CN109737112B - Ultrahigh pressure dynamic valve - Google Patents
Ultrahigh pressure dynamic valve Download PDFInfo
- Publication number
- CN109737112B CN109737112B CN201910088475.3A CN201910088475A CN109737112B CN 109737112 B CN109737112 B CN 109737112B CN 201910088475 A CN201910088475 A CN 201910088475A CN 109737112 B CN109737112 B CN 109737112B
- Authority
- CN
- China
- Prior art keywords
- valve
- chamber
- ultra
- valve core
- high pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007789 sealing Methods 0.000 claims abstract description 63
- 239000000463 material Substances 0.000 claims description 6
- 229920002635 polyurethane Polymers 0.000 claims description 6
- 239000004814 polyurethane Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Landscapes
- Magnetically Actuated Valves (AREA)
- Fluid-Driven Valves (AREA)
Abstract
The invention relates to an ultrahigh pressure dynamic valve which comprises a valve block, a cover plate connected with the valve block, a containing cavity formed by the valve block and the cover plate after being matched with each other, a valve sleeve positioned in the containing cavity, a valve core extending into the valve sleeve, a spring connected with the valve core, an adjusting rod connected with the valve core, a valve sleeve sealing piece for realizing the sealing of the valve sleeve, a valve core sealing piece for realizing the sealing of the valve core and a pilot electromagnetic valve for controlling the movement of the valve core. The ultrahigh pressure dynamic valve provided by the invention has the advantages that the working pressure can reach 100MPa, the control pressure is only below 20MPa, the design of the hydraulic system only needs to partially design the ultrahigh pressure, the cost of the hydraulic system is effectively reduced, on the other hand, the control pressure is only below 20MPa, the control can be performed by adopting a common pilot electromagnetic valve, and the difficulty and the cost are reduced.
Description
Technical Field
The invention relates to the technical field of dynamic valve equipment, in particular to an ultrahigh pressure dynamic valve.
Background
The common valve structure for hydraulic presses is a cartridge valve, which is usually matched with a pilot electromagnetic valve to be used as a high-flow two-way switch valve, and the pilot electromagnetic valve controls the main valve to bake or close. The closing is controlled by a pilot electromagnetic valve and is active, and the opening is driven by cavity pressure oil to push the main valve core to open, so that a certain opening pressure is needed, and the main valve core is passive. Typically such cartridge valves cannot be used for ultra high pressures, but only for dental systems below 35MPa, because of the following problems with valves of this construction:
1. Because of the area ratio of each cavity of the valve, if the valve is used for ultrahigh pressure (generally higher than 100 MPa), the control pressure needs to reach very high pressure (far exceeding 35 MPa) to ensure that the main valve core is reliably closed, and the pressure bearing of a common pilot electromagnetic valve cannot exceed 35MPa, so that the working pressure of the conventional cartridge valve is low and generally does not exceed 35MPa.
2. The cartridge valve generally adopts a sealing structure of a common rubber O-shaped ring and a check ring, the working pressure of the cartridge valve is not more than 42MPa at maximum, the valve core of the cartridge valve is not sealed, and leakage exists between a control cavity and a main valve cavity.
3. The valve core of the conventional cartridge valve can not be actively opened under the working state, the main valve cavity can be opened only by a certain working pressure, and back pressure can be formed for the system, which is determined by the structure of the cartridge valve, and the valve core is pushed to be opened by the certain working pressure of the main valve cavity, if the valve core is used for pressure relief of a main oil cylinder, the pressure can not be relieved to 0, and the market demand can not be met.
Based on various shortcomings of the existing cartridge valves, it is necessary to provide a novel valve structure to solve the above problems.
The invention provides an ultrahigh pressure dynamic valve, wherein the working pressure is ultrahigh pressure, the control pressure is medium-low pressure, and the ultrahigh pressure dynamic valve can be controlled by adopting a pilot electromagnetic valve, so that the cost of a hydraulic system is effectively reduced.
Disclosure of Invention
The invention aims to solve the technical problem of providing the ultrahigh pressure dynamic valve, wherein the working pressure is ultrahigh pressure, the control pressure is medium-low pressure, and the ultrahigh pressure dynamic valve can be controlled by adopting a pilot electromagnetic valve, so that the cost of a hydraulic system is effectively reduced.
In order to solve the technical problems, the invention provides an ultrahigh pressure dynamic valve, which comprises a valve block, a cover plate connected with the valve block, a containing cavity formed by the valve block and the cover plate after being mutually matched, a valve sleeve positioned in the containing cavity, a valve core extending into the valve sleeve, a spring connected with the valve core, an adjusting rod connected with the valve core, a valve sleeve sealing piece for realizing the sealing of the valve sleeve, a valve core sealing piece for realizing the sealing of the valve core and a pilot electromagnetic valve for controlling the movement of the valve core, wherein the valve core is connected with the valve core;
the valve sleeve seals include an ultra-high pressure valve sleeve seal and an atmospheric valve sleeve seal;
The valve core sealing piece comprises an ultrahigh pressure valve core sealing piece and an normal pressure valve core sealing piece.
Preferably, the valve block is provided with a first chamber and a second chamber, and the first chamber and the second chamber are respectively communicated with the accommodating cavity.
Preferably, the cover plate is provided with an adjusting rod mounting position, a first control oil way and a second control oil way;
The shape and the size of the accommodating cavity are matched with those of the valve sleeve.
Preferably, the valve housing has a hollow housing structure including a third chamber for mounting the valve cartridge, a first flow hole communicating the first and third chambers, and a second flow hole communicating the second and third chambers.
Preferably, the inner wall of the third chamber is provided with a first step structure;
The outer wall of the valve core is provided with a second step structure, and the second step structure and the first step structure are mutually matched to form a first control cavity in the third cavity;
The valve core divides the third chamber into a second control chamber and a hydraulic chamber, and the hydraulic chamber is communicated with the first chamber through the first flow hole;
The first control chamber, the second control chamber and the hydraulic chamber are mutually separated.
Preferably, a mounting hole is further formed in one end, far away from the hydraulic cavity, of the valve core;
The spring is sleeved outside the adjusting rod, and the spring and the adjusting rod extend into the mounting hole.
Preferably, the adjusting rod extends into the mounting hole and extends out of the cover plate through the adjusting rod mounting position;
The ultrahigh pressure dynamic valve further comprises an adjusting rod sealing piece, and the adjusting rod sealing piece is sleeved on the periphery of the adjusting rod and protrudes out of the surface of the adjusting rod.
Preferably, the ultra-high pressure valve sleeve sealing element is made of high-hardness polyurethane material, is sleeved on the periphery of the valve sleeve and protrudes out of the surface of the valve sleeve, and is divided into two parts, namely an ultra-high pressure valve sleeve sealing element a and an ultra-high pressure valve sleeve sealing element b;
Wherein the ultra-high pressure valve sleeve seal a is located between the first chamber and the second chamber, and the ultra-high pressure valve sleeve seal b is located between the second chamber and the first control chamber;
The normal pressure valve sleeve sealing piece is sleeved on the periphery of the valve sleeve and is positioned between the first control cavity and the second control cavity.
Preferably, the ultrahigh pressure valve core sealing member is made of high-hardness polyurethane material, sleeved on the periphery of the valve core and protruding out of the surface of the valve core, and is positioned between the hydraulic cavity and the first control cavity;
The normal pressure valve core sealing piece is sleeved on the periphery of the valve core and is positioned between the first control cavity and the second control cavity.
Preferably, the pilot solenoid valve comprises a first output end and a second output end;
The first output end is communicated with the first control cavity through the first control oil way;
the second output end is communicated with the second control cavity through the second control oil circuit.
Compared with the prior art, the invention has the beneficial effects that:
1. The ultrahigh pressure dynamic valve provided by the invention has the advantages that the working pressure can reach 100MPa, the control pressure is only below 20MPa, the design of the hydraulic system only needs to partially design the ultrahigh pressure, the cost of the hydraulic system is effectively reduced, on the other hand, the control pressure is only below 20MPa, the control can be performed by adopting a common pilot electromagnetic valve, and the difficulty and the cost are reduced.
2. According to the ultrahigh pressure dynamic valve, the valve core and the valve sleeve are sealed by ultrahigh pressure, so that the control cavity (namely the first control cavity and the second control cavity) and the main valve cavity (namely the first cavity and the second cavity) cannot leak inwards, no leakage is realized, and the energy consumption loss is reduced.
3. The valve core of the ultrahigh pressure dynamic valve can be independently opened through the pilot electromagnetic valve, the valve core oil way has no lowest pressure limit, the pressure of the oil way can be relieved to 0, and the ultrahigh pressure dynamic valve is particularly useful for the pressure of the main oil cylinder of the hydraulic machine to be relieved to zero.
Drawings
FIG. 1 is a schematic diagram of the structure of an ultra-high pressure dynamic valve provided by the invention;
FIG. 2 is a schematic diagram of the structure of the ultrahigh pressure dynamic valve provided by the invention without a valve block, a cover plate, an adjusting rod and a pilot electromagnetic valve;
FIG. 3 is an enlarged view of FIG. 2 at A;
Fig. 4 is an enlarged view at B in fig. 2.
Detailed Description
In order to better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
As shown in fig. 1-2, the ultrahigh pressure dynamic valve comprises a valve block 1, a cover plate 2 connected with the valve block 1, a containing cavity formed by the valve block 1 and the cover plate 2 after being matched with each other, a valve sleeve 3 positioned in the containing cavity, a valve core 4 extending into the valve sleeve 3, a spring 5 connected with the valve core 4, an adjusting rod 6 connected with the valve core 4, a valve sleeve sealing piece 7 used for realizing the sealing of the valve sleeve 3, a valve core sealing piece 8 used for realizing the sealing of the valve core 4 and a pilot electromagnetic valve 9 used for controlling the movement of the valve core 4;
The valve sleeve seal 7 comprises an ultra-high pressure valve sleeve seal 71 and an atmospheric valve sleeve seal 72;
The spool seals 8 include an ultrahigh pressure spool seal 81 and an atmospheric pressure spool seal 82.
The valve block 1 is matched with the cover plate 2 to form a containing cavity in the valve block, so that the valve sleeve 3, the valve core 4, the spring 5 and the adjusting rod 6 are conveniently contained in the containing cavity, and the ultrahigh pressure dynamic valve is assembled.
In order to realize the switching of the liquid, the valve block 1 is further provided with a first chamber 11 and a second chamber 12, and the first chamber 11 and the second chamber 12 are respectively communicated with the accommodating cavity, so that the switching of the first chamber 11 and the second chamber 12 is realized through the valve sleeve 3 and the valve core 4.
The cover plate 2 is connected with the valve block 1, and is matched with the valve block 1 to realize the installation of the valve sleeve 3 and the valve core, an adjusting rod installation position 21, a first control oil way 22 and a second control oil way 23 are arranged on the cover plate, and the adjusting rod installation position 21 is used for realizing the installation of the adjusting rod 6.
The accommodating cavity is a cavity formed by the cover plate 2 and the valve block 1 which are matched with each other, and the shape and the size of the accommodating cavity are matched with those of the valve sleeve 3.
The valve sleeve 3 is positioned in the accommodating cavity, and is matched with the valve core 4 to realize opening or closing of liquid. The valve housing 3 has a hollow housing structure, and comprises a third chamber 31 for mounting the valve core 4, a first flow hole 32 for communicating the first chamber 11 with the third chamber 31, and a second flow hole 33 for communicating the second chamber 12 with the third chamber 31, so as to control the opening or closing of the liquid through the valve core 4.
As shown in fig. 3, in order to facilitate the pilot solenoid valve 9 to control the movement of the valve spool 4, the inner wall of the third chamber 31 is provided with a first stepped structure 34.
The valve core 4 is located inside the third chamber 31 and is in an integral structure, the length of the valve core 4 is smaller than that of the third chamber 31, a second step structure 41 is arranged on the outer wall of the valve core 4, the second step structure 41 and the first step structure 34 are mutually matched to form a first control chamber 42, a second control chamber 43 and a hydraulic chamber 44 are respectively formed at two ends of the valve core 4, the hydraulic chamber 44 is communicated with the first chamber 11 through the first flow hole 32, namely, the valve core 4 divides the third chamber 31 into the second control chamber 43 and the hydraulic chamber 44, the first step structure 34 and the second step structure 41 form a first control chamber 42 which is mutually separated from the second control chamber 43 and the hydraulic chamber 44 inside the third chamber 31, the first control chamber 42 and the second control chamber 43 are used for controlling the forward and backward movement of the valve core 4, and the hydraulic chamber 44 are used for opening or closing liquid.
In order to realize the fixed mounting of the spring 5 and the adjusting rod 6, one end, far away from the hydraulic cavity 44, of the valve core 4 is further provided with a mounting hole 45, and the spring 5 and the adjusting rod 6 extend into the mounting hole 45 to realize the adjustment of the valve core 4.
The spring 5 is sleeved outside the adjusting rod 6, one end of the spring is contacted with the bottom of the mounting hole 45, the other end of the spring is contacted with the cover plate 2, interaction of the valve core 4 with the spring 5 in the moving process is ensured, and return motion and the like of the valve core 4 are realized.
The adjusting rod 6 extends into the mounting hole 45, and extends out of the cover plate 2 through the adjusting rod mounting position 21, so that the flow of the ultra-high pressure dynamic valve can be conveniently adjusted through the adjusting rod 6.
In order to realize the sealing between the adjusting rod 6 and the cover plate 2, an adjusting rod sealing piece 61 is further arranged, the adjusting rod sealing piece 61 is sleeved on the periphery of the adjusting rod 6 and protrudes out of the surface of the adjusting rod 6, so that the sealing between the adjusting rod 6 and the cover plate 2 is realized, and the control medium in the second control cavity 43 is prevented from overflowing from the gap between the cover plate 2 and the adjusting rod 6.
The valve sleeve seal 7 is used for realizing the sealing of a valve sleeve and comprises an ultrahigh-pressure valve sleeve seal 71 and an ordinary-pressure valve sleeve seal 72, wherein the minimum bearing capacity of the ultrahigh-pressure valve sleeve seal 71 is 100MPa, and the ultrahigh-pressure valve sleeve seal is made of high-hardness polyurethane material. The ultrahigh-pressure valve sleeve sealing member 71 is sleeved on the periphery of the valve sleeve 4 and protrudes out of the surface of the valve sleeve 4, so that the sealing between the valve block 1 and the valve sleeve 3 is realized. Specifically, as shown in fig. 4, the ultra-high pressure valve sleeve sealing member 71 includes a main sealing ring 711 and a retainer ring 712, where a protrusion is disposed in the middle of the main sealing ring 711, that is, the cross section of the main sealing ring 711 is shaped like a "convex", and the number of retainer rings 712 is two, and the two retainer rings are respectively located at two sides of the protrusion, so that the pressure born by the sealing structure is increased by the double sealing structure of the ultra-high pressure valve sleeve sealing member, thereby realizing the sealing of the ultra-high pressure dynamic valve. The number of the ultra-high pressure valve sleeve seals 71 is two, namely an ultra-high pressure valve sleeve seal a71a and an ultra-high pressure valve sleeve seal b71b, wherein the ultra-high pressure valve sleeve seal a71a is positioned between the first chamber 11 and the second chamber 12 to realize the sealing between the first chamber 11 and the second chamber 12, and the ultra-high pressure valve sleeve seal b71b is positioned between the second chamber 12 and the first control chamber 42 to realize the sealing between the second chamber 12 and the first control chamber 42. The pressure bearing capacity of the normal pressure valve sleeve sealing member 72 is about 35MPa, and the normal pressure valve sleeve sealing member is sleeved on the periphery of the valve sleeve 3 and is positioned between the first control cavity 42 and the second control cavity 43, so that the sealing between the first control cavity 42 and the second control cavity 43 is realized.
The valve core sealing piece 8 is used for sealing the valve core 4, and comprises an ultrahigh pressure valve core sealing piece 81 and an atmospheric pressure valve core sealing piece 82, wherein the minimum bearing capacity of the ultrahigh pressure valve core sealing piece 81 is 100MPa, and the ultrahigh pressure valve core sealing piece is made of a high-hardness polyurethane material. The ultrahigh-pressure valve core sealing member 81 is sleeved on the periphery of the valve core 4 and protrudes out of the surface of the valve core 4, so that the valve core 4 and the valve sleeve 3 are sealed. Specifically, the structure of the ultrahigh-pressure valve sleeve sealing element is the same as that of the ultrahigh-pressure valve core sealing element, and details are not repeated here. The extra-high pressure spool seal 81 is located between the hydraulic pressure chamber 44 and the first control chamber 42, and seals between the hydraulic pressure chamber 44 and the first control chamber 42. The pressure bearing capacity of the normal pressure valve core sealing member 82 is about 35MPa, and the normal pressure valve core sealing member is sleeved on the periphery of the valve core 4 and is located between the first control chamber 11 and the second control chamber 12, so as to seal between the first control chamber 42 and the second control chamber 43.
The pilot electromagnetic valve 9 is used for controlling the movement of the valve core 4, and comprises a first output end and a second output end, wherein the first output end is communicated with the first control cavity 42 through the first control oil way 22, and the second output end is communicated with the second control cavity 43 through the second control oil way 23, so that the movement of the valve core 4 is conveniently controlled through the pilot electromagnetic valve 9.
When the ultrahigh pressure dynamic valve provided by the invention works, the first output end of the pilot electromagnetic valve 9 is opened, a control medium enters the first control cavity 42, the volume of the second control cavity 43 is reduced, and the volume of the hydraulic cavity 44 is increased until the hydraulic cavity 44 is communicated with the first cavity 11 and the second cavity 12, so that the opening action of the ultrahigh pressure dynamic valve is realized.
If the ultrahigh pressure dynamic valve is used for closing the liquid circulation, the second output end of the pilot electromagnetic valve 9 is opened, the control medium enters the second control cavity 43, the volume of the second control cavity 43 is increased, and the volume of the hydraulic cavity 44 is decreased until the valve core 4 completely realizes the isolation between the first chamber 11 and the second chamber 12, thereby realizing the closing action of the ultrahigh pressure dynamic valve.
While the foregoing is directed to the preferred embodiments of the present invention, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the invention, such changes and modifications are also intended to be within the scope of the invention.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910088475.3A CN109737112B (en) | 2019-01-30 | 2019-01-30 | Ultrahigh pressure dynamic valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910088475.3A CN109737112B (en) | 2019-01-30 | 2019-01-30 | Ultrahigh pressure dynamic valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109737112A CN109737112A (en) | 2019-05-10 |
| CN109737112B true CN109737112B (en) | 2024-12-17 |
Family
ID=66366657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910088475.3A Active CN109737112B (en) | 2019-01-30 | 2019-01-30 | Ultrahigh pressure dynamic valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109737112B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112762207A (en) * | 2021-01-12 | 2021-05-07 | 上海航天控制技术研究所 | Hydraulic control one-way valve with safety function |
| CN116498614A (en) * | 2023-04-24 | 2023-07-28 | 通用技术集团大连机床有限责任公司 | Normally open type large-flux two-way cartridge valve |
| CN116928166A (en) * | 2023-06-21 | 2023-10-24 | 东风专用零部件有限公司 | Normally open type hydraulic control two-position two-way structure, valve and dismounting method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209892541U (en) * | 2019-01-30 | 2020-01-03 | 广东科达洁能股份有限公司 | Ultrahigh pressure dynamic valve |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| LU88384A1 (en) * | 1993-07-16 | 1995-02-01 | Hydrolux Sarl | 2-way cartridge valve as a seat valve |
| US20080078455A1 (en) * | 2005-11-18 | 2008-04-03 | Patterson Andrew J | Compact Manifolded Fail Safe Hydraulic Control System |
| CN101916676B (en) * | 2010-08-16 | 2012-07-04 | 杨秀丽 | Electromagnetic hydraulic valve for spring hydraulic control mechanism |
| CN201787099U (en) * | 2010-09-29 | 2011-04-06 | 山东泰丰液压股份有限公司 | Dynamic interposing valve having stroke limitation |
| CN201982394U (en) * | 2011-03-18 | 2011-09-21 | 上海海事大学 | Ultrahigh-pressure hydraulic solenoid reversing valve |
| CN102562701B (en) * | 2012-02-15 | 2015-01-14 | 武汉科技大学 | Easily controlling hydraulic corner self-servo valve |
| CN202971370U (en) * | 2012-11-30 | 2013-06-05 | 广东科达机电股份有限公司 | Balanced active control type cartridge valve |
| CN105927606B (en) * | 2016-06-23 | 2017-12-08 | 广东力源液压机械有限公司 | A kind of hydraulic pile system and its inserted valve |
| CN107152428B (en) * | 2017-06-15 | 2019-04-09 | 上海诺玛液压系统有限公司 | A kind of highly integrated SERVO CONTROL ultrahigh pressure proportional inserted valve |
-
2019
- 2019-01-30 CN CN201910088475.3A patent/CN109737112B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209892541U (en) * | 2019-01-30 | 2020-01-03 | 广东科达洁能股份有限公司 | Ultrahigh pressure dynamic valve |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109737112A (en) | 2019-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109737112B (en) | Ultrahigh pressure dynamic valve | |
| TW477863B (en) | Air drive pumps and components therefor | |
| WO2022068046A1 (en) | Pilot-operated electric proportional high-pressure relief valve | |
| JP4696188B2 (en) | Diaphragm type solenoid valve with closing force enhancement mechanism | |
| US6488050B1 (en) | Pneumatic valve assembly | |
| CN101589254B (en) | slide valve | |
| EP1639283A4 (en) | Flow control valves | |
| ATE301777T1 (en) | HYDRO STORAGE | |
| JP2005214014A (en) | Double reciprocating bellows pump with interlocking shaft | |
| WO2013141212A1 (en) | Piston-format working-fluid-pressure actuator and control valve | |
| US3874629A (en) | Fluid operated needle valve | |
| CN101273193B (en) | Solenoid isolation valve | |
| CN209892541U (en) | Ultrahigh pressure dynamic valve | |
| CN114076198B (en) | Pneumatic stop valve | |
| CN109611305B (en) | Booster water pump | |
| CN213629011U (en) | Diaphragm solenoid valve | |
| US3623694A (en) | Fluid-operated valve | |
| CN100425890C (en) | Vacuum valve | |
| CN113775764A (en) | Large-flow leakage-free unloading valve | |
| JP2004360876A (en) | Three-way valve | |
| KR20200008167A (en) | Actuators, valves and semiconductor manufacturing equipment | |
| CN210266048U (en) | Negative pressure valve and water supply system with same | |
| CN109723692B (en) | pressure control valve | |
| JPWO2012118071A1 (en) | Fluid control valve | |
| CN220248334U (en) | Liquid inlet and outlet valve group structure and ultrahigh-pressure plunger pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |