CN109716501A - 用于抓取和运输基底的装置 - Google Patents

用于抓取和运输基底的装置 Download PDF

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Publication number
CN109716501A
CN109716501A CN201780047327.6A CN201780047327A CN109716501A CN 109716501 A CN109716501 A CN 109716501A CN 201780047327 A CN201780047327 A CN 201780047327A CN 109716501 A CN109716501 A CN 109716501A
Authority
CN
China
Prior art keywords
vacuum chamber
conveyer belt
separating element
hollow configuration
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780047327.6A
Other languages
English (en)
Chinese (zh)
Inventor
阿希姆·阿诺德
弗洛里安·瓦姆斯勒
克劳斯·奥佩尔特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yassis Automation System Co Ltd
Original Assignee
Yassis Automation System Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yassis Automation System Co Ltd filed Critical Yassis Automation System Co Ltd
Publication of CN109716501A publication Critical patent/CN109716501A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B65G21/2027—Suction retaining means
    • B65G21/2036—Suction retaining means for retaining the load on the load-carrying surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
CN201780047327.6A 2016-07-29 2017-07-28 用于抓取和运输基底的装置 Pending CN109716501A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016214095.7 2016-07-29
DE102016214095.7A DE102016214095A1 (de) 2016-07-29 2016-07-29 Vorrichtung zum Greifen und Transportieren von Substraten
PCT/EP2017/069216 WO2018020028A1 (fr) 2016-07-29 2017-07-28 Dispositif de préhension et de transport de substrats

Publications (1)

Publication Number Publication Date
CN109716501A true CN109716501A (zh) 2019-05-03

Family

ID=59686905

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780047327.6A Pending CN109716501A (zh) 2016-07-29 2017-07-28 用于抓取和运输基底的装置

Country Status (4)

Country Link
EP (1) EP3491663A1 (fr)
CN (1) CN109716501A (fr)
DE (1) DE102016214095A1 (fr)
WO (1) WO2018020028A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113649298A (zh) * 2021-08-23 2021-11-16 深圳市优界科技有限公司 一种全自动晶圆分选机
CN114435947A (zh) * 2020-10-30 2022-05-06 通快机床两合公司 用于加工机器的操作装置的抓取单元

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018207336B4 (de) * 2018-05-09 2021-06-24 Asys Automatisierungssysteme Gmbh Bearbeitungsvorrichtung zum Bearbeiten von Substraten
CN115747710A (zh) * 2022-11-01 2023-03-07 浙江合特光电有限公司 一种光伏组件的薄膜沉积工艺

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0893372A1 (fr) * 1997-07-24 1999-01-27 Neuhäuser GMBH + CO. Dispositif pour le transport de pièces d'oeuvre, notamment de pièces suspendues tabulaires
US6083566A (en) * 1998-05-26 2000-07-04 Whitesell; Andrew B. Substrate handling and processing system and method
WO2009059586A1 (fr) * 2007-11-05 2009-05-14 Hennecke Systementwicklung Convoyeur à tabliers individuels, convoyeur sans fin à tabliers individuels et agencement constitué d'au moins deux convoyeurs sans fin à tabliers individuels
US20110005899A1 (en) * 2008-03-16 2011-01-13 Janusz Grzelak Method and conveyor belt system having at least one conveyor belt for transporting flat transport goods
US20120067701A1 (en) * 2010-09-16 2012-03-22 Montech Ag Apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3539876A1 (de) * 1985-11-11 1987-05-14 Karl Lenhardt Vorrichtung fuer das schlupffreie foerdern von stueckgut in beliebiger position, insbesondere in geneigter oder im wesentlichen vertikaler stellung
US5163891A (en) * 1991-12-19 1992-11-17 Langston Staley Corporation Box forming machine having a vacuum belt top conveyor
US6102191A (en) * 1996-04-15 2000-08-15 Tridelta Magnetsysteme Gmbh Device for transporting flat, especially plate-like objects
DE10104510B4 (de) * 2001-01-31 2005-06-23 Neuhäuser GmbH Vorrichtung zum Transport von Werkstücken
DE202006010294U1 (de) * 2006-06-30 2006-11-02 Heinrich Wemhöner GmbH & Co. KG Maschinenfabrik Unterdruck-Riemenförderer
JP5254114B2 (ja) * 2009-04-07 2013-08-07 日鉄住金ファインテック株式会社 ウエハ搬送方法およびウエハ搬送装置
EP2256796A1 (fr) * 2009-05-29 2010-12-01 Hennecke Systems GmbH Dispositif de transport de tranches de silicium et/ou de cellules solaires
FR3017065B1 (fr) * 2014-02-06 2016-11-18 Coval Caisson a vide modulaire

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0893372A1 (fr) * 1997-07-24 1999-01-27 Neuhäuser GMBH + CO. Dispositif pour le transport de pièces d'oeuvre, notamment de pièces suspendues tabulaires
US6083566A (en) * 1998-05-26 2000-07-04 Whitesell; Andrew B. Substrate handling and processing system and method
WO2009059586A1 (fr) * 2007-11-05 2009-05-14 Hennecke Systementwicklung Convoyeur à tabliers individuels, convoyeur sans fin à tabliers individuels et agencement constitué d'au moins deux convoyeurs sans fin à tabliers individuels
US20110005899A1 (en) * 2008-03-16 2011-01-13 Janusz Grzelak Method and conveyor belt system having at least one conveyor belt for transporting flat transport goods
US20120067701A1 (en) * 2010-09-16 2012-03-22 Montech Ag Apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114435947A (zh) * 2020-10-30 2022-05-06 通快机床两合公司 用于加工机器的操作装置的抓取单元
CN113649298A (zh) * 2021-08-23 2021-11-16 深圳市优界科技有限公司 一种全自动晶圆分选机

Also Published As

Publication number Publication date
DE102016214095A1 (de) 2018-02-01
WO2018020028A1 (fr) 2018-02-01
EP3491663A1 (fr) 2019-06-05

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Application publication date: 20190503