CN111551914A - Optical phased array device, laser radar and detection method based on laser radar - Google Patents
Optical phased array device, laser radar and detection method based on laser radar Download PDFInfo
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Abstract
The invention provides an optical phase control array device, a laser radar and a detection method based on the laser radar, wherein the optical phase control array device comprises the following components: the system comprises an optical switch, an electro-optical intensity modulator, a power distribution network, an amplitude consistency network and a light-operated phased array. The optical switch is used for controlling and receiving optical signals in different modes, and the electro-optical intensity modulator is connected with the optical switch and used for controlling the intensity of the optical signals. The power division network is connected with the electro-optical intensity modulator and used for distributing the optical signals to the plurality of sub-channels. The amplitude consistency network is connected with the power distribution network and used for detecting and adjusting the optical power of the optical signals in each sub-channel. The optical phased array device integrates the electro-optical intensity modulator, the optical switch and the optical control phased array into a chip, so that the integration of measurement and communication is realized.
Description
Technical Field
The invention relates to the technical field of optoelectronic devices, in particular to an optical phased array device, a laser radar and a detection method based on the laser radar.
Background
The light-operated phased array is a key component for laser radar beam forming. The laser measurement and communication integrated radar is an important direction for the development of a laser radar system in future, and consists of a laser source, a modulator, a beam forming device, a beam scanning device, a detection device and the like, wherein the modulator and the beam scanning device are core devices.
In the related art, the beam scanning device and the modulation device are separated, that is, the beam scanning function and the communication function need to be realized by two sets of systems, which causes the defects of large volume, large power consumption and long function switching time of the device.
Disclosure of Invention
The invention aims to solve the technical problems that in the related art, a beam scanning device and a modulator are separately arranged, so that the laser radar equipment has the defects of large volume, large power consumption and long function switching time. The invention provides an optical phased array device, a laser radar and a detection method based on the laser radar.
An optical phased array device according to an embodiment of the present invention includes:
the optical switch is used for controlling and receiving light source signals in different modes;
the electro-optical intensity modulator is connected with the optical switch and is used for modulating the intensity of the optical signal;
the power division network is connected with the electro-optical intensity modulator and used for distributing the optical signals to a plurality of sub-channels;
the amplitude consistency network is connected with the power distribution network and is used for detecting and adjusting the optical power of the optical signal in each subchannel;
the light-operated phased array comprises a plurality of electro-optical phase shifters, and each sub-channel is provided with the electro-optical phase shifter and used for adjusting the phase of the optical signal in the sub-channel.
The optical phased array device provided by the embodiment of the invention aims to solve the defects of large volume, heavy weight and slow scanning of the existing measurement and control communication integrated technical scheme and the defect that the existing phased array device does not have a communication measurement function. The phase control array device integrates the electro-optical intensity modulator, the optical switch and the light control phase control array in one chip, realizes the integration of measurement and communication, and breaks through the technical problem of integration of long-distance laser communication and medium-distance high-precision distance measurement highly integrated miniaturized laser load optical machines.
In addition, the problem that the output amplitude of each sub-channel of the light-controlled phased array is inconsistent due to nonuniform light splitting caused by chip manufacturing process errors is solved, and too high grating lobe level and beam pointing deviation are avoided. The amplitude consistency network is added at the front end of the light-controlled phased array, so that the consistency of the optical power in each sub-channel is effectively ensured.
According to some embodiments of the present invention, the optical switch is a 2 × 2 mach-zehnder interferometer, and includes two transmission arms and a first phase shifter disposed on at least one of the transmission arms, the first phase shifter being configured to adjust a phase difference of the optical signals in the two transmission arms to control receiving of the optical source signals of different modes.
In some embodiments of the present invention, the first phase shifter is a PIN structure of a carrier injection type, or a PN structure of a carrier depletion type.
According to some embodiments of the invention, the first phase shifter employs an electro-optical first phase shifter that controls a phase difference of the optical signals in the two transmission arms using a carrier dispersion effect of a waveguide.
In some embodiments of the invention, the amplitude coherence network comprises:
a photodetector for detecting the optical power of the optical signal in each of the subchannels;
a directional coupler for adjusting the duty ratio of the optical signal input to the photodetector in each of the subchannels;
and the adjustable attenuator is used for adjusting the optical power of the optical signal in each subchannel according to the optical power of the optical signal in each subchannel.
According to some embodiments of the invention, the optical switch is configured to control the reception of a continuous laser or a pulsed laser.
In some embodiments of the present invention, the optical phased-array device is a silicon-based optical phased-array device, and the silicon-based optical phased-array device is prepared by using a silicon-on-insulator wafer.
According to an embodiment of the invention, a lidar includes: an optical phased array device as described above.
According to the laser radar provided by the embodiment of the invention, a silicon-based optical waveguide phased array device integrating measurement and communication is adopted, the problems of space high-speed communication and beam scanning and splitting are solved, and a modulator and the phased array are integrated by using one chip. In addition, by arranging the amplitude consistency network, the problem of inconsistent optical output amplitude of each sub-channel caused by unbalanced power distribution of the phased array and optical loss caused by a carrier absorption effect is solved, the deviation of beam pointing is reduced, and the level of grating lobes is reduced.
According to the detection method based on the laser radar, the detection method adopts the laser radar, and the method comprises the following steps:
controlling to receive continuous laser through the optical switch;
detecting the optical power of an optical signal in each sub-channel through the amplitude consistency network, and adjusting the optical power of the optical signal in each sub-channel based on the optical power of the optical signal in each sub-channel so as to make the optical power in each sub-channel consistent;
starting a detection function of the laser radar, and receiving pulse laser through the optical switch light control;
and adjusting the phase of the received pulse laser in each sub-channel through the optical phased array, and outputting to form a scanning beam so as to scan and detect a target.
According to the detection method based on the laser radar, the silicon-based optical waveguide phased array device integrating measurement and communication is adopted, the problem that optical output amplitudes of sub-channels are inconsistent due to unbalanced power distribution of the phased array and optical loss caused by a carrier absorption effect can be solved by setting the amplitude consistency network, beam pointing deviation is reduced, and the level of a grating lobe is reduced.
According to some embodiments of the invention, the method further comprises:
after the target is scanned and detected to obtain the position of the target, the optical switch controls to receive continuous laser;
and modulating the intensity of the continuous laser by the electro-optical intensity modulator and generating a communication signal to be sent to the target.
Drawings
FIG. 1 is a schematic diagram of a portion of a lidar system according to the related art;
FIG. 2 is a schematic view showing a structure of a related art optical phased array device;
FIG. 3 is a schematic structural diagram of an optical phased array device according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of an optical switch of an optical phased array device according to a first embodiment of the present invention;
fig. 5 is a schematic structural diagram of a PIN-structured phase shifter according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a PN-structured phase shifter according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of an optical switch of an optical phased array device according to a second embodiment of the present invention;
FIG. 8 is a schematic diagram of an electro-optic intensity modulator according to a first embodiment of the present invention;
FIG. 9 is a schematic diagram of an electro-optic intensity modulator according to a second embodiment of the present invention;
fig. 10 is a schematic structural diagram of an optical power splitter according to an embodiment of the present invention.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the present invention will be described in detail with reference to the accompanying drawings and preferred embodiments.
Because of the characteristics of high frequency, good directivity, concentrated energy and the like, the light has the following advantages as a new carrier in an aerospace application system: the characteristic of narrow frequency spectrum enables the measurement resolution to be high and the measurement precision to be high; the characteristic of high frequency enables the device to have higher data transmission rate; the action distance is further due to the characteristic of energy concentration; the emission angle of the laser beam is extremely narrow, the anti-interference capability of the laser carrier wave is strong in milliarc level and even micro radian level, and the security and the safety are extremely high.
With the continuous high-intensity investment and research and development at home and abroad in recent years, the laser technology is more and more mature in the aerospace application field, and the technologies such as laser ranging, laser imaging, laser communication, laser doppler and the like are typically applied, such as a GLAS altimeter, a MOLA altimeter, an RVS laser intersection butt-joint sensor, an LLCD optical communication system, an SSLS laser imaging system, a LIST laser mapping system, an ALADIN global laser wind measuring system and the like. The laser unified measurement and control technology is used for realizing high-speed laser data transmission and high-precision laser measurement and control between a space station-GEO, a space station-LEO and a space station-ground by adopting a laser means, and providing technical support for construction of information ports of the space station in the future. Due to the limitation of application scenes, the communication, imaging and ranging integrated technology is not reported in related application reports, but an insurmountable bottleneck does not exist in the technology, for example, a 1550nm waveband is selected, and a mature solution is provided in the aspects of basic support of devices, components and the like and single technology inheritance.
As shown in fig. 1, in the related art, a system of a laser radar mainly includes a common-aperture optical and two-dimensional scanning system, an ATP system, a beacon light system, a transmitting and receiving system, a biaxial scanning system, a light source, a temperature control system, an active detection system, an imaging processing subsystem, and a comprehensive information processing and control subsystem.
The transmitter takes 1550nm and 1064nm as optical fiber lasers as light sources, the 1550nm band is used for laser communication, and the 1065nm band is used for short-distance measurement and control and high-speed scanning imaging. The receiving adopts a detection mode that a unit APD and an array APD coexist, the communication unit APD is used for receiving communication light and acquiring information, an array 32X 32 array detector is used for measurement, and a scanning system adopts a form of a rotary table and a swing mirror.
The disadvantages of the technical scheme are that: the system is composed of a space optical communication system and a laser measurement and control system and is built by discrete devices. The inherent defect of the system formed by the discrete devices is that the system has larger volume and weight and does not meet the requirements of the system on equipment miniaturization and integration in manned aerospace application. In order to realize rapid laser measurement imaging, the scanning rate is required to be in the order of microseconds, and the rotation speed realized by the rotary table and the swing mirror at present obviously cannot meet the requirement, so that the imaging time is too long.
In addition, as shown in fig. 2, in the related art, a light source is input to each optical phase-controlled channel through an optical power distribution network, which may be implemented by cascading power dividers 1 × 2, an electro-optical phase shifter is provided in each channel, and each phase shifter is controlled such that the phase value of each channel is respectively equal to
Ensure adjacent channel difference of
The grating coupler can be used as an antenna to realize the light coupling in the waveguide into free space, the output light of each array is synthesized into a main beam in the space, and the main beam is controlled
To achieve deflection of the main beam pointing direction.
The technical scheme has the following defects: due to manufacturing process errors of the basic power dividing unit, light splitting nonuniformity and initial phase difference always exist, and the more the cascade connection is, the larger the deviation is, the different channel amplitudes are caused, and the grating lobe level is raised. Moreover, there is no function of spatial optical communication.
As shown in fig. 3, an optical phased array device according to an embodiment of the present invention includes: the system comprises an optical switch, an electro-optical intensity modulator, a power distribution network, an amplitude consistency network and an optically controlled phased array.
In particular, the optical switch is used for controlling the reception of light source signals of different modes. As shown in fig. 3, the optical phased array may be connected to the continuous laser and the pulsed laser through optical switches, and may be controlled to be connected to the continuous laser and disconnected from the pulsed laser through the optical switches, or may be controlled to be disconnected from the continuous laser and connected to the pulsed laser through the optical switches. Therefore, the light source signals of different modes can be controlled and received through the optical switch.
The electro-optical intensity modulator is connected with the optical switch and used for modulating the intensity of the optical signal. When the laser radar performs a communication function, the optical switch may control to receive the continuous laser beam, and the electro-optical intensity modulator may modulate the intensity of the received continuous laser beam.
The power division network is connected with the electro-optical intensity modulator and used for distributing the optical signals to the plurality of sub-channels. The amplitude consistency network is connected with the power distribution network and used for detecting and adjusting the optical power of the optical signals in each sub-channel. The light-operated phased array comprises a plurality of electro-optical phase shifters, and each sub-channel is provided with an electro-optical phase shifter for adjusting the phase of an optical signal in the sub-channel.
The optical phased array device provided by the embodiment of the invention aims to solve the defects of large volume, heavy weight and slow scanning of the existing measurement and control communication integrated technical scheme and the defect that the existing phased array device does not have a communication measurement function. The phase control array device integrates the electro-optical intensity modulator, the optical switch and the light control phase control array in one chip, realizes the integration of measurement and communication, and breaks through the technical problem of integration of long-distance laser communication and medium-distance high-precision distance measurement highly integrated miniaturized laser load optical machines.
In addition, the problem that the output amplitude of each sub-channel of the light-controlled phased array is inconsistent due to nonuniform light splitting caused by chip manufacturing process errors is solved, and too high grating lobe level and beam pointing deviation are avoided. The amplitude consistency network is added at the front end of the light-controlled phased array, so that the consistency of the optical power in each sub-channel is effectively ensured.
According to some embodiments of the present invention, as shown in fig. 4, a mach-zehnder interferometer having an optical switch of 2 × 2 includes two transmission arms and a first phase shifter disposed on at least one of the transmission arms, the first phase shifter being configured to adjust a phase difference of optical signals in the two transmission arms to control reception of optical signals of different modes.
In some embodiments of the present invention, as shown in fig. 5 and 6, the first phase shifter is a PIN structure of a carrier injection type, or a PN structure of a carrier depletion type. That is, the first phase shifter may employ a carrier injection type PIN structure shown in fig. 5; the first phase shifter may also employ a carrier depletion type PN structure shown in fig. 6.
According to some embodiments of the invention, the first phase shifter employs an electro-optical first phase shifter that controls a phase difference of optical signals in the two transmission arms using a carrier dispersion effect of the waveguide.
In some embodiments of the invention, the amplitude consistency network comprises: a photodetector, a directional coupler, and an adjustable attenuator.
Wherein the photodetector is used for detecting the optical power of the optical signal in each sub-channel. The directional coupler is used to adjust the fraction of the optical signal in each subchannel that is input to the photodetector. The adjustable attenuator is used for adjusting the optical power of the optical signal in each sub-channel according to the optical power of the optical signal in each sub-channel.
In some embodiments of the present invention, the optical phased array device is a silicon-based optical phased array device fabricated using a silicon-on-insulator wafer.
According to an embodiment of the invention, a lidar includes: an optical phased array device as described above.
According to the laser radar provided by the embodiment of the invention, a silicon-based optical waveguide phased array device integrating measurement and communication is adopted, the problems of space high-speed communication and beam scanning and splitting are solved, and a modulator and the phased array are integrated by using one chip. In addition, by arranging the amplitude consistency network, the problem of inconsistent optical output amplitude of each sub-channel caused by unbalanced power distribution of the phased array and optical loss caused by a carrier absorption effect is solved, the deviation of beam pointing is reduced, and the level of grating lobes is reduced.
According to the detection method based on the laser radar, the detection method adopts the laser radar, and the method comprises the following steps:
receiving continuous laser through optical switch control;
detecting the optical power of the optical signal in each sub-channel through an amplitude consistency network, and adjusting the optical power of the optical signal in each sub-channel based on the optical power of the optical signal in each sub-channel so as to make the optical power in each sub-channel consistent;
starting the detection function of the laser radar, and receiving pulse laser through optical switch control;
and adjusting the phase of the received pulse laser in each sub-channel through the optical phased array, and outputting to form a scanning beam so as to scan and detect the target.
According to the detection method based on the laser radar, the silicon-based optical waveguide phased array device integrating measurement and communication is adopted, the problem that optical output amplitudes of sub-channels are inconsistent due to unbalanced power distribution of the phased array and optical loss caused by a carrier absorption effect can be solved by setting the amplitude consistency network, beam pointing deviation is reduced, and the level of a grating lobe is reduced.
According to some embodiments of the invention, the method further comprises:
after scanning and detecting the target to obtain the position of the target, the optical switch controls to receive continuous laser;
the intensity of the pulse laser is modulated by an electro-optical intensity modulator, and a communication signal is generated and sent to a target.
The optical phased array device and the lidar according to the present invention are described in detail below in three specific embodiments. It is to be understood that the following description is illustrative only and is not intended to be in any way limiting.
The optical phased array device provided by the invention is a silicon-based optical phased array device integrating measurement and communication, can be prepared on a silicon-on-insulator wafer (SOI), has a preparation process compatible with a CMOS (complementary metal oxide semiconductor) process, can effectively reduce the production cost, and is easy to integrate with other microelectronic devices.
The first embodiment is as follows:
as shown in fig. 3, the optical phased array device includes: the system comprises an electro-optical intensity modulator, a photoelectric detector, an optical switch, a power distribution network, an amplitude consistency network, a phased array and a grating array. The waveguide structure of the device can be a ridge waveguide structure or a strip waveguide structure.
The optical phased array device also comprises an electrode part which is used for leading out detection signals of the electro-optical modulator, the phase shifter, the optical switch and the photoelectric detector driven by electric signals.
As shown in fig. 3, the number of channels N is 8 as an example. The optical switch is used for connecting the continuous light laser and the pulse light laser outside the device. Wherein the continuous light source is used for subsequent calibration and communication and the pulsed light source is used for subsequent measurement. The electro-optical intensity modulator is used for modulating the intensity of the continuous light to form an OOK (on-off key) modulation signal. The power distribution network is used for distributing the light source to the N sub-channels on average. The amplitude consistency network detects the optical power of each sub-channel through a photoelectric detector, and then the adjustable attenuator is controlled in a feedback mode, so that the output optical power of each sub-channel is kept consistent. The electro-optical phase shifters of each sub-channel are used for phase modulation to form phase difference and control the direction of the transmitted beam. A grating array is used to optically couple light into the waveguide into free space to form a beam.
As shown in fig. 4, the structure of the optical switch is a 2 × 2 mach-zehnder interferometer (MZI). The two transmission arms are equal in length, one of the transmission arms is provided with an electro-optical phase shifter, the switching of the output ports is realized by adjusting the phase difference of the two transmission arms, the electro-optical phase shifter can adopt a carrier dispersion effect, a carrier injection type PIN structure or a carrier depletion type PN structure, and the sections of waveguides of the two structures are shown in fig. 5 and 6.
The electro-optic intensity modulator is shown in fig. 8, and the structure is a mach-zehnder interferometer, wherein the 1 × 2 splitter and combiner may be a multimode interferometer structure or a directional coupler structure. The two arms of the MZI are equal in length, an electro-optical phase shifter is arranged on each of the two arms, and a thermo-optical phase shifter is arranged on one arm. The structure of the electro-optical phase shifter is the same as that of the optical switch, a differential driving signal is loaded on the electro-optical phase shifter through a traveling wave electrode to form a push-pull driving mode, and the tail end of the traveling wave electrode is provided with a matching impedance Zt (the impedance can be 33 ohms, 50 ohms and 100 ohms). The thermo-optic phase shifter utilizes the thermo-optic effect of the silicon waveguide to change the phase difference of the two arms and adjust the modulator to be at a half-wave working point (-3 dB). The continuous light is amplitude modulated by a modulator to form an OOK modulated signal.
The 1 × N power division network may be implemented by cascading 1 × 2 power dividers. The 1 × 2 power divider may be implemented by a multi-mode interference structure or a directional coupler structure. The actual splitting ratio of the 1 x 2 power divider is not uniform due to process errors, and the nonuniformity is amplified after a plurality of devices are cascaded, so that the optical power output by each channel is not uniform, the beam pointing is deviated, and the level of a side lobe is raised. To solve this problem, the present invention proposes an amplitude coherence network for adjusting the output optical power per channel.
The amplitude adjusting function of each channel in the amplitude consistency network of the N channels is completed by an adjustable attenuator, a directional coupler and a photoelectric detector. The working principle is as follows: the ratio of the optical power output to the grating by the directional coupler to the optical power output to the photoelectric detector is m, the photoelectric detector adopts a germanium-silicon PIN detection structure, and the optical power detected by the photoelectric detector can be converted in proportion to obtain the optical power output to the grating by the channel. And adjusting the adjustable attenuator according to the comparison between the output optical powers of all the channels, so that the amplitudes of the channels tend to be consistent.
The phase control array sets high-speed electro-optical phase shifters per channel for high-speed phase adjustment (0 to 2 pi). The antenna array is composed of a grating array structure.
The working process of the integrated optical phased array silicon-based device for measuring and communicating comprises the following steps:
and S100, powering up and starting the device, controlling the optical switch to switch on the continuous wave laser, and enabling the electro-optical intensity modulator to not work at the moment.
And S200, starting a device amplitude correction function, outputting continuous waves by the laser, starting the photoelectric detectors, and obtaining the detection power of the photoelectric detectors of each channel (E1, E2 and E3 … … En).
S300, comparing the light power detected by all the photoelectric detectors to obtain the minimum light power which is used as the reference light power Ex.
S400, adjusting an adjustable attenuator in the amplitude correction network to enable the optical power output to the photoelectric detector to be equal to the reference optical power, and enabling the amplitudes of all channels to be consistent.
S500, starting a measuring function of the device, controlling the optical switch to be communicated with the pulse laser, obtaining the position of the target through the TOF technology, and estimating the moving speed and the moving direction of the target by using a distance differential method. And controlling the phased array to carry out beam fast scanning to form a target point cloud image.
S600, controlling the wave beam to point to a target, starting a communication function, controlling the optical switch to switch on the continuous light laser again, starting the electro-optical intensity modulator, and performing amplitude modulation on the optical signal.
Therefore, the invention integrates the measurement and communication functions on one device, and realizes the unification of the measurement and communication functions through time division multiplexing.
Example two:
as shown in fig. 7, unlike the first embodiment, in this embodiment, the optical switch uses a silicon-based micro-ring resonator structure to realize the optical switching function, when the resonant wavelength is aligned with the wavelength of the light source, the input light of Port1 enters Port3 through the micro-ring, and when the resonant wavelength is far away from the source wavelength of the light, the input light of Port1 is output to Port3 through the straight waveguide. The resonant wavelength can be changed by adjusting the phase by a thermo-optic phase shifter.
Fig. 9 is a schematic view of the structure of an electro-optical intensity modulator according to a second example of the present invention. The electro-optic intensity modulator takes the form of a single port push-pull drive. The DC bias is loaded on the DC electrode between the two arms, the RF driving signal is loaded on the traveling wave electrode, and the matching impedance of the traveling wave electrode is 50 ohms. The phase shifter adopts a PN junction structure, the Bias1 provides reverse Bias for the PN junction, and the Bias2 provides a static working point for the modulator, so that the modulator works at a-3 dB working point. In this embodiment, other structures and the obtained effects are basically the same as those of the first embodiment.
Example three:
unlike the first embodiment, in this embodiment, the power distribution network includes one bus waveguide and N-1 directional couplers, as shown in fig. 10. The directional coupler is a waveguide arranged in parallel with the bus waveguide, the ratio of the optical power output by the directional coupler to each channel to the optical power of the bus is respectively 1/N from the beginning to the end, 1/(N-1), 1/N, … … and 1/2, and the optical power of each channel is ensured to be 1/N of the input optical power. The other structures and the obtained effects are basically the same as those of the first embodiment.
In summary, in order to enable the silicon optical phased array device to have a function of integrating measurement and communication, and to solve the problem that the existing silicon-based phased array device is single in function, the silicon optical phased array device is designed to have a function of integrating communication and communication in a large scale by fully utilizing the characteristic of the silicon optical sub-device.
The invention connects the external continuous light laser and the pulse light laser through the optical switch, the amplitude correction and communication are connected with the continuous light laser, and the detection is connected with the pulse light laser. The electro-optical intensity modulator performs amplitude modulation.
The invention sets an amplitude consistency network, comprising: the amplitude consistency network comprises: the directional coupler, the photoelectric detector and the adjustable attenuator. The adjustable attenuator can be adjusted according to the detected optical power, the output optical power of each channel is controlled, and the consistency of the amplitude is realized, so that the beam pointing deviation and the minor lobe level elevation are avoided.
The invention relates to a silicon photonic integrated device manufactured on a silicon-based SOI wafer, wherein an optical power divider can also be manufactured by using a silicon nitride waveguide, and a phase shifter can be manufactured by using a thermo-optic phase shifter based on the silicon nitride waveguide.
In addition, the optical switch of the invention can be replaced by a wavelength division multiplexer, and the wavelengths of the continuous light laser and the pulse light laser are different at the moment, and the continuous light laser and the pulse light laser are synthesized into a path to be accessed into the modulator through the wavelength division multiplexer. During detection, the pulse laser works, and during communication, the continuous light laser works.
While the invention has been described in connection with specific embodiments thereof, it is to be understood that it is intended by the appended drawings and description that the invention may be embodied in other specific forms without departing from the spirit or scope of the invention.
Claims (10)
1. An optical phased array device, comprising:
the optical switch is used for controlling light source signals in different modes;
the electro-optical intensity modulator is connected with the optical switch and is used for modulating the intensity of the optical signal;
the power division network is connected with the electro-optical intensity modulator and used for distributing the optical signals to a plurality of sub-channels;
the amplitude consistency network is connected with the power distribution network and is used for detecting and adjusting the optical power of the optical signal in each subchannel;
the light-operated phased array comprises a plurality of electro-optical phase shifters, and each sub-channel is provided with the electro-optical phase shifter and used for adjusting the phase of the optical signal in the sub-channel.
2. The optical phased array device according to claim 1, wherein the optical switch is a mach-zehnder interferometer, and comprises two transmission arms and a first phase shifter disposed on at least one of the transmission arms, and the first phase shifter is configured to adjust a phase difference of the optical signals in the two transmission arms to control receiving of the optical source signals of different modes.
3. The optical phased array device according to claim 2, wherein the first phase shifter is a PIN structure of a carrier injection type or a PN structure of a carrier depletion type.
4. The optical phased array device according to claim 2, wherein said first phase shifter is an electro-optical first phase shifter, and said electro-optical first phase shifter controls a phase difference of said optical signals in two of said transmission arms by using a carrier dispersion effect of a waveguide.
5. The optical phased array device of claim 1, wherein the amplitude coherence network comprises:
a photodetector for detecting the optical power of the optical signal in each of the subchannels;
a directional coupler for adjusting the duty ratio of the optical signal input to the photodetector in each of the subchannels;
and the adjustable attenuator is used for adjusting the optical power of the optical signal in each subchannel according to the optical power of the optical signal in each subchannel.
6. The optical phased array device as claimed in claim 1, wherein said optical switch is configured to control the reception of continuous laser light or pulsed laser light.
7. The optical phased array device according to any of claims 1 to 6, wherein the optical phased array device is a silicon-based optical phased array device fabricated using a silicon-on-insulator wafer.
8. A lidar, comprising: the optical phased array device of any one of claims 1 to 7.
9. A lidar-based detection method, wherein the detection method employs the lidar of claim 8, and wherein the method comprises:
controlling to receive continuous laser through the optical switch;
detecting the optical power of an optical signal in each sub-channel through the amplitude consistency network, and adjusting the optical power of the optical signal in each sub-channel based on the optical power of the optical signal in each sub-channel so as to make the optical power in each sub-channel consistent;
starting a detection function of the laser radar, and receiving pulse laser through the optical switch light control;
and adjusting the phase of the received pulse laser in each sub-channel through the optical phased array, and outputting to form a scanning beam so as to scan and detect a target.
10. The lidar-based detection method of claim 9, wherein the method further comprises:
after the target is scanned and detected to obtain the position of the target, the optical switch controls to receive continuous laser;
and modulating the intensity of the continuous laser by the electro-optical intensity modulator and generating a communication signal to be sent to the target.
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