CN108398383A - Observe film window - Google Patents
Observe film window Download PDFInfo
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- CN108398383A CN108398383A CN201810249406.1A CN201810249406A CN108398383A CN 108398383 A CN108398383 A CN 108398383A CN 201810249406 A CN201810249406 A CN 201810249406A CN 108398383 A CN108398383 A CN 108398383A
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- Prior art keywords
- film
- observation
- substrate
- coordinate structure
- holes
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
本发明公开了一种观测薄膜窗口，包括：衬底，其包括相对设置的第一表面和第二表面；预定厚度的薄膜，其设置在第一表面和第二表面上，薄膜的形状和尺寸与衬底的形状和尺寸一致；衬底上还设置有贯穿第一表面和第二表面的观测凹槽；并且，观测凹槽还贯穿位于第一表面或第二表面上的薄膜；坐标结构，坐标结构设置在薄膜上，且坐标结构与观测凹槽相对应，坐标结构用于对样品进行观测定位。其在薄膜上设置有坐标结构，这样，在对样品进行观测时，坐标结构能有效地进行对样品的观测定位，并且在光学显微镜和透射电镜观测切换的时候，有效记录对应样品的位置。因此，本发明的观测薄膜窗口可以实现快速定位，提高样品观测效率。
The invention discloses an observation film window, comprising: a substrate, which includes a first surface and a second surface oppositely arranged; a film with a predetermined thickness, which is arranged on the first surface and the second surface; the shape and size of the film are Consistent with the shape and size of the substrate; the substrate is also provided with an observation groove that runs through the first surface and the second surface; and the observation groove also runs through the film on the first surface or the second surface; the coordinate structure, The coordinate structure is arranged on the film, and the coordinate structure corresponds to the observation groove, and the coordinate structure is used for observing and positioning the sample. It is provided with a coordinate structure on the film, so that when the sample is observed, the coordinate structure can effectively position the sample for observation, and effectively record the position of the corresponding sample when switching between the optical microscope and the transmission electron microscope. Therefore, the observation thin film window of the present invention can realize fast positioning and improve sample observation efficiency.
Description
Technical Field
The invention relates to the technical field of micro-nano characterization, in particular to an observation film window.
Background
The micro-nano characterization technology plays the most intuitive basic role in scientific research and is extremely emphasized by extensive scientific researchers. For nanomaterials and biological samples such as viruses, cells, many characterization means such as TEM (transmission electron microscope) and the like require a supporting film that is transparent to electron beams. The X-ray equipment needs a high-quality pressure-resistant and high-energy and low-energy X-ray-resistant transmittance supporting film, and the supporting film needs to meet the requirements of ultra-thinness, high temperature resistance and high pressure resistance so as to ensure the X-ray transmittance and the vacuum requirement of the X-ray equipment. The observation and characterization of samples in the biological field, such as viruses, cells, etc., is sensitive to changes in the surrounding environment and is prone to damage. Therefore, in the micro-nano characterization means, the above points have many limitations on the supporting body, and although the copper mesh carbon film carrier existing on the market today can satisfy most of the observation requirements, there are still many disadvantages, such as large background noise, poor affinity to biological samples, difficult positioning, and the like.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art and provides an observation film window.
In order to achieve the above object, the present invention provides an observation thin film window comprising:
a substrate comprising a first surface and a second surface disposed opposite;
a thin film of a predetermined thickness disposed on the first surface and the second surface, the thin film having a shape and size conforming to those of the substrate;
an observation groove penetrating through the first surface and the second surface is further formed in the substrate; and the observation groove also penetrates through the film on the first surface or the second surface;
the coordinate structure is arranged on the film and corresponds to the observation groove, and the coordinate structure is used for observing and positioning the sample.
Optionally, the coordinate structure comprises a plurality of through holes penetrating the thin film; wherein a plurality of the through-holes are arranged in a row and a column to define four quadrant regions, and,
the distance between each of the through holes in the same row is equal,
the distance between the through holes in the same column is equal.
Optionally, the coordinate structure further comprises a plurality of through hole identifiers; wherein,
at least one through hole mark is arranged in each quadrant area.
Optionally, the distance between the through holes in the same row is 0.1-100 μm; and/or the presence of a gas in the gas,
the distance between the through holes in the same row is 0.1-100 μm.
Optionally, the diameter of each through hole in the same row is 0.1-100 μm; and &
Or,
the diameter of each through hole in the same row is 0.1-100 μm.
Optionally, the size of the observation groove is 0.05-20 mm.
Optionally, the predetermined thickness of the thin film is 1-500 nm.
Optionally, the material of the film comprises any one of silicon, silicon nitride, silicon oxide and silicon carbide.
Optionally, the substrate has a thickness of 50-1000 um.
Optionally, the substrate is N-type or P-type monocrystalline silicon.
According to the observation film window, the coordinate structure is arranged on the film, so that when a sample is observed, the coordinate structure can effectively observe and position the sample, and when an optical microscope and a transmission electron microscope are observed and switched, the position of the corresponding sample is effectively recorded. Therefore, the observation film window can realize quick positioning and improve the observation efficiency of the sample. Further, the thin film is provided to have a predetermined thickness, so that high transmittance of X-rays is secured, and good biocompatibility is exhibited.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of a thin film window according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of the viewing film window shown in FIG. 1;
fig. 3 is a schematic diagram of a coordinate structure according to an embodiment of the invention.
Description of the reference numerals
100: observing the film window;
110: a substrate;
111: a first surface;
112: a second surface;
113: observing the groove;
120: a film;
130: a coordinate structure;
131: a through hole;
132: and identifying the through hole.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As shown in FIG. 1, the present invention relates to a viewing film window 100, the viewing film window 100 including a substrate 110 and a film 120 of a predetermined thickness. The substrate 110 includes a first surface 111 and a second surface 112 disposed opposite to each other. And, the film 120 is disposed on both the first surface 111 and the second surface 112. The thin film 120 may be formed on both surfaces of the substrate 110 by plating or the like. The shape and size of the membrane 120 should conform to the shape and size of the substrate 110.
The substrate 110 is further provided with a viewing groove 113 penetrating through the first surface 111 and the second surface 112; also, the observation groove 113 also penetrates the thin film 120 on the first surface 111 or the second surface 112, for example, as shown in fig. 1, the observation groove 113 penetrates the thin film 120 on the first surface 111 (i.e., the upper surface of the substrate 110 as shown in fig. 1).
The film observing window 100 further includes a coordinate structure 130, wherein the coordinate structure 130 is disposed on the film 120, and the coordinate structure 130 corresponds to the observing groove 113. That is, on the film 120 through which the observation groove 113 penetrates (i.e., the film 120 on the upper surface of the substrate 110 as shown in fig. 1), the coordinate structure 130 is disposed, and the coordinate structure 130 performs observation positioning on the sample.
The observation film window 100 of the present embodiment is provided with the coordinate structure 130 on the film 120, so that when a sample is observed, the coordinate structure 130 can effectively perform observation and positioning on the sample, and when observation of the optical microscope and observation of the transmission electron microscope are switched, the position of the corresponding sample can be effectively recorded. Therefore, the observation film window 100 of the structure of the embodiment can realize rapid positioning, and improve the observation efficiency of the sample. Further, the thin film 120 is provided to have a predetermined thickness, so that high transmittance of X-rays is secured, and good biocompatibility is provided.
It should be noted that, no limitation is made on the specific structure of the coordinate structure 130, for example, the coordinate structure 130 may be a through hole structure disposed on the film 120, or the coordinate structure 130 may also be a blind hole structure disposed on the film 120, and so on.
It should be further noted that the predetermined thickness of the thin film 120 is not limited, and the thickness of the thin film 120 should be determined according to practical requirements, for example, on the premise of ensuring high X-ray transmittance.
Alternatively, as shown in fig. 1 and 3, the coordinate structure 130 includes a plurality of through holes 131 penetrating the thin film 120; wherein a plurality of the through holes 131 are arranged in a row and a column in a crossed manner (as shown in fig. 3, a plurality of the through holes 131 are arranged in a row and a column in a crossed manner in a vertical manner) to define four quadrant regions. The distance between the through holes 131 in the same row is equal, and the distance between the through holes 131 in the same column is equal.
In the observation film window 100 of the present embodiment, the coordinate structure 130 is a plurality of through holes 131 penetrating through the film 120, the through holes 131 are arranged in a row and a column in a crossed manner, and the distances between the through holes 131 in the same row are equal and the distances between the through holes 131 in the same column are equal. Like this, can be according to a certain through-hole 131 position department at sample place, realize the location to the sample, consequently, the observation film window 100 of this embodiment structure can further realize quick location, improves sample observation efficiency.
It should be noted that the distance between the through holes 131 in the same row may also be increased or decreased based on a certain rule; the distance between the through holes 131 in the same column may also be increased or decreased based on a certain rule, and the like.
Optionally, to further achieve fast positioning of the observation sample, the coordinate structure 130 further includes a plurality of through hole identifiers 132; wherein, at least one through hole mark 132 is arranged in each quadrant region.
Optionally, in order to further realize the fast positioning of the observation sample, the distance between the through holes 131 in the same row is 0.1-100 μm, and preferably may be 3 μm. The distance between the through holes 131 in the same column is 0.1 to 100 μm, and preferably may be 3 μm.
Optionally, in order to further realize the fast positioning of the observation sample, the diameter of each through hole 131 in the same row is 0.1-100 μm, and preferably may be 3 μm. The diameter of each through hole 131 in the same column is 0.1 to 100 μm, and preferably may be 3 μm.
Optionally, the size of the observation groove 113 is 0.05-20 mm, and as shown in fig. 1 and fig. 2, the observation groove 113 may be shaped as an inverted square pyramid cavity structure, with a bottom opening located on the first surface of the substrate 110 and a top opening located on the second surface of the substrate 110.
Alternatively, the predetermined thickness of the thin film 120 is 1 to 500nm, and preferably may be 5 nm.
Alternatively, the material of the film 120 includes any one of silicon, silicon nitride, silicon oxide and silicon carbide, and the film 120 may be formed by using a silicon nitride material.
Optionally, the thickness of the substrate 110 is 50-1000um, and preferably may be 100 μm, and the length and width dimensions of the substrate 110 may be 3 mm. The substrate 110 may be made of N-type or P-type single crystal silicon.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A viewing film window, comprising:
a substrate comprising a first surface and a second surface disposed opposite;
a thin film of a predetermined thickness disposed on the first surface and the second surface, the thin film having a shape and size conforming to those of the substrate;
an observation groove penetrating through the first surface and the second surface is further formed in the substrate; and the observation groove also penetrates through the film on the first surface or the second surface;
the coordinate structure is arranged on the film and corresponds to the observation groove, and the coordinate structure is used for observing and positioning the sample.
2. The viewing film window of claim 1, wherein the coordinate structure comprises a plurality of through-holes extending through the film; wherein,
a plurality of the through-holes are arranged in a row and a column to define four quadrant regions, and,
the distance between each of the through holes in the same row is equal,
the distance between the through holes in the same column is equal.
3. The viewing film window of claim 2, wherein the coordinate structure further comprises a plurality of through-hole indicia; wherein,
at least one through hole mark is arranged in each quadrant area.
4. Observation film window according to claim 2,
the distance between the through holes in the same row is 0.1-100 mu m; and/or the presence of a gas in the gas,
the distance between the through holes in the same row is 0.1-100 μm.
5. Observation film window according to claim 2,
the diameter of each through hole in the same row is 0.1-100 mu m; and/or the presence of a gas in the gas,
the diameter of each through hole in the same row is 0.1-100 μm.
6. The viewing film window of any of claims 1 to 5, wherein the size of the viewing groove is 0.05 to 20 mm.
7. Observation film window according to any one of claims 1 to 5, wherein said film has a predetermined thickness of 1 to 500 nm.
8. The observation film window of any of claims 1 to 5, wherein the film is made of a material comprising any of silicon, silicon nitride, silicon oxide and silicon carbide.
9. Observation film window according to any one of claims 1 to 5, wherein the thickness of said substrate is 50-1000 um.
10. Observation thin film window according to any one of claims 1 to 5, wherein said substrate is N-type or P-type single crystal silicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810249406.1A CN108398383A (en) | 2018-03-23 | 2018-03-23 | Observe film window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810249406.1A CN108398383A (en) | 2018-03-23 | 2018-03-23 | Observe film window |
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| Publication Number | Publication Date |
|---|---|
| CN108398383A true CN108398383A (en) | 2018-08-14 |
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| CN201810249406.1A Pending CN108398383A (en) | 2018-03-23 | 2018-03-23 | Observe film window |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116973385A (en) * | 2023-07-31 | 2023-10-31 | 上海迈振电子科技有限公司 | In-situ chip for TEM characterization of magnetic material and preparation method thereof |
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| CN116973385A (en) * | 2023-07-31 | 2023-10-31 | 上海迈振电子科技有限公司 | In-situ chip for TEM characterization of magnetic material and preparation method thereof |
| CN116973385B (en) * | 2023-07-31 | 2024-05-28 | 上海迈振电子科技有限公司 | In-situ chip for TEM characterization of magnetic material and preparation method thereof |
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Application publication date: 20180814 |