CN106969864B - Double differential capacitance type moment sensor - Google Patents
Double differential capacitance type moment sensorInfo
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- CN106969864B CN106969864B CN201710409974.9A CN201710409974A CN106969864B CN 106969864 B CN106969864 B CN 106969864B CN 201710409974 A CN201710409974 A CN 201710409974A CN 106969864 B CN106969864 B CN 106969864B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
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- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
本发明公开了一种双差动电容式力矩传感器，它由传感器外圈、若干变形梁、传感器内圈、电容动电极部分、过载保护部分、基板和电容静电极部分等构成。电容动电极部分和电容静电极部分组成了4个电容器，其中第一电容器与第三电容器关于x轴对称分布，构成差动结构一；第二电容器与第四电容器关于y轴对称分布，构成差动结构二；差动结构一与差动结构二之间呈正交分布，构成双差动式结构。通过双差动式结构可以有效提高力矩传感器的灵敏度和可靠性，减小线性误差，并能抵消横向力造成的干扰。将传感器力矩反馈信息应用于机器人控制中，能实现对机器人的精确力矩控制，提高机器人运转效率。
The present invention discloses a dual differential capacitive torque sensor, which is composed of a sensor outer ring, a plurality of deformable beams, a sensor inner ring, a capacitor moving electrode part, an overload protection part, a substrate and a capacitor static electrode part. The capacitor moving electrode part and the capacitor static electrode part form four capacitors, wherein the first capacitor and the third capacitor are symmetrically distributed about the x-axis, forming a differential structure one; the second capacitor and the fourth capacitor are symmetrically distributed about the y-axis, forming a differential structure two; the differential structure one and the differential structure two are orthogonally distributed, forming a dual differential structure. The dual differential structure can effectively improve the sensitivity and reliability of the torque sensor, reduce linear errors, and offset the interference caused by lateral forces. Applying the sensor torque feedback information to robot control can achieve precise torque control of the robot and improve the robot's operating efficiency.
Description
Technical Field
The invention belongs to the technical field of sensors, relates to a force sensor, and in particular relates to a double differential capacitance type moment sensor.
Background
As a structural sensor, a torque sensor has been widely used in many fields where a torque is required to be measured. According to the mode of generating moment signal, the moment sensor can be divided into optical mode, photoelectric mode, capacitive mode, electromagnetic mode and strain mode, etc. its principle is to utilize structural parameter change to convert into correspondent electric signal. The mature moment sensors in the current market are mainly electromagnetic type and strain type. The electromagnetic torque sensor outputs two paths of angular displacement signals with phase difference, and torque information is obtained by combining the signals, and the sensor is a non-contact sensor without abrasion, but is not suitable for measuring the robot joint torque due to large volume. Strain type torque sensors are generally complex in structure, difficult in torque decoupling, and require additional signal amplification circuits, a/D converters, and the like.
The capacitive torque sensor is manufactured according to the law of electrostatic field as a theoretical basis, has the advantages of good temperature stability, simple structure, good dynamic response and capability of realizing non-contact measurement, and is widely applied to physical measurement of thickness, displacement, pressure, speed, concentration and the like in recent years. However, in the current robot joint application, the capacitive torque sensor has low sensitivity, poor anti-interference capability and is easily affected by transverse force and overload torque, so that the robot hand is difficult to realize accurate torque control when grabbing a certain object or the tail end of the robot is about to finish a certain specific action, thereby reducing the accuracy of a robot control system.
Disclosure of Invention
The invention aims to provide a double-differential capacitive torque sensor aiming at the defects of the traditional capacitive torque sensor, and the sensitivity and the linearity of the torque sensor are improved by adopting a double-differential structure, and meanwhile, the influence caused by interference such as transverse force is eliminated.
In order to achieve the above object, the present invention adopts the following technical scheme:
A double differential capacitive torque sensor comprises a sensor outer ring 1, a plurality of deformed beams 2, a sensor inner ring 3, a capacitive movable electrode part 4, an overload protection part 5, a substrate 6, a capacitive electrostatic electrode part 7 and the like. A plurality of round bosses 9 and U-shaped bosses 10 are uniformly distributed on the sensor outer ring 1, threaded holes are formed in the bosses, the threaded holes in the round bosses 9 are used for connecting the base plate 6, the base plate 6 and the sensor outer ring 1 can be fixed through annular grooves 11 in the base plate 6, and the threaded holes in the U-shaped bosses 10 are used for connecting a sensor and a load. The sensor inner ring 3 is uniformly provided with a plurality of threaded holes 8 for connecting the sensor with a speed reducer, the deformation beam 2 is of a trapezoid structure, and two ends of the deformation beam are respectively connected with the sensor outer ring 1 and the sensor inner ring 3 to play a role in transmitting torque. The substrate 6 is also provided with a rectangular groove 12, and simultaneously a capacitance static electrode part 7, sensing elements used by a sensor and a detection circuit are distributed, and the rectangular groove 12 is used for placing the capacitance movable electrode part 4.
The capacitance movable electrode part 4 comprises a first movable electrode 4-1, a second movable electrode 4-2, a third movable electrode 4-3 and a fourth movable electrode 4-4, and the capacitance static electrode part 7 comprises a first static electrode 7-1, a second static electrode 7-2, a third static electrode 7-3, The differential structure comprises a first capacitor 13-1 with capacitance edge effect, a second capacitor 13-2 with capacitance edge effect, a third capacitor 13-3 with capacitance edge effect, a fourth capacitor 4-4 with a certain gap between two electrodes, a third capacitor 4-4 with a certain gap between two electrodes, a fourth capacitor 13-4 with capacitance edge effect, wherein the first electrode 4-1 is perpendicular to the first electrode 7-1, the first capacitor 13-1 with capacitance edge effect is formed by a certain gap between two electrodes, the second electrode 4-2 is perpendicular to the second electrode 7-2, the second capacitor 13-2 with a certain gap between two electrodes is formed by a certain gap between two electrodes, the first capacitor 13-2 with a certain gap between two electrodes is symmetrically distributed about an x-axis to form a differential structure I, the second capacitor 13-2 with a certain gap between two electrodes is symmetrically distributed about a y-axis to form a differential structure II, and the differential structure I and the differential structure II are orthogonally distributed to form a double differential structure. When the sensor works, the electrode distance of the first capacitor 13-1 is reduced (increased) by delta h, the measured capacitance is C 1, the capacitance is increased (reduced) by delta C 1, the electrode distance of the third capacitor 13-3 is increased (reduced) by delta h, the measured capacitance is C 3, the capacitance is reduced (increased) by delta C 3, the capacitance change amount is (delta C 1+ΔC3) when the difference value of (C 1-C3) is taken as an input signal end 1 for moment detection, and the electrode distance of the second capacitor 13-2 is reduced (increased) by delta h, the measured capacitance is C 2, the capacitance is increased (reduced) by delta C 2, the electrode distance of the fourth capacitor 13-4 is increased (reduced) by delta h, the measured capacitance is C 4, the capacitance is reduced (increased) by delta C 4, the capacitance change amount is (delta C 2+ΔC4) when the difference value of (C 2-C4) is taken as an input signal end 2 for moment detection, so that the capacitance change amount is increased, and the sensitivity of the sensor is improved. By converting the capacitance variation (delta C 1+ΔC3) into the moment T 1, the lateral forces carried by the capacitance variation (delta C 2+ΔC4) into the moments T 2,T1 and T 2 can cancel each other, and the actual output moment is T= (T 1+T2)/2. Therefore, the torque output of the sensor is obtained by adopting a double differential structure, the sensitivity and the reliability of the sensor can be improved, the linear error is reduced, the influence of transverse force on an output signal can be effectively restrained, and the control precision of the robot action is further improved.
The overload protection part 5 comprises an overload protection beam 14 and an overload protection block 15, wherein the overload protection beam 14 is a cantilever beam fixedly connected to the outer edge of the sensor inner ring 3, a lug and a countersunk screw hole 16 are arranged on the beam, the lug is used as a second movable electrode 4-2 and a fourth movable electrode 4-4 of the capacitor, the overload protection block 15 is of an L-shaped structure and is fixed on two sides of the tail end of the overload protection beam 14 through the countersunk screw hole 16 by bolts, meanwhile, a certain gap exists between the overload protection block 15 and the sensor outer ring 1, the gap is slightly smaller than the gap between the two electrodes of the capacitor, and when overload occurs, the overload protection block 18 is firstly contacted with the sensor outer ring 1, so that the contact between the capacitor movable electrode part 4 and the capacitor electrostatic electrode part 7 is prevented, and the protection effect is achieved. The capacitive moving electrode is arranged on the overload protection beam 14 in the overload protection part 5, so that the internal space of the sensor is saved, and the dual functions of overload protection and capacitive moving electrode can be realized.
The invention has the characteristics and beneficial effects that:
the invention adopts a double differential non-contact electrode structure, electrodes are orthogonally distributed, the capacitance value of a first capacitor is different from the capacitance value of a third capacitor, the capacitance value of a second capacitor is different from the capacitance value of a fourth capacitor, two groups of moment values are obtained by converting the difference values of the two groups of capacitance values, and then the moment output value of the sensor is obtained by taking the average value of the two groups of moment values. The sensitivity and the reliability of the moment sensor can be effectively improved through the double differential structure, the linear error is reduced, and the interference caused by the transverse force can be counteracted. The capacitive torque sensor has the advantages of simple structure, easy assembly, no need of additional converters and sensors, reduced cost and good effect.
Drawings
Fig. 1 is an exploded perspective view of the present invention.
Fig. 2 is a perspective assembly schematic diagram of the present invention.
Fig. 3 is a view in the direction a of fig. 2.
Fig. 4 is an enlarged partial view of the overload protection section of the present invention.
In the attached drawing, 1, a sensor outer ring; 2, deforming the beam; the sensor comprises a sensor inner ring, a capacitance movable electrode part, a first movable electrode, a second movable electrode, a third movable electrode, a fourth movable electrode, an overload protection part, a substrate, a capacitance static electrode part, a first static electrode, a second static electrode, a third static electrode, a fourth static electrode, a threaded hole, a round boss, a 10U-shaped boss, a ring-shaped groove, a rectangular groove, a capacitor, a first capacitor, a second capacitor, a third capacitor, a fourth capacitor, a overload protection beam, a counter electrode and a countersunk screw hole, wherein the capacitor inner ring is 4, the capacitance movable electrode part, the first movable electrode is 4-1, the second movable electrode is 4-2, the third movable electrode is 4-3, the fourth movable electrode is 4-4, the overload protection part is 5, the substrate is 7, the capacitance static electrode part is 7-1, the first static electrode is 7-2, the second static electrode is 7-3, the third static electrode is 7-4, the fourth static electrode is 8, the threaded hole is 9, the round boss is 10. U-shaped boss, the ring-shaped groove is 11, the rectangular groove is 12, the rectangular groove is 13, the capacitor is 13-2, the first capacitor is 13-2, the second capacitor is the third capacitor, the fourth capacitor is 13-4.
Detailed Description
In order that the invention may be better understood, exemplary embodiments of the invention will be described hereinafter with reference to the accompanying drawings.
As shown in fig. 1 to 4, the dual differential capacitive torque sensor of the present invention comprises a sensor outer ring 1, a plurality of deformed beams 2, a sensor inner ring 3, a capacitive moving electrode portion 4, an overload protection portion 5, a substrate 6, a capacitive electrostatic electrode portion 7, and the like. A plurality of round bosses 9 and U-shaped bosses 10 are uniformly distributed on the sensor outer ring 1, threaded holes are formed in the bosses, the threaded holes in the round bosses 9 are used for connecting a base plate 6, the base plate 6 and the sensor outer ring 1 can be fixed through annular grooves 11 in the base plate 6, and the threaded holes in the U-shaped bosses 10 are used for connecting a sensor and a load. A plurality of threaded holes 8 are uniformly distributed on the sensor inner ring 3 and are used for connecting the sensor with a speed reducer. The deformed beam 2 is of a trapezoid structure, two ends of the deformed beam 2 are respectively connected with the sensor outer ring 1 and the sensor inner ring 3, the function of transmitting torque is achieved, the number of the deformed beams in the figure is 4, but in the actual production process, the number of the deformed beams can be adjusted according to the size of the torque. The substrate 6 is also provided with a rectangular groove 12, and a capacitance electrostatic electrode part 7, an induction element used for a sensor and a detection circuit are distributed at the same time, wherein the rectangular groove 12 is used for placing the capacitance movable electrode part 4.
The capacitive moving electrode part 4 comprises a first moving electrode 4-1, a second moving electrode 4-2, a third moving electrode 4-3 and a fourth moving electrode 4-4; the capacitive static electrode part 7 comprises a first static electrode 7-1, a second static electrode 7-2, a third static electrode 7-3 and a fourth static electrode 7-4, wherein the first dynamic electrode 4-1 is perpendicular to the first static electrode 7-1, a certain gap exists between the two electrodes to form a first capacitor 13-1 with a capacitive fringe effect, the second dynamic electrode 4-2 is perpendicular to the second static electrode 7-2, a certain gap exists between the two electrodes to form a second capacitor 13-2 with a capacitive fringe effect, the third dynamic electrode 4-3 is perpendicular to the third static electrode 7-3, a certain gap exists between the two electrodes to form a third capacitor 13-3 with a capacitive fringe effect, the fourth dynamic electrode 4-4 is perpendicular to the fourth static electrode 7-4, a certain gap exists between the two electrodes to form a fourth capacitor 13-4 with a capacitive fringe effect, wherein the first capacitor 13-1 and the third capacitor 13-3 are symmetrically distributed about an x-axis to form a differential structure I, namely the first capacitor 13-1 increases in capacitance (decreases) when the sensor is stressed, the third capacitor 13-3 increases in capacitance (decreases in capacitance) and the second capacitor 13-3 increases in capacitance (increases in capacitance) about the second capacitor 13-4 and the differential structure 13-increases in capacitance (capacitor 13-2 increases in capacitance) when the differential structure is stressed about the second capacitor 2 increases in x-axis, the fourth capacitor 13-4 has reduced (increased) capacitance, and the first differential structure and the second differential structure are orthogonally distributed to form a double differential structure.
The working principle of the sensor is that when moment is applied, the deformation body of the trapezoid beam is deformed, the inner ring of the sensor generates small angular displacement, the electrode distance of the first capacitor 13-1 is reduced (increased) by delta h, the capacitance of the first capacitor is C 1, the electrode distance of the fourth capacitor 13-4 is increased (reduced) by delta C 1, the electrode distance of the third capacitor 13-3 is increased (reduced) by delta h, the capacitance of the third capacitor is C 3, the capacitance of the third capacitor is reduced (increased) by delta C 3, the capacitance of the third capacitor is changed by delta C 1+ΔC3 when the difference value of the third capacitor and the fourth capacitor is taken as an input signal end 1 for moment detection, the capacitance of the third capacitor is changed by delta C 1+ΔC3, the electrode distance of the second capacitor 13-2 is reduced (increased) by delta h, the capacitance of the third capacitor is C 2, the capacitance of the fourth capacitor 13-4 is increased (reduced) by delta C 2, the capacitance of the third capacitor is C 4, the capacitance of the fourth capacitor is increased by delta C 4, and the capacitance of the fourth capacitor is taken as an input signal end 2 for moment detection. The sensitivity approximation of the capacitance change caused by the capacitance distance can be obtained by analyzing the electric field distribution of the sensor by the electromagnetic theory, and can be seen as follows:
Where K is proportional to the amount of change in capacitance and inversely proportional to the distance of change.
The analysis shows that the capacitance change amounts are (delta C 1+ΔC3) and (delta C 2+ΔC4) by adopting the double differential type capacitance moment sensor, and the capacitance change amount is delta C 1 or delta C 2 or delta C 3 or delta C 4 by adopting the non-double differential type capacitance moment sensor, so that the capacitance change amount is increased by adopting the double differential type structure, and the sensitivity and the linearity of the sensor are improved. Meanwhile, the capacitance variation (delta C 1+ΔC3) is converted into the moment T 1, the lateral forces carried by the capacitance variation (delta C 2+ΔC4) converted into the moment T 2,T1 and the moment T 2 can be mutually offset, and the actual output moment is T= (T 1+T2)/2.
The overload protection part 5 comprises an overload protection beam 14 and an overload protection block 15, wherein the overload protection beam 14 is a cantilever beam fixedly connected to the outer edge of the inner ring 3 of the sensor, a lug and a countersunk head screw hole 16 are arranged on the beam, the lug is used as a second movable electrode 4-2 and a fourth movable electrode 4-4 of the capacitor, the overload protection block 15 is of an L-shaped structure and is fixed on two sides of the tail end of the overload protection beam 14 through the countersunk head screw hole 16 by bolts, meanwhile, a certain gap exists between the overload protection block 15 and the outer ring 1 of the sensor, and the gap is slightly smaller than the gap between the movable electrode and the electrostatic electrode, and when overload occurs, the overload protection block 15 firstly contacts the outer ring 1 of the sensor, so that the contact between the movable electrode part 4 of the capacitor and the electrostatic electrode part 7 of the capacitor is prevented, and the protection effect is achieved. The second movable electrode and the fourth movable electrode are skillfully arranged on the overload protection beam 14 in the overload protection part 5, electrodes are not required to be arranged at other positions, the internal space of the sensor is saved, and the double functions of overload protection and capacitive movable electrode can be achieved.
The foregoing is only a preferred embodiment of the present invention, but the present invention is not limited to this example, and the differential capacitors used in the present embodiment are two pairs, and the protection scope of the present invention includes even differential capacitors with more than two pairs, and it should be pointed out that all equivalent technical variations studied by applying the principles of the present invention are included in the scope of the invention.
Claims (3)
1. A double differential capacitive torque sensor is characterized by at least comprising a sensor outer ring (1), a plurality of deformed beams (2), a sensor inner ring (3), a capacitive movable electrode part (4), an overload protection part (5), a substrate (6) and a capacitive electrostatic electrode part (7), wherein the capacitive movable electrode part (4) at least comprises a first movable electrode (4-1), a second movable electrode (4-2), a third movable electrode (4-3) and a fourth movable electrode (4-4), the capacitive movable electrode part (7) at least comprises a first static electrode (7-1), a second static electrode (7-2), a third static electrode (7-3) and a fourth static electrode (7-4), the capacitive movable electrode part (4) and the capacitive movable electrode part (7) form a double differential vertical electrode type capacitor (13), the double differential vertical electrode type capacitor (13) means that the first movable electrode (4-1) is perpendicular to the first static electrode (7-1) and forms a certain gap between two electrodes, the first capacitor (4-1) has a certain capacitance edge and the second capacitor (7-2) has a certain gap between the two electrodes, -forming a second capacitor (13-2) having a capacitive edge effect; the third movable electrode (4-3) is perpendicular to the third static electrode (7-3), and a certain gap exists between the two electrodes to form a third capacitor (13-3) with a capacitance edge effect; the first capacitor (13-1) and the third capacitor (13-3) are symmetrically distributed about an x axis to form a differential structure I, the second capacitor (13-2) and the fourth capacitor (13-4) are symmetrically distributed about a y axis to form a differential structure II, the differential structure I and the differential structure II are orthogonally distributed to form a double differential structure, the capacitance value of the first capacitor (13-1) is different from the capacitance value of the third capacitor (13-3), the capacitance value of the second capacitor (13-2) is different from the capacitance value of the fourth capacitor (13-4), two groups of moment values are obtained by converting the capacitance difference values of the two groups of moment values, and the moment output values of the sensor are obtained after the two groups of moment values are averaged, so that the sensitivity and the reliability of the moment sensor can be effectively improved, the sensitivity and the reliability of the moment sensor can be reduced, and interference caused by transverse errors can be counteracted;
The base plate (6) is provided with a ring-shaped groove (11) and a rectangular groove (12), meanwhile, a capacitance static electrode part (7) and sensing elements and detection circuits used for the sensor are distributed, the ring-shaped groove (11) is used for fixing the base plate (6) on the outer ring (1) of the sensor, and the rectangular groove (12) is used for placing the capacitance movable electrode part (4).
2. A dual differential capacitive torque sensor according to claim 1, wherein the differential structure is characterized in that when the electrode pitch of the first capacitor (13-1) is changed by Δh, the electrode pitch of the third capacitor (13-3) is changed by Δh, the capacitance of the third capacitor is C3, the difference between (C1-C3) is used as an input signal terminal 1 for torque detection, and the differential structure is characterized in that when the electrode pitch of the second capacitor (13-2) is changed by Δh, the capacitance of the fourth capacitor (13-4) is changed by Δh, the capacitance of the fourth capacitor is C4, and the difference between (C2-C4) is used as an input signal terminal 2 for torque detection.
3. The double differential capacitive torque sensor according to claim 1 is characterized in that the overload protection part (5) at least comprises an overload protection beam (14) and an overload protection block (15), the overload protection beam (14) is a cantilever beam fixedly connected to the outer edge of the inner ring (3) of the sensor, a bump and a threaded hole (16) are formed in the beam, the bump is used as a second movable electrode (4-2) and a fourth movable electrode (4-4) of the capacitor, the overload protection block (15) is of an L-shaped structure and is fixed to two sides of the tail end of the overload protection beam (14) through the threaded hole (16), a certain gap exists between the overload protection block (15) and the outer ring (1) of the sensor, and the overload protection part (5) plays a double role of overload protection and acting as a movable electrode of the capacitor.
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| CN201720635056.3U Active CN207180915U (en) | 2017-03-29 | 2017-06-02 | A kind of double differential condenser type torque sensor |
| CN201710409974.9A Active CN106969864B (en) | 2017-03-29 | 2017-06-02 | Double differential capacitance type moment sensor |
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| CN207180915U (en) * | 2017-03-29 | 2018-04-03 | 广西安博特智能科技有限公司 | A kind of double differential condenser type torque sensor |
| JP6626074B2 (en) | 2017-11-28 | 2019-12-25 | ファナック株式会社 | Displacement detection type force detection structure and force sensor |
| CN109855772B (en) * | 2019-01-23 | 2024-04-19 | 广西大学 | Capacitive six-dimensional force sensor |
| CN109855774B (en) * | 2019-01-23 | 2024-12-17 | 广西大学 | Layered capacitive multidimensional force sensor |
| CN110579304A (en) * | 2019-10-17 | 2019-12-17 | 广西大学 | A Differential Capacitive Multidimensional Force Sensor |
| CN112345136A (en) * | 2020-10-27 | 2021-02-09 | 广西安博特智能科技有限公司 | Anti-interference capacitive torque sensor |
| CN112362200A (en) * | 2020-11-23 | 2021-02-12 | 广西大学 | Cross-shaped double-straight-beam capacitive torque sensor |
| CN114454217B (en) * | 2021-12-07 | 2024-06-04 | 苏州艾利特机器人有限公司 | Redundant sensing multidimensional force sensor and force control robot |
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| CN104984531A (en) * | 2015-07-28 | 2015-10-21 | 安徽机电职业技术学院 | Bicycle riding training aiding device |
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