CN106949841A - 自动点检卡匣支撑下垂量的测量装置 - Google Patents
自动点检卡匣支撑下垂量的测量装置 Download PDFInfo
- Publication number
- CN106949841A CN106949841A CN201710277166.1A CN201710277166A CN106949841A CN 106949841 A CN106949841 A CN 106949841A CN 201710277166 A CN201710277166 A CN 201710277166A CN 106949841 A CN106949841 A CN 106949841A
- Authority
- CN
- China
- Prior art keywords
- column
- cassette
- sag
- chain
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 49
- 238000001514 detection method Methods 0.000 claims abstract description 72
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 abstract description 24
- 239000011521 glass Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 5
- 238000007665 sagging Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 210000000056 organ Anatomy 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710277166.1A CN106949841B (zh) | 2017-04-25 | 2017-04-25 | 自动点检卡匣支撑下垂量的测量装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710277166.1A CN106949841B (zh) | 2017-04-25 | 2017-04-25 | 自动点检卡匣支撑下垂量的测量装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106949841A true CN106949841A (zh) | 2017-07-14 |
| CN106949841B CN106949841B (zh) | 2019-08-30 |
Family
ID=59477713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710277166.1A Active CN106949841B (zh) | 2017-04-25 | 2017-04-25 | 自动点检卡匣支撑下垂量的测量装置 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106949841B (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479060A (zh) * | 2017-08-17 | 2017-12-15 | 京东方科技集团股份有限公司 | 卡匣清洗设备 |
| CN108253892A (zh) * | 2017-12-30 | 2018-07-06 | 南京陶特思软件科技有限公司 | 检测硅片下垂量的测量装置 |
| CN112362004A (zh) * | 2020-11-05 | 2021-02-12 | 惠科股份有限公司 | 卡匣的检测装置及检测方法,基板加工生产线 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162213A (ja) * | 2000-11-28 | 2002-06-07 | Nippon Ceramic Co Ltd | 片持ち梁変形量検出センサー |
| US20060131521A1 (en) * | 2003-08-15 | 2006-06-22 | Adriaan Garssen | Method for sensing wafers located inside a closed wafer cassette |
| CN203012159U (zh) * | 2012-12-27 | 2013-06-19 | 京东方科技集团股份有限公司 | 卡匣检测装置和卡匣 |
| CN203534535U (zh) * | 2013-10-31 | 2014-04-09 | 东旭集团有限公司 | 一种玻璃片下垂度自动测量仪 |
| CN204043626U (zh) * | 2013-12-11 | 2014-12-24 | 中咨公路养护检测技术有限公司 | 一种防眩板的抗变形量测量装置 |
| CN106441189A (zh) * | 2016-09-22 | 2017-02-22 | 东旭科技集团有限公司 | 玻璃基板的垂度测量装置及方法 |
-
2017
- 2017-04-25 CN CN201710277166.1A patent/CN106949841B/zh active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162213A (ja) * | 2000-11-28 | 2002-06-07 | Nippon Ceramic Co Ltd | 片持ち梁変形量検出センサー |
| US20060131521A1 (en) * | 2003-08-15 | 2006-06-22 | Adriaan Garssen | Method for sensing wafers located inside a closed wafer cassette |
| CN203012159U (zh) * | 2012-12-27 | 2013-06-19 | 京东方科技集团股份有限公司 | 卡匣检测装置和卡匣 |
| CN203534535U (zh) * | 2013-10-31 | 2014-04-09 | 东旭集团有限公司 | 一种玻璃片下垂度自动测量仪 |
| CN204043626U (zh) * | 2013-12-11 | 2014-12-24 | 中咨公路养护检测技术有限公司 | 一种防眩板的抗变形量测量装置 |
| CN106441189A (zh) * | 2016-09-22 | 2017-02-22 | 东旭科技集团有限公司 | 玻璃基板的垂度测量装置及方法 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479060A (zh) * | 2017-08-17 | 2017-12-15 | 京东方科技集团股份有限公司 | 卡匣清洗设备 |
| CN107479060B (zh) * | 2017-08-17 | 2019-09-27 | 京东方科技集团股份有限公司 | 卡匣清洗设备 |
| CN108253892A (zh) * | 2017-12-30 | 2018-07-06 | 南京陶特思软件科技有限公司 | 检测硅片下垂量的测量装置 |
| CN112362004A (zh) * | 2020-11-05 | 2021-02-12 | 惠科股份有限公司 | 卡匣的检测装置及检测方法,基板加工生产线 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106949841B (zh) | 2019-08-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170714 Assignee: Yungu (Gu'an) Technology Co., Ltd.|Bazhou Yungu Electronic Technology Co., Ltd.|Kunshan Institute of technology new flat panel display technology center Co., Ltd Assignor: Kunshan Guo Xian Photoelectric Co., Ltd. Contract record no.: X2019990000157 Denomination of invention: Automatic point inspection cartridge support sag amount measurement device Granted publication date: 20190830 License type: Common License Record date: 20191031 |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191206 Address after: No. 2 Xiangshan Avenue, Yongning Street, Zengcheng District, Guangzhou, Guangdong province (the core of Zengcheng economic and Technological Development Zone) Patentee after: Guangzhou Guoxian Technology Co., Ltd Address before: 215300, No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou, 4 Patentee before: Kunshan Guo Xian Photoelectric Co., Ltd. |