CN112123743A - A leveling device for transparent substrate of Fabry-Perot interferometer - Google Patents

Abstract

The invention discloses a leveling device for a Fabry-Perot interferometer transparent substrate, which comprises a support base, a protective shell, a primary leveling component, a planar ranging component and a finishing leveling component, wherein the upper end surface of the support base is provided with the primary leveling component, and the primary leveling component performs leveling work on the outer surface of the transparent substrate through the vertical relative extrusion action of the primary leveling component, so that the finish deviation of the outer end surface of the transparent substrate is constant within the error range; the up end of supporting pedestal is provided with the plane and measures the subassembly, the plane is surveyed the subassembly and is effectively measured the local terminal surface flushness of transparent substrate, and the record transmits its detected data to the flat subassembly of finishing, just, be provided with the flat subassembly of finishing directly over the plane range finding subassembly, this fine flattening subassembly carries out the accurate adjustment to the flattening working face according to the detected data for its flattening working face full adaptation corresponds the surface in transparent substrate.

Description

A leveling device for transparent substrate of Fabry-Perot interferometer

technical field

The invention relates to the technical field of Fabry-Perot interferometer repair equipment, in particular to a leveling device for a transparent substrate of a Fabry-Perot interferometer.

Background technique

Fabry-Perot interferometers are used as optical filters and in spectral sensors, Fabry-Perot interferometers are based on parallel beamsplitters, which are formed as mirrors in Fabry-Perot cavities Gap between mirrors, arranged to form an optical cavity; the pass band wavelength of a Fabry-Perot interferometer can be controlled by adjusting the distance between the mirrors (ie, the width of the gap), common The Fabry-Perot interferometer is produced using micromechanical techniques. In the prior art, the spectral position of the transmission peak can be changed by changing the distance between the mirrors, and a transparent substrate is generally provided on the observation surface of the device, which is affected by the long-term clamping force, so that concave folds appear on its circumferential surface. Bending deformation, and because it needs to be rotated and adjusted many times during use, the end face of the transparent substrate is prone to form different degrees of bending and undulation. Therefore, it is necessary to propose a leveling device for the transparent substrate of the Fabry-Perot interferometer. to solve the above problems.

SUMMARY OF THE INVENTION

In order to achieve the above purpose, the present invention provides the following technical solutions: a leveling device for a transparent substrate of a Fabry-Perot interferometer, which includes a support base, a protective casing, a preliminary leveling component, and a plane ranging component and a leveling assembly, wherein the lower end face of the support base is symmetrically provided with strip-shaped support legs for supporting and fixing, and the two sides of the upper end face are fixedly connected with a protective shell by bolts, and the left and right sides of the protective shell are connected. Each side is provided with a transmission port for feeding in and taking out a transparent substrate, and a preliminary leveling component is installed on the upper end surface of the supporting base.

The preliminary leveling assembly performs leveling work on the outer surface of the transparent substrate through its up-down relative extrusion action, so that the smoothness deviation of the outer end surface of the transparent substrate is constant within its error range;

The upper end surface of the support base is provided with a plane distance measuring component, the plane distance measuring component effectively measures the local end face flushness of the transparent substrate, records and transmits its detection data to the finishing leveling component,

Moreover, a leveling and leveling component is arranged directly above the plane ranging component, and the leveling and leveling component precisely adjusts the leveling working surface according to the detection data, so that the leveling working surface is completely adapted to the corresponding transparent substrate. The outer surface.

As a preferred technical solution of the present invention, the preliminary leveling assembly includes an upper leveling device, a lower leveling device and a conveyor belt, wherein a connecting baffle is vertically fixed on one side of the inner side of the protection housing, and the protection housing A separation plate is attached and fixed on the inner upper side, and the left and right sides of the upper end surface of the support base are inclined with conveyor belts through the support columns. delivery space;

An upper leveling device is arranged on the inner upper side of the protective casing, and a lower leveling device is fixed on the upper end surface of the support base through a fixing seat, and the upper leveling device and the lower leveling device cooperate in parallel with each other, The end face of the transparent substrate is leveled while being transported laterally;

A fixed guide rod is vertically symmetrically arranged on both sides of the inner side of the protective casing, and the upper leveling device is limited and slid on the fixed guide rod by means of sliding pieces arranged on both sides of the upper leveling device.

Moreover, a mounting seat is fixed symmetrically up and down at the inner middle position of the protective casing, a connecting guide wheel is rotatably arranged in the mounting seat, and a connecting tooth chain is engaged and driven on the connecting guide wheel, and the connecting tooth One side of the chain is fixed with the upper leveling device, so that the upper leveling device can effectively adjust the vertical distance between the upper leveling device and the lower leveling device through the meshing and sliding of the connecting tooth chain.

As a preferred technical solution of the present invention, the upper leveling device has the same internal structure as the lower leveling device, and the transmission direction of the working surface is the same, wherein the upper leveling device includes a fixed frame, an extrusion wheel shaft, an installation transmission A belt, a connecting frame, a rotating motor and a leveling disc seat, the fixed frame is provided with a left-right symmetrical extruding wheel shaft, and a guide wheel is symmetrically installed in the fixed frame, and the extruding wheel shaft and the guiding wheel are driven by a Install the conveyor belt, and smooth the outer surface of the transparent substrate through the installation conveyor belt,

A leveling disc base is installed in the fixed frame, and a rotating motor is fixed in the fixed frame through a connecting frame, and the output end of the rotating motor is connected and fixed with the leveling disc base, and one side of the leveling disc base is fixed. The end surface is closely attached to the installation conveyor, so that when the leveling disc base is driven to rotate by the rotating motor, the outer surface of the installation conveyor forms a circular flat working surface.

As a preferred technical solution of the present invention, the leveling disc base includes a mounting plate, a side pressing piece, a fixed disc base, a main leveling piece and a connecting spring, wherein one end face of the mounting plate is provided with a circumferential opening. There are a plurality of internal notches for fixing the side pressing member, the side pressing member can be relatively rotatably fixed on the mounting plate, and the left and right sides of the side pressing member are provided with connecting springs and the The mounting plate is connected and fixed, so that when the side pressing member is leveling and pressing the transparent substrate, it can be adjusted in time according to the undulating state of the end face of the transparent substrate;

A fixed disc seat is coaxially fixed on the lower end surface of the mounting plate through a plurality of connecting columns, and a main leveling piece is installed on the lower end surface of the fixed disc base, and the main leveling piece is installed and transmitted under the circumstance of rotation. With leveling work on transparent substrates.

As a preferred technical solution of the present invention, the extrusion axle further includes an outer support, a fixed axle and an inner heater, wherein a fixed axle is rotatably provided in the outer support, and the fixed axle is internally provided with There is an accommodating cavity, the inner heater is laterally fixed in the accommodating cavity, and a plurality of heat conduction ports are opened on the circumference of the fixed wheel shaft, so that when the inner heater performs heating work, it passes through the heat conduction ports. Heat is transferred to the outer surface of the stationary axle.

As a preferred technical solution of the present invention, the installation conveyor is set as a multi-layer structure, and the side close to the fixed axle is a heat-conducting inner part, and the other side is a heat-insulating outer part.

As a preferred technical solution of the present invention, the plane distance measuring assembly includes a bearing plate, a distance measuring probe, a mounting base and a lower fixing member, wherein a mounting base is fixed on the upper end surface of the supporting base, and the mounting base is The base is provided with a connecting notch for limiting and fixing the lower fixing piece, the upper end surface of the lower fixing piece is provided with a bearing plate, and a transparent measuring plate is fixed on the bearing plate at intervals;

Moreover, a plurality of distance measuring probes are vertically arranged on the carrying plate, and each of the distance measuring probes is communicated with the peripheral data processor through connecting leads, so that after measuring the surface flushness of the transparent substrate, the distance measuring probes are The peripheral data processor is passed to the screed assembly, causing the screed assembly to make corresponding adjustments.

As a preferred technical solution of the present invention, the leveling assembly includes a telescopic cylinder, a telescopic guide cover, a return spring, a press-fit outer plate, a mounting piece and a controllable guide rod, wherein the support base is fixed with a A frame, a telescopic cylinder is vertically fixed on the frame, and a press-fit outer plate is installed at the output end of the telescopic cylinder,

In addition, a telescopic guide cover is arranged between the pressing outer plate and the telescopic cylinder, the telescopic guide cover has a two-stage retractable structure, and a plurality of return springs are arranged in parallel in the telescopic guide cover; A plurality of mounting pieces are arranged on one end face of the closing outer plate away from the telescopic guide cover, and a plurality of controllable guide rods are also vertically fixed on each of the mounting pieces.

Compared with the prior art, the present invention provides a leveling device for a transparent substrate of a Fabry-Perot interferometer, which has the following beneficial effects:

In the present invention, the support base is provided with a preliminary leveling component, which performs preliminary leveling work on the transparent substrate through the mutual extrusion and cooperation between the upper leveling device and the lower leveling device arranged symmetrically from top to bottom, so that the outer end surface of the transparent substrate is preliminarily leveled. The smoothness deviation is constant within a certain error range. Among them, there are extruding axles in the front and rear of the fixed frame, and an inner heater is arranged in the extruding axle. The outer surface of the substrate is partially heated and softened and plasticized, so that the end face of the leveling disc seat can be leveled under the action of rotation; and a plurality of freely adjustable side pressing pieces are arranged on the circumference of the mounting plate, which can follow the transparent substrate. The undulating state of the end face is adjusted in a timely manner to prevent the phenomenon of "excessive extrusion" during the leveling process, so that the internal force of the end face is directly broken; the support base is also provided with a plane distance measuring component and a leveling component. The distance probe effectively measures the local end-face flushness of the transparent substrate, records and transmits the inspection data to the leveling component, and adjusts accordingly through the controllable guide rod, so as to perform high-precision leveling work on the transparent substrate.

Description of drawings

Fig. 1 is the structural representation of the present invention;

2 is a schematic structural diagram of a preliminary leveling assembly in the present invention;

3 is a schematic structural diagram of an upper leveling device in the present invention;

Fig. 4 is the sectional view of leveling disc seat in the present invention;

Fig. 5 is the sectional view of the extrusion wheel axle in the present invention;

6 is a schematic structural diagram of a plane ranging assembly in the present invention;

7 is a schematic structural diagram of a leveling assembly in the present invention;

In the figure: 1 support base, 2 protective shell, 3 preliminary leveling components, 301 upper leveling device, 302 lower leveling device, 303 fixed seat, 304 sliding piece, 305 fixed guide rod, 306 mounting seat, 307 connecting guide wheel , 308 connecting tooth chain, 309 connecting clapboard, 310 separating plate, 311 transmission belt, 312 fixed frame, 313 guide wheel, 314 connecting frame, 315 rotating motor, 316 installation belt, 317 heat insulation outer part, 318 heat conduction inner part, 4 Planar distance measuring component, 401 mounting base, 402 lower fixing piece, 403 bearing plate, 404 distance measuring probe, 405 transparent measuring plate, 406 connecting lead, 5 finishing flat component, 501 frame, 502 telescopic cylinder, 503 telescopic guide Cover, 504 return spring, 505 press-fit outer plate, 506 mounting piece, 507 controllable guide rod, 6 leveling disc seat, 601 mounting plate piece, 602 side pressing piece, 603 fixed disc base, 604 main leveling piece, 605 Connecting springs, 7 extrusion axles, 701 outer brackets, 702 fixed axles, 703 inner heaters.

Detailed ways

1, the present invention provides a technical solution: a leveling device for a transparent substrate of a Fabry-Perot interferometer, which includes a support base 1, a protective casing 2, a preliminary leveling component 3, a plane The distance measuring assembly 4 and the leveling assembly 5, wherein the lower end face of the support base 1 is symmetrically provided with a strip-shaped support leg for supporting and fixing, and the two sides of the upper end face are fixedly connected with a protective shell 2 by bolts, The left and right sides of the protective casing 2 are provided with transmission ports for feeding in and taking out the transparent substrate, and the upper end surface of the support base 1 is provided with a preliminary leveling component 3 ,

The preliminary leveling component 3 performs leveling work on the outer surface of the transparent substrate through its up-down relative extrusion action, so that the smoothness deviation of the outer end surface of the transparent substrate is constant within its error range;

The upper end surface of the support base 1 is provided with a plane distance measuring component 4 , and the plane distance measuring component 4 effectively measures the flushness of the partial end face of the transparent substrate, records and transmits its detection data to the leveling component 5,

In addition, a leveling component 5 is provided directly above the plane distance measuring component 4, and the leveling component 5 precisely adjusts the leveling working surface according to the detection data, so that the leveling working surface is completely adapted to The transparent substrate corresponds to the outer surface. Among them, it should be noted that in order to prevent the leveling component from directly leveling the end face of the transparent substrate under the action of high pressure, the relative amplitude difference of the working surface can be adjusted appropriately so that the It will not form a vertical working face with a high difference, and control the working pressure in real time.

2, in this embodiment, the preliminary leveling assembly 3 includes an upper leveling device 301, a lower leveling device 302 and a conveyor belt 311, wherein a connecting baffle 309 is vertically fixed on one side of the inner side of the protective housing 2, A separating plate 310 is attached and fixed on the inner upper side of the protective casing 2 , and conveyor belts 311 are inclined on the left and right sides of the upper end surface of the support base 1 through support columns. The transmission belt 311 and the separating plate 309 are mutually Parallel spacing equipment, so that the two sides of the protective shell 2 form a conveying space;

An upper leveling device 301 is arranged on the inner upper side of the protective casing 2, and a lower leveling device 302 is fixed on the upper end surface of the support base 1 through a fixing seat 303. The upper leveling device 301 is connected to the lower leveling device 302. The devices 302 are matched in parallel with each other, and the end faces of the transparent substrates are leveled while being transported laterally;

Fixed guide rods 305 are vertically symmetrically arranged on both sides of the inner side of the protective casing 2, and the upper leveling device 301 is limited and slid on the fixed guide rods 305 by the sliding members 304 disposed on both sides thereof.

In addition, a mounting seat 306 is fixed symmetrically up and down at the inner middle position of the protective casing 2, and a connecting guide wheel 307 is rotatably arranged in the mounting seat 306. The connecting guide wheel 307 is engaged with a connecting tooth chain. 308, one side of the connecting toothed chain 308 is fixed with the upper leveling device 301, so that the upper leveling device 301 can effectively adjust the vertical distance between the upper leveling device 301 and the lower leveling device 302 through the meshing and sliding of the connecting toothed chain 308 , in order to perform leveling work with transparent substrates with different material thicknesses or different deformation and bending degrees, which is convenient for timely adjustment.

Referring to FIG. 3 , in this embodiment, the upper leveling device 301 and the lower leveling device 302 have the same internal structure, and their working surfaces have the same transmission direction, wherein the upper leveling device 301 includes a fixed frame 312 , an extrusion wheel shaft 7. Install the conveyor belt 316, the connecting frame 314, the rotating motor 315 and the leveling disc seat 6. The fixed frame 312 is provided with a left-right symmetrical extrusion wheel shaft 7, and the fixed frame 312 is symmetrically installed with a guide wheel 313. An installation belt 316 is installed on the extrusion wheel shaft 7 and the guide wheel 313, and the outer surface of the transparent substrate is smoothed through the installation belt 316.

The leveling disc base 6 is installed in the fixed frame 312, and a rotating motor 315 is fixed in the fixed frame 312 through the connecting frame 314. The output end of the rotating motor 315 is connected and fixed with the leveling disc base 6. One end face of the leveling disc base 6 is closely attached to the installation conveyor belt 314, so that when the leveling disc base 6 is rotated by the rotating motor 315, the outer surface of the installation conveyor belt 316 forms a circular flat working surface, The leveling disc seat indirectly levels the transparent substrate by installing the conveyor belt, preventing its direct contact from causing scratches on its surface.

Referring to FIG. 4 , in this embodiment, the leveling disc base 6 includes a mounting plate 601 , a side pressing piece 602 , a fixed disc base 603 , a main leveling piece 604 and a connecting spring 605 , wherein the mounting plate 601 A plurality of internal notches for fixing the side pressing member 602 are opened on the circumference of one side end face of the s Both sides are provided with connecting springs 605 to be connected and fixed with the mounting plate 601, so that when the side pressing member 602 is leveling and pressing the transparent substrate, it can be adjusted in time with the undulating state of the end face of the transparent substrate;

A fixed plate seat 603 is coaxially fixed on the lower end surface of the mounting plate 601 through a plurality of connecting columns, and a main leveling member 604 is installed on the lower end surface of the fixed plate seat 603. The transparent substrate is leveled by installing the conveyor belt 316 under rotation.

Referring to FIG. 5 , in this embodiment, the extruding axle 7 further includes an outer bracket 701 , a fixed axle 702 and an inner heater 703 , wherein the outer bracket 701 is provided with a relatively rotatable fixed axle 702 . The fixed axle 702 is provided with an accommodating cavity, the inner heater 703 is laterally fixed in the accommodating cavity, and a plurality of heat conduction ports are opened on the circumference of the fixed axle 702, so that when the inner heater 703 operates, During the heating operation, it transmits heat to the outer surface of the fixed axle 702 through the heat conduction port, and uses the inner heater to locally supply heat for the installation conveyor, so that the outer layer of the transparent substrate is partially heated and softened and plasticized, so that the leveling disc seat is rotated. The end face can be leveled below.

In this embodiment, the mounting belt 316 is a multi-layer structure, and one side of the mounting belt 316 close to the fixed axle 702 is a heat-conducting inner member 318 , and the other side is a heat-insulating outer member 317 .

Referring to FIG. 6 , in this embodiment, the plane distance measuring assembly 4 includes a bearing plate 403 , a distance measuring probe 404 , a mounting base 401 and a lower fixing member 402 , wherein the upper end surface of the supporting base 1 is fixed with a mounting The base 401, the mounting base 401 is provided with a connecting notch for limiting and fixing the lower fixing member 402, the upper end surface of the lower fixing member 402 is provided with a bearing plate 403, the upper space of the bearing plate 403 A transparent measuring plate 405 is fixed;

In addition, a plurality of distance measuring probes 404 are vertically disposed on the carrier plate 403, and each of the distance measuring probes 404 is connected to a peripheral data processor (not shown in the figure) through connecting leads 406, so that the After the surface levelness of the transparent substrate is measured, it is transmitted to the leveling component 5 through the peripheral data processor, so that the leveling component 5 makes corresponding adjustments.

Referring to FIG. 7 , in this embodiment, the leveling assembly 5 includes a telescopic cylinder 502 , a telescopic guide cover 503 , a return spring 504 , a press-fit outer plate 505 , a mounting member 506 and a controllable guide rod 507 , wherein the A frame 501 is fixed on the support base 1, a telescopic cylinder 502 is vertically fixed on the frame 501, and a pressing outer plate 505 is installed at the output end of the telescopic cylinder 502.

In addition, a telescopic guide cover 503 is arranged between the pressing outer plate 505 and the telescopic cylinder 502 , the telescopic guide cover 503 is a two-stage retractable structure, and a plurality of resets are arranged in parallel in the telescopic guide cover 503 Spring 504; a plurality of mounting pieces 506 are arranged on the end face of the press-fit outer plate 505 away from the telescopic guide cover 503, and a plurality of controllable guide rods 507 are also vertically fixed on each of the mounting pieces 506. Each controllable guide rod operates independently and telescopically, so that it can perform corresponding telescopic adjustment according to the detection situation, and has high flexibility.

Specifically, when the transparent substrate of the Fabry-Perot interferometer is leveled, the transparent substrate is guided between the upper leveling device and the lower leveling device through the transmission belt. The effective distance between the leveling device and the lower leveling device is effectively adjusted by the connecting tooth chain, and is limited and fixed by the sliding piece. The installation conveyor belt slowly transports the transparent substrate horizontally, and the inner heater passes the heat conduction port to the installation transmission. With local heating, the outer layer of the transparent substrate is partially heated and softened and plasticized. The rotating motor drives the leveling disc seat to perform preliminary leveling work on the transparent substrate through the installation of the conveyor belt under the action of high-speed rotation; The local end face flushness is effectively measured, and the detection data is recorded and transmitted to the leveling component. Multiple controllable guide rods are correspondingly telescopic and adjusted according to the detection conditions, and are pressed down through the telescopic cylinder to achieve high precision to the transparent substrate. Precision leveling work.

The above description is only a preferred specific embodiment of the invention, but the protection scope of the present invention is not limited to this. Equivalent replacements or changes to the inventive concept shall all fall within the protection scope of the present invention.

Claims (8)

1. A leveling device for a transparent substrate of a Fabry-Perot interferometer, comprising a support base (1), a protective casing (2), a preliminary leveling component (3), a plane ranging component ( 4) and the leveling assembly (5), wherein the lower end surface of the support base (1) is symmetrically provided with strip-shaped support legs for supporting and fixing, and both sides of the upper end surface are connected with a protective shell by bolts. (2), the left and right sides of the protective casing (2) are provided with transmission ports for feeding in and taking out the transparent substrate, and it is characterized in that: the upper end surface of the supporting base (1) is provided with a preliminary leveling component (3), The preliminary leveling component (3) performs leveling work on the outer surface of the transparent substrate through its up-down relative extrusion action, so that the smoothness deviation of the outer end surface of the transparent substrate is constant within its error range; The upper end face of the support base (1) is provided with a plane distance measuring assembly (4), the plane distance measuring assembly (4) effectively measures the flushness of the partial end face of the transparent substrate, records and transmits its detection data to the Finishing flat assembly (5), Furthermore, a leveling component (5) is arranged directly above the plane ranging component (4), and the leveling component (5) precisely adjusts the leveling working surface according to the detection data, so that it is leveled The working surface is completely adapted to the corresponding outer surface of the transparent substrate. 2. A flattening device for a transparent substrate of a Fabry-Perot interferometer according to claim 1, characterized in that: the preliminary flattening assembly (3) comprises an upper flattening device (301), a lower A leveling device (302) and a conveyor belt (311), wherein a connecting baffle (309) is vertically fixed on one inner side of the protective casing (2), and a connecting baffle (309) is attached and fixed on the inner upper side of the protective casing (2) The separation plate (310) is provided with conveyor belts (311) on the left and right sides of the upper end surface of the support base (1) through supporting columns, and the transmission belt (311) and the separation plate (309) are parallel to each other and spaced apart from each other. , so that a conveying space is formed on both sides of the protective casing (2); An upper leveling device (301) is arranged on the inner upper side of the protective casing (2), and a lower leveling device (302) is fixedly arranged on the upper end surface of the support base (1) through the fixing seat (303), so The upper leveling device (301) and the lower leveling device (302) are matched in parallel with each other, and the end face of the transparent substrate is leveled while being transported laterally; Fixed guide rods (305) are vertically symmetrically arranged on both sides of the inner side of the protective casing (2), and the upper leveling device (301) is limited and slid on the upper leveling device (301) by means of sliding members (304) arranged on both sides thereof. On the fixed guide rod (305), In addition, a mounting seat (306) is fixed symmetrically up and down at the inner middle position of the protective casing (2), and a connecting guide wheel (307) is rotatably provided in the mounting seat (306), and the connecting guide wheel (307) There is a connecting tooth chain (308) in the upper meshing transmission, and one side of the connecting tooth chain (308) is fixed with the upper leveling device (301), so that the upper leveling device (301) passes through the connecting tooth chain The engaging sliding of (308) effectively adjusts the vertical distance between it and the lower leveling device (302). 3. A flattening device for a transparent substrate of a Fabry-Perot interferometer according to claim 2, wherein the upper flattening device (301) and the lower flattening device (302) are inside The structure is the same, and the transmission direction of the working surface is the same, wherein the upper leveling device (301) includes a fixed frame (312), a pressing wheel shaft (7), an installation belt (316), a connecting frame (314), a rotating motor (315) and the leveling disc seat (6), the fixed frame (312) is provided with a left-right symmetrical extrusion wheel shaft (7), and the fixed frame (312) is symmetrically installed with a guide wheel (313), so An installation belt (316) is arranged on the extrusion wheel shaft (7) and the guide wheel (313), and the outer surface of the transparent substrate is smoothed by the installation belt (316). A leveling disc seat (6) is installed in the fixed frame (312), and a rotary motor (315) is fixed in the fixed frame (312) through a connecting frame (314), and the output of the rotary motor (315) The end is connected and fixed with the leveling disc base (6), and one end face of the leveling disc base (6) is closely fitted with the installation belt (314), so that when the leveling disc base (6) is driven by the rotating motor When the drive (315) rotates, the outer surface of the installation conveyor (316) forms a circular flat working surface. 4. A leveling device for a transparent substrate of a Fabry-Perot interferometer according to claim 3, characterized in that: the leveling disc seat (6) comprises a mounting plate (601), a side The pressing member (602), the fixing plate seat (603), the main leveling member (604) and the connecting spring (605), wherein one end face of the mounting plate member (601) is provided with a plurality of fixing positions around the circumference. The side pressing member (602) is provided with a notch inside, the side pressing member (602) can be relatively rotatably fixed on the mounting plate (601), and the left and right sides of the side pressing member (602) are provided with The connecting spring (605) is connected and fixed with the mounting plate (601), so that the side pressing member (602) is adjusted in time according to the undulating state of the end face of the transparent substrate when the transparent substrate is leveled and pressed; A fixed disk seat (603) is coaxially fixed on the lower end surface of the mounting plate (601) through a plurality of connecting columns, and a main leveling member (604) is installed on the lower end surface of the fixed disk seat (603). The main leveling member (604) performs leveling work on the transparent substrate through the installation conveyor (316) under the circumstance of rotation. 5. A leveling device for a transparent substrate of a Fabry-Perot interferometer according to claim 4, characterized in that: the extrusion wheel shaft (7) further comprises an outer support (701), a fixed wheel shaft (702) and an inner heater (703), wherein a fixed wheel shaft (702) is rotatably provided in the outer support (701), and the fixed wheel shaft (702) is provided with a accommodating cavity, and the The inner heater (703) is laterally fixed in the accommodating cavity, and a plurality of heat conduction ports are opened on the circumference of the fixed wheel shaft (702), so that when the inner heater (703) performs a heating operation, the inner heater (703) is heated through heat conduction. The port transfers heat to the outer surface of the stationary axle (702). 6. A leveling device for a transparent substrate of a Fabry-Perot interferometer according to claim 5, characterized in that: the installation conveyor (316) is set as a multi-layer structure, and it is close to One side of the fixed axle (702) is a heat-conducting inner member (318), and the other side is a heat-insulating outer member (317). 7. A leveling device for a transparent substrate of a Fabry-Perot interferometer according to claim 1, characterized in that: the plane distance measuring assembly (4) comprises a bearing plate (403), a measuring A distance probe (404), an installation base (401) and a lower fixing piece (402), wherein an installation base (401) is fixed on the upper end surface of the support base (1), and a The connecting notch of the lower fixing member (402) is fixed in position, the upper end surface of the lower fixing member (402) is provided with a bearing plate member (403), and a transparent transparent fixing plate member (403) is fixed on the upper end surface of the lower fixing member (402). Test board (405); In addition, a plurality of distance measuring probes (404) are vertically arranged on the carrier plate (403), and each of the distance measuring probes (404) is communicated with the peripheral data processor through the connecting lead (406), so that the After the surface levelness of the transparent substrate is measured, it is transmitted to the leveling component (5) through the peripheral data processor, so that the leveling component (5) makes corresponding adjustments. 8. A leveling device for a transparent substrate of a Fabry-Perot interferometer according to claim 1, characterized in that: the leveling component (5) comprises a telescopic cylinder (502), a telescopic guide Cover (503), return spring (504), press-fit outer plate (505), mounting piece (506) and controllable guide rod (507), wherein a frame (501) is fixed on the support base (1) ), a telescopic cylinder (502) is vertically fixed on the frame (501), and a press-fit outer plate (505) is installed at the output end of the telescopic cylinder (502), In addition, a telescopic guide cover (503) is arranged between the pressing outer plate (505) and the telescopic cylinder (502), the telescopic guide cover (503) has a two-stage retractable structure, and the telescopic guide cover (503) is a two-stage retractable structure. A plurality of return springs (504) are arranged in parallel in (503); a plurality of mounting pieces (506) are arranged on the side end face of the press-fit outer plate (505) away from the telescopic guide cover (503). A plurality of controllable guide rods (507) are also vertically fixed on the component (506).

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