CN118024292A - Multidimensional force detection structure - Google Patents
Multidimensional force detection structure Download PDFInfo
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- CN118024292A CN118024292A CN202410300791.3A CN202410300791A CN118024292A CN 118024292 A CN118024292 A CN 118024292A CN 202410300791 A CN202410300791 A CN 202410300791A CN 118024292 A CN118024292 A CN 118024292A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/085—Force or torque sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
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- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
本发明涉及机械臂技术领域，公开一种多维力检测结构，包括：外筒；内轴，其一端伸入外筒内；力检测组件，包括第一MEMS力传感器、第二MEMS力传感器、第三MEMS力传感器及第四MEMS力传感器，第一MEMS力传感器能够检测第一方向的作用力，第二MEMS力传感器能够检测第二方向的作用力，第三MEMS力传感器能够检测第三方向的作用力，第四MEMS力传感器能够检测内轴和外筒沿第三方向转动时的切向力。本发明公开的多维力检测结构采用芯片式力传感器检测作用力的多维力检测结构的检测精度高、抗蠕变能力强且温漂小，克服了现有技术受多维力检测结构的结构限制而只能使用应变片式传感器才能检测各个方向的应力的技术偏见。
The present invention relates to the field of mechanical arm technology, and discloses a multi-dimensional force detection structure, including: an outer cylinder; an inner shaft, one end of which extends into the outer cylinder; a force detection component, including a first MEMS force sensor, a second MEMS force sensor, a third MEMS force sensor and a fourth MEMS force sensor, wherein the first MEMS force sensor can detect the force in the first direction, the second MEMS force sensor can detect the force in the second direction, the third MEMS force sensor can detect the force in the third direction, and the fourth MEMS force sensor can detect the tangential force when the inner shaft and the outer cylinder rotate along the third direction. The multi-dimensional force detection structure disclosed by the present invention uses a chip-type force sensor to detect the force. The multi-dimensional force detection structure has high detection accuracy, strong anti-creep ability and small temperature drift, and overcomes the technical bias of the prior art that can only use strain gauge sensors to detect stress in various directions due to the structural limitation of the multi-dimensional force detection structure.
Description
Technical Field
The invention relates to the technical field of mechanical arms, in particular to a multi-dimensional force detection structure.
Background
In the field of modern industrial automation, the mechanical arm is increasingly widely applied, and the performance and the precision of the mechanical arm directly influence the production efficiency and the product quality. In order to realize accurate control of the mechanical arm, real-time and accurate detection of acting forces in all directions is needed, and the multidimensional force detection structure is used as a key sensing device, and can be arranged on the mechanical arm to detect the acting forces in all directions in real time so as to provide accurate force feedback information for the mechanical arm. However, most of the existing force sensors are strain gauge sensors, and there are some problems in practical application.
First, the detection accuracy of the strain gauge sensor is low. The working principle of the strain gauge is that the stress is calculated by measuring the deformation of the material after the stress, so that the detection precision of the strain gauge sensor is greatly influenced by factors such as material characteristics, manufacturing process and the like, and the force sensor is difficult to realize high-precision detection of micro force in practical application. Second, strain gauge sensors have poor creep resistance. After the strain gauge sensor is stressed for a long time, a sensitive element of the strain gauge sensor can generate creep phenomenon, so that an output signal of the sensor drifts, and the detection accuracy is affected. Finally, the strain gauge sensor has the problem of temperature drift, and in practical application, the influence of temperature on an output signal is difficult to eliminate, so that a larger detection error is caused.
Disclosure of Invention
Based on the above, the invention aims to provide a multi-dimensional force detection structure, which solves the problems of low detection precision, poor creep resistance and serious temperature drift of the existing strain gauge type multi-dimensional force sensor, and greatly promotes the application of the multi-dimensional force sensor in the field of high-precision force control.
In order to achieve the above purpose, the invention adopts the following technical scheme:
A multi-dimensional force detection structure comprising: an outer cylinder; an inner shaft, one end of which extends into the outer cylinder, wherein one of the inner wall of the outer cylinder and the outer wall of the inner shaft is provided with a supporting boss, the other one of the inner wall of the outer cylinder and the outer wall of the inner shaft is provided with an abutting groove corresponding to the supporting boss, the supporting boss can be contacted with the abutting groove, the contact position of the supporting boss and the abutting groove is a contact area, and the outer cylinder or the inner shaft can rotate by a preset angle by taking any point of the contact area as a fulcrum; the force detection assembly comprises a first MEMS force sensor, a second MEMS force sensor, a third MEMS force sensor and a fourth MEMS force sensor, wherein the first MEMS force sensor, the second MEMS force sensor and the fourth MEMS force sensor are all positioned between the inner shaft and the outer cylinder, the third MEMS force sensor is positioned at the end part of the inner shaft, the first MEMS force sensor can detect acting force in a first direction, the second MEMS force sensor can detect acting force in a second direction, the third MEMS force sensor can detect acting force in a third direction, and the fourth MEMS force sensor can detect tangential force when the inner shaft and the outer cylinder rotate along the third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other; the first MEMS force sensor, the second MEMS force sensor, the third MEMS force sensor and the fourth MEMS force sensor are chip type force sensors, the chip type force sensors comprise a top cover plate, a base, a sealing film and a force measuring chip, the sealing film covers the base and forms a hydraulic cavity, the top cover plate is fixed on the sealing film, and the force measuring chip is arranged on the base and can detect the hydraulic pressure of liquid in the hydraulic cavity.
As a preferred scheme of multidimensional force detection structure, the support boss is arranged on the inner wall of the outer cylinder and comprises a first rotating boss and a second rotating boss, an accommodating groove is formed between the first rotating boss and the second rotating boss, the abutting groove is arranged on the inner shaft and comprises a first abutting sub-groove and a second abutting sub-groove, the first rotating boss stretches into the first abutting sub-groove and contacts with the bottom ends of the first abutting sub-groove and the second abutting sub-groove to form a first contact sub-area, the second rotating boss stretches into the second abutting sub-groove and contacts with the bottom ends of the second abutting sub-groove to form a second contact sub-area, and the first contact sub-area and the second contact sub-area form a contact area.
As the preferred scheme of a multidimensional force detection structure, the multidimensional force detection structure further comprises a pressing block group, wherein the pressing block group and the fourth MEMS force sensor are both arranged in the accommodating groove, one of the pressing block group and the fourth MEMS force sensor is fixed on the supporting boss, the other pressing block group is arranged on the inner shaft, the pressing block group comprises a first pressing block and a second pressing block, the number of the fourth MEMS force sensor is at least two, and the first pressing block and the second pressing block can be in butt joint with at least one fourth MEMS force sensor.
As a preferred scheme of multidimensional force detection structure, be equipped with the liquid boss on the base, chip formula force sensor still includes the clamping ring, the sealing membrane is the metal film, the clamping ring is fixed on the metal film just to the setting of liquid boss, so that the metal film presss from both sides to be established the clamping ring with between the base, the top apron with the clamping ring interval sets up just be equipped with on the top apron and dodge the opening, the metal film includes metal ripple piece and metal flat piece, the top apron is fixed on the metal flat piece just the top apron with the sealing membrane is in dodge opening department and is formed the flexible clearance.
As a preferable scheme of the multidimensional force detection structure, two first mounting grooves are formed in one of the outer wall of the inner shaft and the inner wall of the outer barrel, two third pressing blocks are arranged on the other one, the two first mounting grooves are distributed on two sides of the inner shaft along the first direction, one first MEMS force sensor is arranged in each first mounting groove, and each first MEMS force sensor corresponds to one third pressing block.
As a preferable scheme of the multidimensional force detection structure, two second mounting grooves are formed in one of the outer wall of the inner shaft and the inner wall of the outer barrel, two fourth pressing blocks are arranged on the other one, the two second mounting grooves are distributed on two sides of the inner shaft along the second direction, one second MEMS force sensor is arranged in each second mounting groove, and each second MEMS force sensor corresponds to one fourth pressing block.
As the preferred scheme of a multidimensional force detection structure, the multidimensional force detection structure further comprises a connecting assembly, the connecting assembly comprises a connecting cylinder and an axial pressing seat, the connecting cylinder is connected with the outer cylinder, the axial pressing seat is arranged in the connecting cylinder and can move along a third direction relative to the connecting cylinder, a third mounting groove is further formed in the connecting cylinder, two third MEMS force sensors are arranged in the third mounting groove, and the inner shaft and the axial pressing seat are respectively positioned at two sides of the third MEMS force sensors along the third direction.
As a preferred scheme of multidimensional force detection structure, be equipped with the locating hole on the axial pressure seat, be equipped with on the connecting cylinder with the constant head tank that the locating hole corresponds, coupling assembling still includes the connecting axle, the one end interference fit of connecting axle is in the locating hole, the other end can with the constant head tank contact is in order to spacing the connecting cylinder, the connecting cylinder can be followed the axial displacement of connecting axle.
As a preferred scheme of multidimensional force detection structure, the supporting boss is a semi-annular boss, the positioning groove is a semi-annular groove, the semi-annular groove is arranged on the outer cylinder, the semi-annular boss is arranged on the inner shaft, two mounting gaps are formed at two ends of the semi-annular boss and the semi-annular groove along the circumferential direction, and each mounting gap is internally provided with a fourth MEMS force sensor arranged on the semi-annular boss or the semi-annular groove.
As a preferred scheme of the multi-dimensional force detection structure, the multi-dimensional force detection structure further comprises a rotating column, a connecting arm, a first transmission assembly, a second transmission assembly and a third transmission assembly, wherein the rotating column is rotatably connected with the connecting arm, the connecting arm is rotatably connected with the inner shaft or the outer cylinder, and the first transmission assembly can drive the rotating column to drive the connecting arm, the inner shaft and the outer cylinder to rotate along a fourth direction so as to enable the inner shaft and the outer cylinder to move along the second direction and the third direction, and the fourth direction is parallel to the axial direction of the rotating column; the second transmission assembly can drive the connecting arm to drive the inner shaft and the outer barrel to rotate along a fifth direction, so that the inner shaft and the outer barrel move along the first direction and the third direction, and the fifth direction is perpendicular to the fourth direction; the third transmission assembly can drive the inner shaft and the outer cylinder to rotate along the fifth direction so as to enable the inner shaft and the outer cylinder to move along the first direction and the third direction.
The beneficial effects of the invention are as follows:
The multi-dimensional force detection structure disclosed by the invention has the advantages that when the force in the first direction is detected, the equal-large equidirectional acting force exists between the inner shaft and the outer cylinder, the acting force can be detected by the first MEMS force sensor, the detection of the acting force in the first direction is finally realized, the acting force in the second direction can be detected by the second MEMS force sensor, the acting force in the third direction can be detected by the third MEMS force sensor, and the moment in the third direction can be obtained according to the tangential force detected by the fourth MEMS force sensor due to the fixed moment arm, wherein the hydraulic pressure detected by the force measuring chip of the chip-type force sensor is the acting force to be detected, and the chip-type force sensor of the structure has the characteristics of high detection precision and small creep resistance Jiang Juwen, so that the technical bias that the stress in all directions can be detected only by using the strain gauge type sensor due to the structural limitation of the multi-dimensional force detection structure in the prior art is overcome.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a multi-dimensional force detection structure provided in an embodiment of the present invention;
FIG. 2 is a schematic illustration of a multi-dimensional force sensing structure provided in an embodiment of the present invention with the outer barrel removed;
FIG. 3 is a cross-sectional view of FIG. 1 at A-A;
FIG. 4 is a first cross-sectional view of a chip-type force sensor of a multi-dimensional force detection structure provided in accordance with an embodiment of the present invention;
FIG. 5 is a second cross-sectional view of a chip-type force sensor of a multi-dimensional force detection structure provided in accordance with an embodiment of the present invention;
FIG. 6 is a schematic diagram of an axial compression seat of a multi-dimensional force detection structure according to an embodiment of the present invention;
FIG. 7 is a schematic view of a connecting barrel of a multi-dimensional force detection structure according to an embodiment of the present invention;
Fig. 8 is a cross-sectional view of the connection shaft of fig. 1 at B-B.
In the figure:
1. An outer cylinder; 11. a support boss; 111. a first rotating boss; 112. a second rotating boss;
2. An inner shaft; 20. an abutment groove;
31. a first MEMS force sensor; 32. a second MEMS force sensor; 33. a third MEMS force sensor; 34. a fourth MEMS force sensor;
41. A first briquette; 42. a second briquetting;
51. A connecting cylinder; 5101. a third mounting groove; 5102. a positioning groove; 52. an axial pressing seat; 520. positioning holes;
61. a spin column; 62. a connecting arm; 63. a shoulder joint; 64. a third rotating shaft;
71. A first transmission assembly; 711. a first worm; 712. a first worm wheel; 72. a second transmission assembly; 721. a second worm; 722. a second worm wheel; 723. a third worm; 724. a third worm wheel; 73. a third transmission assembly; 731. a fourth worm; 732. a fourth worm wheel;
8. A fifth briquetting;
10. A hydraulic chamber; 1001. an inner liquid chamber; 1002. an outer liquid chamber; 101. a base; 1010. a communication hole; 1011. an inner ring boss; 1012. an outer ring boss; 102. a sealing film; 103. a connector; 1031. an insulating base; 1032. a conductive member; 104. a force measuring chip; 105. an inner pressure ring; 106. an outer pressure ring; 107. a top cover plate; 10701. an inner ring avoiding groove; 10702. an outer ring avoiding groove; 10703. avoiding the notch.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The embodiment provides a multidimensional force detection structure, as shown in fig. 1 to 8, including an outer cylinder 1, an inner shaft 2 and a force detection assembly, one end of the inner shaft 2 extends into the outer cylinder 1, one of the inner wall of the outer cylinder 1 and the outer wall of the inner shaft 2 is provided with a supporting boss 11, the other one is provided with an abutting groove 20 corresponding to the supporting boss 11, the position where the supporting boss 11 can contact with the abutting groove 20 and the contact between the supporting boss and the abutting groove is a contact area, the outer cylinder 1 or the inner shaft 2 can rotate by a preset angle with any point of the contact area as a fulcrum, the force detection assembly includes a first MEMS force sensor 31, a second MEMS force sensor 32, a third MEMS force sensor 33 and a fourth MEMS force sensor 34, the first MEMS force sensor 31, the second MEMS force sensor 32 and the fourth MEMS force sensor 34 are all located between the inner shaft 2 and the outer cylinder 1, the third MEMS force sensor 33 is located at the end of the inner shaft 2, the first MEMS force sensor 31 can detect the acting force in the first direction, the second MEMS force sensor 32 can detect the acting force in the second direction, the third MEMS force sensor 33 can detect the acting force in the third direction, the fourth MEMS force sensor 34 can detect the acting force in the third direction when the outer cylinder 1 and the third direction is perpendicular to the third direction.
As shown in fig. 4 and 5, the first MEMS force sensor, the second MEMS force sensor, the third MEMS force sensor and the fourth MEMS force sensor of the present embodiment are all chip-type force sensors, the chip-type force sensor includes a top cover plate 107, a base 101, a sealing film 102 and a force measuring chip 104, the sealing film 102 covers the base 101 and forms a hydraulic chamber 10 with the base 101, the top cover plate 107 is fixed on the sealing film 102, the force measuring chip 104 is disposed on the base 101 and is capable of detecting the hydraulic pressure of the liquid in the hydraulic chamber 10, specifically, the top cover plate 107 is bonded on the sealing film 102.
As shown in fig. 1, in this embodiment, the first direction is the X-axis direction, the second direction is the Y-axis direction, the third direction is the Z-axis direction, the Z-axis direction is the central axis direction of the inner shaft 2, there is a small gap between the outer wall of the inner shaft 2 and the inner wall of the outer tube 1, and a lubricant for reducing friction force between the two is applied between the two. In other embodiments of the present invention, a larger gap may exist between the inner shaft 2 and the outer cylinder 1, and a buffer member with elasticity is filled in the gap, and the structures of the inner shaft 2 and the outer cylinder 1 are specifically set according to actual needs.
As shown in fig. 4 and 5, the base 101 of the chip force sensor is provided with a liquid boss, the chip force sensor further comprises a pressing ring, the sealing film 102 is a metal film, the pressing ring is fixed on the metal film and is opposite to the liquid boss, so that the metal film is clamped between the pressing ring and the base 101, a top cover plate 107 and the pressing ring are arranged at intervals, a gap 10703 is formed in the top cover plate 107, the metal film comprises a metal corrugated sheet and a metal flat sheet, the top cover plate 107 is fixed on the metal flat sheet, and a deformable gap is formed between the top cover plate 107 and the sealing film 102 at the gap 10703. The existence of the deformable gap enables the metal film to deform, the top cover plate 107 moves along the direction of the acting force, when the acting force reaches a preset force value, the metal film in the deformable gap is attached to the top cover plate 107 to prevent the top cover plate 107 from continuing to move, at the moment, the metal corrugated sheet of the metal film is abutted to the end face of the top cover plate 107, after being pressed, the metal corrugated sheet deforms to enable the contact area of the top cover plate 107 and the metal film to be increased, the pressure intensity inside the chip type force sensor can be reduced, and the self protection of the chip type force sensor is realized.
As shown in fig. 4 and 5, the side surface of the avoidance gap 10703 is a curved surface, and this arrangement can make the sealing film 102 and the side surface of the avoidance gap 10703 contact with each other to form surface contact, so that the contact area between the sealing film 102 and the top cover plate 107 is further increased.
Specifically, as shown in fig. 4 and 5, the liquid boss includes an inner ring boss 1011 and an outer ring boss 1012, the inner ring boss 1011 and the metal film enclose an inner liquid chamber 1001, the outer ring boss 1012, the inner ring boss 1011 and the metal film enclose an outer liquid chamber 1002, the inner ring boss 1011 is provided with a communication hole 1010 for communicating the inner liquid chamber 1001 and the outer liquid chamber 1002, the inner liquid chamber 1001 and the outer liquid chamber 1002 form the hydraulic chamber 10, the metal film includes a metal corrugated sheet and a metal flat sheet, the top cover plate 107 is fixed on the metal flat sheet, the metal film at the top of the outer liquid chamber 1002 is a metal flat sheet, and the metal film at the top of the inner liquid chamber 1001 is a metal corrugated sheet. As shown in fig. 4 and 5, the press ring of the present embodiment includes an inner press ring 105 and an outer press ring 106, where the inner press ring 105 is disposed opposite to the inner ring boss 1011, the outer press ring 106 is disposed opposite to the outer ring boss 1012, and both the inner press ring 105 and the outer press ring 106 are annular, so that the metal film is firmly clamped between the press ring and the liquid boss, and the tightness of the hydraulic chamber 10 is ensured. The top cover plate 107 of the embodiment is provided with an inner ring avoiding groove 1071 and an outer ring avoiding groove 10702, the cross section of the inner ring avoiding groove 10701 is U-shaped, the cross section of the outer ring avoiding groove 10702 is L-shaped, the inner pressure ring 105 and at least part of the inner ring boss 1011 extend into the inner ring avoiding groove 1071, and the outer pressure ring 106 and at least part of the outer ring boss 1012 extend into the outer ring avoiding groove 10702.
As shown in fig. 5, the chip-type force sensor of the present embodiment further includes a connector 103, the connector 103 is fixed on the base 101 in a sealing manner, the force measuring chip 104 is fixed on the connector 103, the force measuring chip 104 is capable of detecting the hydraulic pressure in the hydraulic chamber 10, the connector 103 includes an insulating base 1031 and a conductive member 1032 fixed on the insulating base 1031, one end of the conductive member 1032 extends out of the insulating base 1031, and the other end of the conductive member 1032 is electrically connected with the metal PAD of the force measuring chip 104. In other embodiments, the connector 103 may be a conductive stainless steel member, the force measuring chip 104 is fixed on the connector 103, the metal PAD of the force measuring chip 104 contacts with the wall surface of the connector 103, and the structure and the material of the connector 103 may be specifically set according to actual needs, which is not limited in this embodiment. The number of the conductive members 1032 in this embodiment is four, the number of the metal PADs of the force measuring chip 104 is also four, and the four metal PADs are disposed in one-to-one correspondence with the four conductive members 1032. In other embodiments, the number of the conductive members 1032 and the metal PADs of the force measuring chip 104 is not limited to four in the present embodiment, but may be one, two, three or more than four, and each conductive member 1032 corresponds to the metal PAD of one force measuring chip 104, and the specific number is set according to actual needs.
The chip force sensor with the structure provided by the embodiment can detect acting force in a high-temperature environment, the volume is small, the base 101 and the metal film form the inner liquid cavity 1001 and the outer liquid cavity 1002 which are used for containing liquid and are communicated, the outer pressure ring 106 and the inner pressure ring 105 are arranged to further realize the sealing connection between the base 101 and the metal film, when the top cover plate 107 receives the acting force, the force is transmitted to the liquid in the inner liquid cavity 1001 and the outer liquid cavity 1002 through the metal film, and then the acting force is detected on the force measuring chip 104, the linearity of the chip force sensor with the structure is higher due to the elasticity of the metal film, the signal of the force measuring chip 104 is transmitted outwards by adopting the conductive piece 1032 in the connector 103, no lead-out is realized, the chip force sensor is suitable for the environment with strong vibration and large impact, and in addition, the whole structure of the chip force sensor is cylindrical, and the installation is convenient.
In the multi-dimensional force detection structure provided by the embodiment, when the acting force in the first direction is detected, the equidirectional acting force exists between the inner shaft 2 and the outer cylinder 1, the acting force can be detected by the first MEMS force sensor 31, and finally the detecting of the acting force in the first direction is realized, likewise, the acting force in the second direction can be detected by the second MEMS force sensor 32, the acting force in the third direction can be detected by the third MEMS force sensor 33, and because the force arm is fixed, the moment in the third direction can be obtained according to the tangential force detected by the fourth MEMS force sensor 34, wherein the hydraulic pressure detected by the force measuring chip 104 of the chip-type force sensor is the acting force to be detected, the chip-type force sensor with the structure has the characteristics of high detection precision and small creep resistance Jiang Juwen, and the technical bias that the stress in all directions can be detected only by using the strain chip-type sensor due to the structural limitation of the multi-dimensional force detection structure in the prior art is overcome.
Specifically, as shown in fig. 3, the supporting boss 11 of the present embodiment is disposed on the inner wall of the outer cylinder 1 and includes a first rotating boss 111 and a second rotating boss 112, an accommodating groove is formed between the first rotating boss 111 and the second rotating boss 112, the abutting groove 20 is disposed on the outer wall of the inner cylinder 2 and includes a first abutting sub-groove and a second abutting sub-groove, the first rotating boss 111 extends into the first abutting sub-groove and contacts the bottom ends of the first abutting sub-groove and the second abutting sub-groove to form a first contact sub-area, the second rotating boss 112 extends into the second abutting sub-groove and contacts the bottom ends of the second abutting sub-groove to form a second contact sub-area, and the first contact sub-area and the second contact sub-area form the contact area.
In this embodiment, the first contact sub-area and the second contact sub-area are rectangular areas, and when the inner shaft 2 rotates in the first direction or the second direction relative to the outer tube 1, the points between the inner shaft 2 and the outer tube 1, which are actually points, are linear contacts. In other embodiments, the shapes of the first contact sub-area and the second contact sub-area are not limited to the rectangle in the embodiment, but may be curved or other shapes, and the rotation pivot at this time may be linear or dot, which is specifically set according to actual needs.
Further, the multi-dimensional force detection structure further comprises a press block group, wherein the press block group and the fourth MEMS force sensor 34 are both arranged in the accommodating groove, one of the press block group and the fourth MEMS force sensor 34 is fixed on the supporting boss 11, the other is arranged on the inner shaft 2, as shown in fig. 3, the press block group comprises a first press block 41 and a second press block 42, the number of the fourth MEMS force sensor 34 is at least two, and the first press block 41 and the second press block 42 can be abutted against at least one fourth MEMS force sensor 34. That is, the following is true. The first pressing block 41 and the fourth MEMS force sensor 34 corresponding to the first pressing block are respectively arranged on the supporting boss 11 and the inner shaft 2, the second pressing block 42 and the fourth MEMS force sensor 34 corresponding to the second pressing block are respectively arranged on the supporting boss 11 and the inner shaft 2, when the outer cylinder 1 and the inner shaft 2 are subjected to torque along the third direction, the first pressing block 41 or the second pressing block 42 can be abutted against the fourth MEMS force sensor 34 corresponding to the first pressing block, the acting force detected by the fourth MEMS force sensor 34 is the shearing force between the inner shaft 2 and the outer cylinder 1, and the torque can be directly calculated because the moment arm can be considered as a constant value.
The outer wall of the inner shaft 2 is provided with two first mounting grooves, the inner wall of the outer barrel 1 is provided with two third pressing blocks, the two first mounting grooves are distributed on two sides of the inner shaft 2 along the first direction, each first mounting groove is internally provided with a first MEMS force sensor 31, and each first MEMS force sensor 31 corresponds to one third pressing block. In other embodiments, the first mounting groove for mounting the first MEMS force sensor 31 may also be provided on the inner wall of the outer cylinder 1, and the third pressing block is provided on the outer wall of the inner cylinder 2, specifically according to actual needs. The number of the first installation groove and the third pressing block is not limited to two in this embodiment, and may be four, specifically set according to actual needs.
Two second mounting grooves are formed in the outer wall of the inner shaft 2 of the embodiment, two fourth pressing blocks are arranged on the inner wall of the outer barrel 1, the two second mounting grooves are distributed on two sides of the inner shaft 2 along the second direction, a second MEMS force sensor 32 is arranged in each second mounting groove, and each second MEMS force sensor 32 corresponds to one fourth pressing block. In other embodiments, the second mounting groove for mounting the second MEMS force sensor 32 may also be provided on the inner wall of the outer cylinder 1, and the fourth press block is provided on the outer wall of the inner cylinder 2, specifically according to actual needs. The number of the second installation grooves and the fourth pressing blocks is not limited to two in this embodiment, and may be four, specifically set according to actual needs.
The multidimensional force detecting structure of the present embodiment further includes a connection assembly, as shown in fig. 6 to 8, the connection assembly includes a connection cylinder 51 and an axial pressing seat 52, the connection cylinder 51 is connected with the outer cylinder 1, the axial pressing seat 52 is disposed inside the connection cylinder 51 and can move along a third direction relative to the connection cylinder 51, a third mounting groove 5101 is further disposed on the connection cylinder 51, two third MEMS force sensors 33 are disposed in the third mounting groove 5101, and the inner shaft 2 and the axial pressing seat 52 are respectively located at two sides of the two third MEMS force sensors 33 along the third direction. As shown in fig. 8, the axial pressing seat 52 is provided with a fifth pressing block 8, and the inner shaft 2 is provided with a sixth pressing block (not shown in the figure), where the fifth pressing block 8 corresponds to one third MEMS force sensor 33, and the sixth pressing block corresponds to the other third MEMS force sensor 33.
Specifically, as shown in fig. 6 to 8, the axial pressing seat 52 is provided with two positioning holes 520, the connecting cylinder 51 is provided with two positioning grooves 5102 corresponding to the two positioning holes 520, the connecting assembly further comprises two connecting shafts (not shown in the drawings), one end of each connecting shaft is in interference fit with one positioning hole 520, the other end of each connecting shaft can be in contact with one positioning groove 5102 to limit the connecting cylinder 51, and the connecting cylinder 51 can move along the axial direction of the connecting shaft. When the MEMS force sensor is mounted, firstly, the axial pressing seat 52 is pressed into the connecting cylinder 51 after passing through the third mounting groove 5101 along the axial direction of the connecting cylinder 51, then, one end of the connecting shaft extends into the positioning hole 520, and the axial pressing seat 52 is rotated, so that the connecting shaft is abutted with the positioning groove 5102 of the connecting cylinder 51 to limit the connecting cylinder 51, and finally, the two third MEMS force sensors 33 are mounted in the third mounting groove 5101.
In the multi-dimensional force detection structure, in a non-working mode, the readings of the two third MEMS force sensors 33 are zero, when a force in the direction from the axial pressing seat 52 to the inner shaft 2 along the axial direction of the axial pressing seat 52 is applied outwards, the axial pressing seat 52 drives the fifth pressing block 8 to press the third MEMS force sensor 33 close to the fifth pressing block, and the readings of the third MEMS force sensor 33 are the acting force applied outwards by the multi-dimensional force detection structure; when receiving the force along the axial direction of the axial pressing seat 52 along the direction from the inner shaft 2 to the axial pressing seat 52, the inner shaft 2 drives the sixth pressing block to press the third MEMS force sensor 33 close to the sixth pressing block, and the reading of the third MEMS force sensor 33 is the acting force received by the multi-dimensional force detection structure.
In other embodiments, the supporting boss 11 is a semi-annular boss, the positioning groove 5102 is a semi-annular groove, the semi-annular groove is formed in the outer cylinder 1, the semi-annular boss is formed in the inner cylinder 2, the first pressing block 41 and the second pressing block 42 of the pressing block group are arranged at two ends of the semi-annular groove along the circumferential direction, two mounting gaps are formed at two ends of the semi-annular boss and the semi-annular groove along the circumferential direction, the fourth MEMS force sensor 34 arranged on the semi-annular boss is arranged in each mounting gap, and the first pressing block 41 and the second pressing block 42 are respectively arranged corresponding to one fourth MEMS force sensor 34. In other embodiments, the first pressing block 41 and the second pressing block 42 may be disposed at two ends of the semi-annular boss, and the fourth MEMS force sensor 34 may be disposed at two ends of the semi-annular groove, specifically according to actual needs.
As shown in fig. 1 and 2, the multi-dimensional force detecting structure of the present embodiment further includes a rotating column 61, a connecting arm 62, a first transmission assembly 71, a second transmission assembly 72 and a third transmission assembly 73, where the rotating column 61 is rotatably connected with the connecting arm 62, the connecting arm 62 is rotatably connected with the inner shaft 2 or the outer cylinder 1, and the first transmission assembly 71 can drive the rotating column 61 to drive the connecting arm 62, the inner shaft 2 and the outer cylinder 1 to rotate along a fourth direction so as to move the inner shaft 2 and the outer cylinder 1 along the second direction and the third direction, and the fourth direction is parallel to the axial direction of the rotating column 61; the second transmission assembly 72 can drive the connecting arm 62 to drive the inner shaft 2 and the outer cylinder 1 to rotate along a fifth direction, so that the inner shaft 2 and the outer cylinder 1 move along a first direction and a third direction, and the fifth direction is perpendicular to the fourth direction; the third transmission assembly 73 is capable of driving the inner shaft 2 and the outer tube 1 to rotate in the fifth direction to move the inner shaft 2 and the outer tube 1 in the first and third directions.
Specifically, as shown in fig. 2, the first transmission assembly 71 includes a first motor (not shown), a first worm 711, and a first worm wheel 712, the first worm wheel 712 being fixed to the rotating column 61, the first worm wheel 712 being engaged with the first worm 711, the first worm wheel 711 being capable of being driven to rotate, and the first worm wheel 712 engaged with the first worm 711 being capable of being rotated in synchronization therewith, so that the rotating column 61 is rotated in the fourth direction.
As shown in fig. 1, the multi-dimensional force detecting structure further includes a shoulder joint 63, a first rotating shaft (not shown in the drawing) and a second rotating shaft (not shown in the drawing), one end of the shoulder joint 63 is rotatably connected with the rotating column 61 through the first rotating shaft, the other end of the shoulder joint 63 is rotatably connected with the connecting arm 62 through the second rotating shaft, the first rotating shaft drives the outer cylinder 1 and the inner shaft 2 to rotate sequentially through the shoulder joint 63 and the connecting arm 62, the second rotating shaft drives the inner shaft 2 and the outer cylinder 1 to rotate through the connecting arm 62, as shown in fig. 2, the second transmission assembly 72 includes a second motor (not shown in the drawing), a second worm 721, a second worm wheel 722, a third motor (not shown in the drawing), a third worm 723 and a third worm wheel 723, the second worm wheel 722 is fixed on the first rotating shaft, the second worm wheel 722 is in meshed connection with the second worm 721, the third worm wheel 724 is in meshed connection with the second worm wheel, the second worm 721 can be driven to rotate, the second worm wheel 722 meshed with the third worm wheel 723 can be driven to rotate, the third worm wheel 723 can be driven to rotate synchronously with the third worm wheel 723, and the third worm is driven to rotate synchronously with the third worm wheel 723.
As shown in fig. 2, the third transmission assembly 73 of the present embodiment includes a fourth motor (not shown), a fourth worm 731, and a fourth worm wheel 732, the multi-dimensional force detecting structure further includes a third rotating shaft 64, the fourth worm wheel 732 is fixed on the third rotating shaft 64, the fourth worm wheel 732 is engaged with the fourth worm 731, the third rotating shaft 64 can drive the outer cylinder 1 and the inner shaft 2 to rotate, and the fourth motor can drive the fourth worm 731 to rotate, so that the fourth worm wheel 732 engaged with the fourth worm 731 rotates, and the fourth worm wheel 732 drives the outer cylinder 1 and the inner shaft 2 to rotate through the third rotating shaft 64.
In other embodiments of the present invention, the structures of the first transmission assembly 71, the second transmission assembly 72 and the third transmission assembly 73 are not limited to the motor, the worm wheel and the worm structure of the present embodiment, and may be other driving structures such as a motor and a gear set, and the like, and may be specifically set according to actual needs.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. A multi-dimensional force sensing structure comprising:
An outer cylinder;
An inner shaft, one end of which extends into the outer cylinder, wherein one of the inner wall of the outer cylinder and the outer wall of the inner shaft is provided with a supporting boss, the other one of the inner wall of the outer cylinder and the outer wall of the inner shaft is provided with an abutting groove corresponding to the supporting boss, the supporting boss can be contacted with the abutting groove, the contact position of the supporting boss and the abutting groove is a contact area, and the outer cylinder or the inner shaft can rotate by a preset angle by taking any point of the contact area as a fulcrum;
The force detection assembly comprises a first MEMS force sensor, a second MEMS force sensor, a third MEMS force sensor and a fourth MEMS force sensor, wherein the first MEMS force sensor, the second MEMS force sensor and the fourth MEMS force sensor are all positioned between the inner shaft and the outer cylinder, the third MEMS force sensor is positioned at the end part of the inner shaft, the first MEMS force sensor can detect acting force in a first direction, the second MEMS force sensor can detect acting force in a second direction, the third MEMS force sensor can detect acting force in a third direction, and the fourth MEMS force sensor can detect tangential force when the inner shaft and the outer cylinder rotate along the third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other;
The first MEMS force sensor, the second MEMS force sensor, the third MEMS force sensor and the fourth MEMS force sensor are chip type force sensors, the chip type force sensors comprise a top cover plate, a base, a sealing film and a force measuring chip, the sealing film covers the base and forms a hydraulic cavity, the top cover plate is fixed on the sealing film, and the force measuring chip is arranged on the base and can detect the hydraulic pressure of liquid in the hydraulic cavity.
2. The multi-dimensional force detecting structure according to claim 1, wherein the supporting boss is disposed on an inner wall of the outer cylinder and includes a first rotating boss and a second rotating boss, an accommodating groove is formed between the first rotating boss and the second rotating boss, the abutting groove is disposed on the inner shaft and includes a first abutting sub-groove and a second abutting sub-groove, the first rotating boss extends into the first abutting sub-groove and bottom ends of the first abutting sub-groove and the second abutting sub-groove are contacted to form a first contact sub-area, the second rotating boss extends into the second abutting sub-groove and bottom ends of the second abutting sub-groove are contacted to form a second contact sub-area, and the first contact sub-area and the second contact sub-area form the contact area.
3. The multi-dimensional force detection structure of claim 2, further comprising a press block set, wherein the press block set and the fourth MEMS force sensor are both disposed in the accommodating groove, one of the press block set and the fourth MEMS force sensor is fixed on the supporting boss, the other is disposed on the inner shaft, the press block set comprises a first press block and a second press block, the number of the fourth MEMS force sensors is at least two, and the first press block and the second press block can be abutted with at least one fourth MEMS force sensor.
4. The multi-dimensional force detection structure according to claim 1, wherein the base is provided with a liquid boss, the chip-type force sensor further comprises a pressing ring, the sealing film is a metal film, the pressing ring is fixed on the metal film and is opposite to the liquid boss, so that the metal film is clamped between the pressing ring and the base, the top cover plate and the pressing ring are arranged at intervals, the top cover plate is provided with an avoidance gap, the metal film comprises a metal corrugated sheet and a metal flat sheet, and the top cover plate is fixed on the metal flat sheet, and a deformable gap is formed between the top cover plate and the sealing film at the avoidance gap.
5. The multi-dimensional force detecting structure according to claim 1, wherein two first mounting grooves are formed in one of the outer wall of the inner shaft and the inner wall of the outer cylinder, two third pressing blocks are formed in the other one, the two first mounting grooves are distributed on two sides of the inner shaft along the first direction, one first MEMS force sensor is arranged in each first mounting groove, and each first MEMS force sensor corresponds to one third pressing block.
6. The multi-dimensional force detecting structure according to claim 1, wherein two second mounting grooves are formed in one of the outer wall of the inner shaft and the inner wall of the outer cylinder, two fourth pressing blocks are formed in the other one, the two second mounting grooves are distributed on two sides of the inner shaft along the second direction, one second MEMS force sensor is arranged in each second mounting groove, and each second MEMS force sensor corresponds to one fourth pressing block.
7. The multi-dimensional force detecting structure according to claim 1, further comprising a connecting assembly, wherein the connecting assembly comprises a connecting cylinder and an axial pressing seat, the connecting cylinder is connected with the outer cylinder, the axial pressing seat is arranged inside the connecting cylinder and can move along the third direction relative to the connecting cylinder, a third mounting groove is further formed in the connecting cylinder, two third MEMS force sensors are arranged in the third mounting groove, and the inner shaft and the axial pressing seat are respectively located at two sides of the two third MEMS force sensors along the third direction.
8. The multi-dimensional force detecting structure according to claim 7, wherein the axial pressing seat is provided with a positioning hole, the connecting cylinder is provided with a positioning groove corresponding to the positioning hole, the connecting assembly further comprises a connecting shaft, one end of the connecting shaft is assembled in the positioning hole in an interference mode, the other end of the connecting shaft can be in contact with the positioning groove to limit the connecting cylinder, and the connecting cylinder can move along the axial direction of the connecting shaft.
9. The multi-dimensional force detecting structure according to claim 8, wherein the supporting boss is a semi-annular boss, the positioning groove is a semi-annular groove, the semi-annular groove is arranged on the outer cylinder, the semi-annular boss is arranged on the inner shaft, two mounting gaps are formed at two ends of the semi-annular boss and the semi-annular groove along the circumferential direction, and the fourth MEMS force sensor arranged on the semi-annular boss or the semi-annular groove is arranged in each mounting gap.
10. The multi-dimensional force detecting structure according to claim 1, further comprising a rotary column, a connecting arm, a first transmission assembly, a second transmission assembly, and a third transmission assembly, wherein the rotary column is rotatably connected with the connecting arm, the connecting arm is rotatably connected with the inner shaft or the outer cylinder, and the first transmission assembly is capable of driving the rotary column to drive the connecting arm, the inner shaft, and the outer cylinder to rotate in a fourth direction so as to move the inner shaft and the outer cylinder in the second direction and the third direction, wherein the fourth direction is parallel to an axial direction of the rotary column; the second transmission assembly can drive the connecting arm to drive the inner shaft and the outer barrel to rotate along a fifth direction, so that the inner shaft and the outer barrel move along the first direction and the third direction, and the fifth direction is perpendicular to the fourth direction; the third transmission assembly can drive the inner shaft and the outer cylinder to rotate along the fifth direction so as to enable the inner shaft and the outer cylinder to move along the first direction and the third direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410300791.3A CN118024292B (en) | 2024-03-15 | Multidimensional force detection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410300791.3A CN118024292B (en) | 2024-03-15 | Multidimensional force detection structure |
Publications (2)
| Publication Number | Publication Date |
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| CN118024292A true CN118024292A (en) | 2024-05-14 |
| CN118024292B CN118024292B (en) | 2026-05-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120760918A (en) * | 2025-09-05 | 2025-10-10 | 南京元感微电子有限公司 | A six-dimensional force sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05200682A (en) * | 1991-12-20 | 1993-08-10 | Honda Motor Co Ltd | Walking control device for legged mobile robot |
| CN109079826A (en) * | 2018-10-12 | 2018-12-25 | 中国石油大学(华东) | A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot |
| CN115389065A (en) * | 2022-08-01 | 2022-11-25 | 燕山大学 | Robot foot end multi-dimensional force detection method based on crack sensor and foot end device |
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05200682A (en) * | 1991-12-20 | 1993-08-10 | Honda Motor Co Ltd | Walking control device for legged mobile robot |
| CN109079826A (en) * | 2018-10-12 | 2018-12-25 | 中国石油大学(华东) | A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot |
| CN115389065A (en) * | 2022-08-01 | 2022-11-25 | 燕山大学 | Robot foot end multi-dimensional force detection method based on crack sensor and foot end device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120760918A (en) * | 2025-09-05 | 2025-10-10 | 南京元感微电子有限公司 | A six-dimensional force sensor |
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