CN1107343C - 清洗金属污染的晶片基片同时保持晶片的光滑性的方法及清洗组合物 - Google Patents

清洗金属污染的晶片基片同时保持晶片的光滑性的方法及清洗组合物 Download PDF

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Publication number
CN1107343C
CN1107343C CN97122584A CN97122584A CN1107343C CN 1107343 C CN1107343 C CN 1107343C CN 97122584 A CN97122584 A CN 97122584A CN 97122584 A CN97122584 A CN 97122584A CN 1107343 C CN1107343 C CN 1107343C
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CN
China
Prior art keywords
weight
cleaning combination
aqueous solution
cleaning
composition
Prior art date
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Expired - Lifetime
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CN97122584A
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English (en)
Chinese (zh)
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CN1187689A (zh
Inventor
D·C·斯基
G·施瓦茨科普夫
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Anwantuo Materials LLC
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Mallinckrodt Baker Inc
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Publication of CN1187689A publication Critical patent/CN1187689A/zh
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    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/261—Alcohols; Phenols
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/268—Carbohydrates or derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3218—Alkanolamines or alkanolimines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5022—Organic solvents containing oxygen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Molecular Biology (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
CN97122584A 1996-10-11 1997-10-11 清洗金属污染的晶片基片同时保持晶片的光滑性的方法及清洗组合物 Expired - Lifetime CN1107343C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US729565 1996-10-11
US08/729,565 US5989353A (en) 1996-10-11 1996-10-11 Cleaning wafer substrates of metal contamination while maintaining wafer smoothness

Publications (2)

Publication Number Publication Date
CN1187689A CN1187689A (zh) 1998-07-15
CN1107343C true CN1107343C (zh) 2003-04-30

Family

ID=24931617

Family Applications (1)

Application Number Title Priority Date Filing Date
CN97122584A Expired - Lifetime CN1107343C (zh) 1996-10-11 1997-10-11 清洗金属污染的晶片基片同时保持晶片的光滑性的方法及清洗组合物

Country Status (11)

Country Link
US (1) US5989353A (2)
EP (1) EP0886547B1 (2)
JP (1) JP4282093B2 (2)
KR (1) KR100305314B1 (2)
CN (1) CN1107343C (2)
AT (1) ATE315965T1 (2)
DE (1) DE69735126T2 (2)
DK (1) DK0886547T3 (2)
ES (1) ES2252776T3 (2)
TW (1) TW467954B (2)
WO (1) WO1998016330A1 (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102085346B (zh) * 2011-01-02 2012-02-15 刘晓云 一种治疗慢性阻塞性肺病的中药组合物

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Also Published As

Publication number Publication date
DK0886547T3 (da) 2006-05-22
EP0886547B1 (en) 2006-01-18
ATE315965T1 (de) 2006-02-15
TW467954B (en) 2001-12-11
DE69735126T2 (de) 2006-08-03
KR100305314B1 (ko) 2001-11-30
JP4282093B2 (ja) 2009-06-17
WO1998016330A1 (en) 1998-04-23
KR19990072074A (ko) 1999-09-27
EP0886547A1 (en) 1998-12-30
CN1187689A (zh) 1998-07-15
DE69735126D1 (de) 2006-04-06
ES2252776T3 (es) 2006-05-16
EP0886547A4 (en) 2002-05-08
JP2000503342A (ja) 2000-03-21
US5989353A (en) 1999-11-23

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