CN106944751A - A kind of filter membrane and laser-processing system using Laser Processing - Google Patents
A kind of filter membrane and laser-processing system using Laser Processing Download PDFInfo
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- CN106944751A CN106944751A CN201710331982.6A CN201710331982A CN106944751A CN 106944751 A CN106944751 A CN 106944751A CN 201710331982 A CN201710331982 A CN 201710331982A CN 106944751 A CN106944751 A CN 106944751A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/54—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms
- B01D46/543—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms using membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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Abstract
本发明公开了一种利用激光加工的过滤膜,可用于过滤几百纳米至几百微米不同尺寸的污染颗粒。其应用范围广,当激光加工得到的过滤膜孔径小于污染颗粒效果更佳;还公开了一种用于加工所述过滤膜的激光加工系统,其包括顺次设置的激光器、扩束装置、衍射光学元件、振镜单元、透镜、载物机构以及相应的控制单元。通过对激光加工参数的选择,辅以振镜和载物机构,能够在选定材质的过滤膜上制得孔径几百纳米至几百微米不等的微孔阵列,该系统可用于加工过滤膜(网),其工作效率高、生产成本低,无工具损耗、微孔密度大,具有良好的过滤效果。
The invention discloses a filter membrane processed by laser, which can be used to filter pollution particles with different sizes ranging from hundreds of nanometers to hundreds of microns. It has a wide range of applications, and it is better when the pore size of the filter membrane obtained by laser processing is smaller than the pollution particles; a laser processing system for processing the filter membrane is also disclosed, which includes sequentially arranged lasers, beam expanders, diffraction Optical components, vibrating mirror unit, lens, object-carrying mechanism and corresponding control unit. Through the selection of laser processing parameters, supplemented by vibrating mirrors and object-carrying mechanisms, micropore arrays with pore diameters ranging from hundreds of nanometers to hundreds of microns can be made on the filter membranes of selected materials. This system can be used to process filter membranes (net), which has high working efficiency, low production cost, no tool loss, high pore density, and good filtering effect.
Description
技术领域technical field
本发明属于环保领域,涉及一种利用激光加工的过滤膜或过滤网及加工该过滤膜或过滤网的激光加工系统。The invention belongs to the field of environmental protection, and relates to a filter film or filter net processed by laser and a laser processing system for processing the filter film or filter net.
背景技术Background technique
近年来全球空气污染、水污染现象日益加重,为了缓解气体或液体污染物对人们的不良影响,过滤技术得到了研究人员和环保型企业的重视和发展,其中微滤技术和产品,尤其是能过滤微米至纳米尺度污染物的过滤膜(网)的需求量不断加大。微滤具体是指从气相和液相悬浮液中截留微粒、细菌和其它污染物的方法,主要采用膜分离技术实现,过滤膜的分离机理主要是筛分截留,将尺寸大于滤膜孔径的固体颗粒或颗粒聚集体截留,可广泛应用于废水、污水处理、食品、药品工业、海水淡化工程、空气污染治理等领域。In recent years, global air pollution and water pollution have become more and more serious. In order to alleviate the adverse effects of gas or liquid pollutants on people, filtration technology has been valued and developed by researchers and environmental protection enterprises. Among them, microfiltration technology and products, especially energy The demand for filter membranes (nets) for filtering micron to nanoscale pollutants is increasing. Microfiltration specifically refers to the method of intercepting particles, bacteria and other pollutants from the gas phase and liquid phase suspension, which is mainly realized by membrane separation technology. Particle or particle aggregate interception can be widely used in wastewater, sewage treatment, food, pharmaceutical industry, seawater desalination engineering, air pollution control and other fields.
特别是近几年空气中细颗粒物污染严重,环境中空气动力学当量直径小于2.5微米的颗粒物(PM2.5)浓度居高不下,严重影响了空气质量,与较粗的大气颗粒相比,其面积大、活性强,易附带如重金属、微生物等有毒、有害物质,其在大气中停留时间长、输送距离远,对人体健康和大气环境影响很大。而现有过滤膜加工装置结构较为复杂,生产成本高,同时膜材料可过滤的微粒很有限。Especially in recent years, the pollution of fine particulate matter in the air has been serious, and the concentration of particulate matter (PM2.5) with an aerodynamic equivalent diameter of less than 2.5 microns in the environment has remained high, seriously affecting air quality. Compared with coarser atmospheric particles, its Large area, strong activity, easy to attach toxic and harmful substances such as heavy metals and microorganisms, which stay in the atmosphere for a long time and transport distance, which has a great impact on human health and the atmospheric environment. However, the structure of the existing filter membrane processing device is relatively complicated, the production cost is high, and the particles that can be filtered by the membrane material are very limited.
发明内容Contents of the invention
为解决上述技术问题,本发明提出一种利用激光加工的、可用于过滤不同尺寸(几百纳米至几百微米)污染颗粒的过滤膜(网)及用于制备过滤孔的激光加工系统。In order to solve the above technical problems, the present invention proposes a filter membrane (net) processed by laser that can be used to filter pollution particles of different sizes (hundreds of nanometers to hundreds of microns) and a laser processing system for preparing filter holes.
本发明的技术方案为:Technical scheme of the present invention is:
本发明提供一种利用激光加工的过滤膜,所述过滤膜上分布有用于过滤微颗粒的微孔阵列,所述微孔阵列中,微孔的直径为0.1微米-1毫米。The invention provides a filter membrane processed by laser. A micropore array for filtering microparticles is distributed on the filter membrane. In the micropore array, the diameter of the micropore is 0.1 micron-1 mm.
作为优选,所述过滤膜的材质为金属或非金属,所述金属包括但不限于不锈钢、铝,所述非金属包括但不限于塑料;所述过滤膜的厚度为1微米-2毫米。Preferably, the filter membrane is made of metal or non-metal, the metal includes but not limited to stainless steel and aluminum, and the non-metal includes but not limited to plastic; the thickness of the filter membrane is 1 micron to 2 mm.
作为优选,所述微孔的孔径不大于2.5μm。Preferably, the diameter of the micropores is not greater than 2.5 μm.
本发明还提供一种用于加工所述过滤膜的激光加工系统,所述加工系统包括沿激光光路顺次设置的激光器、扩束装置、衍射光学元件、振镜单元、透镜、载物机构,还包括与所述激光器、振镜单元和载物机构电连接的控制单元。The present invention also provides a laser processing system for processing the filter film, the processing system includes a laser, a beam expander, a diffractive optical element, a vibrating mirror unit, a lens, and an object-carrying mechanism arranged sequentially along the laser optical path, It also includes a control unit electrically connected with the laser, the vibrating mirror unit and the object-carrying mechanism.
作为优选,还包括CCD图像传感器,所述CCD图像传感器与所述振镜单元相邻设置,所述CCD图像传感器的摄像头朝向所述载物机构的载物平面。Preferably, a CCD image sensor is further included, the CCD image sensor is arranged adjacent to the vibrating mirror unit, and the camera of the CCD image sensor faces the object-carrying plane of the object-carrying mechanism.
作为优选,所述激光器发出的激光束波长小于2000nm。Preferably, the wavelength of the laser beam emitted by the laser is less than 2000nm.
作为优选,所述激光的脉宽可为毫秒、微秒、纳秒、皮秒或飞秒级别。Preferably, the pulse width of the laser can be at millisecond, microsecond, nanosecond, picosecond or femtosecond level.
作为优选,所述振镜单元包括X-Y振镜、角度测量传感器和驱动所述X-Y振镜转动的驱动机构;Preferably, the vibrating mirror unit includes an X-Y vibrating mirror, an angle measurement sensor, and a driving mechanism for driving the X-Y vibrating mirror to rotate;
作为优选,所述载物机构为X-Y轴移动平台。Preferably, the loading mechanism is an X-Y axis moving platform.
作为优选,所述透镜可以为平凸透镜、双凸透镜或平场扫描透镜。Preferably, the lens may be a plano-convex lens, a double-convex lens or a flat-field scanning lens.
本发明的上述技术方案相比现有技术具有以下优点:The above technical solution of the present invention has the following advantages compared with the prior art:
(1)本发明所述的利用激光加工的过滤膜,所述过滤膜上分布有用于过滤微颗粒的微孔阵列,所述微孔阵列中,微孔的直径为0.1微米-1毫米。能过滤不同尺寸(几百纳米至几百微米)的污染颗粒,应用范围广,当制得的过滤膜(网)孔径小于污染颗粒效果更佳;同时该过滤膜的过滤孔由激光加工制得,加工效率高、设备本身无损耗,可以制备孔密度大、数量多的过滤膜,降低了生产成本,制得的过滤膜可根据需要用作口罩或其它过滤产品上。(1) The filter membrane processed by laser according to the present invention, the filter membrane is distributed with a micropore array for filtering microparticles, and in the micropore array, the diameter of the micropore is 0.1 micron-1 mm. It can filter pollution particles of different sizes (hundreds of nanometers to hundreds of microns), and has a wide range of applications. When the filter membrane (mesh) pore size is smaller than the pollution particles, the effect is better; at the same time, the filter holes of the filter membrane are made by laser processing. , high processing efficiency, no loss of equipment itself, can prepare filter membranes with large pore density and large quantity, which reduces production costs, and the prepared filter membranes can be used as masks or other filter products according to needs.
(2)本发明所述的利用激光加工的过滤膜,所述过滤膜的材质为金属或非金属,所述金属包括但不限于不锈钢、铝,所述非金属包括但不限于塑料,所述过滤膜的厚度为1微米-2毫米,所述过滤膜材质选用广泛,不同材质的过滤膜可应用于不同的过滤场合。(2) The filter membrane utilizing laser processing according to the present invention, the material of the filter membrane is metal or non-metal, the metal includes but not limited to stainless steel, aluminum, the non-metal includes but not limited to plastic, the The thickness of the filter membrane is 1 micron-2 mm, and the material of the filter membrane is widely selected, and filter membranes of different materials can be applied to different filter occasions.
(3)本发明所述的用于加工所述过滤膜的激光加工系统,包括沿激光光路顺次设置的激光器、扩束装置、衍射光学元件、振镜单元、透镜、载物机构,还包括与所述激光器、振镜单元和载物机构电连接的控制单元。该系统可实时监控激光钻孔过程,可靠性高、加工效率和精度高,适用于过滤膜的工业化批量生产。(3) The laser processing system for processing the filter film according to the present invention includes a laser, a beam expander, a diffractive optical element, a vibrating mirror unit, a lens, and an object-carrying mechanism arranged sequentially along the laser light path, and also includes A control unit electrically connected with the laser, the vibrating mirror unit and the object-carrying mechanism. The system can monitor the laser drilling process in real time, has high reliability, high processing efficiency and precision, and is suitable for industrial mass production of filter membranes.
附图说明Description of drawings
为了使本发明的内容更容易被清楚的理解,下面根据本发明的具体实施例并结合附图,对本发明作进一步详细的说明,其中In order to make the content of the present invention more easily understood, the present invention will be described in further detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein
图1是本发明实施例2所述的激光加工系统的结构示意图。FIG. 1 is a schematic structural diagram of a laser processing system according to Embodiment 2 of the present invention.
图中附图标记表示为:1-激光器;2-扩束装置;3-振镜单元;4-透镜;5-载物机构;6-控制单元;7-衍射光学元件。The reference numerals in the figure are represented as: 1-laser; 2-beam expander; 3-galvanometer unit; 4-lens; 5-object-carrying mechanism; 6-control unit; 7-diffractive optical element.
具体实施方式detailed description
实施例1Example 1
本实施例提供一种利用激光加工的过滤膜,所述过滤膜上分布有用过过滤不同粒径的微颗粒的微孔阵列,所述微孔阵列中,微孔的直径为0.1μm-1mm,优选为2-500μm,根据不同的需求,可将微孔用激光加工为不同孔径,本实施例中,所述微孔的孔径优选为不大于2.5μm,适宜于过滤PM2.5等微型颗粒,其过滤效果好,在使用时,无需多层叠加使用。所述过滤膜的材质可以为金属或者非金属材料,其中金属材料可以选择为不锈钢或者铝等常规材质,非金属材料可以选用塑料,所述过滤膜的厚度为1微米-2毫米,可根据需求选用不同的厚度。作为可变换的实施方式,所述过滤膜也可以为具有激光制作的不同孔径网孔的过滤网,起到过滤微粒的作用即可。This embodiment provides a filter membrane processed by laser, on which a micropore array for filtering microparticles of different particle sizes is distributed, and in the micropore array, the diameter of the micropore is 0.1 μm-1 mm, It is preferably 2-500 μm. According to different requirements, the micropores can be laser-processed into different apertures. In this embodiment, the aperture of the micropores is preferably not greater than 2.5 μm, which is suitable for filtering PM2.5 and other micro particles. Its filtering effect is good, and it does not need to be stacked in multiple layers when used. The material of the filter membrane can be metal or non-metal material, wherein the metal material can be selected as conventional materials such as stainless steel or aluminum, and the non-metal material can be selected from plastic. Choose from different thicknesses. As an alternative embodiment, the filter membrane may also be a filter screen with different apertures made by laser, and it only needs to play the role of filtering particles.
实施例2Example 2
本实施例提供一种用于加工所述过滤膜(网)的激光加工系统,其如图1所示,包括沿激光光路顺次设置的激光器1、用于改变激光光束直径的扩束装置2、衍射光学元件(DOE)7、用于使激光束偏转的振镜单元3、用于聚焦激光束的透镜4和载物机构5,所述载物机构5的载物平面朝向所述透镜4的出光面,还包括与所述激光器1、振镜单元3和载物机构4电连接的控制单元6。所述衍射光学元件7设置于扩束装置2与振镜单元3之间,起到将激光束衍射成为多条平行光束的作用,可以同时在过滤膜上形成多个微孔或者直接形成微孔阵列,提高了激光打孔的效率。The present embodiment provides a kind of laser processing system for processing described filter membrane (net), and it as shown in Figure 1, comprises the laser device 1 that is arranged sequentially along the laser light path, is used to change the beam expander 2 of laser beam diameter , a diffractive optical element (DOE) 7, a galvanometer unit 3 for deflecting the laser beam, a lens 4 for focusing the laser beam, and an object-carrying mechanism 5, the object-carrying plane of the object-carrying mechanism 5 faces the lens 4 The light output surface of the laser beam also includes a control unit 6 electrically connected to the laser 1 , the vibrating mirror unit 3 and the object-carrying mechanism 4 . The diffractive optical element 7 is arranged between the beam expander 2 and the vibrating mirror unit 3, and plays the role of diffracting the laser beam into multiple parallel beams, and can simultaneously form multiple micropores on the filter film or directly form micropores array, improving the efficiency of laser drilling.
其中,所述控制单元6为常规计算机、手机等控制终端;所述激光器1为半导体激光器,其发出的激光束波长为266-1064nm;扩束装置2为激光扩束镜,其扩束倍数为1-10倍,用于改变激光束的光束直径和发散角,使激光聚焦效果更好;所述振镜单元3包括一套X-Y振镜,这套镜片可以分别在X、Y轴方向转动,对激光束起到反射作用,实现对激光的偏转效果,振镜连接有角度测量传感器,用于测量X、Y振镜的偏转角度并将测得的信息传送给控制单元6,还包括驱动X-Y振镜转动的驱动机构,所述驱动机构为常规的伺服电机;所述透镜4可以采用平凸透镜、双凸透镜或平常扫描透镜,起到对激光束的聚焦作用即可;所述载物机构5为X-Y轴移动平台,可在控制单元6的调控下沿X、Y方向带动待打孔过滤膜工件移动。Wherein, the control unit 6 is a conventional computer, mobile phone and other control terminals; the laser 1 is a semiconductor laser, and the wavelength of the laser beam it sends is 266-1064nm; the beam expander 2 is a laser beam expander, and its beam expansion factor is 1-10 times, used to change the beam diameter and divergence angle of the laser beam, so that the laser focusing effect is better; the galvanometer unit 3 includes a set of X-Y galvanometers, and this set of lenses can be rotated in the directions of the X and Y axes respectively. Reflect the laser beam to realize the deflection effect of the laser. The galvanometer is connected with an angle measurement sensor, which is used to measure the deflection angle of the X and Y galvanometers and transmit the measured information to the control unit 6. It also includes driving the X-Y The driving mechanism for the galvanometer to rotate, the driving mechanism is a conventional servo motor; the lens 4 can adopt a plano-convex lens, a double-convex lens or an ordinary scanning lens, which can focus the laser beam; the object-carrying mechanism 5 It is an X-Y axis moving platform, which can drive the filter membrane workpiece to be perforated to move along the X and Y directions under the control of the control unit 6 .
更进一步地,还包括一CCD图像传感器,所述CCD图像传感器与所述振镜单元相邻设置,图像传感器的摄像头朝向载物机构5的载物平面,实时监控激光打孔的过程。Furthermore, a CCD image sensor is also included, and the CCD image sensor is arranged adjacent to the galvanometer unit, and the camera of the image sensor faces the object-carrying plane of the object-carrying mechanism 5 to monitor the laser drilling process in real time.
本实施例还提供一种利用实施例1所述的过滤膜(网)的激光加工系统进行激光打孔的方法,其包括如下步骤:This embodiment also provides a method for laser drilling using the laser processing system of the filter membrane (net) described in Embodiment 1, which includes the following steps:
S1、采用控制单元6制作加工图形,设置待打孔的孔径和孔间距,并将该图形信息导入至激光器1终端;S1, use the control unit 6 to make processing graphics, set the aperture and hole spacing to be punched, and import the graphic information to the laser 1 terminal;
S2、将待加工过滤膜(网)工件置于载物机构5的载物平面,设置激光焦点位置和激光加工参数,根据过滤膜(网)的厚度和材质设定激光的脉宽、功率、波长等参数,激光的脉宽可根据过滤膜的不同设置为毫秒、微秒、纳秒、皮秒或飞秒级别,本实施例中,所述过滤膜(网)采用塑料材质,厚度为5-60μm;S2, place the filter film (net) workpiece to be processed on the loading plane of the loading mechanism 5, set the laser focus position and laser processing parameters, and set the pulse width, power, Wavelength and other parameters, the pulse width of the laser can be set to milliseconds, microseconds, nanoseconds, picoseconds or femtoseconds according to the different filter membranes. In this embodiment, the filter membrane (net) is made of plastic with a thickness of 5 -60μm;
S3、开启激光器1,进行激光打孔,同时启动CCD图像传感器,对激光打孔过程全程实时监控,在激光打孔的过程中控制所述载物机构5在X、Y轴方向移动,以对工件的不同位置进行打孔加工。S3, turn on the laser device 1, perform laser drilling, and start the CCD image sensor at the same time, monitor the laser drilling process in real time throughout the whole process, and control the movement of the loading mechanism 5 in the X and Y axis directions during the laser drilling process, so as to Different positions of the workpiece are drilled.
显然,上述实施例仅仅是为清楚地说明所作的举例,而并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.
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| CN201710331982.6A CN106944751A (en) | 2017-05-11 | 2017-05-11 | A kind of filter membrane and laser-processing system using Laser Processing |
| PCT/CN2017/103375 WO2018205482A1 (en) | 2017-05-11 | 2017-09-26 | Filtering film processed using laser and laser processing system |
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