range is general below 5 times, it is difficult to the occasion larger for requiring adjustable range, and homogeneity of product is poor, exists scaling-off
Hidden danger.
Difficulty of processing is big in actual applications for above-mentioned three kinds of throttle styles, complex structure, it is difficult to meet space propulsion system
High reliability, quick realization, the requirement of low cost.
The content of the invention
Present invention solves the technical problem that being：In view of the shortcomings of the prior art, a kind of new micrometeor gas is proposed
Mass flow controller, using circumferential weld throttle style, difficulty of processing is small, process is simple, by adjusting inlet pressure, flow output
Range is big.
To reach above-mentioned purpose, the technical solution adopted by the present invention is as follows：A kind of new micrometeor gas mass flow control
Device processed, including：Access cover (1), sealing ring 1 (2), fastener (3), spring (4), valve element (5), sleeve (6), steel ball (7), sealing
Circle 2 (8), push rod (9) and locking nut (10)；
The end face that sleeve (6) is connected with access cover (1) is provided with the groove for placing sealing ring 1 (2), access cover (1) and sleeve (6)
Sealing ring 1 (2) is compressed by fastener (3)；One end of valve element (5) is provided with convex shoulder, and spring (4) is pressed on into access cover (1)
On, make spring (4) in its pre-compressed state, valve element (5) outer wall forms a throttling circumferential weld with sleeve (6) endoporus, to gaseous state work
The flow of matter is adjusted；Be pressed on steel ball (7) on the other end of valve element (5) by push rod (9), sleeve (6) and locking nut
(10) screw thread coordinates, and push rod (9) can be driven in sleeve (6) or sleeve (6) is moved outward by rotational lock nut (10)；
Access cover (1) is provided with hollow cavity as inlet channel, and inlet channel is connected with inside sleeve (6)；Push rod (9)
In sleeve (6), in sleeve (6) outward, push rod (9) one end in sleeve (6) is provided with twice and places sealing the other end for one end
The annular seal groove of circle 2 (8), sealing ring 2 (8) is two, is respectively placed in twice and places in the annular seal groove of sealing ring 2 (8)；
Gaseous working medium is flowed into from access cover (1), by the radial clearance between spring (4), valve element (5) and sleeve (6),
Again by the circumferential weld that throttles, push rod (9) front end is reached；Enter the centre bore of push rod (9) from the radial hole of push rod (9) front end, finally
Flowed out from the gas outlet of push rod (9)；Sealing ring (2) and the sealing function of sealing ring (8), make whole device No leakage；
Access cover (1) is hollow circular cylinder, and there are the boss for stretching out, the boss of access cover (1) in one end of cylinder
One end is plane, there is multiple fastener receptacles in the plane, and the other end of cylinder is used as air inlet pipe.
Sleeve (6) is a hollow cylindrical, and one end of sleeve (6) is that annular seal groove is carried on ring flange, and ring flange,
There is screw thread on the other end outer wall of sleeve (6), the screw-internal thread fit with locking nut (10)；There is one in the middle part of hollow cylindrical
Shoulder hole.
Valve element (5) is cylindrical, massive axle, there is an annular convex shoulder, valve element (5) on the outer wall of cylindrical, massive axle one end
Can be compressed spring (4) when mobile；There are tapered location hole, push rod (9) on the end face of the cylindrical, massive axle other end
Steel ball (7) is pressed in the taper location hole.
Push rod (9) is hollow elongated cylinder, has a radial direction through hole on the end face of the one end in sleeve (6), with push rod (9)
The vast sky at center is communicated, and also has two parallel annular seal grooves on its outer wall, for assembling sealing ring (8), it is ensured that gas outlet
Sealing.There is an annular convex shoulder at push rod (9) middle part, in sleeve (6) outward, locking nut (10) is by this for the annular convex shoulder
Annular convex shoulder promotes push rod (9) mobile.The one end of push rod (9) in sleeve (6) outward is elongated tubular product, is the outlet of whole controller
Mouthful.
Locking nut (10) one end is regular hexagon, has a circular hole at regular hexagon center, escaping pipe one end of push rod (9) from
The circular hole is stretched out, and the annular convex shoulder in the middle part of push rod (9) is stuck at the circular hole at regular hexagon center, and locking nut (10) other end is
Hollow circuit cylinder, hollow circuit cylinder inwall has screw thread, and the end of thread with sleeve (6) coordinates.
The present invention proposes a kind of new micrometeor gas mass flow controller, compared with prior art, its advantage and
Beneficial effect is：
(1) relative to conventional flow controller, the present invention uses valve element with valve pocket for hole axle coordinates, and is realized by circumferential weld
Throttling control, processing technology is simple, and reliability is high, and contamination resistance is strong.
(2) present invention is using adjusting means adjusting spool position, and adjustable range is big, can be controlled under accurate adjustment specified pressure
The flow output of device.
(3) the whole flow controller topology layout of the present invention is compact, size is small, lightweight.
(4) present invention by adjusting inlet pressure Δ p, flow can be controlled to export, flow-control scope up to 100 times with
On, therefore, structure proposed by the present invention is applied to system multi-mode working state and needs the field of working medium flow continuous variable
Close.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is the partial enlarged drawing of throttling circumferential weld in structure of the present invention；
Fig. 3 is debugging schematic diagram of the invention.
Specific embodiment
Basic ideas of the invention are：Propose a kind of new micrometeor gas mass flow controller structure, including import
Lid, sealing ring 1, fastener, spring, valve element, sleeve, steel ball, sealing ring 2, push rod and locking nut.By sleeve and valve element it
Between formed 4 μm~10 μm radial clearances constitute throttling circumferential weld, when gaseous working medium by air inlet enter controller after, by the section
Stream circumferential weld realizes micrometeor control.The adjusting means being made up of push rod, steel ball, locking nut, spring etc. is capable of adjusting spool
Position, reaches the purpose of control circumferential weld length, realizes the accurate output of 20 μ g/s~2mg/s tiny flow quantities under specified pressure.Phase
For conventional flow controller, the present invention uses valve element with valve pocket for hole axle coordinates, and throttling control, processing are realized by circumferential weld
Process is simple, reliability is high, and contamination resistance is strong.Using adjusting means adjusting spool position, adjustable range is big, can accurate adjustment
The flow output of controller under specified pressure.Whole flow controller topology layout is compact, and size is small, lightweight.By regulation
Inlet pressure, flow output area changes greatly, and flow-control scope is applicable to system multi-mode working up to more than 100 times
State and need the occasion of working medium flow continuous variable.
Below with reference to accompanying drawing and case study on implementation, the invention will be further described.
As shown in figure 1, a kind of new micrometeor gas mass flow controller of the present invention, including：Access cover 1, sealing ring
(1) 2, fastener 3, spring 4, valve element 5, sleeve 6, steel ball 7, sealing ring (2) 8, push rod 9 and locking nut 10.
Access cover 1 is hollow circular cylinder, and there are the boss for stretching out, boss one end of access cover 1 in one end of cylinder
It is plane, there are multiple fastener receptacles in the plane, the other end of cylinder is used as air inlet pipe.Sleeve 6 is connected with access cover 1
End face be provided with the groove for placing sealing ring (1) 2, access cover 1 and sleeve 6 are compressed sealing ring (1) 2 by fastener 3；Valve element 5
It is cylindrical, massive axle, one end is provided with convex shoulder, spring 4 is pressed on access cover 1, spring 4 is in its pre-compressed state, it is another
There is tapered location hole on the end face at end, be pressed on steel ball 7 in the taper location hole by push rod 9.Sleeve 6 is a hollow cylindrical,
There is a shoulder hole at middle part, and the outer wall with valve element 5 forms one 4 μm~10 μm of throttling circumferential weld, and the flow to gaseous working medium enters
Row regulation.Push rod 9 is hollow elongated cylinder, has a radial direction through hole on the end face of the one end in sleeve 6, with the center of push rod 9
Vast sky is communicated, and also has two parallel annular seal grooves on its outer wall, for assembling sealing ring 8, it is ensured that the sealing of gas outlet.
There is an annular convex shoulder at the middle part of push rod 9, outside sleeve 6, locking nut 10 promotes top to the annular convex shoulder by the annular convex shoulder
Bar 9 is moved.The one end of push rod 9 outside sleeve 6 is elongated tubular product, is the gas outlet of whole controller.The one end of locking nut 10 is
Regular hexagon, escaping pipe one end for having circular hole, push rod 9 at regular hexagon center is stretched out from the circular hole, the convex annular at the middle part of push rod 9
Shoulder is stuck at the circular hole at regular hexagon center, and the other end of locking nut 10 is hollow circuit cylinder, and hollow circuit cylinder inwall has screw thread, with set
The end of thread of cylinder 6 coordinates.
Throttling circumferential weld is constituted by preferred 4 μm~10 μm radial clearances between sleeve and valve element, when gaseous working medium is by entering
After gas port enters controller, Laminar Flow is formed in annulus, ignore the compressibility of working medium, there is gas mass flow to calculate
Formula：
In formula, qmIt is the mass flow of gaseous working medium；Δ p is the pressure drop at throttling circumferential weld two ends, and δ is gap radial dimension, ε
It is relative eccentric ratio, l is throttling circumferential weld length.In the case where Δ p, δ, ε are certain, by by push rod, steel ball, locking nut,
The position of the adjusting means adjusting spool of the compositions such as spring, reaches the purpose of control circumferential weld length l, and then under realizing specified pressure
The accurate output of 20 μ g/s~2mg/s tiny flow quantities.Sealing ring 1 and sealing ring 2 prevent gaseous working medium from air inlet or gas outlet
Effusion, it is ensured that the sealing of little flow controller.
Gaseous working medium is flowed into from access cover 1, by the radial clearance between spring 4, valve element 5 and sleeve 6, then by section
Stream circumferential weld, reaches the front end of push rod 9；Enter the centre bore of push rod 9 from the radial hole of the front end of push rod 9, finally from the gas outlet of push rod 9
Outflow.Due to sealing ring (1) 2 and the sealing function of sealing ring (2) 8, it is ensured that whole device No leakage.
As shown in Fig. 2 being valve element 5 in the present invention and the partial enlarged drawing of the throttling circumferential weld of the formation of sleeve 6.According to gas matter
Amount flow rate calculation formula, the radial clearance δ between control valve element 5 and sleeve 6 is set between 4 μm~10 μm by need of work
Pressure differential Δ p, the eccentric ε between valve element 5 and sleeve 6 is caused by factors such as assembling, processing, belongs to immeasurability.In Δ p, δ, ε mono-
In the case of fixed, the position of the adjusting means adjusting spool by being made up of push rod 9, steel ball 7, locking nut 10, spring 4 etc.,
The purpose of control circumferential weld length l is reached, and then realizes the accurate output of 20 μ g/s~2mg/s tiny flow quantities under specified pressure.
It is illustrated in figure 3 debugging schematic diagram of the invention.In Fig. 3：Precision pressure gauge 1, new micrometeor gas flow control
Device processed 2, gas mass flow gauge 3, pipeline 4, the gaseous working medium of certain pressure enter in apparatus of the present invention 2 from air inlet, are entering
Gas port sets a precision pressure gauge 1, detects inlet pressure, and gas mass flow gauge 3 is connected in gas outlet one end, can detect logical
The mass flow of the gaseous working medium of apparatus of the present invention is crossed, the outlet of gas mass flow 3 is communicated with air.To set the present invention
The mass flow under pressure difference p kPa of device is α μ g/s.First, it is p kPa to set admission pressure, by precision pressure gauge 1
Detection.Secondly, one side rotational lock nut 10, the length l of the circumferential weld that throttled between adjusting spool 5 and sleeve 6, while observation gas
The detected value of mass flowmenter 3：If the reading of gas mass flow gauge 3 is more than α μ g/s, by locking nut 10 to the inward turning of sleeve 6
Turn, increase throttling circumferential weld length l reduces the output flow of flow controller；If the reading of gas mass flow gauge 3 is less than α μ
G/s, locking nut 10 is rotated to outside sleeve 6, reduces throttling circumferential weld length l, increases the output flow of flow controller.Instead
Multiple this process, until flow controller is output as α μ g/s.Apparatus of the present invention can realize 20 μ g/s~2mg/ under specified pressure
The accurate output of s tiny flow quantities.
Claims (6)
1. a kind of new micrometeor gas mass flow controller, it is characterised in that：Including access cover (1), sealing ring 1 (2), tight
Firmware (3), spring (4), valve element (5), sleeve (6), steel ball (7), sealing ring 2 (8), push rod (9) and locking nut (10)；
The end face that sleeve (6) is connected with access cover (1) is provided with the groove for placing sealing ring 1 (2), and access cover (1) passes through with sleeve (6)
Fastener (3) compresses sealing ring 1 (2)；One end of valve element (5) is provided with convex shoulder, and spring (4) is pressed on access cover (1), makes
In its pre-compressed state, valve element (5) outer wall forms a throttling circumferential weld to spring (4) with sleeve (6) endoporus, to the stream of gaseous working medium
Amount is adjusted；Be pressed on steel ball (7) on the other end of valve element (5) by push rod (9), sleeve (6) and locking nut (10) screw thread
Coordinate, push rod (9) can be driven in sleeve (6) or sleeve (6) is moved outward by rotational lock nut (10)；
Access cover (1) is provided with hollow cavity as inlet channel, and inlet channel is connected with inside sleeve (6)；One end of push rod (9)
In sleeve (6), in sleeve (6) outward, push rod (9) one end in sleeve (6) is provided with twice and places sealing ring 2 other end
(8) annular seal groove, sealing ring 2 (8) is two, is respectively placed in twice and places in the annular seal groove of sealing ring 2 (8)；
Gaseous working medium is flowed into from access cover (1), by the radial clearance between spring (4), valve element (5) and sleeve (6), then is led to
Throttling circumferential weld is crossed, push rod (9) front end is reached；Enter the centre bore of push rod (9) from the radial hole of push rod (9) front end, finally from top
The gas outlet outflow of bar (9)；Sealing ring (2) and the sealing function of sealing ring (8), make whole device No leakage.
2. a kind of new micrometeor gas mass flow controller according to claim 1, it is characterised in that：Access cover
(1) it is hollow circular cylinder, and there is the boss for stretching out one end of cylinder, boss one end of access cover (1) is plane, flat
There are multiple fastener receptacles on face, the other end of cylinder is used as air inlet pipe.
3. a kind of new micrometeor gas mass flow controller according to claim 1, it is characterised in that：Sleeve (6)
It is a hollow cylindrical, one end of sleeve (6) is that annular seal groove, the other end of sleeve (6) are carried on ring flange, and ring flange
There is screw thread on outer wall, the screw-internal thread fit with locking nut (10)；There is a shoulder hole in the middle part of hollow cylindrical.
4. a kind of new micrometeor gas mass flow controller according to claim 1, it is characterised in that：Valve element (5)
It is cylindrical, massive axle, there is an annular convex shoulder on the outer wall of cylindrical, massive axle one end, valve element (5) can makes spring when mobile
(4) compressed；There is tapered location hole on the end face of the cylindrical, massive axle other end, steel ball (7) is pressed on this by push rod (9)
In taper location hole.
5. a kind of new micrometeor gas mass flow controller according to claim 1, it is characterised in that：Push rod (9)
It is hollow elongated cylinder, has a radial direction through hole on the end face of the one end in sleeve (6), the vast sky with push rod (9) center is communicated,
There are two parallel annular seal grooves on its outer wall, for assembling sealing ring (8), it is ensured that the sealing of gas outlet；In push rod
(9) there is an annular convex shoulder at middle part, and in sleeve (6) outward, locking nut (10) is promoted and pushed up the annular convex shoulder by the annular convex shoulder
Bar (9) is mobile；The one end of push rod (9) in sleeve (6) outward is elongated tubular product, is the gas outlet of whole controller.
6. a kind of new micrometeor gas mass flow controller according to claim 1, it is characterised in that：Locking nut
(10) one end is regular hexagon, and the escaping pipe one end for having circular hole, push rod (9) at regular hexagon center is stretched out from the circular hole, push rod
(9) annular convex shoulder in the middle part of is stuck at the circular hole at regular hexagon center, and locking nut (10) other end is hollow circuit cylinder, hollow circle
Column wall has screw thread, and the end of thread with sleeve (6) coordinates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710077778.6A CN106919190B (en) | 2017-02-14 | 2017-02-14 | Novel micro-flow gas mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710077778.6A CN106919190B (en) | 2017-02-14 | 2017-02-14 | Novel micro-flow gas mass flow controller |
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| Publication Number | Publication Date |
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| CN106919190A true CN106919190A (en) | 2017-07-04 |
| CN106919190B CN106919190B (en) | 2019-12-20 |
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ID=59454148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710077778.6A Active CN106919190B (en) | 2017-02-14 | 2017-02-14 | Novel micro-flow gas mass flow controller |
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| Country | Link |
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| CN (1) | CN106919190B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115493834A (en) * | 2022-09-29 | 2022-12-20 | 中国航发动力股份有限公司 | A throttle valve flow test device with adjustable flow |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2062388U (en) * | 1989-12-20 | 1990-09-19 | 成都科技大学 | High pressure micro-flow valve |
| JP3482180B2 (en) * | 2000-07-31 | 2003-12-22 | 日本原子力研究所 | Micro flow control valve |
| CN2656728Y (en) * | 2003-11-28 | 2004-11-17 | 辽宁工程技术大学 | Miniature high pressure difference microflow control valve |
| CN2713192Y (en) * | 2004-07-22 | 2005-07-27 | 上海航天控制工程研究所 | Micro flow force feedback electro-hydraulic servo valve |
| JP2005291383A (en) * | 2004-03-31 | 2005-10-20 | Nissin Kogyo Co Ltd | Normally closed solenoid valve |
| CN201858406U (en) * | 2010-10-20 | 2011-06-08 | 安徽中科智能高技术有限责任公司 | Low-high gas flow adjustable device |
| KR20130103476A (en) * | 2013-08-30 | 2013-09-23 | 박기영 | Gas range time valve |
| CN205315718U (en) * | 2015-12-17 | 2016-06-15 | 上海仪电分析仪器有限公司 | Gas flow controlling ratio valve |
-
2017
- 2017-02-14 CN CN201710077778.6A patent/CN106919190B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2062388U (en) * | 1989-12-20 | 1990-09-19 | 成都科技大学 | High pressure micro-flow valve |
| JP3482180B2 (en) * | 2000-07-31 | 2003-12-22 | 日本原子力研究所 | Micro flow control valve |
| CN2656728Y (en) * | 2003-11-28 | 2004-11-17 | 辽宁工程技术大学 | Miniature high pressure difference microflow control valve |
| JP2005291383A (en) * | 2004-03-31 | 2005-10-20 | Nissin Kogyo Co Ltd | Normally closed solenoid valve |
| CN2713192Y (en) * | 2004-07-22 | 2005-07-27 | 上海航天控制工程研究所 | Micro flow force feedback electro-hydraulic servo valve |
| CN201858406U (en) * | 2010-10-20 | 2011-06-08 | 安徽中科智能高技术有限责任公司 | Low-high gas flow adjustable device |
| KR20130103476A (en) * | 2013-08-30 | 2013-09-23 | 박기영 | Gas range time valve |
| CN205315718U (en) * | 2015-12-17 | 2016-06-15 | 上海仪电分析仪器有限公司 | Gas flow controlling ratio valve |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115493834A (en) * | 2022-09-29 | 2022-12-20 | 中国航发动力股份有限公司 | A throttle valve flow test device with adjustable flow |
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| Publication number | Publication date |
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| CN106919190B (en) | 2019-12-20 |
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