CN109062012A - LED condensation light source and the exposure light source system for using LED condensation light source - Google Patents

LED condensation light source and the exposure light source system for using LED condensation light source Download PDF

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Publication number
CN109062012A
CN109062012A CN201811016219.5A CN201811016219A CN109062012A CN 109062012 A CN109062012 A CN 109062012A CN 201811016219 A CN201811016219 A CN 201811016219A CN 109062012 A CN109062012 A CN 109062012A
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China
Prior art keywords
light source
led
led lamp
lamp beads
mounting plate
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CN201811016219.5A
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Chinese (zh)
Inventor
余燕青
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LI-GREAT OPTOELECTRONICS TECHNOLOGY Co Ltd
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LI-GREAT OPTOELECTRONICS TECHNOLOGY Co Ltd
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Priority to CN201811016219.5A priority Critical patent/CN109062012A/en
Publication of CN109062012A publication Critical patent/CN109062012A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

本发明涉及LED聚光光源，LED聚光光源器件主体具有前端安装板、驱动板和外壳，前端安装板上安装多个LED灯珠，LED灯珠电性连接驱动板，多个LED灯珠点亮后在设计焦点叠加集合成聚光光源的光斑。使用LED聚光光源的曝光光源系统中，光斑经过蝇眼透镜组积分分配，形成均匀多点光源，冷镜吸收蝇眼透镜组透射的多点光源，反射到球面镜上，球面镜吸收多点光源反射积分形成面光源，投射到工作台上进行曝光作业。本发明利用多个LED的发光点叠加集合成聚光光源的光斑，达到曝光要求的光照强度，解决了灯珠衰减不一致或某个LED灯失效而导致的曝光作业问题，获得均匀的曝光光源，提升曝光效率，适合柔性精细线路制作。

The invention relates to an LED concentrating light source. The main body of the LED concentrating light source device has a front-end mounting plate, a drive plate and a casing. A plurality of LED lamp beads are installed on the front-end mounting plate. The LED lamp beads are electrically connected to the drive plate. After brightening, superimpose and gather the light spots at the design focus to form a spotlight source. In the exposure light source system using LED spotlight light source, the light spot is distributed through the fly-eye lens group to form a uniform multi-point light source. The cold mirror absorbs the multi-point light source transmitted by the fly-eye lens group and reflects it to the spherical mirror. The spherical mirror absorbs the reflection of the multi-point light source. The integral forms a surface light source, which is projected onto the workbench for exposure operations. The present invention utilizes the light-emitting points of multiple LEDs to be superimposed and assembled to form a light spot of a concentrated light source to achieve the light intensity required for exposure, solve the problem of exposure operation caused by inconsistent attenuation of lamp beads or failure of a certain LED lamp, and obtain a uniform exposure light source. Improve exposure efficiency, suitable for flexible and fine line production.

Description

LED condensation light source and the exposure light source system for using LED condensation light source
Technical field
The present invention relates to exposure sources technical fields, in particular for the light-source structure of the exposure sources of flexible base board.
Background technique
LED lamp is small in size, light-weight at present, and epoxy resin encapsulation can bear high-strength mechanical impact and vibration, be not easy It is broken.Average life span was up to 100,000 hours.LED lamp service life was up to 5 ~ 10 years；LED light reaction speed is fast simultaneously, can be in height Frequency operates, and in the case where same illuminating effect, power consumption is a ten thousandth of incandescent lamp bulb, the half of fluorescent tube, by There are environmental protection and energy saving in LED light source, occur many mercury lamps for using LED light source to replace highly energy-consuming in the market as exposure light source.Mesh Preceding LED exposure light source use LED light lattice arrangement, when scanning mode is exposed operation, due to each LED light illumination angle by Lamp front butterfly mirror influences, and when lamp bead decaying inconsistent or some LED light failure in LED dot matrix, all exists between dot matrix and exposes The light source uniformity difference defect inconsistent with parallel half-angle, can not make fine electronic circuit, cause product quality consistency Difference, capacity efficiency are low.
Summary of the invention
It is an object of the invention to overcome the deficiencies of existing technologies, a kind of LED condensation light source is provided, utilizes multiple LED's Luminous point carries out superposition around the center of circle and forms hot spot, and hot spot reaches the intensity of illumination that exposure requires.
Still a further object of the present invention is to provide a kind of exposure light source system using LED condensation light source, using environmental protection and energy saving LED condensation light source replace traditional mercury lamp light source, absorbed by the optical frames specially designed and conversion, realize that temperature is low, uniform Property the good and consistent directional light exposure light source of parallel half-angle, be more suitable for flexible fine-line and make.
To reach above-mentioned first purpose, the present invention adopts the following technical scheme:
A kind of LED condensation light source, including LED condensation light source device main body, the LED condensation light source device main body are installed with front end Plate, driving plate and shell, shell provide the installation position of front end mounting plate and driving plate, install multiple LED light on the mounting plate of front end Pearl, LED lamp bead are electrically connected driving plate, and multiple LED lamp beads in design focus superposition assemble the hot spot of condensation light source after lighting.
Above scheme is further: the shell is equipped with fan, and fan is electrically connected driving plate, and fan, which is given, to be excluded LED lamp bead lights the heat generated when work.
Above scheme is further: two groups up and down that the interior of shell forms subregion are behave affectedly, and driving plate is mounted on Group behave affectedly and connects power supply by power connector, and front end mounting plate is mounted on the following group and behave affectedly, and fan is distributed under shell and assembles The periphery of chamber.
Above scheme is further: the quantity of LED lamp bead is 10-100 on the front end mounting plate, all LED lamp beads It is distributed by multi-layer discs shape, the LED lamp bead for occupying the center of circle is arranged vertically, and the relatively tilting angle of other LED lamp beads.
To reach above-mentioned second purpose, the present invention adopts the following technical scheme:
A kind of exposure light source system using LED condensation light source, the exposure light source system have LED condensation light source device main body, Fly lens group, Cold Mirrors and spherical mirror, LED condensation light source device main body have front end mounting plate, driving plate and shell, and shell mentions For the installation position of front end mounting plate and driving plate, multiple LED lamp beads are installed on the mounting plate of front end, LED lamp bead is electrically connected driving Plate, multiple LED lamp beads in design focus superposition assemble the hot spot of condensation light source after lighting；The hot spot is by fly lens group product Distribution, forms uniform multi-point source, and Cold Mirrors absorbs the multi-point source of fly lens group transmission, is reflected on spherical mirror, spherical surface Mirror absorbs multi-point source reflection integral and forms area source, is incident upon on following workbench.
Above scheme is further: the LED condensation light source device main body, fly lens group and Cold Mirrors setting are the same as always On line, fly lens group is located on the position for designing focus superposition set after multiple LED lamp beads are lighted.
Above scheme is further: the shell is equipped with fan, and fan is electrically connected driving plate, and fan, which is given, to be excluded LED lamp bead lights the heat generated when work.
Above scheme is further: two groups up and down that the interior of shell forms subregion are behave affectedly, and driving plate is mounted on Group behave affectedly and connects power supply by power connector, and front end mounting plate is mounted on the following group and behave affectedly, and fan is distributed under shell and assembles The periphery of chamber.
Above scheme is further: the quantity of LED lamp bead is 10-100 on the front end mounting plate, all LED lamp beads By discoid distribution, the LED lamp bead for occupying the center of circle is arranged vertically, and the relatively tilting angle of other LED lamp beads.
The present invention assembles the hot spot of condensation light source using the luminous point of multiple LED in design focus superposition, reaches exposure It is required that intensity of illumination, solve the problems, such as exposure operation caused by lamp bead decaying inconsistent or some LED light failure, obtain equal Even exposure light source promotes exposure efficiency.
Further advantage of the present invention is to provide a kind of exposure light source system using LED condensation light source, using environmental protection and energy saving LED condensation light source replaces traditional mercury lamp light source, absorbs by the optical frames specially designed and conversion, realizes that temperature is low, uniformity Well with the consistent directional light exposure light source of parallel half-angle, it is more suitable for flexible fine-line production.
Detailed description of the invention:
Attached drawing 1 is LED condensation light source structural schematic diagram of the invention；
Attached drawing 2 is the exposure light source system provided by the invention combined using LED condensation light source
Specific embodiment:
It is described further below with reference to technical effect of the attached drawing to design of the invention, specific structure and generation, with abundant Ground understands the purpose of the present invention, feature and effect.
As shown in fig.1, the present invention is in relation to a kind of LED condensation light source, including LED condensation light source device main body 1, the LED Condensation light source device main body 1 has front end mounting plate 11, driving plate 13 and shell 14, and shell 14 provides front end mounting plate 11 and drives The installation position of movable plate 13 installs multiple LED lamp beads 12 on front end mounting plate 11, and LED lamp bead 12 is electrically connected driving plate 13, multiple LED lamp bead 12 in design focus superposition assembles the hot spot of condensation light source after lighting.Hot spot reaches the intensity of illumination that exposure requires, It solves the problems, such as exposure operation caused by lamp bead decaying inconsistent or some LED light failure, obtains uniform exposure light source, mention Rise exposure efficiency.
Shown in Fig. 1, in the present embodiment, the shell 14 is equipped with fan 16, and fan 16 is electrically connected driving plate 13, fan 16, which give exclusion LED lamp bead 12, lights the heat generated when work, and the work of 12 constant temperature of effective protection LED lamp bead reduces temperature pair The influence of LED lamp bead emission wavelength.Further, two groups up and down for subregion being formed inside the shell 14 are behave affectedly, driving plate 13 are mounted on over-assemble chamber and connect power supply by power connector 15, and front end mounting plate 11 is mounted on the following group and behave affectedly, fan 16 It is distributed in the periphery that 14 the following group of shell is behave affectedly.Since driving plate 13 is far from front end mounting plate 11, thus reduces LED lamp bead 12 and light Influence of the heat generated when work to driving plate 13, constant 13 guarantee of power LED condensation light source of driving plate use safer And long service life.
Shown in Fig. 1, this quantity for implementing LED lamp bead 12 on preferred front end mounting plate 11 is 10-100, all LED light Pearl 12 is distributed by multi-layer discs shape, and the LED lamp bead 12 for occupying the center of circle is arranged vertically, and other LED lamp beads 12 relatively tilting one Angle, the light of the LED lamp bead 12 after lighting assemble the hot spot of condensation light source in design focus superposition, obtain preferably exposure Intensity.Driving plate 13 controls the switch of LED lamp bead 12 and brightness and the control operation heat dissipation of high-power fan 16, guarantees and optimize LED The luminous work of lamp bead 12.
As shown in fig.2, the present invention also provides a kind of exposure light source system combined using LED condensation light source, the exposure Light-source system has LED condensation light source device main body 1, fly lens group 2, Cold Mirrors 3 and spherical mirror 4, LED condensation light source device master Body 1 has front end mounting plate 11, driving plate 13 and shell 14, and shell 14 provides the installation of front end mounting plate 11 and driving plate 13 , multiple LED lamp beads 12 are installed, LED lamp bead 12 is electrically connected driving plate 13,12 points of multiple LED lamp beads on front end mounting plate 11 The hot spot of condensation light source is assembled after bright in design focus superposition；The hot spot is formed uniform by the integral distribution of fly lens group 2 Multi-point source, Cold Mirrors 3 absorb the multi-point source that fly lens group 2 transmits, are reflected on spherical mirror 4, and spherical mirror 4 absorbs multiple spot light Source reflection integral forms area source, is incident upon on following workbench 5, is exposed operation.
Shown in Fig. 2, in the present embodiment, the LED condensation light source device main body 1, fly lens group 2 and the setting of Cold Mirrors 3 exist On same straight line, fly lens group 2 is located on the position for designing focus superposition set after multiple LED lamp beads 12 are lighted.Fly's eye is saturating Microscope group 2 is distributed by integrating to hot spot, forms uniform multi-point source, and acquisition temperature is low, uniformity is good consistent with parallel half-angle Directional light exposure light source is more suitable for flexible fine-line production.
Shown in Fig. 1, in the present embodiment, the shell 14 is equipped with fan 16, and fan 16 is electrically connected driving plate 13, fan 16, which give exclusion LED lamp bead 12, lights the heat generated when work.Two assemblings up and down of subregion are formed inside the shell 14 Chamber, driving plate 13 are mounted on over-assemble chamber and connect power supply by power connector 15, and front end mounting plate 11 is mounted on lower assembling Chamber, fan 16 are distributed in the periphery that 14 the following group of shell is behave affectedly.The structure makes driving plate 13 far from front end mounting plate 11, thus reduces LED lamp bead 12 lights influence of the heat generated when work to driving plate 13, constant 13 guarantee of power LED optically focused light of driving plate Source uses safer and long service life.
Use safer and long service life.The quantity of LED lamp bead 12 is 10-100 on the front end mounting plate 11, institute There is LED lamp bead 12 to be distributed by multi-layer discs shape, the LED lamp bead 12 for occupying the center of circle is arranged vertically, and other LED lamp beads 12 are opposite A tilting angle, the light of the LED lamp bead 12 after lighting assemble the hot spot of condensation light source in design focus superposition, obtain preferable Exposure intensity.Driving plate 13 control LED lamp bead 12 switch and brightness and control high-power fan 16 operation heat dissipation, guarantee and Optimize the luminous work of LED lamp bead 12.
LED lamp bead 12 in this example presses the evenly distributed installation of angle design around central tendency, issues fixed wave length Ultraviolet light, the focus of collocation design convex lens realizes that multiple 12 lights of LED lamp bead exist at hot spot in LED lamp bead 12 Design focus superposition assembles the hot spot of condensation light source, obtains preferable exposure intensity.Fly lens group 2 is poly- for receiving LED The hot spot of the aggregation of radiant 1 simultaneously carries out optical integration distribution, forms uniform multi-point source；Cold Mirrors 3 receives fly lens group 2 and transmits Multi-point source out is reflected to change the propagation angle of multi-point source by Cold Mirrors 3, realizes the steering of optical path direction；Work as ball Face mirror 4 receives the multi-point source that Cold Mirrors 3 reflects, and forms uniform area light source by the reflection integral of spherical mirror 4, projects exposure On station 5, exposure operation is realized.Traditional mercury lamp light source is replaced using the LED condensation light source of environmental protection and energy saving, and by special design Optical frames absorb and conversion, obtain that temperature is low, uniformity is good with the consistent directional light exposure light source of parallel half-angle, be more suitable for soft Property fine-line production.
Certainly, the above combination embodiment elaborates the present invention, only technical concept to illustrate the invention and Feature, its object is to allow person skilled in the art to understand the contents of the present invention and to be implemented, therefore, it is all according to the present invention The equivalent change or modification that Spirit Essence is done, should be covered by the scope of protection of the present invention.

Claims (9)

1.LED聚光光源，包括LED聚光光源器件主体（1），其特征在于：该LED聚光光源器件主体（1）具有前端安装板（11）、驱动板（13）和外壳（14），外壳（14）提供前端安装板（11）和驱动板（13）的安装位，前端安装板（11）上安装多个LED灯珠（12），LED灯珠（12）电性连接驱动板（13），多个LED灯珠（12）点亮后在设计焦点叠加集合成聚光光源的光斑。1. LED concentrating light source, including LED concentrating light source device main body (1), characterized in that: the LED concentrating light source device main body (1) has a front mounting plate (11), a driving board (13) and a housing (14) , the housing (14) provides mounting positions for the front mounting plate (11) and the driver board (13), and multiple LED lamp beads (12) are installed on the front mounting plate (11), and the LED lamp beads (12) are electrically connected to the driver board (13), after being lit, multiple LED lamp beads (12) are superimposed and assembled at the design focus to form a light spot of a spotlight light source. 2.根据权利要求1所述的LED聚光光源，其特征在于：所述外壳（14）上设有风扇（16），风扇（16）电性连接驱动板（13），风扇（16）给予排除LED灯珠（12）点亮工作时产生的热量。2. The LED spotlight light source according to claim 1, characterized in that: the housing (14) is provided with a fan (16), the fan (16) is electrically connected to the drive board (13), and the fan (16) gives Get rid of the heat generated when the LED lamp bead (12) lights up. 3.根据权利要求1或2所述的LED聚光光源，其特征在于：所述外壳（14）内部形成分区的上下两个组装腔，驱动板（13）安装在上组装腔并通过电源连接器（15）连接电源，前端安装板（11）安装在下组装腔，风扇（16）分布在外壳（14）下组装腔的外围。3. The LED spotlight light source according to claim 1 or 2, characterized in that two upper and lower assembly cavities are formed inside the housing (14), and the driving board (13) is installed in the upper assembly cavity and connected to the power supply. The device (15) is connected to the power supply, the front mounting plate (11) is installed in the lower assembly cavity, and the fans (16) are distributed on the periphery of the lower assembly cavity of the casing (14). 4.根据权利要求1所述的LED聚光光源，其特征在于：所述前端安装板（11）上LED灯珠（12）的数量为10-100颗，所有LED灯珠（12）按多层圆盘状分布，位居圆心的LED灯珠（12）垂直布置，而其它的LED灯珠（12）相对斜置一角度。4. The LED spotlight light source according to claim 1, characterized in that: the number of LED lamp beads (12) on the front mounting plate (11) is 10-100, and all LED lamp beads (12) are as many as The layers are distributed in a disk shape, and the LED lamp beads (12) located in the center of the circle are arranged vertically, while the other LED lamp beads (12) are relatively inclined at an angle. 5.使用LED聚光光源的曝光光源系统，其特征在于：该曝光光源系统具有LED聚光光源器件主体（1）、蝇眼透镜组（2）、冷镜（3）及球面镜（4），LED聚光光源器件主体（1）具有前端安装板（11）、驱动板（13）和外壳（14），外壳（14）提供前端安装板（11）和驱动板（13）的安装位，前端安装板（11）上安装多个LED灯珠（12），LED灯珠（12）电性连接驱动板（13），多个LED灯珠（12）点亮后在设计焦点叠加集合成聚光光源的光斑；该光斑经过蝇眼透镜组（2）积分分配，形成均匀多点光源，冷镜（3）吸收蝇眼透镜组（2）透射的多点光源，反射到球面镜（4）上，球面镜（4）吸收多点光源反射积分形成面光源，投射在下面的工作台（5）上。5. An exposure light source system using an LED spotlight light source, characterized in that the exposure light source system has an LED spotlight light source device body (1), a fly-eye lens group (2), a cold mirror (3) and a spherical mirror (4), The main body (1) of the LED spotlight light source device has a front mounting plate (11), a driving board (13) and a casing (14). The casing (14) provides the installation positions for the front mounting plate (11) and the driving Multiple LED lamp beads (12) are installed on the mounting plate (11), and the LED lamp beads (12) are electrically connected to the driver board (13). After being lit, multiple LED lamp beads (12) are superimposed and gathered at the design focus to form a spotlight The light spot of the light source; the light spot is integrally distributed by the fly-eye lens group (2) to form a uniform multi-point light source, and the cold mirror (3) absorbs the multi-point light source transmitted by the fly-eye lens group (2) and reflects it to the spherical mirror (4), The spherical mirror (4) absorbs the reflection integral of the multi-point light source to form a surface light source, which is projected on the workbench (5) below. 6.根据权利要求5所述的使用LED聚光光源的曝光光源系统，其特征在于：所述LED聚光光源器件主体（1）、蝇眼透镜组（2）及冷镜（3）设置在同一直线上，蝇眼透镜组（2）位于多个LED灯珠（12）点亮后设计焦点叠加集合的位置上。6. The exposure light source system using LED concentrating light source according to claim 5, characterized in that: the LED concentrating light source device main body (1), fly-eye lens group (2) and cold mirror (3) are set at On the same straight line, the fly-eye lens group (2) is located at the position where a plurality of LED lamp beads (12) are lit to design focus stacking sets. 7.根据权利要求5所述的使用LED聚光光源的曝光光源系统，其特征在于：所述外壳（14）上设有风扇（16），风扇（16）电性连接驱动板（13），风扇（16）给予排除LED灯珠（12）点亮工作时产生的热量。7. The exposure light source system using LED spot light source according to claim 5, characterized in that: the housing (14) is provided with a fan (16), and the fan (16) is electrically connected to the drive board (13), The fan (16) provides and removes the heat generated when the LED lamp beads (12) light up and work. 8.根据权利要求5所述的使用LED聚光光源的曝光光源系统，其特征在于：所述外壳（14）内部形成分区的上下两个组装腔，驱动板（13）安装在上组装腔并通过电源连接器（15）连接电源，前端安装板（11）安装在下组装腔，风扇（16）分布在外壳（14）下组装腔的外围。8. The exposure light source system using LED concentrating light source according to claim 5, characterized in that: the casing (14) forms two upper and lower assembly cavities in partitions, and the driving board (13) is installed in the upper assembly cavity and The power supply is connected through the power connector (15), the front mounting plate (11) is installed in the lower assembly cavity, and the fans (16) are distributed on the periphery of the lower assembly cavity of the casing (14). 9.根据权利要求5所述的使用LED聚光光源的曝光光源系统，其特征在于：所述前端安装板（11）上LED灯珠（12）的数量为10-100颗，所有LED灯珠（12）按多层圆盘状分布，位居圆心的LED灯珠（12）垂直布置，而其它的LED灯珠（12）相对斜置一角度。9. The exposure light source system using LED spot light source according to claim 5, characterized in that: the number of LED lamp beads (12) on the front mounting plate (11) is 10-100, and all LED lamp beads (12) Distributed in a multi-layer disk shape, the LED lamp beads (12) located in the center of the circle are arranged vertically, while the other LED lamp beads (12) are placed obliquely at an angle relative to each other.
CN201811016219.5A 2018-09-02 2018-09-02 LED condensation light source and the exposure light source system for using LED condensation light source Pending CN109062012A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113798205A (en) * 2021-09-24 2021-12-17 深圳市华腾半导体设备有限公司 An alignment detection device and a chip sorting device with the same
CN116224729A (en) * 2023-05-08 2023-06-06 广东科视光学技术股份有限公司 Adjustable device of mixed light source of photoetching machine

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102449552A (en) * 2010-02-24 2012-05-09 恩斯克科技有限公司 Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate
CN202581108U (en) * 2012-06-05 2012-12-05 成都市锦华实用电器研究所有限公司 Obstruction lamp capable of ejecting medium-light-intensity white flash in ring-shaped and 360-degree mode
CN204129435U (en) * 2014-11-03 2015-01-28 中国科学院重庆绿色智能技术研究院 The ultraviolet LED photohead of high evenness
CN104483813A (en) * 2014-12-01 2015-04-01 东莞科视自动化科技有限公司 Exposure machine light source transformation method and UVLED light source mechanism
CN205539935U (en) * 2016-04-12 2016-08-31 中国科学院重庆绿色智能技术研究院 UVLED light structures and parallel light exposure machine
CN206573849U (en) * 2016-10-28 2017-10-20 张家港奇点光电科技有限公司 UV LED/light sources, system and parallel exposing machine
CN208969425U (en) * 2018-09-02 2019-06-11 东莞市友辉光电科技有限公司 LED condensation light source and the exposure light source system for using LED condensation light source

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102449552A (en) * 2010-02-24 2012-05-09 恩斯克科技有限公司 Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate
CN202581108U (en) * 2012-06-05 2012-12-05 成都市锦华实用电器研究所有限公司 Obstruction lamp capable of ejecting medium-light-intensity white flash in ring-shaped and 360-degree mode
CN204129435U (en) * 2014-11-03 2015-01-28 中国科学院重庆绿色智能技术研究院 The ultraviolet LED photohead of high evenness
CN104483813A (en) * 2014-12-01 2015-04-01 东莞科视自动化科技有限公司 Exposure machine light source transformation method and UVLED light source mechanism
CN205539935U (en) * 2016-04-12 2016-08-31 中国科学院重庆绿色智能技术研究院 UVLED light structures and parallel light exposure machine
CN206573849U (en) * 2016-10-28 2017-10-20 张家港奇点光电科技有限公司 UV LED/light sources, system and parallel exposing machine
CN208969425U (en) * 2018-09-02 2019-06-11 东莞市友辉光电科技有限公司 LED condensation light source and the exposure light source system for using LED condensation light source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113798205A (en) * 2021-09-24 2021-12-17 深圳市华腾半导体设备有限公司 An alignment detection device and a chip sorting device with the same
CN116224729A (en) * 2023-05-08 2023-06-06 广东科视光学技术股份有限公司 Adjustable device of mixed light source of photoetching machine
CN116224729B (en) * 2023-05-08 2023-07-04 广东科视光学技术股份有限公司 Adjustable device of mixed light source of photoetching machine

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