CN115683031A - Measuring method for converting horizontal um-level deviation of coaxiality of pipe cap into height mm - Google Patents

Measuring method for converting horizontal um-level deviation of coaxiality of pipe cap into height mm Download PDF

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CN115683031A
CN115683031A CN202211317289.0A CN202211317289A CN115683031A CN 115683031 A CN115683031 A CN 115683031A CN 202211317289 A CN202211317289 A CN 202211317289A CN 115683031 A CN115683031 A CN 115683031A
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cap
distance
tube
rangefinder
pipe
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黄宏伟
李志刚
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Weifang Huaguang Photoelectronics Co ltd
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Abstract

本发明涉及一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法,属于半导体激光器检验领域,包括测距仪、模条、移动支架,将封帽完成的激光器放入模条上,固定完成后将模条放置在移动支架上,由移动支架带动模条等距移动;测距仪垂直在激光器管帽的上方,以激光器管座的圆心为中心点,测距仪在管座圆心水平面的投影位置在>管帽半径的50um处的同心圆上;分别测试同心圆上A、B、C、D四点处测距仪到管座的距离,根据测距仪测试距离判断同轴度,移动支架自动前进,依次测距,根据测距仪的数值变化剔除管帽封偏的激光器,本发明有助于同时保证测量的精度以及速率,既简便可行同时保证较高的准确率。

Figure 202211317289

The invention relates to a measurement method for converting the coaxiality horizontal um level offset of a tube cap into a height mm, which belongs to the field of semiconductor laser inspection and includes a range finder, a mold bar, and a mobile bracket. After the fixation is completed, the mold strip is placed on the mobile bracket, and the mold strip is driven by the mobile bracket to move equidistantly; the rangefinder is vertically above the laser tube cap, with the center of the laser tube base as the center point, and the rangefinder is on the The projection position of the horizontal plane of the center of the pipe seat is on the concentric circle > 50um of the radius of the pipe cap; respectively test the distance from the distance meter to the pipe seat at four points A, B, C, and D on the concentric circle, and measure the distance according to the distance meter Judging the coaxiality, the mobile bracket automatically advances, measures the distance in turn, and eliminates the laser that is capped off the cap according to the numerical change of the rangefinder. Accuracy.

Figure 202211317289

Description

一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法A measurement method for converting the horizontal um-level offset of pipe cap coaxiality into height mm

技术领域technical field

本发明涉及一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法,属于半导体激光器技术领域。The invention relates to a measurement method for converting the coaxiality horizontal um level offset of a pipe cap into a height mm, and belongs to the technical field of semiconductor lasers.

背景技术Background technique

半导体激光器及其阵列因其体积小、重量轻、效率高、成本低等优点已经在工业、医疗、通信、军事等诸多领域获得了广泛的应用。随着半导体激光器及其阵列应用的日益广泛,如何准确、方便地检测器件的性能,对其可靠性进行评价变得越来越重要。Semiconductor lasers and their arrays have been widely used in many fields such as industry, medical treatment, communication, and military because of their small size, light weight, high efficiency, and low cost. With the increasing application of semiconductor lasers and their arrays, how to accurately and conveniently detect device performance and evaluate its reliability has become more and more important.

随着人工智能开始走向应用,其在手机终端、智能家居、工业机器人以及未来无人驾驶等领域逐步普及,未来智能终端对真实环境的准确感知变得尤为重要。激光器作为机器三维视觉的重要元器件,激光器的封装精度成为传感应用的参数。特别是客户在封装自动化的前提下,激光器芯片的出光点相对于管帽的位置往往作为重点的指示参数,这就要求我们激光器封帽的同轴度必须准确。As artificial intelligence begins to be applied, it is gradually popularized in mobile terminals, smart homes, industrial robots, and future unmanned driving. The accurate perception of the real environment by smart terminals in the future becomes particularly important. Lasers are an important component of machine 3D vision, and the packaging accuracy of lasers becomes a parameter for sensing applications. Especially under the premise of automatic packaging for customers, the position of the laser chip's light emitting point relative to the cap is often used as an important indicator parameter, which requires that the coaxiality of our laser cap must be accurate.

目前同轴度测试基本以模具测试,测试精度较低,速率较慢,例如中国专利文件一种TO56激光器管帽同心度检测夹具(公告号CN210051284U),测量精度最高为0.1mm,同时每一种封装都需设计一套夹具,速率较慢,整体成本较高。At present, the coaxiality test is basically based on the mold test, the test accuracy is low, and the speed is slow. For example, a TO56 laser tube cap concentricity detection fixture (notification number CN210051284U) in the Chinese patent document has a measurement accuracy of up to 0.1mm. At the same time, each All packaging needs to design a set of fixtures, the speed is slow, and the overall cost is high.

发明内容Contents of the invention

针对现有技术的不足,本发明提供一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法,可以将提升速率更加准确的挑选管帽偏移的异常品。Aiming at the deficiencies of the prior art, the present invention provides a measurement method that converts the horizontal um-level deviation of the coaxiality of the pipe cap into a height mm, which can select the abnormal products with the pipe cap deviation more accurately by increasing the lifting rate.

本发明的技术方案如下:Technical scheme of the present invention is as follows:

一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法,包括测距仪、模条、移动支架,包括步骤如下:A measurement method for converting the horizontal um-level offset of pipe cap coaxiality into height mm, including a rangefinder, a mold bar, and a mobile bracket, including the following steps:

(1)将封帽完成的激光器放入模条上,固定完成后将模条放置在移动支架上,由移动支架带动模条等距移动;(1) Put the capped laser on the mold strip, place the mold strip on the mobile support after the fixation is completed, and the mobile support drives the mold strip to move equidistantly;

(2)测距仪垂直在激光器管帽的上方,管帽的直径是固定的,按照封装精度要求,管帽的中心点应与管座的中心点相重合;因此以激光器管座的圆心为中心点,测距仪在管座圆心水平面的投影位置在>管帽半径的50um处的同心圆上;分别测试同心圆上A、B、C、D四点处测距仪到管座的距离,四点在管帽圆周外等距分布;(2) The rangefinder is vertically above the laser tube cap, and the diameter of the tube cap is fixed. According to the packaging accuracy requirements, the center point of the tube cap should coincide with the center point of the tube base; therefore, the center of the laser tube base is taken as At the center point, the projection position of the rangefinder on the horizontal plane of the center of the pipe seat is on the concentric circle > 50um of the radius of the pipe cap; respectively test the distance from the distance meter to the pipe seat at four points A, B, C, and D on the concentric circle , the four points are equidistantly distributed outside the circumference of the cap;

(3)当管帽与管座的中心点重合时,A、B、C、D四点处测距仪测试的距离为测距仪到管座的距离,将此值设为正常值;若管帽与管座的中心点不重合,假设管帽往A点偏移>50um时,测距仪测试距离为:测距仪正常值-管帽高度;(3) When the center point of the pipe cap and the pipe seat coincides, the distance measured by the distance meter at the four points A, B, C, and D is the distance from the distance meter to the pipe seat, and this value is set as a normal value; if The center point of the tube cap and the tube seat does not coincide. Assuming that the tube cap shifts to point A > 50um, the test distance of the rangefinder is: the normal value of the rangefinder - the height of the tube cap;

(4)移动支架自动前进,依次测距,根据测距仪的数值变化剔除管帽封偏的激光器。(4) The mobile bracket advances automatically, measures the distance in turn, and eliminates the lasers that are sealed off the cap according to the value change of the distance meter.

根据本发明优选的,步骤(2)中,测距仪的数量为两个,两个测距仪到管座中心的连线相互垂直。同时测定水平方向和垂直方向,效率更高。Preferably according to the present invention, in step (2), the number of range finders is two, and the lines connecting the two range finders to the center of the tube base are perpendicular to each other. Simultaneously measure the horizontal and vertical directions, which is more efficient.

根据本发明优选的,所述模条与目前封装配套,半导体激光器型号为TO56、TO33、TO38、TO46或TO9。Preferably according to the present invention, the mold strip is matched with the current package, and the semiconductor laser model is TO56, TO33, TO38, TO46 or TO9.

本发明未详尽之处,均可采用现有技术。Where the present invention is not exhaustive, prior art can be adopted.

本发明的有益效果在于:The beneficial effects of the present invention are:

本发明将测量同轴度的水平偏移量um级别的测量转换为mm管帽高度级别的测量,有助于测量的精度以及速率,既简便可行同时保证较高的准确率。The invention converts the um-level measurement of the horizontal offset of the coaxiality measurement into the mm-level cap height measurement, which contributes to the accuracy and speed of the measurement, is simple and feasible, and ensures high accuracy at the same time.

附图说明Description of drawings

图1为本发明的模条。Fig. 1 is the molding bar of the present invention.

图2为激光器测试示意图。Figure 2 is a schematic diagram of laser testing.

图3为激光器构造结构示意图。Figure 3 is a schematic diagram of the structure of the laser.

图4为测试管帽偏移示意图。Fig. 4 is a schematic diagram of the deviation of the test tube cap.

其中:1、模条,2、激光器,3、测距仪,4、管帽,5、管座。Among them: 1. Mold bar, 2. Laser, 3. Range finder, 4. Tube cap, 5. Tube seat.

具体实施方式Detailed ways

下面通过实施例并结合附图对本发明做进一步说明,但不限于此。The present invention will be further described below through the embodiments and in conjunction with the accompanying drawings, but not limited thereto.

实施例1:Example 1:

如图2-3所示,以TO56半导体激光器为例,所述TO56半导体激光器管座直径尺寸为5.6mm。图3为管帽尺寸,直径为3.55mm,高度为2.43mm。As shown in Figure 2-3, taking the TO56 semiconductor laser as an example, the diameter of the TO56 semiconductor laser stem is 5.6 mm. Figure 3 shows the size of the cap, with a diameter of 3.55mm and a height of 2.43mm.

一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法,包括测距仪、模条、移动支架,包括步骤如下:A measurement method for converting the horizontal um-level offset of pipe cap coaxiality into height mm, including a rangefinder, a mold bar, and a mobile bracket, including the following steps:

(1)如图1所示,将封帽完成的激光器放入模条上,固定完成后将模条放置在移动支架上,由移动支架带动模条等距移动。(1) As shown in Figure 1, put the cap-sealed laser on the mold bar, place the mold bar on the mobile support after the fixation is completed, and the mobile support drives the mold bar to move equidistantly.

(2)测距仪垂直在激光器管帽的上方,管帽的直径是固定的,按照封装精度要求,管帽的中心点应与管座的中心点相重合;因此以激光器管座的圆心为中心点,测距仪在管座圆心水平面的投影位置在>管帽半径的50um处的同心圆上;分别测试同心圆上A、B、C、D四点处测距仪到管座的距离,四点在管帽圆周外等距分布;管座的半径为2.8mm,管帽的半径为1.775mm,因此将距离管座中心的2.22mm处设置为A、B、C、D四点,如图2所示。(2) The rangefinder is vertically above the laser tube cap, and the diameter of the tube cap is fixed. According to the packaging accuracy requirements, the center point of the tube cap should coincide with the center point of the tube base; therefore, the center of the laser tube base is At the center point, the projected position of the rangefinder on the horizontal plane of the center of the pipe seat is on the concentric circle > 50um of the radius of the pipe cap; respectively test the distance from the distance meter to the pipe seat at four points A, B, C, and D on the concentric circle , the four points are equidistantly distributed outside the circumference of the pipe cap; the radius of the pipe seat is 2.8mm, and the radius of the pipe cap is 1.775mm, so the distance from the center of the pipe seat to 2.22mm is set as four points A, B, C, and D. as shown in picture 2.

(3)水平方向与垂直方向各固定一个测距仪,水平方向测距仪测试A、D两点到测距仪的距离,垂直测距仪测试B、C两点到测距仪的距离;当管帽与管座的中心点重合时,A、B、C、D四点处测距仪测试的距离为测距仪到管座的距离,将此值设为正常值;若管帽与管座的中心点不重合,假设管帽往A点偏移>50um时,测距仪测试距离为:测距仪正常值-管帽高度(2.43mm)。(3) One rangefinder is respectively fixed in the horizontal direction and the vertical direction, the distance from the two points A and D to the rangefinder is tested by the horizontal rangefinder, and the distance from the two points B and C to the rangefinder is tested by the vertical rangefinder; When the center point of the tube cap coincides with the tube base, the distance measured by the rangefinder at the four points A, B, C, and D is the distance from the rangefinder to the tube base, and this value is set as a normal value; The center points of the tube sockets do not coincide. Assuming that the tube cap shifts to point A > 50um, the test distance of the rangefinder is: the normal value of the rangefinder - the height of the tube cap (2.43mm).

(4)移动支架自动前进,依次测距,根据测距仪的数值变化剔除管帽封偏的激光器。(4) The mobile bracket advances automatically, measures the distance in turn, and eliminates the lasers that are sealed off the cap according to the value change of the distance meter.

Claims (2)

1.一种将管帽同轴度水平um级别偏移转换为高度mm的测量方法,其特征在于,包括测距仪、模条、移动支架,包括步骤如下:1. A method of measuring that pipe cap coaxiality level um level offset is converted into height mm, it is characterized in that, comprises range finder, mold bar, mobile support, comprises steps as follows: (1)将封帽完成的激光器放入模条上,固定完成后将模条放置在移动支架上,由移动支架带动模条等距移动;(1) Put the cap-capped laser on the mold strip, place the mold strip on the mobile support after the fixation is completed, and the mobile support drives the mold strip to move equidistantly; (2)测距仪垂直在激光器管帽的上方,管帽的直径是固定的,按照封装精度要求,管帽的中心点应与管座的中心点相重合;以激光器管座的圆心为中心点,测距仪在管座圆心水平面的投影位置在>管帽半径的50um处的同心圆上;分别测试同心圆上A、B、C、D四点处测距仪到管座的距离,四点在管帽圆周外等距分布;(2) The rangefinder is vertically above the laser tube cap, and the diameter of the tube cap is fixed. According to the packaging accuracy requirements, the center point of the tube cap should coincide with the center point of the tube base; the center of the laser tube base is the center Point, the projected position of the rangefinder on the horizontal plane of the center of the pipe seat is on the concentric circle > 50um of the radius of the pipe cap; respectively test the distance from the distance meter to the pipe seat at four points A, B, C, and D on the concentric circle, Four points are equidistantly distributed outside the circumference of the cap; (3)当管帽与管座的中心点重合时,A、B、C、D四点处测距仪测试的距离为测距仪到管座的距离,将此值设为正常值;若管帽与管座的中心点不重合,假设管帽往A点偏移>50um时,测距仪测试距离为:测距仪正常值-管帽高度;(3) When the center point of the pipe cap and the pipe seat coincides, the distance measured by the distance meter at the four points A, B, C, and D is the distance from the distance meter to the pipe seat, and this value is set as a normal value; if The center point of the tube cap and the tube seat does not coincide. Assuming that the tube cap shifts to point A > 50um, the test distance of the rangefinder is: the normal value of the rangefinder - the height of the tube cap; (4)移动支架自动前进,依次测距,根据测距仪的数值变化剔除管帽封偏的激光器。(4) The mobile bracket advances automatically, measures the distance in turn, and eliminates the lasers that are sealed off the cap according to the value change of the distance meter. 2.根据权利要求1所述的将管帽同轴度水平um级别偏移转换为高度mm的测量方法,其特征在于,步骤(2)中,测距仪的数量为两个,两个测距仪到管座中心的连线相互垂直。2. the measuring method that cap coaxiality level um level offset is converted into height mm according to claim 1, it is characterized in that, in step (2), the quantity of range finder is two, and two range finders The connecting lines from the distance meter to the center of the tube base are perpendicular to each other.
CN202211317289.0A 2022-10-26 2022-10-26 Measuring method for converting horizontal um-level deviation of coaxiality of pipe cap into height mm Pending CN115683031A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01314907A (en) * 1988-06-16 1989-12-20 Yokohama Rubber Co Ltd:The Method and device for zero-point correction in measuring thickness
JP2013087928A (en) * 2011-10-21 2013-05-13 Jfe Steel Corp Monitoring method and monitoring apparatus for piston of dry type gas holder
CN104903679A (en) * 2013-01-09 2015-09-09 日立造船株式会社 Segment roundness measuring device and segment roundness measuring method
CN106429301A (en) * 2016-11-07 2017-02-22 中国矿业大学(北京) Belt monitoring early warning device based on ultrasonic waves
KR101876546B1 (en) * 2017-12-28 2018-08-09 (주)평화엔지니어링 Bridge support edge distance measuring device
CN109931890A (en) * 2019-04-15 2019-06-25 山西阳煤化工机械(集团)有限公司 A method of for detecting vessel shell concentricity

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01314907A (en) * 1988-06-16 1989-12-20 Yokohama Rubber Co Ltd:The Method and device for zero-point correction in measuring thickness
JP2013087928A (en) * 2011-10-21 2013-05-13 Jfe Steel Corp Monitoring method and monitoring apparatus for piston of dry type gas holder
CN104903679A (en) * 2013-01-09 2015-09-09 日立造船株式会社 Segment roundness measuring device and segment roundness measuring method
CN106429301A (en) * 2016-11-07 2017-02-22 中国矿业大学(北京) Belt monitoring early warning device based on ultrasonic waves
KR101876546B1 (en) * 2017-12-28 2018-08-09 (주)평화엔지니어링 Bridge support edge distance measuring device
CN109931890A (en) * 2019-04-15 2019-06-25 山西阳煤化工机械(集团)有限公司 A method of for detecting vessel shell concentricity

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