CN109682995A - A kind of scattering formula low-temperature scanning near-field optical microscope - Google Patents
A kind of scattering formula low-temperature scanning near-field optical microscope Download PDFInfo
- Publication number
- CN109682995A CN109682995A CN201910053045.8A CN201910053045A CN109682995A CN 109682995 A CN109682995 A CN 109682995A CN 201910053045 A CN201910053045 A CN 201910053045A CN 109682995 A CN109682995 A CN 109682995A
- Authority
- CN
- China
- Prior art keywords
- platform
- scanning
- sample
- probe
- needle tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 21
- 239000000523 sample Substances 0.000 claims abstract description 90
- 238000000605 extraction Methods 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims abstract description 12
- 238000010168 coupling process Methods 0.000 claims abstract description 12
- 238000005859 coupling reaction Methods 0.000 claims abstract description 12
- 230000007246 mechanism Effects 0.000 claims description 36
- 230000035939 shock Effects 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 abstract description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 11
- 230000006872 improvement Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical group [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- -1 pedestal Chemical compound 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Microscoopes, Condenser (AREA)
Abstract
本发明公开了一种散射式低温扫描近场光学显微镜，包括冷台、设置于冷台底部的样品扫描平台和探针扫描平台、抛物面镜平台以及底座，所述样品扫描平台包括扫描台，扫描台上设置有弹性夹片和样品架，样品架可插拔的夹于扫描台和弹性夹片之间以便于更换样品；所述探针扫描平台位于样品扫描平台相对一侧，包括连接于冷台底部的针尖耦合提取平台和针尖托，针尖托上固定有探针，针尖托以磁吸式连接于针尖耦合提取平台并且与扫描台相对以便于更换探针对样品进行扫描；所述抛物面镜平台设置于底座上以会聚外部激光于探针处并收集带有样品信息的散射光于外部探测器。本发明可以同时实现原位换探针和换样品，操作简单兼容性强。
The invention discloses a scattering type low-temperature scanning near-field optical microscope, comprising a cold stage, a sample scanning platform and a probe scanning platform arranged at the bottom of the cold platform, a parabolic mirror platform and a base. An elastic clip and a sample holder are arranged on the stage, and the sample holder is pluggably clamped between the scanning stage and the elastic clip to facilitate sample replacement; the probe scanning platform is located on the opposite side of the sample scanning platform, including a The needle tip is coupled to the extraction platform and the needle tip holder at the bottom of the table, a probe is fixed on the needle tip holder, and the needle tip holder is magnetically connected to the needle tip coupling extraction platform and is opposite to the scanning table so that the probe can be replaced to scan the sample; the parabolic mirror The platform is arranged on the base to focus external laser light on the probe and collect scattered light with sample information on the external detector. The present invention can realize in-situ probe replacement and sample replacement at the same time, with simple operation and strong compatibility.
Description
Technical field
The invention belongs near field optic Instrument technology fields, and in particular to a kind of scattering formula low temperature scanning near field optic is micro-
Mirror.
Background technique
With being constantly progressive for modern micro-nano technology technology and scanning probe microscopy, near-field optical microscope is not yet
There is the near-field optical microscope of various feedback forms and working method in disconnected development, these near-field optical microscope obtain closely
For the resolution ratio of field optics image compared with being difficult to break through the diffraction limit of light, obtained resolution ratio is lower.In order to by resolution ratio into
One step improves, scientists by the AFM probe of metallization, obtained in the way of scattering resolution ratio in~10nm or so or
Better near field optic image, thus the research in the near field optic field pushed, meanwhile, the breakthrough of high vacuum and liquid helium region
The near field imaging system of diffraction limit also has important application in fields such as physics, chemistry, material, biology, national defence, information.
But currently, the scattering formula that can obtain liquid helium region is infrared or far infrared near field imaging system only has a company
It is making, product cannot achieve needle exchange in situ or vary product, and its scattering formula near field imaging system cannot be according to the actual situation
Each platform is positioned, working environment and vacuum degree do not reach the requirement of ultrahigh vacuum yet, in research application and reality
It is all very inconvenient in the operation of border, adverse effect is also generated to experimental data.
Therefore, it is necessary to propose expansible, compatible scattering under easy to operate, the extremely low mild ultra-high vacuum environment of one kind
Formula low-temperature scanning near-field optical microscope.
Summary of the invention
The present invention is directed to the situation of the prior art, overcomes drawbacks described above, proposes a kind of scattering formula low temperature scanning near field optic
Microscope.
The present invention use following technical scheme, a kind of scattering formula low-temperature scanning near-field optical microscope, including cold bench,
Sample Scan platform, probe scanning platform, paraboloidal mirror platform and pedestal, in which:
The Sample Scan platform is set to cold bench bottom, and the Sample Scan platform includes scan table, the scan table
On be provided with elastic clip and specimen holder, the specimen holder is pluggable to be sandwiched between scan table and elastic clip in order to replace
Sample；
The probe scanning platform is set to cold bench bottom and is located at Sample Scan platform opposite side, the probe scanning
Platform includes the needle point coupling extraction platform and needle point support for being connected to cold bench bottom, is fixed with probe in the needle point support, described
Needle point support is connected to needle point coupling extraction platform and opposite with the scan table in order to replacing probe pair with magnetic-type
Sample is scanned；
The paraboloidal mirror platform is set on pedestal, and the paraboloidal mirror platform is for assembling external laser at probe
And the scattering light with sample message is collected in outer locator.
As a further improvement of the above technical scheme, the Sample Scan platform further includes having to be fixed on cold bench bottom
First XYZ mobile mechanism, the scan table are connected to the first XYZ mobile mechanism and are driven and move in XYZ space.
As a further improvement of the above technical scheme, the probe scanning platform further includes be fixed on cold bench bottom
Two XYZ mobile mechanisms, the needle point coupling extraction platform are connected to the 2nd XYZ mobile mechanism and are driven in XYZ space
Interior movement is to adjust needle point support in the position of XYZ space.
As a further improvement of the above technical scheme, the paraboloidal mirror platform includes the 3rd XYZ mobile mechanism and throwing
Object plane mirror, the 3rd XYZ mobile mechanism are fixed on pedestal, and the paraboloidal mirror is connected to the 3rd XYZ mobile mechanism
And it is driven and is moved in XYZ space to assemble external laser at probe and collect the scattering light with sample message in outside
Detector.
As a further improvement of the above technical scheme, the paraboloidal mirror preferred dimension is off-axis no more than 1 inch
Paraboloidal mirror.
As a further improvement of the above technical scheme, the cold bench is fixed on external cryostat.
As a further improvement of the above technical scheme, shock-absorbing arms is also set up between the cold bench and pedestal.
A kind of scattering formula low-temperature scanning near-field optical microscope disclosed by the invention, the beneficial effect is that, in the present invention
Needle point support is fixed in a manner of magnetic, it can be achieved that needle exchange in situ and being applicable to various types of probes, and specimen holder passes through elasticity
Intermediate plate is fixed on scan table, while original position may be implemented and vary product, and compatibility easy to operate is strong；The configuration of the present invention is simple configuration is small
Ingeniously, the intracavitary use of ultrahigh vacuum, strong applicability can be placed directly in；Using three XYZ mobile mechanisms to each flat in the present invention
Platform carries out spatial position adjustment and paraboloidal mirror is using off axis paraboloidal mirror convergent laser and collection scattering light, can effectively mention
Take near-field signals, signal-to-noise ratio with higher；Shock-absorbing arms is also set up between cold bench and pedestal, so that present invention work is in low vibration
Environment, experimental result are reliable.
Detailed description of the invention
Fig. 1 is the general structure schematic diagram of the preferred embodiment of the present invention.
Fig. 2 is a visual angle schematic diagram of Sample Scan platform in the present invention.
Fig. 3 is the partial enlarged view of part A in Fig. 1.
Appended drawing reference includes: 1- cold bench, 2- Sample Scan platform, 22- scan table, the first XYZ mobile mechanism of 21-, 23- bullet
Property intermediate plate, 24- specimen holder, 25- lug, 3- probe scanning platform, the 2nd XYZ mobile mechanism of 31-, the coupling of 32- needle point is extracted flat
Platform, 33- needle point support, 34- magnet, 4- paraboloidal mirror platform, the 3rd XYZ mobile mechanism of 41-, 42- paraboloidal mirror, 5- pedestal, 51-
Shock-absorbing arms.
Specific embodiment
The invention discloses a kind of scattering formula low-temperature scanning near-field optical microscopes, below with reference to preferred embodiment, to this
The specific embodiment of invention is further described.
Specific structure of the invention is shown to Fig. 3, Fig. 1 to Fig. 3 referring to Figure 1 of the drawings.A kind of scattering formula low temperature
Optical microscope for scanning near field, including cold 1, Sample Scan platform 2, probe scanning platform 3, paraboloidal mirror platform 4 and pedestal
5, in which:
The Sample Scan platform 2 is set to 1 bottom of cold bench, and the Sample Scan platform 2 includes scan table 22, described to sweep
It retouches and is provided with elastic clip 23 and specimen holder 24 on platform 22, the specimen holder 24 is pluggable to be sandwiched in scan table 22 and elastic clip
In order to replacing sample between 23；
The probe scanning platform 3 is set to 1 bottom of cold bench and is located at 2 opposite side of Sample Scan platform, the probe
Scanning platform 3 includes the needle point coupling extraction platform 32 and needle point support 33 for being connected to 1 bottom of cold bench, is fixed in the needle point support 33
Have a probe, the needle point support 33 with it is magnetic-type be connected to the needle point coupling extraction platform 32 and with the scan table 22 it is opposite
It is scanned in order to replace probe to sample；
The paraboloidal mirror platform 4 is set on pedestal 5, and the paraboloidal mirror platform 4 is for assembling external laser in spy
At needle and the scattering light with sample message is collected in outer locator.
Cold bench 1 provides low temperature environment for near-field optical microscope in the present invention, can use various forms of refrigeration platforms,
Versatile, scan table 22 provides placement platform for sample, elastic clip 23 and specimen holder 24 is provided on scan table 22, in reality
Sample is to be affixed on specimen holder 24 in a manner of gluing, and specimen holder 24 is pluggable to be sandwiched in scan table 22 and bullet in the application of border
Property intermediate plate 23 between, specimen holder 24 need to only be extracted to the insertion that more renew, further at this when needing replacing sample
Specimen holder 24 is additionally provided with a lug 25 far from the side of elastic clip 23 in embodiment, which conveniently exchanges specimen holder for,
Probe scanning platform 3 is used to obtain the optical imagery of sample, is wherein provided with magnet 34, needle point in needle point coupling extraction platform 32
Support 33 is pulled in needle point coupling extraction platform 32 in a manner of magnetic, and probe is mounted in needle point support 33, can be with this
Needle point support 33 is easily removed to the replacement for carrying out probe, in practice, can according to need hyperphoric various probes (not only can be more
It is changed to AFM probe and is also replaced by STM probe), paraboloidal mirror platform 4 can converge to external laser at probe to make probe
It is effective extract near-field signals (laser include visible light, infrared and terahertz wave band light) and collect have sample message
Light is scattered in outer locator.The replacement of progress sample and probe that the present invention can be convenient, compatibility easy to operate are strong.
Further, the Sample Scan platform 2 further includes having the first XYZ mobile mechanism 21 for being fixed on 1 bottom of cold bench,
The scan table 22 is connected to the first XYZ mobile mechanism 21 and is driven and moves in XYZ space.
Further, the probe scanning platform 3 further includes the 2nd XYZ mobile mechanism 31 for being fixed on 1 bottom of cold bench, institute
Needle point coupling extraction platform 32 is stated to be connected to the 2nd XYZ mobile mechanism 31 and be driven in XYZ space movement to adjust
Needle point support 33 is in the position of XYZ space.
Further, the paraboloidal mirror platform 4 includes the 3rd XYZ mobile mechanism 41 and paraboloidal mirror 42, the third
XYZ mobile mechanism 41 is fixed on pedestal 5, and the paraboloidal mirror 42 is connected in the 3rd XYZ mobile mechanism 41 and by band
It moves and is moved in XYZ space to assemble external laser at probe and collect the scattering light with sample message in external detection
Device.
Specifically, the first XYZ mobile mechanism 21, the 2nd XYZ mobile mechanism 31 and the 3rd XYZ mobile mechanism 41 adopt
With the prior art known in those skilled in the art, the first XYZ mobile mechanism 21, the 2nd XYZ mobile mechanism 31 and the 3rd XYZ
Mobile mechanism 41 itself is not inventive point of the invention, the first XYZ mobile mechanism 21,31 and of the 2nd XYZ mobile mechanism
3rd XYZ mobile mechanism 41 includes X to stepper motor, Y-direction stepping motor and Z-direction stepping motor, and the X is to stepper motor, Y
It is respectively used to control the X-direction displacement, Y-direction displacement and Z-direction displacement of each platform to stepper motor and Z-direction stepping motor.
In the present embodiment by three XYZ mobile mechanisms (21,31,41) respectively to Sample Scan platform 2, probe scanning platform 3 and
The spatial position of paraboloidal mirror platform 4 is adjusted, so as to high-precision adjusting probe at a distance from sample, laser convergence
Orientation, allow the invention to effectively extract near-field signals, signal-to-noise ratio with higher.
Further, 42 preferred dimension of paraboloidal mirror is the off axis paraboloidal mirror no more than 1 inch.
Further, the cold bench 1 is fixed on external cryostat, so that present invention may apply to each
The cryostat of kind form, it is applied widely.
Further, shock-absorbing arms 51 is also set up between the cold bench 1 and pedestal 5.
Specifically, since each platform that will drive of each XYZ mobile mechanism carries out motion scan, in order to prevent each
Vibration influence experimental result is generated during platform motion scan, and shock-absorbing arms 51 is provided between cold bench 1 and pedestal 5, so that
The present invention works in low shake environment, and experimental result is true and reliable.
It is noted that the metal material part of scattering formula low-temperature scanning near-field optical microscope proposed by the invention
Using oxygen-free copper or aluminium alloy (such as pedestal, shock-absorbing arms, Sample Scan platform) and surface polishing is passed through in its metal material part
Or it is gold-plated, since oxygen-free copper and aluminium alloy are that (it is high that other thermal conductivitys also can be selected in the high metal of thermal conductivity in practical applications
Metal), on metal material polishing or it is gold-plated, enhance thermal isolation effect of the invention, allow the invention to be subjected to height
Temperature baking, is suitable for ultra-high vacuum environment.
For a person skilled in the art, technical solution documented by foregoing embodiments can still be repaired
Change or equivalent replacement of some of the technical features, it is all within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should be included in protection scope of the present invention.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910053045.8A CN109682995A (en) | 2019-01-21 | 2019-01-21 | A kind of scattering formula low-temperature scanning near-field optical microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910053045.8A CN109682995A (en) | 2019-01-21 | 2019-01-21 | A kind of scattering formula low-temperature scanning near-field optical microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109682995A true CN109682995A (en) | 2019-04-26 |
Family
ID=66192420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910053045.8A Pending CN109682995A (en) | 2019-01-21 | 2019-01-21 | A kind of scattering formula low-temperature scanning near-field optical microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109682995A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112665966A (en) * | 2020-12-15 | 2021-04-16 | Oppo（重庆）智能科技有限公司 | Precision controller |
| CN113884706A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Vacuum interconnection system and transfer vacuum sample support |
| CN114018921A (en) * | 2021-11-02 | 2022-02-08 | 仪晟科学仪器(嘉兴)有限公司 | A near-field optical microscope based on a probe optical positioning system |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05181064A (en) * | 1991-12-26 | 1993-07-23 | Nikon Corp | Transmission type near-field scanning microscope |
| US6194711B1 (en) * | 1997-03-12 | 2001-02-27 | Seiko Instruments Inc. | Scanning near-field optical microscope |
| JP2001305038A (en) * | 2000-04-21 | 2001-10-31 | Olympus Optical Co Ltd | Scanning near field optical microscope and probe for it |
| RU2271583C1 (en) * | 2004-09-09 | 2006-03-10 | Зао "Нт-Мдт" | Cryogenic scanning probing microscope |
| CN1862308A (en) * | 2006-06-19 | 2006-11-15 | 中国科学院上海光学精密机械研究所 | modular scanning probe microscope |
| JP2007108088A (en) * | 2005-10-14 | 2007-04-26 | Nec Corp | Optical device using near-field light |
| CN202495417U (en) * | 2012-03-31 | 2012-10-17 | 上海华力微电子有限公司 | Sample holder for scanning electron microscope |
| WO2015133014A1 (en) * | 2014-03-05 | 2015-09-11 | 株式会社日立製作所 | Scanning probe microscope and sample measurement method using same |
| CN108856127A (en) * | 2018-04-26 | 2018-11-23 | 中北大学 | A kind of integrated atomic force microscope probe saves transport and cleaning device |
| CN209542654U (en) * | 2019-01-21 | 2019-10-25 | 仪晟科学仪器(嘉兴)有限公司 | A Scattering Low-temperature Scanning Near-Field Optical Microscope |
-
2019
- 2019-01-21 CN CN201910053045.8A patent/CN109682995A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05181064A (en) * | 1991-12-26 | 1993-07-23 | Nikon Corp | Transmission type near-field scanning microscope |
| US6194711B1 (en) * | 1997-03-12 | 2001-02-27 | Seiko Instruments Inc. | Scanning near-field optical microscope |
| JP2001305038A (en) * | 2000-04-21 | 2001-10-31 | Olympus Optical Co Ltd | Scanning near field optical microscope and probe for it |
| RU2271583C1 (en) * | 2004-09-09 | 2006-03-10 | Зао "Нт-Мдт" | Cryogenic scanning probing microscope |
| JP2007108088A (en) * | 2005-10-14 | 2007-04-26 | Nec Corp | Optical device using near-field light |
| CN1862308A (en) * | 2006-06-19 | 2006-11-15 | 中国科学院上海光学精密机械研究所 | modular scanning probe microscope |
| CN202495417U (en) * | 2012-03-31 | 2012-10-17 | 上海华力微电子有限公司 | Sample holder for scanning electron microscope |
| WO2015133014A1 (en) * | 2014-03-05 | 2015-09-11 | 株式会社日立製作所 | Scanning probe microscope and sample measurement method using same |
| CN108856127A (en) * | 2018-04-26 | 2018-11-23 | 中北大学 | A kind of integrated atomic force microscope probe saves transport and cleaning device |
| CN209542654U (en) * | 2019-01-21 | 2019-10-25 | 仪晟科学仪器(嘉兴)有限公司 | A Scattering Low-temperature Scanning Near-Field Optical Microscope |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113884706A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Vacuum interconnection system and transfer vacuum sample support |
| CN112665966A (en) * | 2020-12-15 | 2021-04-16 | Oppo（重庆）智能科技有限公司 | Precision controller |
| CN114018921A (en) * | 2021-11-02 | 2022-02-08 | 仪晟科学仪器(嘉兴)有限公司 | A near-field optical microscope based on a probe optical positioning system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109682995A (en) | A kind of scattering formula low-temperature scanning near-field optical microscope | |
| CN104634997B (en) | An atomic force microscope system suitable for high-speed scanning | |
| TW446986B (en) | Stage for charged particle microscopy system | |
| JP6009862B2 (en) | Scanning probe microscope | |
| CN109001493B (en) | A high-precision magnetometry microscope device integrating diamond nitrogen vacancy scanning and AFM | |
| EP0746857A1 (en) | Scanning probe microscope | |
| JPH0776696B2 (en) | Atomic force microscope | |
| JP2000501500A (en) | Flat scanning stage for scanning probe microscope observation | |
| CN101501785A (en) | System and method for high speed measurement, analysis and imaging in the meter to sub-nanometer length range | |
| JPH08146018A (en) | Atomic force microscope | |
| CN103412150A (en) | Double-probe atomic power microscope and method for realizing nanometer structure operation by adopting microscope | |
| CN108152941A (en) | High speed optical super-resolution imaging system and method based on micro-nano lens array | |
| Schaefer-Nolte et al. | A diamond-based scanning probe spin sensor operating at low temperature in ultra-high vacuum | |
| CN114813670B (en) | A low-temperature diamond nitrogen-vacancy color center optical microscope | |
| CN209542654U (en) | A Scattering Low-temperature Scanning Near-Field Optical Microscope | |
| CN111458537A (en) | Three-dimensional orthogonal scanning type atomic force microscope probe | |
| CN106198407B (en) | A kind of scanning of sample space and positioning device | |
| CN104614078A (en) | Piezoelectric swing mirror micro scanning thermal microscope imaging system | |
| CN106568989B (en) | A kind of horizontal probe apparatus of the deep space environment atomic force microscopy system based on quartz tuning-fork probe | |
| CN114594284B (en) | Atomic force microscope with coupled reflection and transmission optical paths | |
| CN109884060B (en) | Precise focusing device for digital slice scanner | |
| US5635836A (en) | Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope | |
| CN117423592A (en) | Move the diaphragm | |
| CN117347332A (en) | Scanning magnetic detection system | |
| JPH0579814A (en) | Scanning probe microscope device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190426 |
|
| RJ01 | Rejection of invention patent application after publication |