CN107162000A - A kind of renovation process of silicon carbide blade material - Google Patents
A kind of renovation process of silicon carbide blade material Download PDFInfo
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- CN107162000A CN107162000A CN201710539110.9A CN201710539110A CN107162000A CN 107162000 A CN107162000 A CN 107162000A CN 201710539110 A CN201710539110 A CN 201710539110A CN 107162000 A CN107162000 A CN 107162000A
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- silicon carbide
- carbide powder
- useless
- powder
- blade material
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 46
- 239000000463 material Substances 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000009418 renovation Methods 0.000 title claims abstract description 12
- 238000005202 decontamination Methods 0.000 claims abstract description 7
- 230000003588 decontaminative effect Effects 0.000 claims abstract description 7
- 239000007787 solid Substances 0.000 claims abstract description 6
- 239000002699 waste material Substances 0.000 claims abstract description 6
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 239000004570 mortar (masonry) Substances 0.000 claims abstract description 5
- 238000000926 separation method Methods 0.000 claims abstract description 5
- 238000000746 purification Methods 0.000 claims abstract description 4
- 239000002245 particle Substances 0.000 claims description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 13
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- 239000000843 powder Substances 0.000 claims description 10
- 239000002738 chelating agent Substances 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 9
- 239000004088 foaming agent Substances 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 7
- 239000002270 dispersing agent Substances 0.000 claims description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 6
- 238000011069 regeneration method Methods 0.000 claims description 6
- 238000003756 stirring Methods 0.000 claims description 6
- 238000000227 grinding Methods 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 230000008929 regeneration Effects 0.000 claims description 4
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 4
- 208000037656 Respiratory Sounds Diseases 0.000 claims description 3
- 239000002156 adsorbate Substances 0.000 claims description 3
- 238000005273 aeration Methods 0.000 claims description 3
- 238000013019 agitation Methods 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 239000003350 kerosene Substances 0.000 claims description 3
- 239000006148 magnetic separator Substances 0.000 claims description 3
- 229910021645 metal ion Inorganic materials 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims description 3
- 238000005554 pickling Methods 0.000 claims description 3
- 238000007517 polishing process Methods 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- 230000010148 water-pollination Effects 0.000 claims description 3
- 239000002023 wood Substances 0.000 claims description 3
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 2
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 2
- 239000004115 Sodium Silicate Substances 0.000 claims description 2
- 238000005119 centrifugation Methods 0.000 claims description 2
- 229960001484 edetic acid Drugs 0.000 claims description 2
- 125000003916 ethylene diamine group Chemical group 0.000 claims description 2
- PMYUVOOOQDGQNW-UHFFFAOYSA-N hexasodium;trioxido(trioxidosilyloxy)silane Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[O-][Si]([O-])([O-])O[Si]([O-])([O-])[O-] PMYUVOOOQDGQNW-UHFFFAOYSA-N 0.000 claims description 2
- 238000001802 infusion Methods 0.000 claims description 2
- 230000000630 rising effect Effects 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 claims description 2
- 235000019795 sodium metasilicate Nutrition 0.000 claims description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 2
- CDVLCTOFEIEUDH-UHFFFAOYSA-K tetrasodium;phosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])([O-])=O CDVLCTOFEIEUDH-UHFFFAOYSA-K 0.000 claims description 2
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 claims 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000272814 Anser sp. Species 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 102000002322 Egg Proteins Human genes 0.000 description 1
- 108010000912 Egg Proteins Proteins 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 210000004681 ovum Anatomy 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000029219 regulation of pH Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 238000007614 solvation Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Carbon And Carbon Compounds (AREA)
- Processing Of Solid Wastes (AREA)
Abstract
The present invention discloses a kind of renovation process of silicon carbide blade material, and silicon carbide waste mortar is obtained into useless silicon carbide powder by separation of solid and liquid first, also included successively：Decontamination, purification, integer, reconstruction grain sword step, compared with prior art, discarded carborundum is reclaimed processing and recycled by the present invention, and utilization rate is up to more than 90%, to greatest extent using carborundum, increases the use value of carborundum.
Description
Technical field
The present invention relates to crystal silicon chip processing technique field, and in particular to a kind of sword material renovation process of silicon carbide blade material.
Background technology
Sword material refers to that granularity is micro- generally between solids such as 5 μm~15 μm of relatively fine carborundum, boron carbide or aluminum oxide
Powder particles, quality is hard and with sharp corner angle, wire cutting available for solar energy crystal silicon chip and semiconductor crystal wafer, grinds
Mill, polishing, are one of main consumptive materials of current crystal silicon chip processing.
The sword material after wire cutting, grinding, polishing use is due to the certain journey of corner angle generation of part powder granule at present
The abrasion of degree, granularity there occurs a certain degree of change, introduce the impurity such as a certain degree of iron filings, at present to the sword after use
Material can only use refractory material or be buried, and cause significant wastage.
Li Sen, Wang Jie of Kaifeng Wan Sheng new materials Co., Ltd etc. were the 6th phase in 2013《Regenerated resources and recycling economy》
" the regeneration and treatment technique research of cutting blade material carborundum " text has been delivered in periodical, has disclosed a kind of using chemical reaction removal of impurities
The method of processing and waterpower sedimentation grading carries out sword material regeneration method, mainly includes, waste mortar separation of solid and liquid is obtained
To sand cake first carry out HCl dropwise processing, remove the iron and its oxi in carborundum, including other metal impurities, then
Carry out thereto again plus alkali chemical treatment, remove the silicon and its oxide impurity in carborundum.It is chemically treated more than, carbonization
Impurity in silicon is substantially achieved removal.It is subjected to waterpower sedimentation in siphon cylinder again, according to the sedimentation of varigrained carborundum
The difference of speed so that varigrained carborundum is classified by settling layering.The carborundum purity and granularity being classified are equal
Effectively handled, then needed according to cutting, carry out the regulation of pH values to carborundum in neutrality.Then carborundum is taken off
Water and drying, slough the moisture in carborundum, so as to obtain silicon carbide powder.
Scheme disclosed in this article is the method rather than regeneration method of a kind of recovery actually, for the hair of powder granule
The raw corner angle worn and torn to a certain degree do not carry out any processing procedure, it is impossible to be re-used for crystal silicon chip and semiconductor crystal wafer
Wire cutting, grinding, polishing.
The content of the invention
The purpose of the present invention is to overcome the deficiencies in the prior art, and open one kind really turns waste into wealth, by disabled carbon
SiClx is reprocessed into the renovation process for the silicon carbide blade material that can reach the brand-new cutting power of silicon carbide micro-powder more than 90% again.Institute
Adopt the technical scheme that：
A kind of renovation process of silicon carbide blade material, obtains useless silicon carbide powder by silicon carbide waste mortar by separation of solid and liquid first,
Characterized in that, also including successively：
A）Decontamination：Removed respectively through 80 mesh, 200 mesh, the classification of 500 mesh water sieves fiber in the useless silicon carbide powder, gravel,
The impurity such as wood chip；
B）Purification：
（1）The useless silicon carbide powder after decontamination is placed in container, the water for not having its upper surface is added, in stirring condition
It is lower to add the dispersant for accounting for aqueous weight 0.2% -0.3%, the chelating agent of aqueous weight 0.2% -0.3% is accounted for, is made using dispersant
The adsorbate adsorbed in useless silicon carbide powder particle surface is separated and is suspended in water, is arrived metal ion inclusion using chelating agent
Inside chelating agent, become the bigger compound of molecular weight stably and be dispersed in water；
（2）The collecting agent for accounting for aqueous weight 0.2% -0.3% is added under agitation, accounts for rising for aqueous weight 0.2% -0.3%
To Aeration in the water after infusion, the collecting agent makes the hydrophily of useless silicon carbide powder particle be changed into hydrophobicity；The foaming agent drop
The surface tension of the low aqueous solution, makes to be filled with the air in water and is easy to disperse into bubble and stablizes bubble；Foaming agent and collecting agent connection
It is combined and is adsorbed in useless silicon carbide powder particle surface, makes useless silicon carbide powder particle emersion；
（3）Most of iron powder that useless silicon carbide powder is mixed into cutting, grinding, polishing process is removed with wet magnetic separator；
（4）Useless silicon carbide powder is placed in stirring and pickling in mixed acid solution, remaining iron in useless silicon carbide powder is removed completely
Powder and its oxide；
（5）Useless silicon carbide powder is rinsed more than three times with pure water again, carried out by modes such as centrifugation, press filtration or tube settlers dense
Contracting, the useless silicon carbide powder after concentration, by steam-heated mode, is sufficiently dried in tray drier, final
To the useless silicon carbide powder of purifying；
C）Integer：There to be crackle Particle Breakage using reshaper；
D）Reproduce grain sword：The silicon-carbide particle of approximate cobblestone is worn into the sharp carborundum of corner angle using tower ball mill
Grain；Form regeneration silicon carbide blade material.
Further, the dispersant be sodium pyrophosphate, tertiary sodium phosphate, tetrasodium phosphate, calgon, sodium metasilicate or
Sodium disilicate；The chelating agent is ethylenediamine, 2,2'- bipyridyls, 1,10- ferrosins, oxalate or ethylenediamine tetra-acetic acid.It is scattered
Agent isInorganic electrolyteMatter dispersant, can particle surface absorption, the absolute value of particle surface current potential can not only be significantly increased,
So as to produce powerful electric double layer electrostatic repulsion, and inorganic electrolyte can also strengthen wetting journey of the water to particle surface
Degree.Inorganic electrolyte also strengthens wettability of the surface, increase solvation film strength and thickness in the absorption of particle surface, so that
Further enhance the mutually exclusive effect of particle.
Further, the collecting agent is aviation kerosine；The foaming agent is No. two oil.
Further, the mixed acid is that concentration is 1 according to volume ratio for the hydrochloric acid and sulfuric acid less than 9%:3 mixing.
Further, in the step C）Before with the process for adding classification, by the useless silicon carbide powder according to particle diameter
Size is divided into different grades, then carries out shaping and reconstruction grain sword respectively again.
Compared with prior art, it is of the inventionDiscarded carborundum is reclaimed into processing to recycle, utilization rate up to more than 90%,
Carborundum is utilized to greatest extent, increases the use value of carborundum.
Embodiment
A kind of renovation process of silicon carbide blade material, obtains useless carborundum powder by silicon carbide waste mortar by separation of solid and liquid first
Body, is then carried out successively：
A）Decontamination：Removed respectively through 80 mesh, 200 mesh, the classification of 500 mesh water sieves fiber in the useless silicon carbide powder, gravel,
The impurity such as wood chip；
B）Purification：
（1）The useless silicon carbide powder after decontamination is placed in container, the water for not having its upper surface is added, in stirring condition
It is lower to add the tertiary sodium phosphate for accounting for aqueous weight 0.25%, 1, the 10- ferrosins of aqueous weight 0.28 are accounted for, make suction using tertiary sodium phosphate
The adsorbate for being attached to useless silicon carbide powder particle surface is separated and is suspended in water, using 1,10- ferrosins by metal ion bag
Close inside chelating agent, the bigger compound of the molecular weight for becoming stable is dispersed in water；
（2）It is backward that the aviation kerosine for accounting for aqueous weight 0.22%, No. two oil for accounting for aqueous weight 0.26% are added under agitation
Aeration in the water, the collecting agent makes the hydrophily of useless silicon carbide powder particle be changed into hydrophobicity；The foaming agent reduces the aqueous solution
Surface tension, make to be filled with the air in water and be easy to disperse into bubble and stablizing bubble；Foaming agent and collecting agent are united
Useless silicon carbide powder particle surface is adsorbed in, makes useless silicon carbide powder particle emersion；
（3）Most of iron powder that useless silicon carbide powder is mixed into cutting, grinding, polishing process is removed with wet magnetic separator；
（4）Useless silicon carbide powder is placed in stirring and pickling in mixed acid solution, remaining iron in useless silicon carbide powder is removed completely
Powder and its oxide；The increasing mixed acid concentration is 1 according to volume ratio for the hydrochloric acid and sulfuric acid less than 9%:3 mixing.
（5）Useless silicon carbide powder is rinsed more than three times with pure water again, concentrated by press filtration, the useless carbonization after concentration
Silicon powder, by steam-heated mode, is sufficiently dried in tray drier, finally gives the useless carborundum of purifying
Powder；
（6）The useless silicon carbide powder is divided into different grades according to particle size；
C）Integer：There to be crackle Particle Breakage in different grades of useless silicon carbide powder using reshaper；
D）Reproduce grain sword：Now with corner angle particle and approximate cobblestone silicon-carbide particle it is mixed in together, due to
The particles of corner angle seldom, therefore is not required to when reproducing grain sword to separate, and all participates in reconstruction, using tower ball mill by approximate goose ovum
The silicon-carbide particle of stone wears into the sharp silicon-carbide particle of corner angle；Form regeneration silicon carbide blade material.
Claims (5)
1. a kind of renovation process of silicon carbide blade material, obtains useless carborundum powder by silicon carbide waste mortar by separation of solid and liquid first
Body, it is characterised in that also include successively：
A）Decontamination：Removed respectively through 80 mesh, 200 mesh, the classification of 500 mesh water sieves fiber in the useless silicon carbide powder, gravel,
The impurity such as wood chip；
B）Purification：
（1）The useless silicon carbide powder after decontamination is placed in container, the water for not having its upper surface is added, in stirring condition
It is lower to add the dispersant for accounting for aqueous weight 0.2% -0.3%, the chelating agent of aqueous weight 0.2% -0.3% is accounted for, is made using dispersant
The adsorbate adsorbed in useless silicon carbide powder particle surface is separated and is suspended in water, is arrived metal ion inclusion using chelating agent
Inside chelating agent, become the bigger compound of molecular weight stably and be dispersed in water；
（2）The collecting agent for accounting for aqueous weight 0.2% -0.3% is added under agitation, accounts for rising for aqueous weight 0.2% -0.3%
To Aeration in the water after infusion, the collecting agent makes the hydrophily of useless silicon carbide powder particle be changed into hydrophobicity；The foaming agent drop
The surface tension of the low aqueous solution, makes to be filled with the air in water and is easy to disperse into bubble and stablizes bubble；Foaming agent and collecting agent connection
It is combined and is adsorbed in useless silicon carbide powder particle surface, makes useless silicon carbide powder particle emersion；
（3）Most of iron powder that useless silicon carbide powder is mixed into cutting, grinding, polishing process is removed with wet magnetic separator；
（4）Useless silicon carbide powder is placed in stirring and pickling in mixed acid solution, remaining iron in useless silicon carbide powder is removed completely
Powder and its oxide；
（5）Useless silicon carbide powder is rinsed more than three times with pure water again, carried out by modes such as centrifugation, press filtration or tube settlers dense
Contracting, the useless silicon carbide powder after concentration, by steam-heated mode, is sufficiently dried in tray drier, final
To the useless silicon carbide powder of purifying；
C）Integer：There to be crackle Particle Breakage using reshaper；
D）Reproduce grain sword：The silicon-carbide particle of approximate cobblestone is worn into the sharp carborundum of corner angle using tower ball mill
Grain；Form regeneration silicon carbide blade material.
2. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：The dispersant is burnt phosphorus
Sour sodium, tertiary sodium phosphate, tetrasodium phosphate, calgon, sodium metasilicate or sodium disilicate；The chelating agent is ethylenediamine, 2,2'-
Bipyridyl, 1,10- ferrosins, oxalate or ethylenediamine tetra-acetic acid.
3. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：The collecting agent is aviation
Kerosene；The foaming agent is No. two oil.
4. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：The mixed acid is concentration
According to volume ratio it is 1 for the hydrochloric acid and sulfuric acid less than 9%:3 mixing.
5. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：In the step C）Before
Process with classification is added, is divided into different grades according to particle size by the useless silicon carbide powder, then carries out respectively again
Shaping and reconstruction grain sword.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710539110.9A CN107162000A (en) | 2017-07-04 | 2017-07-04 | A kind of renovation process of silicon carbide blade material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710539110.9A CN107162000A (en) | 2017-07-04 | 2017-07-04 | A kind of renovation process of silicon carbide blade material |
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| Publication Number | Publication Date |
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| CN107162000A true CN107162000A (en) | 2017-09-15 |
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| CN201710539110.9A Pending CN107162000A (en) | 2017-07-04 | 2017-07-04 | A kind of renovation process of silicon carbide blade material |
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|---|---|---|---|---|
| CN108394903A (en) * | 2018-04-23 | 2018-08-14 | 刘焕新 | A kind of preparation method of nanometer silicon carbide micro mist |
| CN108752003A (en) * | 2018-08-17 | 2018-11-06 | 宁夏和兴碳基材料有限公司 | The preparation method of silicon carbide fine ceramics silicon carbide micro-powder |
| CN111298950A (en) * | 2019-08-07 | 2020-06-19 | 西安隆基锂电新材料有限公司 | Aqueous silicon powder grinding method and silicon powder |
| CN111377448A (en) * | 2018-12-27 | 2020-07-07 | Kc工业有限公司 | Preparation method of high-purity SiC powder |
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| CN111377448A (en) * | 2018-12-27 | 2020-07-07 | Kc工业有限公司 | Preparation method of high-purity SiC powder |
| US11718532B2 (en) | 2018-12-27 | 2023-08-08 | Kcindustrial Co., Ltd. | Preparation method of high purity SiC powder |
| CN111298950A (en) * | 2019-08-07 | 2020-06-19 | 西安隆基锂电新材料有限公司 | Aqueous silicon powder grinding method and silicon powder |
| CN111298950B (en) * | 2019-08-07 | 2022-04-05 | 西安隆基锂电新材料有限公司 | Aqueous silicon powder grinding method and silicon powder |
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