CN108398408A - A kind of composite air-sensitive material and preparation method thereof for formaldehyde gas detection - Google Patents
A kind of composite air-sensitive material and preparation method thereof for formaldehyde gas detection Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于半导体材料领域,涉及金属氧化物半导体气敏材料,具体来说是一种用于甲醛气体检测的复合气敏材料及其制备方法。The invention belongs to the field of semiconductor materials, and relates to metal oxide semiconductor gas-sensitive materials, in particular to a composite gas-sensitive material for formaldehyde gas detection and a preparation method thereof.
背景技术Background technique
甲醛作为世界上产量最高的十种化学品之一,是一种需求量很大的化学物质,它被广泛应用于日常生活中,例如在衣物布料加工过程中加入含有甲醛的助剂便可使布料具有防褶皱、防缩水和阻燃等优点;另外,它还存在于各种人工合成粘合剂中,其中由甲醛和尿素在一定反应条件下合成的脲醛树脂在木材加工业中具有不可取代的地位。但是,伴随着甲醛在各个领域的大量使用,不可避免地出现了一些令人头疼不已的副作用,即室内甲醛含量超标,这严重影响着人们的身体健康,尤其是对儿童、老人、孕妇及其他抵抗力虚弱的人群危害极大。目前,甲醛被国际癌症研究机构(IARC)列为一级致癌物,其对人体的危害已经众所周知。测定甲醛浓度的方法很多,如酚试剂法、气相色谱法、极谱法、比色法、荧光测定法和分光光度法等。相比于这些需要先收集后分析的方法,具有实时分析功能的甲醛传感器无疑是最优的选择。但是目前市面上的高灵敏甲醛传感器价格普遍太高,而价格便宜的又灵敏度较低、抗干扰能力差,无法满足家居环保产业的巨大市场需求。As one of the top ten chemicals with the highest output in the world, formaldehyde is a chemical substance in great demand. It is widely used in daily life. For example, adding formaldehyde-containing additives in the process of fabric processing can make Cloth has the advantages of anti-wrinkle, anti-shrinkage and flame-retardant; in addition, it also exists in various synthetic adhesives, among which urea-formaldehyde resin synthesized by formaldehyde and urea under certain reaction conditions has an irreplaceable role in the wood processing industry. status. However, along with the extensive use of formaldehyde in various fields, there are inevitably some troublesome side effects, that is, the indoor formaldehyde content exceeds the standard, which seriously affects people's health, especially for children, the elderly, pregnant women and others. People with weakened resistance are extremely harmful. At present, formaldehyde is listed as a primary carcinogen by the International Agency for Research on Cancer (IARC), and its harm to the human body is well known. There are many methods for determining the concentration of formaldehyde, such as phenol reagent method, gas chromatography, polarography, colorimetry, fluorescence measurement and spectrophotometry. Compared with these methods that need to be collected first and then analyzed, the formaldehyde sensor with real-time analysis function is undoubtedly the best choice. However, the price of high-sensitivity formaldehyde sensors currently on the market is generally too high, and the cheap ones have low sensitivity and poor anti-interference ability, which cannot meet the huge market demand of the household environmental protection industry.
半导体氧化物传感器是目前应用最广泛的一类气体传感器,具有低成本,高灵敏度,易维护,小型化的潜力以及操作简单等优点。但是,对于一些传感器来说,它们的高操作温度要求与其他在室温下工作的其他传感器相比需要更多的成本和复杂的配置,这限制了它们的发展。Semiconductor oxide sensors are currently the most widely used type of gas sensors, which have the advantages of low cost, high sensitivity, easy maintenance, potential for miniaturization, and simple operation. However, for some sensors, their high operating temperature requirements require more cost and complex configurations compared with other sensors that work at room temperature, which limits their development.
石墨烯/金属氧化物半导体复合材料为解决这一问题提供了新思路。首先,石墨烯通过促进电荷传输可增强复合材料的导电性,从而降低金属氧化物通常所需的工作温度。其次,石墨烯和金属氧化物可以通过在接触界面形成异质结产生强烈的电子相互作用,从而调节或影响气敏过程中的电荷转移行为。Graphene/metal oxide semiconductor composite materials provide a new idea to solve this problem. First, graphene can enhance the electrical conductivity of the composite by facilitating charge transport, thereby lowering the operating temperatures normally required for metal oxides. Second, graphene and metal oxides can regulate or affect the charge transfer behavior in the gas sensing process by forming a heterojunction at the contact interface to generate strong electronic interactions.
随着纳米技术的发展,二维结构的纳米材料制备工艺不断突破,各种具有片状结构的金属氧化物半导体材料可以通过化学气相沉积法、水热法、模板牺牲法等大量合成,与颗粒状的金属氧化物材料相比,这些片状氧化物具有更高的比表面积和更优异的电学性能,更适用于合成各种气体传感器。With the development of nanotechnology, the preparation process of nanomaterials with two-dimensional structure has been continuously broken through. Various metal oxide semiconductor materials with sheet structure can be synthesized in large quantities by chemical vapor deposition, hydrothermal method, and template sacrificial method. Compared with metal oxide materials, these flake oxides have higher specific surface area and better electrical properties, and are more suitable for the synthesis of various gas sensors.
另一方面,石墨烯量子点是单层或少量层状石墨烯,横向尺寸通常小于20nm,与大片石墨烯相比,具有零维结构的石墨烯量子点在气体传感领域更具应用潜力。首先,石墨烯量子点具有更大的比表面积,表面有大量的悬健且容易官能团化,因此可大大提高对目标气体分子的吸附性能。其次,石墨烯量子点具有可调带隙,荧光性能和电子输运性能均可以通过其粒径进行调控,且易通过掺杂改变其导电性。然而,关于石墨烯量子点的气敏性能目前尚未见有相关实验报道,这主要是因为单纯的石墨烯量子点很难形成导通的网络结构,器件应用受到限制。On the other hand, graphene quantum dots are single-layer or a small number of layered graphene, and the lateral size is usually less than 20nm. Compared with large sheets of graphene, graphene quantum dots with a zero-dimensional structure have more application potential in the field of gas sensing. First of all, graphene quantum dots have a larger specific surface area, a large number of suspensions on the surface and are easy to be functionalized, so the adsorption performance of target gas molecules can be greatly improved. Secondly, graphene quantum dots have an adjustable band gap, and their fluorescence properties and electron transport properties can be adjusted through their particle size, and their conductivity can be easily changed by doping. However, there are no relevant experimental reports on the gas-sensing properties of graphene quantum dots. This is mainly because it is difficult for pure graphene quantum dots to form a conductive network structure, and the device application is limited.
综合二维金属氧化物和石墨烯量子点的优点,制备复合材料,是甲醛传感器开发的一个方向,具有重要意义。Combining the advantages of two-dimensional metal oxides and graphene quantum dots to prepare composite materials is a direction for the development of formaldehyde sensors and is of great significance.
发明内容Contents of the invention
针对现有技术中的上述技术问题,本发明提供了一种用于甲醛气体检测的复合气敏材料及其制备方法,所述的这种用于甲醛气体检测的复合气敏材料及其制备方法要解决现有技术中检测甲醛气体的气敏材料灵敏度、工作温度高、选择性和稳定性不佳的技术问题。Aiming at the above-mentioned technical problems in the prior art, the present invention provides a composite gas-sensitive material for formaldehyde gas detection and a preparation method thereof, the composite gas-sensitive material for formaldehyde gas detection and a preparation method thereof It is necessary to solve the technical problems of sensitivity, high working temperature, poor selectivity and stability of gas-sensitive materials for detecting formaldehyde gas in the prior art.
本发明提供了一种用于甲醛气体检测的复合气敏材料,由二维片状金属氧化物与石墨烯量子点材料复合而成,所述二维片状金属氧化物占所述复合材料的质量百分含量为70%-99.99%,所述石墨烯量子点材料占所述复合材料的质量百分含量为0.01%-30%。The invention provides a composite gas-sensitive material for formaldehyde gas detection, which is composed of a two-dimensional sheet metal oxide and a graphene quantum dot material, and the two-dimensional sheet metal oxide accounts for 1% of the composite material. The mass percentage is 70%-99.99%, and the mass percentage of the graphene quantum dot material in the composite material is 0.01%-30%.
进一步的,所述二维片状金属氧化物为氧化锌、氧化锡、氧化钨等具有半导体性质的氧化物;所述石墨烯量子点材料为本征石墨烯量子点、掺杂石墨烯量子点或经表面改性的石墨烯量子点。Further, the two-dimensional sheet metal oxide is an oxide with semiconductor properties such as zinc oxide, tin oxide, and tungsten oxide; the graphene quantum dot material is intrinsic graphene quantum dot, doped graphene quantum dot Or surface-modified graphene quantum dots.
进一步的,所述二维片状金属氧化物的尺寸大小为0.5-100μm,厚度为5-100nm;所述石墨烯量子点材料的尺寸大小为2-50nm,厚度为0.6-10nm。Further, the size of the two-dimensional flake metal oxide is 0.5-100 μm, and the thickness is 5-100 nm; the size of the graphene quantum dot material is 2-50 nm, and the thickness is 0.6-10 nm.
本发明还提供了上述的一种用于甲醛气体检测的复合气敏材料的制备方法,包括如下步骤:The present invention also provides the above-mentioned preparation method of a composite gas-sensitive material for formaldehyde gas detection, comprising the following steps:
1)一个制备二维金属氧化物纳米片的步骤;1) A step for preparing two-dimensional metal oxide nanosheets;
2)一个制备石墨烯量子点材料的步骤;2) a step for preparing graphene quantum dot material;
3)按照质量百分比称取二维片状金属氧化物和所述石墨烯量子点材料,将所述二维片状金属氧化物和所述石墨烯量子点材料按比例复合,所述的复合方法为水热法或者超声法;得到用于甲醛气体检测的复合气敏材料。3) Weighing the two-dimensional sheet metal oxide and the graphene quantum dot material according to the mass percentage, and compounding the two-dimensional sheet metal oxide and the graphene quantum dot material in proportion, the compounding method It is a hydrothermal method or an ultrasonic method; and a composite gas-sensitive material for formaldehyde gas detection is obtained.
进一步的,所述石墨烯量子点的制备方法为水热法或者化学剥离法。Further, the preparation method of the graphene quantum dots is a hydrothermal method or a chemical exfoliation method.
进一步的,所述金属氧化物的制备方法为化学气相沉积法、水热法或者模板牺牲法。Further, the preparation method of the metal oxide is a chemical vapor deposition method, a hydrothermal method or a template sacrificial method.
进一步的,上述的一种用于甲醛气体检测的复合气敏材料的制备方法,按照质量百分比称取二维片状金属氧化物和所述石墨烯量子点材料,将所述金属氧化物和所述石墨烯量子点材料在液相中混合后搅拌5-10min;控制频率为300-400W进行超声4-6h;最后在60-80℃温度下干燥,即得所述用于甲醛气体检测的复合气敏材料。Further, the above-mentioned method for preparing a composite gas-sensing material for formaldehyde gas detection, weighs the two-dimensional sheet metal oxide and the graphene quantum dot material according to the mass percentage, and mixes the metal oxide and the The graphene quantum dot material is mixed in the liquid phase and then stirred for 5-10 minutes; the control frequency is 300-400W and ultrasonic is carried out for 4-6 hours; finally, it is dried at a temperature of 60-80°C to obtain the composite compound for formaldehyde gas detection. gas sensitive material.
本发明还提供了上述的一种用于甲醛气体检测的复合气敏材料在制备气敏传感器中的用途。The present invention also provides the use of the above-mentioned composite gas-sensitive material for formaldehyde gas detection in preparing a gas-sensitive sensor.
具体的,上述的用于甲醛气体检测的复合气敏材料的制备过程如下:Specifically, the preparation process of the above-mentioned composite gas-sensitive material for formaldehyde gas detection is as follows:
1)以氯化锌为原料,配制浓度为0.2mol/L的氯化锌溶液;1) taking zinc chloride as raw material, the preparation concentration is the zinc chloride solution of 0.2mol/L;
2)以六亚甲基四胺为原料,配制浓度为0.2mol/L的六亚甲基四胺溶液;2) Using hexamethylenetetramine as a raw material, prepare a hexamethylenetetramine solution with a concentration of 0.2mol/L;
3)将步骤1)的氯化锌溶液和步骤2)的六亚甲基四胺溶液按照体积比1:1均匀混合,置于60℃油浴中保温15-30min;3) Mix the zinc chloride solution in step 1) and the hexamethylenetetramine solution in step 2) uniformly at a volume ratio of 1:1, and place them in an oil bath at 60°C for 15-30 minutes;
4)取等摩尔量的醋酸锌和六亚甲基四胺,配制成醋酸锌浓度为0.2-0.3mol/L的溶液;4) Get zinc acetate and hexamethylenetetramine in equimolar amounts, and prepare a solution with zinc acetate concentration of 0.2-0.3mol/L;
5)将步骤3)的氯化锌溶液和步骤4)的醋酸锌溶液均匀混合,加入适量氨水,调节溶液pH值为6-8;5) uniformly mix the zinc chloride solution in step 3) and the zinc acetate solution in step 4), add an appropriate amount of ammonia water, and adjust the pH value of the solution to 6-8;
6)将步骤5)的溶液转移至水热反应釜中,置于高温鼓风干燥箱中,95℃反应2h,自然冷却至室温;6) Transfer the solution in step 5) to a hydrothermal reaction kettle, place it in a high-temperature blast drying oven, react at 95°C for 2 hours, and cool naturally to room temperature;
7)将步骤6)得到的固体粉末离心洗涤3-6遍,60-80℃干燥8-12h,400-600℃煅烧1-2h,得到氧化锌纳米片。7) The solid powder obtained in step 6) is centrifuged and washed 3-6 times, dried at 60-80° C. for 8-12 hours, and calcined at 400-600° C. for 1-2 hours to obtain zinc oxide nanosheets.
本发明还提供了一种气敏元件,包括一个半导体元件,在所述的半导体元件的表面均匀涂敷上述的用于甲醛气体检测的复合气敏材料。The present invention also provides a gas-sensing element, which includes a semiconductor element, and the above-mentioned composite gas-sensing material for formaldehyde gas detection is evenly coated on the surface of the semiconductor element.
具体的,所述的半导体元件为氧化铝陶瓷管。Specifically, the semiconductor element is an alumina ceramic tube.
具体的,上述气敏元件的制备方法,包括如下步骤:Specifically, the preparation method of the above-mentioned gas sensor includes the following steps:
1)以氯化锌为原料,配制浓度为0.2mol/L的氯化锌溶液;1) taking zinc chloride as raw material, the preparation concentration is the zinc chloride solution of 0.2mol/L;
2)以六亚甲基四胺为原料,配制浓度为0.2mol/L的六亚甲基四胺溶液;2) Using hexamethylenetetramine as a raw material, prepare a hexamethylenetetramine solution with a concentration of 0.2mol/L;
3)将步骤1)的氯化锌溶液和步骤2)的六亚甲基四胺溶液按照体积比1:1均匀混合,置于60℃油浴中保温15-30min;3) Mix the zinc chloride solution in step 1) and the hexamethylenetetramine solution in step 2) uniformly at a volume ratio of 1:1, and place them in an oil bath at 60°C for 15-30 minutes;
4)取等摩尔量的醋酸锌和六亚甲基四胺,配制成醋酸锌浓度为0.2-0.3mol/L的溶液;4) Get zinc acetate and hexamethylenetetramine in equimolar amounts, and prepare a solution with zinc acetate concentration of 0.2-0.3mol/L;
5)将步骤3)的氯化锌溶液和步骤4)的醋酸锌溶液均匀混合,加入适量氨水,调节溶液pH值为6-8;5) uniformly mix the zinc chloride solution in step 3) and the zinc acetate solution in step 4), add an appropriate amount of ammonia water, and adjust the pH value of the solution to 6-8;
6)将步骤5)的溶液转移至水热反应釜中,置于高温鼓风干燥箱中,95℃反应2h,自然冷却至室温;6) Transfer the solution in step 5) to a hydrothermal reaction kettle, place it in a high-temperature blast drying oven, react at 95°C for 2 hours, and cool naturally to room temperature;
7)将步骤6)得到的固体粉末离心洗涤3-6遍,60-80℃干燥8-12h,400-600℃煅烧1-2h,得到氧化锌纳米片。7) The solid powder obtained in step 6) is centrifuged and washed 3-6 times, dried at 60-80° C. for 8-12 hours, and calcined at 400-600° C. for 1-2 hours to obtain zinc oxide nanosheets.
8)将步骤7)的氧化锌纳米片和石墨烯量子点材料按79%-99.99%:0.01%-30%的质量百分比例在液相中混合后搅拌5-10min;控制频率为300-400W进行超声4-6h;最后在60-80℃温度下干燥,得到复合气敏材料。8) Mix the zinc oxide nanosheets and graphene quantum dot materials in step 7) in the liquid phase according to the mass percentage of 79%-99.99%: 0.01%-30% and stir for 5-10min; the control frequency is 300-400W Perform ultrasonication for 4-6 hours; finally dry at a temperature of 60-80° C. to obtain a composite gas-sensing material.
9)将步骤8)的复合气敏材料加入乙醇调成糊状,均匀涂敷在半导体元件表面,获得气敏元件。9) Add ethanol to the composite gas-sensing material in step 8) to make a paste, and evenly apply it on the surface of the semiconductor element to obtain a gas-sensing element.
进一步的,对气敏元件进行焊接、老化、封装,获得用于检测甲醛的气敏器件。Further, the gas sensor is welded, aged and packaged to obtain a gas sensor for detecting formaldehyde.
本发明通过复合石墨烯量子点材料,有效提高金属氧化物对甲醛气体的选择性和灵敏度。The invention effectively improves the selectivity and sensitivity of metal oxides to formaldehyde gas by compounding the graphene quantum dot material.
本发明的气敏元件主要技术指标如下:The main technical indicators of the gas sensor of the present invention are as follows:
1.检测气体浓度:1ppm-100ppm;1. Detection of gas concentration: 1ppm-100ppm;
2.元件工作温度:110-160℃;2. Component working temperature: 110-160°C;
3.检测灵敏度(Ra/Rg):100ppm甲醛灵敏度为210;3. Detection sensitivity (Ra/Rg): 100ppm formaldehyde sensitivity is 210;
4.选择性:对100ppm乙醇、丙酮、氨气、苯的灵敏度均低于对甲醛的灵敏度;4. Selectivity: the sensitivity to 100ppm ethanol, acetone, ammonia, and benzene is lower than that to formaldehyde;
5.元件响应时间:小于45s;5. Component response time: less than 45s;
6.元件恢复时间:小于5s。6. Component recovery time: less than 5s.
本发明和已有技术相比,其技术进步是显著的。本发明制得的气敏元件对甲醛气体具有较高的灵敏度,且对干扰气体具有良好的选择性,另外还具有稳定性好、工作温度较低,制备工艺简单,经济实惠等优点,可应用于室内外的甲醛气体检测。Compared with the prior art, the technical progress of the present invention is remarkable. The gas sensor prepared by the invention has high sensitivity to formaldehyde gas, good selectivity to interfering gases, good stability, low working temperature, simple preparation process, economic benefits, etc., and can be applied Formaldehyde gas detection indoors and outdoors.
附图说明Description of drawings
图1为本发明的氧化锌纳米片的X射线衍射图。Figure 1 is an X-ray diffraction pattern of the zinc oxide nanosheets of the present invention.
图2为本发明的氧化锌纳米片的扫描电镜图。Fig. 2 is a scanning electron microscope image of the zinc oxide nanosheets of the present invention.
图3为以本发明方法制备的氧化锌纳米片复合石墨烯量子点及未复合的所制作的气敏元件对100ppm甲醛的响应恢复曲线。Fig. 3 is the response recovery curve to 100ppm formaldehyde of the zinc oxide nanosheet composite graphene quantum dot prepared by the method of the present invention and the gas sensor made without composite.
图4为复合20%石墨烯量子点和未复合石墨烯量子点所制作的气敏元件对100ppm甲醛的选择性比较图,由图可见,复合石墨烯量子点后氧化锌的灵敏度及选择性都有所提高。Fig. 4 is the selectivity comparison diagram of the gas sensor made of compounding 20% graphene quantum dots and non-compositing graphene quantum dots to 100ppm formaldehyde, as can be seen from the figure, the sensitivity and the selectivity of zinc oxide after compounding graphene quantum dots are both has seen an increase.
图5为复合不同比例的石墨烯量子点后所制作的气敏元件对100ppm甲醛的响应恢复曲线对比图,由图可见,复合石墨烯量子点后的气敏材料对甲醛的灵敏度均有所提高,20%石墨烯量子点和氧化锌纳米片复合性能最佳。Figure 5 is a comparison chart of the response recovery curves of the gas sensor made after compounding different proportions of graphene quantum dots to 100ppm formaldehyde. It can be seen from the figure that the sensitivity of the gas sensor after compounding graphene quantum dots to formaldehyde has been improved. , 20% graphene quantum dots and zinc oxide nanosheet composite performance is the best.
具体实施方式Detailed ways
以下用实例对本发明作进一步说明,但不限于此。The present invention will be further described below with examples, but not limited thereto.
实施例1:Example 1:
本发明提供的复合气敏材料为金属氧化物与石墨烯量子点材料按质量百分比计算,即石墨烯量子点材料占复合物总质量百分比分别为5%,10%,20%,30%;The composite gas-sensing material provided by the present invention is metal oxide and graphene quantum dot material calculated by mass percentage, that is, the graphene quantum dot material accounts for 5%, 10%, 20%, and 30% of the total mass percentage of the composite;
所述的金属氧化物为氧化锌;The metal oxide is zinc oxide;
所述的石墨烯量子点为氮掺杂石墨烯量子点;The graphene quantum dots are nitrogen-doped graphene quantum dots;
所述的氧化锌为规则的纳米片状结构,其尺寸大小为4-10μm,厚度为50-100nm;The zinc oxide is a regular nanosheet structure with a size of 4-10 μm and a thickness of 50-100 nm;
所述石墨烯量子点材料为圆形纳米片状结构,其尺寸大小为5-20nm,厚度为0.6-5nm。The graphene quantum dot material is a circular nanosheet structure with a size of 5-20nm and a thickness of 0.6-5nm.
上述复合气敏材料的制备方法,具体包括如下步骤:The preparation method of the above-mentioned composite gas-sensitive material specifically includes the following steps:
1、采用水热法制备氧化锌纳米片1. Preparation of ZnO nanosheets by hydrothermal method
a.取4mmol氯化锌溶于20ml去离子水中,搅拌10min,使氯化锌在溶液中均匀分散;取4mmol六亚甲基四胺溶于20ml去离子水中,搅拌10min,使六亚甲基四胺完全溶解。将两溶液混合,置于60℃油浴中保温15min;a. Dissolve 4mmol of zinc chloride in 20ml of deionized water and stir for 10min to uniformly disperse zinc chloride in the solution; dissolve 4mmol of hexamethylenetetramine in 20ml of deionized water and stir for 10min to make the hexamethylene Tetramine dissolves completely. Mix the two solutions and place them in an oil bath at 60°C for 15 minutes;
b.取8mmol醋酸锌和8mmol六亚甲基四胺溶于30ml去离子水中,搅拌15min,使醋酸锌在溶液中均匀分散,六亚甲基四胺完全溶解;b. Dissolve 8mmol of zinc acetate and 8mmol of hexamethylenetetramine in 30ml of deionized water, and stir for 15min to disperse the zinc acetate evenly in the solution and completely dissolve the hexamethylenetetramine;
c.将步骤a与步骤b的两种溶液混合,加入适量氨水,调整溶液pH值为7;c. Mix the two solutions of step a and step b, add an appropriate amount of ammonia water, and adjust the pH value of the solution to 7;
d.将步骤c的溶液转移至100ml水热反应釜,置于高温鼓风干燥箱中95℃保温2h,自然冷却至室温,将得到的沉淀用水和乙醇离心洗涤6遍后,80℃干燥12h,500℃煅烧1h,得到氧化锌纳米片。d. Transfer the solution in step c to a 100ml hydrothermal reaction kettle, place it in a high-temperature blast drying oven at 95°C for 2h, cool it down to room temperature naturally, wash the obtained precipitate with water and ethanol for 6 times, and dry it at 80°C for 12h , Calcined at 500°C for 1h to obtain ZnO nanosheets.
2、以柠檬酸为碳源,尿素为氮源制备氮掺杂石墨烯量子点。2. Using citric acid as carbon source and urea as nitrogen source to prepare nitrogen-doped graphene quantum dots.
3、复合气敏材料的制备3. Preparation of composite gas-sensing materials
将步骤1的氧化锌纳米片和步骤2的石墨烯量子点按石墨烯量子点占复合物总质量百分比为20%的比例混合加入去离子水中,搅拌10min,控制频率为400W,超声6h,然后控制温度80℃干燥2h,得到复合气敏材料,即石墨烯量子点/氧化锌复合气敏材料。The zinc oxide nanosheets of step 1 and the graphene quantum dots of step 2 are mixed into deionized water according to the ratio of graphene quantum dots accounting for 20% of the total mass percentage of the composite, stirred for 10min, controlled frequency is 400W, ultrasonic 6h, and then Control the temperature at 80° C. and dry for 2 hours to obtain a composite gas-sensing material, that is, a graphene quantum dot/zinc oxide composite gas-sensing material.
进一步的,将复合材料加入乙醇制成浆料,将浆料均匀涂敷在氧化铝陶瓷管表面,制得气敏元件。Further, the composite material is added with ethanol to make a slurry, and the slurry is evenly coated on the surface of the alumina ceramic tube to prepare a gas sensor.
进一步的,按旁热式半导体气敏元件制作工艺对气敏元件进行焊接、老化、封装、制得气敏器件。Further, the gas sensor is welded, aged, packaged according to the manufacturing process of the side-heating semiconductor gas sensor, and the gas sensor is manufactured.
上述所得的氧化锌纳米片通过X射线衍射进行表征,参见图1。由图1可见,该氧化锌纳米片为纤锌矿结构。参见图2(a、b),为氧化锌纳米片的扫描电镜图。由图2可见,该氧化锌纳米片尺寸约为6μm,厚度约为90nm。气敏性能通过静态配气法,在CGS-8气敏元件测试系统上进行气敏性能测试。参见图3,为氧化锌纳米片复合石墨烯量子点及未复合的所制作的气敏元件对100ppm甲醛的响应恢复曲线。由图3可见,气敏元件对100ppm甲醛气体具有较快的响应恢复和较高的灵敏度。参见图4,为复合20%石墨烯量子点和未复合石墨烯量子点所制作的气敏元件对100ppm甲醛的选择性比较图。由图4可见,复合20%石墨烯量子点的氧化锌对甲醛气体的灵敏度和选择性均有所提高。参见图5,为复合不同比例的石墨烯量子点后所制作的气敏元件对100ppm甲醛的响应恢复曲线对比图,由图5可见,复合石墨烯量子点后的氧化锌对甲醛的灵敏度均有所提高,复合20%石墨烯量子点的氧化锌纳米片性能最佳。The zinc oxide nanosheets obtained above were characterized by X-ray diffraction, see FIG. 1 . It can be seen from FIG. 1 that the zinc oxide nanosheets have a wurtzite structure. Referring to Fig. 2 (a, b), it is a scanning electron microscope image of zinc oxide nanosheets. It can be seen from FIG. 2 that the zinc oxide nanosheets have a size of about 6 μm and a thickness of about 90 nm. Gas-sensing performance is tested on the CGS-8 gas-sensing element testing system through the static gas distribution method. Referring to Fig. 3, it is the response recovery curve of zinc oxide nanosheet composite graphene quantum dots and uncomposited gas sensor to 100ppm formaldehyde. It can be seen from Figure 3 that the gas sensor has a faster response recovery and higher sensitivity to 100ppm formaldehyde gas. Referring to FIG. 4 , it is a comparison diagram of selectivity of 100ppm formaldehyde for the gas sensor made by compounding 20% graphene quantum dots and non-compositing graphene quantum dots. It can be seen from Figure 4 that the sensitivity and selectivity of zinc oxide compounded with 20% graphene quantum dots to formaldehyde gas are improved. Referring to Figure 5, it is a comparison chart of the response recovery curves of the gas sensor made after compounding different proportions of graphene quantum dots to 100ppm formaldehyde, as can be seen from Figure 5, the zinc oxide after compounding graphene quantum dots has a certain The performance of zinc oxide nanosheets compounded with 20% graphene quantum dots is the best.
综上所述,所得的氧化锌纳米片与石墨烯量子点的复合材料相较于纯的氧化锌材料对甲醛气体具有更高的灵敏度,对干扰气体具有更好的选择性,石墨烯量子点对甲醛气体检测具有良好的增敏作用。In summary, the resulting composite of zinc oxide nanosheets and graphene quantum dots has higher sensitivity to formaldehyde gas and better selectivity to interfering gases than pure zinc oxide materials. It has a good sensitization effect on the detection of formaldehyde gas.
本发明的复合气敏材料仅以金属氧化物氧化锌和氮掺杂石墨烯量子点复合所得的材料为例,但并不限制其他金属氧化物和其他石墨烯量子点材料所得的复合气敏材料。The composite gas-sensing material of the present invention only takes the material obtained by compounding metal oxide zinc oxide and nitrogen-doped graphene quantum dots as an example, but does not limit the composite gas-sensing material obtained by other metal oxides and other graphene quantum dot materials .
实施例2:本实施例与实施例1基本相同,所不同的是:步骤3中石墨烯量子点占复合物总质量百分比为5%。Embodiment 2: This embodiment is basically the same as Embodiment 1, except that in step 3, graphene quantum dots account for 5% of the total mass of the composite.
实施例3:本实施例与实例1基本相同,所不同的是:步骤3中石墨烯量子点占复合物总质量百分比为10%。Embodiment 3: This embodiment is basically the same as Example 1, except that in step 3, graphene quantum dots account for 10% of the total mass of the composite.
实施例4:本实施例与实例1基本相同,所不同的是:步骤3中石墨烯量子点占复合物总质量百分比为30%。Embodiment 4: This embodiment is basically the same as Example 1, except that in step 3, graphene quantum dots account for 30% of the total mass of the composite.
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