CN1171086C - 气体检测装置及其调整方法 - Google Patents

气体检测装置及其调整方法 Download PDF

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Publication number: CN1171086C
Authority: CN; China
Prior art keywords: resistance; gas; mentioned; oxide semiconductor; mos
Prior art date: 1997-09-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CNB981177360A

Other languages

English (en)

Chinese (zh)

Other versions

CN1213082A (zh

Inventor

盐入明

宇高利浩

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Figaro Engineering Inc

Original Assignee

Figaro Engineering Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-09-03

Filing date

1998-09-02

Publication date

2004-10-13

1998-09-02 Application filed by Figaro Engineering Inc filed Critical Figaro Engineering Inc

1999-04-07 Publication of CN1213082A publication Critical patent/CN1213082A/zh

2004-10-13 Application granted granted Critical

2004-10-13 Publication of CN1171086C publication Critical patent/CN1171086C/zh

2018-09-02 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

238000000034 method Methods 0.000 title claims description 17
230000001105 regulatory effect Effects 0.000 title 1
239000004065 semiconductor Substances 0.000 claims abstract description 54
229910044991 metal oxide Inorganic materials 0.000 claims abstract description 53
150000004706 metal oxides Chemical class 0.000 claims abstract description 53
230000008859 change Effects 0.000 claims abstract description 21
239000007789 gas Substances 0.000 claims description 93
241000826860 Trapezium Species 0.000 claims description 48
238000006243 chemical reaction Methods 0.000 claims description 26
238000005070 sampling Methods 0.000 claims description 13
230000008569 process Effects 0.000 claims description 7
230000000737 periodic effect Effects 0.000 claims description 4
230000009466 transformation Effects 0.000 abstract description 8
229910052739 hydrogen Inorganic materials 0.000 description 26
239000001257 hydrogen Substances 0.000 description 26
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 21
239000000203 mixture Substances 0.000 description 16
238000012545 processing Methods 0.000 description 11
230000035945 sensitivity Effects 0.000 description 9
238000001514 detection method Methods 0.000 description 8
238000010586 diagram Methods 0.000 description 7
239000006185 dispersion Substances 0.000 description 5
150000002431 hydrogen Chemical class 0.000 description 5
238000011551 log transformation method Methods 0.000 description 5
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
230000001419 dependent effect Effects 0.000 description 4
WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
102000001554 Hemoglobins Human genes 0.000 description 3
108010054147 Hemoglobins Proteins 0.000 description 3
229910006404 SnO 2 Inorganic materials 0.000 description 3
230000009471 action Effects 0.000 description 3
230000015572 biosynthetic process Effects 0.000 description 3
239000008280 blood Substances 0.000 description 3
210000004369 blood Anatomy 0.000 description 3
241001269238 Data Species 0.000 description 2
229910021529 ammonia Inorganic materials 0.000 description 2
229910002091 carbon monoxide Inorganic materials 0.000 description 2
238000013461 design Methods 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
230000006870 function Effects 0.000 description 2
230000014509 gene expression Effects 0.000 description 2
238000013507 mapping Methods 0.000 description 2
239000000047 product Substances 0.000 description 2
UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
241000005398 Figaro Species 0.000 description 1
238000004364 calculation method Methods 0.000 description 1
239000003034 coal gas Substances 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
239000012467 final product Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
230000007246 mechanism Effects 0.000 description 1
238000011160 research Methods 0.000 description 1
230000001360 synchronised effect Effects 0.000 description 1
238000012360 testing method Methods 0.000 description 1

Images

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0006—Calibrating gas analysers
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits

Landscapes

Chemical & Material Sciences (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
General Health & Medical Sciences (AREA)
Pathology (AREA)
Immunology (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Biochemistry (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Combustion & Propulsion (AREA)
Medicinal Chemistry (AREA)
Food Science & Technology (AREA)
Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

CNB981177360A 1997-09-03 1998-09-02 气体检测装置及其调整方法 Expired - Fee Related CN1171086C (zh)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP25604697		1997-09-03
JP256046/1997		1997-09-03
JP256046/97		1997-09-03

Publications (2)

Publication Number	Publication Date
CN1213082A CN1213082A (zh)	1999-04-07
CN1171086C true CN1171086C (zh)	2004-10-13

Family

ID=17287161

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CNB981177360A Expired - Fee Related CN1171086C (zh)	1997-09-03	1998-09-02	气体检测装置及其调整方法

Country Status (5)

Country	Link
US (1)	US6055849A (fr)
EP (1)	EP0901012B1 (fr)
KR (1)	KR100530193B1 (fr)
CN (1)	CN1171086C (fr)
DE (1)	DE69830874T2 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6709635B1 (en) *	1996-03-21	2004-03-23	California Institute Of Technology	Gas sensor test chip
WO2000078170A1 (fr) *	1999-06-18	2000-12-28	Steve Myers	Indicateur d'usure pour chaussure
US20040084308A1 (en) *	2002-11-01	2004-05-06	Cole Barrett E.	Gas sensor
US6868350B2 (en) *	2003-04-11	2005-03-15	Therm-O-Disc, Incorporated	Method and apparatus for the detection of the response of a sensing device
US7020583B2 (en) *	2004-01-30	2006-03-28	Tokyo Electron Limited	Method and apparatus for determining chemistry of part's residual contamination
JP4692026B2 (ja) *	2005-03-08	2011-06-01	パナソニック株式会社	ガスセンサ
JP4835375B2 (ja) *	2006-10-20	2011-12-14	株式会社デンソー	ガス濃度検出装置
US8596108B2 (en) *	2007-10-01	2013-12-03	Scott Technologies, Inc.	Gas measuring device and method of operating the same
CN101949887A (zh) *	2010-08-20	2011-01-19	郑州炜盛电子科技有限公司	半导体气体传感器及其多种气体检测方法
EP2762868B1 (fr) *	2013-01-31	2017-03-15	Sensirion AG	Détecteur de gaz à oxyde métallique basé sur la diffusion
CN103558260B (zh) *	2013-11-18	2016-01-06	武汉理工大学	提高半导体电阻式气敏元件动态检测灵敏度的方法及系统
US11698356B2 (en) *	2018-05-17	2023-07-11	Figaro Engineering Inc.	Gas detection device and gas detection method using metal-oxide semiconductor gas sensor
US11493492B2 (en) *	2019-02-12	2022-11-08	Google Llc	Compensation of environmentally-induced drift in an electrochemical carbon-monoxide sensor
JP6976991B2 (ja) *	2019-06-06	2021-12-08	Ｎｉｓｓｈａ株式会社	２成分ガスの濃度比算出方法および検知対象ガスの濃度算出方法
US11506622B2 (en) *	2019-08-08	2022-11-22	Figaro Engineering Inc.	Gas detector comprising plural gas sensors and gas detection method thereby
KR102795331B1 (ko) *	2019-08-20	2025-04-11	삼성전자주식회사	가스 농도 측정 장치 및 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2578624B2 (ja) *	1987-12-08	1997-02-05	フィガロ技研株式会社	センサ抵抗の対数変換方法
KR930010479A (ko) *	1991-11-12	1993-06-22	이헌조	자동환기 기능을 갖는 냉/난방 장치 및 그 제어방법
DE4138369C3 (de) *	1991-11-22	1997-09-04	Bosch Gmbh Robert	Verfahren zur Bestimmung von kleinen Mengen an Kohlenmonoxid und Stickoxiden in Gasgemischen
US5305231A (en) *	1992-02-13	1994-04-19	Bacharach, Inc.	Multiple K factor, selectable gas detector
JPH08101153A (ja) *	1994-09-30	1996-04-16	Nohmi Bosai Ltd	ニオイモニタ
JPH08101151A (ja) *	1994-09-30	1996-04-16	Nohmi Bosai Ltd	ニオイモニタ

1998
- 1998-09-01 US US09/145,131 patent/US6055849A/en not_active Expired - Fee Related
- 1998-09-02 CN CNB981177360A patent/CN1171086C/zh not_active Expired - Fee Related
- 1998-09-03 EP EP98307070A patent/EP0901012B1/fr not_active Expired - Lifetime
- 1998-09-03 KR KR1019980036168A patent/KR100530193B1/ko not_active Expired - Fee Related
- 1998-09-03 DE DE69830874T patent/DE69830874T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0901012A2 (fr)	1999-03-10
US6055849A (en)	2000-05-02
DE69830874D1 (de)	2005-08-25
CN1213082A (zh)	1999-04-07
DE69830874T2 (de)	2006-06-01
EP0901012B1 (fr)	2005-07-20
KR100530193B1 (ko)	2006-04-14
EP0901012A3 (fr)	2001-03-21
KR19990029465A (ko)	1999-04-26

Legal Events

Date	Code	Title
1999-04-07	C06	Publication
1999-04-07	PB01	Publication
2000-11-22	C10	Entry into substantive examination
2000-11-22	SE01	Entry into force of request for substantive examination
2004-10-13	C14	Grant of patent or utility model
2004-10-13	GR01	Patent grant
2009-11-04	C19	Lapse of patent right due to non-payment of the annual fee
2009-11-04	CF01	Termination of patent right due to non-payment of annual fee

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