CN118111237A - Isostatic graphite continuous high-temperature graphitizing equipment for manufacturing large semiconductor silicon wafer - Google Patents
Isostatic graphite continuous high-temperature graphitizing equipment for manufacturing large semiconductor silicon wafer Download PDFInfo
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- CN118111237A CN118111237A CN202410515837.3A CN202410515837A CN118111237A CN 118111237 A CN118111237 A CN 118111237A CN 202410515837 A CN202410515837 A CN 202410515837A CN 118111237 A CN118111237 A CN 118111237A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 16
- 239000010439 graphite Substances 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 15
- 239000010703 silicon Substances 0.000 title claims abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 70
- 238000003756 stirring Methods 0.000 claims abstract description 68
- 238000001816 cooling Methods 0.000 claims abstract description 63
- 238000005087 graphitization Methods 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000009413 insulation Methods 0.000 claims description 19
- 230000006698 induction Effects 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 11
- 238000005096 rolling process Methods 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 238000000462 isostatic pressing Methods 0.000 claims description 8
- 239000004429 Calibre Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 13
- 238000007493 shaping process Methods 0.000 description 12
- 230000003028 elevating effect Effects 0.000 description 10
- 238000004321 preservation Methods 0.000 description 8
- 241000237942 Conidae Species 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/20—Graphite
- C01B32/205—Preparation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D13/00—Apparatus for preheating charges; Arrangements for preheating charges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D15/00—Handling or treating discharged material; Supports or receiving chambers therefor
- F27D15/02—Cooling
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention relates to the technical field of graphitization equipment, in particular to isostatic pressure graphite continuous high-temperature graphitization equipment for manufacturing a semiconductor large silicon wafer, which comprises a kettle body, wherein a preheating area, a high-temperature area and a cooling area are sequentially arranged in the kettle body from top to bottom along the vertical direction, a preheating tank is arranged in the preheating area, a high-temperature tank is arranged in the high-temperature area, a cooling pipe is arranged in the cooling area, conical stirring bodies are coaxially arranged in the preheating tank and the high-temperature tank, a first rotating shaft is coaxially arranged on each conical stirring body, a spiral feeding shaft is arranged in the cooling pipe, a second rotating connecting piece is arranged at the upper end of each conical stirring body, a lifting mechanism is arranged above each conical stirring body, the conical stirring bodies automatically descend through the lifting mechanism in the rotating process, so that powder in the corresponding kettle body automatically descends into the next kettle body, the conical stirring bodies adopt high-temperature resistant materials, the descending is realized in a mechanical mode, and short circuit of wires caused by high temperature does not occur.
Description
Technical Field
The invention relates to the technical field of graphitization equipment, in particular to isostatic pressing graphite continuous high-temperature graphitization equipment for manufacturing a semiconductor large silicon wafer.
Background
Graphitization, namely heat treatment of graphite products, enables originally distributed disordered carbon atoms to be orderly arranged through high temperature, and the graphitization process is a process of converting a two-dimensional structure of a carbon net into a three-dimensional ordered structure through 'microcrystalline' growth of a carbon material under the action of high temperature. The graphitization process is an important process for producing carbon graphite materials, and the graphitization degree is an important index for processing materials.
The graphitization temperature can be divided into two stages, wherein the first stage is carried out at 1000-1800 ℃, the second stage is carried out at 1800-3000 ℃, and the temperature above 2000 ℃ is the key stage for generating the change of the microcrystalline structure of carbon atoms, and the temperature required by different graphite materials for graphitization is different.
Graphitization is classified into a direct method and an indirect method according to a heating manner, and is classified into a batch type and a continuous type according to an operation manner. To graphitize the material, a process tool graphitization furnace is used.
For continuous high-temperature graphitization, raw materials need to be preheated and then heated to high temperature and finally cooled, electric control valves are arranged between adjacent cavities of the traditional graphitization furnace, the raw materials sequentially pass through the cavities from top to bottom through opening and closing the electric control valves, but the structure of the electric control valves is complex, the temperature of the preheated cavity and the temperature of the high-temperature cavity can rise to more than thousand DEG C, then wires in the electric control valves can be continuously and high-temperature blown after long-term use, meanwhile, each electric control valve needs to be coated with a plurality of layers of heat insulation materials, and the heat insulation materials are possibly replaced periodically, so that the corresponding cost is greatly improved, and the replacement process is troublesome.
Disclosure of Invention
In view of the above, it is necessary to provide an isostatic pressing graphite continuous high-temperature graphitization device for manufacturing a large semiconductor silicon wafer.
In order to solve the problems in the prior art, the invention adopts the following technical scheme: the utility model provides a big silicon chip of semiconductor manufacturing is with continuous high temperature graphitization equipment of isostatic pressing graphite, including being vertical cauldron body, be equipped with preheating zone from top to bottom in proper order along vertical direction in the cauldron body, high temperature zone and cooling zone, be equipped with the preheating tank in the preheating zone, be equipped with the high temperature jar in the cooling zone, be equipped with the cooling tube in the cooling zone, the coaxial line of preheating tank in vertical direction and end to end are followed to high temperature jar and cooling tube, all coaxial be equipped with the toper stirring body in preheating tank and the high temperature jar, the heavy-calibre end of every toper stirring body all faces down, all coaxial be equipped with first pivot on every toper stirring body, be equipped with between two toper stirring bodies and be used for with the coaxial continuous first rotary connection of two first pivots, be equipped with the vertical spiral feeding axle in the cooling tube, the upper end of cooling tube is equipped with and is used for the coaxial continuous second rotary connection of first pivot of spiral feeding axle and No. two pivots, the upper end of first rotary connection piece and second rotary connection piece is the same, the upper end of two is the elastic structure and is used for upwards pushing up and down two first pivots, make the both toper stirring body upwards and two high temperature jar high temperature mechanism with the upper and lower end of a high temperature jar of opening and closing respectively, the upper end of this toper stirring body is closed in order to realize respectively, the upper end of two toper stirring bodies is opened and the upper end of the high temperature stirring mechanism is closed and the upper end is used for the upper end.
Further, the center department shaping of the internal bottom of cauldron has the saddle, be fixed to be equipped with on the saddle and be vertical No. one insulating tube, cooling tube coaxial fixation locates in the insulating tube No. one, the coaxial fixation of high temperature jar locates the top of No. one insulating tube, the coaxial fixation of preheating jar locates the top of high temperature jar, and the internal diameter of preheating jar is less than the internal diameter of high temperature jar, the internal diameter of No. one insulating tube is greater than the internal diameter of high temperature jar, the coaxial fixedly connected with heavy-calibre end up No. one conical tube that has preheated the top of jar, still be fixed to be equipped with on the saddle and be vertical and overlap locate No. two insulating tubes outside conical tube, preheat jar, high temperature jar and No. one insulating tube, no. two insulating tube's top coaxial fixation is equipped with the sealing cover plate, be connected with a plurality of inlet pipe on the sealing cover plate, every inlet pipe all uses and is used for the powder to introduce No. one conical tube from the cauldron outside the body, the coaxial fixedly connected with in top of cooling tube is used for getting into the powder in the cooling tube from the high temperature jar, the bin's that the bottom of the cauldron body is opened and is linked together with the bin.
Further, every toper stirring body is the cone shell, be equipped with a plurality of stirring stand on the cone shell, a plurality of stirring stand is along the circumferencial direction evenly distributed of cone shell, and the lower extreme of every stirring stand all links firmly with the outer wall of cone shell, all coaxial shaping has the sealing ring on the inner wall of preheating tank and high temperature jar lower extreme, the lower extreme of every sealing ring all forms the round conical surface, the outer fringe wall of the heavy-calibre end of every cone shell all upwards closely laminates with the conical surface that corresponds, every pivot all coaxial pass the cone shell that corresponds, and every pivot all links firmly with the cone shell coaxial that corresponds.
Further, a rotary connecting piece and No. two rotary connecting pieces all include the column and turn, change cover and end shaft, change the coaxial shaping of cover in the top of column and turn, end shaft coaxial shaping is in the bottom of column and turn, two column turns coaxial rotation respectively and locate in high temperature jar and the two taper pipes, the lower extreme of two pivot inserts in two covers downwards respectively, all be equipped with in every change the cover and be vertical spring, the both ends of every spring all contradict with the interior bottom wall of corresponding lower extreme and the cover of a pivot respectively, all the shaping has a plurality of to be vertical limit bar on the inner wall of two changes the cover, a plurality of limit groove with a limit bar matched with has all been seted up on the outer wall of the lower extreme of two pivot, a vertical groove has been seted up in the end shaft in the one vertical groove, the shaping has a plurality of vertical limit bar on the inner wall of a vertical groove, the upper end of a pivot that is located the high temperature jar upwards inserts in a vertical groove, and a plurality of limit bar is seted up with the coaxial limit bar of two limit bar on the outer wall of a pivot and link to connect with two coaxial limit bar of a plurality of screw thread on the end of a pivot.
Further, a first disc and a second disc are coaxially arranged in the high-temperature tank and the second tapered tube respectively, the first disc is connected with the inner wall of the high-temperature tank through a plurality of first connecting rods uniformly distributed along the circumferential direction of the first disc, the second disc is connected with the inner wall of the second tapered tube through a plurality of second connecting rods uniformly distributed along the circumferential direction of the second disc, a first bearing is coaxially embedded in the center of the first disc and the center of the second disc, and two columnar rotators are coaxially fixedly connected with the inner rings of the first bearings respectively.
Further, the central tube is coaxially arranged in the first conical tube, the central tube is connected with the inner wall of the first conical tube through a plurality of third connecting rods uniformly distributed along the circumferential direction of the central tube, a third disc is coaxially and fixedly arranged in the central tube, a second bearing is coaxially embedded in the center of the third disc, a second rotating shaft vertically penetrating through the third disc is coaxially and fixedly connected to the inner ring of the second bearing, a second vertical groove is formed in the upper end of the first rotating shaft in the preheating tank, the lower end of the second rotating shaft is downwardly inserted into the second vertical groove, a plurality of third limiting strips which are vertical are formed in the outer wall of the lower end of the second rotating shaft, a plurality of third limiting grooves which are matched with the third limiting strips are formed in the inner wall of the second vertical groove, a vertical gear motor is fixedly arranged at the top of the sealing cover plate, and the output end of the gear motor is downwardly and coaxially fixedly connected with the upper end of the second rotating shaft.
Further, every elevating system all includes carousel and two rolling element along the circumferencial direction evenly distributed of carousel, two carousels link firmly with the upper end of two pivot respectively, every rolling element all includes spliced pole and ball, the spliced pole is vertical fixed the top of locating corresponding carousel, the ball inlays and locates in the upper end that corresponds the spliced pole, the ball that is arranged in elevating system of top is inconsistent with the bottom of No. three discs, the ball that is arranged in elevating system of below is inconsistent with the bottom of No. one discs, the bottom shaping of No. three discs has two No. one crest along the circumferencial direction evenly distributed of No. three discs, the bottom shaping of No. one disc has two No. two crest along the circumferencial direction evenly distributed of No. one disc, and two No. one crest and two No. two crest staggered distributions.
Further, the outer wall of the preheating tank is fixedly sleeved with a first induction coil, and the outer wall of the high-temperature tank is fixedly sleeved with a second induction coil.
Further, a circle of threaded condensing pipe is fixedly sleeved on the outer wall of the cooling pipe, two ends of the threaded condensing pipe sequentially penetrate out of the first heat insulating pipe and the second heat insulating pipe, and a water inlet and a water outlet corresponding to two ends of the threaded condensing pipe are formed in the outer wall of the kettle body.
Further, the heat preservation layer which is covered on the upper end of the second heat insulation pipe is fixedly arranged in the kettle body, and the heat preservation layer contains a heat preservation carbon felt which combines soft and hard materials.
Compared with the prior art, the invention has the following beneficial effects:
Firstly, the conical stirring body automatically descends through the lifting mechanism in the rotating process, so that powder in the corresponding tank body automatically falls into the next tank body, the conical stirring body is made of high-temperature resistant materials, the structure is simple, the descending is realized in a mechanical mode, and short circuit of an electric wire caused by high temperature can not occur;
Secondly, the conical stirring body can slowly rotate, so that the powder can be fully stirred by the conical stirring body when being heated, and finally the powder is heated uniformly;
thirdly, when powder falls into the cooling pipe after high-temperature graphitization, the powder can be driven by the spiral feeding shaft to slowly descend, so that the time of the powder passing through the cooling pipe can be prolonged, and the powder cooling efficiency is improved.
Drawings
FIG. 1 is a schematic perspective view of an embodiment;
FIG. 2 is a top view of an embodiment;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is an enlarged partial schematic view of the portion A1 in FIG. 3;
FIG. 5 is an enlarged partial schematic view designated by A2 in FIG. 3;
FIG. 6 is an enlarged partial schematic view designated by A3 in FIG. 3;
FIG. 7 is an enlarged partial schematic view designated by A4 in FIG. 3;
FIG. 8 is a schematic perspective view of a preheating tank and a first conical tube according to an embodiment;
FIG. 9 is a schematic perspective view of a lifting mechanism of an embodiment;
FIG. 10 is an exploded perspective view of the first and second rotary connectors of the embodiment;
FIG. 11 is an exploded view of the perspective structures of the first shaft and the first rotary connector of the embodiment;
FIG. 12 is a schematic perspective view of a high temperature tank of an embodiment;
Fig. 13 is a schematic perspective view of a cooling tube of the embodiment.
The reference numerals in the figures are: 1. a kettle body; 2. a preheating tank; 3. a high temperature tank; 4. a cooling tube; 5. a first rotating shaft; 6. a spiral feeding shaft; 7. a support; 8. a first heat insulating pipe; 9. a first conical tube; 10. a second heat insulating pipe; 11. sealing the cover plate; 12. a feed pipe; 13. a second conical tube; 14. a discharge port; 15. a conical shell; 16. stirring the upright post; 17. a seal ring; 18. a conical surface; 19. a columnar rotator; 20. a rotating sleeve; 21. an end shaft; 22. a spring; 23. a first limit bar; 24. a first limit groove; 25. a first vertical groove; 26. a second limit bar; 27. a second limit groove; 28. a first disc; 29. a second disc; 30. a first connecting rod; 31. a second connecting rod; 32. a first bearing; 33. a central tube; 34. a third connecting rod; 35. a third disc; 36. a second rotating shaft; 37. a second vertical groove; 38. a third limit bar; 39. a third limit groove; 40. a speed reducing motor; 41. a turntable; 42. a connecting column; 43. a ball; 44. a first wave crest; 45. a second wave crest; 46. a first induction coil; 47. a second induction coil; 48. a threaded condenser tube; 49. a water inlet; 50. a water outlet; 51. thermal insulation carbon felt; 52. and a second bearing.
Detailed Description
The invention will be further described in detail with reference to the drawings and the detailed description below, in order to further understand the features and technical means of the invention and the specific objects and functions achieved.
The isostatic pressure graphite continuous high-temperature graphitizing equipment for manufacturing the semiconductor large silicon wafer comprises a vertical kettle body 1, wherein a preheating zone, a high-temperature zone and a cooling zone are sequentially arranged in the kettle body 1 from top to bottom along the vertical direction, a preheating tank 2 is arranged in the preheating zone, a high-temperature tank 3 is arranged in the high-temperature zone, a cooling pipe 4 is arranged in the cooling zone, the preheating tank 2, the high-temperature tank 3 and the cooling pipe 4 are coaxially connected end to end along the vertical direction, conical stirring bodies are coaxially arranged in the preheating tank 2 and the high-temperature tank 3, the large caliber end of each conical stirring body faces downwards, a first rotating shaft 5 is coaxially arranged on each conical stirring body, a first rotating connecting piece for coaxially connecting the two first rotating shafts 5 is arranged between the two conical stirring bodies, be equipped with in the cooling tube 4 and be vertical spiral pay-off axle 6, the upper end of cooling tube 4 is equipped with and is used for the coaxial continuous No. two rotary connection spare of a pivot 5 that is located high temperature jar 3 with spiral pay-off axle 6, no. one rotary connection spare and No. two rotary connection spare's structure is the same, the upper end of both is elastic structure and is used for upwards pushing up two pivot 5 respectively, thereby make the heavy-calibre end of two toper stirring bodies upwards respectively with preheating jar 2 and the lower extreme shutoff of high temperature jar 3, the top of every toper stirring body all is equipped with elevating system, two elevating system are used for driving two pivot 5 respectively and go up and down in proper order, and with this back switching that realizes the preceding switching of high temperature jar 3 lower extreme and preheating jar 2 lower extreme.
In the initial state, the upper ends of the first rotary connecting piece and the second rotary connecting piece are respectively propped up the two first rotary shafts 5 to ensure that the large caliber ends of the two conical stirring bodies upwards respectively plug the lower ends of the preheating tank 2 and the high-temperature tank 3, the lower ends of the preheating tank 2 and the high-temperature tank 3 are respectively plugged by the two first conical stirring bodies, when powder is required to be graphitized, the powder is thrown into the upper end of the preheating tank 2, the powder enters the preheating tank 2 and then falls down onto the corresponding first conical stirring bodies, the two first conical stirring bodies rotate through the two coaxially connected first rotary shafts 5, then the powder in the preheating tank 2 is preheated in the stirring process, and after the temperature in the preheating tank 2 reaches a preset value, the two lifting mechanisms respectively drive the two first rotary shafts 5 to sequentially lift, the conical stirring body in the preheating tank 3 descends and ascends, the conical stirring body in the preheating tank 2 descends and ascends after descending, that is, the lower end of the preheating tank 3 is firstly opened and closed, the lower end of the preheating tank 2 is opened and closed, when the lower end of the preheating tank 2 is opened, powder in the preheating tank 2 falls into the high-temperature tank 3 downwards, the lower end of the high-temperature pipe is closed, finally, the powder falling from the preheating tank 2 is temporarily stored in the high-temperature tank 3, then the lower end of the preheating tank 2 is closed, new powder is put into the preheating tank 2 for preheating, in the process, the powder in the high-temperature tank 3 is continuously heated and uniformly heated through the corresponding conical stirring body, meanwhile, the new powder is preheated in the preheating tank 2, when the temperature in the high-temperature tank 3 is raised to a preset value, the powder can keep warm in the high-temperature tank 3 for a period of time to realize the graphitization of powder, afterwards, two elevating systems can drive two pivot 5 respectively and go up and down in proper order once more, then the high-temperature tank 3 that opens earlier can make the powder that graphitizes fall into the spiral feeding axle 6 in the cooling tube 4, then the preheating tank 2 that opens can make the powder fall into the high-temperature tank 3 that has closed, the powder that falls into in the cooling tube 4 can be driven slowly by spiral feeding axle 6 and descend, this in-process powder continuously lowers the temperature, until the powder is discharged from the cooling tube 4, in sum up, can carry out continuous high-temperature graphitization and the whole course of working to the powder incessantly, wherein, through the toper stirring body, make the lower extreme of high-temperature tank 3 and preheating tank 2 can have certain heat preservation after being shutoff, prevent the flow of heat effectively.
In order to reveal the specific connection of the preheating tank 2, the high-temperature tank 3 and the cooling tank, the following features are provided:
The center department shaping of the internal bottom of cauldron body 1 has saddle 7, the fixed saddle 7 is gone up and is equipped with and is vertical No. one insulating tube 8, cooling tube 4 coaxial fixation locates in No. one insulating tube 8, no. two insulating tube 10's the coaxial fixation in top of No. one insulating tube 8 is located to high temperature jar 3, preheat jar 2 coaxial fixation locates the top of high temperature jar 3, and preheat jar 2's internal diameter and be less than the internal diameter of high temperature jar 3, no. one insulating tube 8's internal diameter is greater than the internal diameter of high temperature jar 3, preheat jar 2's top coaxial fixedly connected with heavy-calibre end conical tube 9 up, saddle 7 is still fixed and is equipped with and is vertical and cover locates No. two insulating tubes 10 outside No. one conical tube 9, preheat jar 2, high temperature jar 3 and No. one insulating tube 8, no. two insulating tube 10's top coaxial fixation is equipped with sealed apron 11, be connected with a plurality of inlet pipe 12 on sealed apron 11, every inlet pipe 12 all uses the confession powder to introduce No. one conical tube 9 from outside the cauldron body 1, cooling tube 4's top coaxial fixedly connected with and is used for cooling tube 4's the two conical tube 13 that will fall from high temperature jar 3 into cooling tube 4's internal cooling tube 1, cooling tube's bottom opening is equipped with the cooling tube 4 that is opened.
Powder gets into the cauldron body 1 through inlet pipe 12, can directly arrange in first conical tube 9 after the powder passes through inlet pipe 12, make powder fall into preheating tank 2 smoothly through first conical tube 9, after high temperature jar 3 is opened, graphitized powder can fall into cooling tube 4 along second conical tube 13, outside the cauldron body 1 can finally be discharged through bin outlet 14 to the powder through the refrigerated, wherein, prevent that high temperature jar 3 and preheating tank 2 radiating heat from producing the influence to cooling tube 4 through the cover locates cooling tube 4 outside first insulating tube 8, thereby can further improve cooling tube 4's cooling efficiency, no. two insulating tube 10 is used for effectively preventing high temperature jar 3 and preheating tank 2 radiating heat and loses gradually.
In order to show the structure of the conical stirring body, the following characteristics are specifically provided:
Every toper stirring body is conical shell 15, be equipped with a plurality of stirring stand 16 on the conical shell 15, a plurality of stirring stand 16 evenly distributes along the circumferencial direction of conical shell 15, and the lower extreme of every stirring stand 16 all links firmly with the outer wall of conical shell 15, all coaxial shaping has sealing ring 17 on the inner wall of preheating tank 2 and high temperature tank 3 lower extreme, the lower extreme of every sealing ring 17 all forms round conical surface 18, the outer fringe wall of the heavy-calibre end of every conical shell 15 all upwards closely laminates with the conical surface 18 that corresponds, every first pivot 5 all coaxial pass corresponding conical shell 15, and every first pivot 5 all links firmly with the conical shell 15 coaxial that corresponds.
As shown in fig. 7, when each conical shell 15 is propped up, the outer edge wall of the large caliber end of each conical shell 15 is tightly attached to the corresponding conical surface 18, at this time, the lower ends of the preheating tank 2 and the high-temperature tank 3 are plugged, when the lifting mechanism drives the first rotating shaft 5 to enable the conical shell 15 positioned in the preheating tank 2 to move downwards towards the high-temperature tank 3, because the inner diameter of the high-temperature tank 3 is larger than that of the preheating tank 2, the powder temporarily stored in the preheating tank 2 can be discharged into the high-temperature tank 3 along the current conical shell 15, and when the lifting mechanism drives the first rotating shaft 5 to enable the conical shell 15 positioned in the high-temperature tank 3 to move downwards towards the first heat insulation pipe 8, because the inner diameter of the first heat insulation pipe 8 is larger than that of the high-temperature tank 3, the powder temporarily stored in the high-temperature tank 3 can be discharged into the second conical pipe 13 along the current conical shell 15;
When one of them pivot 5 is rotatory, through rotary connection spare and No. two rotary connection spare, spiral feeding axle 6 and two toper stirring body can synchronous rotation to this a plurality of stirring stand 16 of locating on the cone 15 can stir the powder in the current jar body, so as to ensure that the powder is heated evenly when preheating and high temperature heating, simultaneously spiral feeding axle 6 can drive the downhill transport of powder in the cooling tube 4, make the powder cool off at the in-process of transportation, and the powder after the final cooling can be discharged outside the cauldron body 1 from bin outlet 14.
In order to reveal the structures of the first rotary connecting piece and the second rotary connecting piece, the following features are specifically provided:
The first rotary connecting piece and the second rotary connecting piece comprise a columnar rotating body 19, a rotating sleeve 20 and an end shaft 21, the rotating sleeve 20 is coaxially formed at the top of the columnar rotating body 19, the end shaft 21 is coaxially formed at the bottom of the columnar rotating body 19, the two columnar rotating bodies 19 are respectively coaxially arranged in the high-temperature tank 3 and the second conical tube 13 in a rotating mode, the lower ends of the first rotating shafts 5 are respectively inserted into the second rotating sleeves 20 downwards, a vertical spring 22 is respectively arranged in each rotating sleeve 20, two ends of each spring 22 are respectively abutted against the lower end of the corresponding first rotating shaft 5 and the inner bottom wall of the corresponding rotating sleeve 20, a plurality of first limiting strips 23 which are vertical are respectively formed on the inner walls of the second rotating sleeves 20, a plurality of first limiting grooves 24 which are matched with the first limiting strips 23 are respectively formed on the outer walls of the lower ends of the first rotating shafts 5, a plurality of first vertical grooves 25 are formed in the end shafts 21 in the first rotating connecting piece, a plurality of second limiting strips 26 which are vertical are formed on the inner walls of the first rotating shafts 21, a plurality of first rotating shafts 5 which are positioned in the high-temperature tank 3 are fixedly connected with the first rotating shafts 25, and a plurality of first limiting grooves which are fixedly connected with the first rotating shafts 25 are fixedly connected with the second rotating shafts 25.
In the initial state, the elastic force is completely released through the spring 22, the corresponding first rotating shaft 5 is pushed up by the spring 22, in the process, each first limiting strip 23 slides in the corresponding first limiting groove 24, each second limiting strip 26 slides in the corresponding second limiting groove 27, each first rotating shaft 5 is rotationally connected with the corresponding rotating sleeve 20 through the cooperation of the first limiting strip 23 and the first limiting groove 24, the end shaft 21 of the first rotating connecting piece is rotationally connected with the first rotating shaft 5 positioned in the high-temperature tank 3 through the cooperation of the second limiting strip 26 and the second limiting groove 27, and therefore when the first rotating shaft 5 positioned in the preheating tank 2 rotates, the first rotating shaft 5 positioned in the high-temperature tank 3 and the spiral feeding shaft 6 positioned in the cooling pipe 4 rotate together.
In order to reveal how the two cylindrical rotators 19 rotate, the following features are provided:
The high-temperature tank 3 and the second conical tube 13 are respectively and coaxially provided with a first disc 28 and a second disc 29, the first disc 28 is connected with the inner wall of the high-temperature tank 3 through a plurality of first connecting rods 30 which are uniformly distributed along the circumferential direction of the first disc 28, the second disc 29 is connected with the inner wall of the second conical tube 13 through a plurality of second connecting rods 31 which are uniformly distributed along the circumferential direction of the second disc 29, a first bearing 32 is coaxially embedded in the centers of the first disc 28 and the second disc 29, and the two columnar rotators 19 are respectively and coaxially fixedly connected with the inner rings of the first bearings 32.
The two columnar rotators 19 are respectively arranged on the first disc 28 and the second disc 29 in a rotating way through two first bearings 32, and the axial displacement of the two columnar rotators 19 is limited through the two first bearings 32;
The outer diameter of the first circular disc 28 is smaller than the large caliber of the conical shell 15 positioned in the preheating tank 2, the outer diameter of the second circular disc 29 is smaller than the large caliber of the conical shell 15 positioned in the high-temperature tank 3, when the conical shell 15 positioned in the preheating tank 2 descends, powder positioned in the preheating tank 2 can downwards fall into the high-temperature tank 3 through a gap between the adjacent first connecting rods 30, and when the conical shell 15 positioned in the high-temperature tank 3 descends, powder positioned in the high-temperature tank 3 can downwards fall into the second conical tube 13 through a gap between the adjacent second connecting rods 31.
In order to drive the rotation shaft No. 5 to rotate, the following features are specifically provided:
The inner part of the first conical tube 9 is coaxially provided with a central tube 33, the central tube 33 is connected with the inner wall of the first conical tube 9 through a plurality of third connecting rods 34 which are uniformly distributed along the circumferential direction of the central tube 33, a third disc 35 is coaxially and fixedly arranged in the central tube 33, a second bearing 52 is coaxially and fixedly arranged at the center of the third disc 35, a second rotating shaft 36 which vertically penetrates through the third disc 35 is coaxially and fixedly connected with the inner ring of the second bearing 52, a second vertical groove 37 is formed in the upper end of the first rotating shaft 5 in the preheating tank 2, the lower end of the second rotating shaft 36 is downwards inserted into the second vertical groove 37, a plurality of third limiting strips 38 which are vertical are formed on the outer wall of the lower end of the second rotating shaft 36, a plurality of third limiting grooves 39 which are matched with the third limiting strips 38 are formed on the inner wall of the second vertical groove 37, a vertical speed reducing motor 40 is fixedly arranged at the top of the sealing cover plate 11, and the output end of the speed reducing motor 40 is downwards and coaxially and fixedly connected with the upper end of the second rotating shaft 36.
After the gear motor 40 is started, the gear motor 40 drives the second rotating shaft 36 to rotate slowly, so that the second rotating shaft 36 drives the first rotating shaft 5 positioned in the preheating tank 2 to rotate through the cooperation of the third limiting bar 38 and the third limiting groove 39, and after the lifting mechanism drives the first rotating shaft 5 to descend, the first rotating shaft 5 is driven to rotate by the second rotating shaft 36 through the third limiting bar 38 and the third limiting groove 39.
In order to reveal the specific structure of the lifting mechanism, the following features are provided:
Every elevating system all includes carousel 41 and two rolling element along the circumferencial direction evenly distributed of carousel 41, two carousels 41 link firmly with the upper end of two pivot 5 respectively, every rolling element all includes spliced pole 42 and ball 43, spliced pole 42 is vertical fixed the top of locating corresponding carousel 41, ball 43 inlays and locates in the upper end of corresponding spliced pole 42, ball 43 in elevating system who is located the top is inconsistent with the bottom of No. three disc 35, ball 43 in elevating system who is located the below is inconsistent with the bottom of No. one disc 28, the bottom shaping of No. three disc 35 has two peak 44 along the circumferencial direction evenly distributed of No. three disc 35, the bottom shaping of No. one disc 28 has two peak 45 along the circumferencial direction evenly distributed of No. one disc 28, and two peak 44 and two peak 45 crisscross distribution.
When the gear motor 40 is started, the two first rotating shafts 5 respectively drive the two turntables 41 and the two conical shells 15 to rotate slowly, when the two conical shells 15 rotate slowly, the powder is fully stirred by the stirring upright posts 16, so that the powder is heated uniformly, as the two first wave crests 44 and the two second wave crests 45 are distributed in a staggered manner, the rolling elements in the high-temperature tank 3 are firstly contacted with the second wave crests 45, then the rolling elements in the preheating tank 2 are contacted with the first wave crests 44, when the rolling elements in the high-temperature tank 3 are contacted with the second wave crests 45, the balls 43 which are in contact with the bottoms of the first discs 28 gradually roll onto the second wave crests 45, then the current turntables 41 drive the first rotating shafts 5 in the high-temperature tank 3 to descend and compress the corresponding springs 22, and simultaneously the corresponding conical shells 15 open the lower ends of the high-temperature tank 3, powder in the high-temperature tank 3 falls down into the second conical tube 13, after that, when the turntable 41 rotates until the balls 43 are far away from the second peak 45, the spring 22 drives the first rotating shaft 5 to rise until the balls 43 are in contact with the bottom of the first disc 28 again, the corresponding conical shell 15 seals the lower end of the high-temperature tank 3 again, after that, with the continuous driving of the gear motor 40, the rolling element in the preheating tank 2 contacts the first peak 44, the balls 43 in contact with the bottom of the third disc 35 gradually roll onto the first peak 44, then the current turntable 41 drives the first rotating shaft 5 in the preheating tank 2 to descend and compress the corresponding spring 22, the corresponding conical shell 15 opens the lower end of the preheating tank 2, the powder in the preheating tank 2 falls down into the high-temperature tank 3, when the turntable 41 rotates until the balls 43 are far away from the first peak 44, the spring 22 drives the corresponding first rotating shaft 5 to rise until the balls 43 are in contact with the bottom of the third disc 35 again, and the corresponding conical shell 15 seals the lower end in the preheating tank 2 again, wherein the rotating speeds of the two first rotating shafts 5 are very slow, so that the powder in the high-temperature tank 3 has enough heating time and is finally graphitized before the high-temperature tank 3 is opened.
In order to reveal how the preheating tank 2 and the high-temperature tank 3 heat the powder, the following features are provided:
A first induction coil 46 is fixedly sleeved on the outer wall of the preheating tank 2, and a second induction coil 47 is fixedly sleeved on the outer wall of the high-temperature tank 3.
When passing through alternating current with a certain frequency, the first induction coil 46 and the second induction coil 47 generate alternating magnetic fields with the same current change frequency, and the preheating tank 2 and the high-temperature tank 3 are respectively positioned at the center positions of the first induction coil 46 and the second induction coil 47, so that eddy currents can be formed, the eddy currents can convert electric energy into heat energy, and finally, powder to be subjected to heat treatment is rapidly heated. In actual use, two temperature detectors (not shown in the figure) for detecting the temperatures in the preheating tank 2 and the high-temperature tank 3 in real time can be added in the kettle body 1, so that the magnitude of the alternating current passing through the first induction coil 46 and the second induction coil 47 can be controlled according to the temperatures displayed by the temperature detectors.
In order to reveal how the cooling tube 4 cools the powder, the following features are provided:
a circle of threaded condensing pipe 48 is fixedly sleeved on the outer wall of the cooling pipe 4, two ends of the threaded condensing pipe 48 sequentially penetrate out of the first heat insulating pipe 8 and the second heat insulating pipe 10, and a water inlet 49 and a water outlet 50 corresponding to two ends of the threaded condensing pipe 48 are formed in the outer wall of the kettle body 1.
Cooling water is continuously injected into the threaded condenser pipe 48 through the water inlet 49, flows through the outer pipe wall of the cooling pipe 4 along the threaded condenser pipe 48 and is finally discharged from the water outlet 50, and the cooling pipe 4 is continuously cooled through the cooling water, so that powder conveyed through the screw feeding shaft 6 at a retarded speed can be sufficiently cooled.
In order to further prevent the flow of the temperature in the preheating tank 2 and the high temperature tank 3, the following features are provided:
the kettle body 1 is internally and fixedly provided with a heat preservation layer coated at the upper end of the second heat insulation pipe 10, and the heat preservation layer contains a heat preservation carbon felt 51 formed by combining soft and hard materials.
The thermal insulation carbon felt 51 combining the soft and hard materials is resistant to high temperature and has better thermal insulation effect, and the thermal insulation carbon felt 51 is used for further preventing the temperature in the preheating tank 2 and the high-temperature pipe from flowing out.
Working principle:
In the initial state, the upper ends of the first rotary connecting piece and the second rotary connecting piece are respectively propped up the two first rotary shafts 5 to ensure that the large caliber ends of the two conical stirring bodies upwards respectively plug the lower ends of the preheating tank 2 and the high-temperature tank 3, the lower ends of the preheating tank 2 and the high-temperature tank 3 are respectively plugged by the two first conical stirring bodies, when powder is required to be graphitized, the powder is thrown into the upper end of the preheating tank 2, the powder enters the preheating tank 2 and then falls down onto the corresponding first conical stirring bodies, the two first conical stirring bodies rotate through the two coaxially connected first rotary shafts 5, then the powder in the preheating tank 2 is preheated in the stirring process, and after the temperature in the preheating tank 2 reaches a preset value, the two lifting mechanisms respectively drive the two first rotary shafts 5 to sequentially lift, the conical stirring body in the preheating tank 3 descends and ascends, the conical stirring body in the preheating tank 2 descends and ascends after descending, that is, the lower end of the preheating tank 3 is firstly opened and closed, the lower end of the preheating tank 2 is opened and closed, when the lower end of the preheating tank 2 is opened, powder in the preheating tank 2 falls into the high-temperature tank 3 downwards, the lower end of the high-temperature pipe is closed, finally, the powder falling from the preheating tank 2 is temporarily stored in the high-temperature tank 3, then the lower end of the preheating tank 2 is closed, new powder is put into the preheating tank 2 for preheating, in the process, the powder in the high-temperature tank 3 is continuously heated and uniformly heated through the corresponding conical stirring body, meanwhile, the new powder is preheated in the preheating tank 2, when the temperature in the high-temperature tank 3 is raised to a preset value, the powder can keep warm in the high-temperature tank 3 for a period of time to realize the graphitization of powder, afterwards, two elevating systems can drive two pivot 5 respectively and go up and down in proper order once more, then the high-temperature tank 3 that opens earlier can make the powder that graphitizes fall into the spiral feeding axle 6 in the cooling tube 4, then the preheating tank 2 that opens can make the powder fall into the high-temperature tank 3 that has closed, the powder that falls into in the cooling tube 4 can be driven slowly by spiral feeding axle 6 and descend, this in-process powder continuously lowers the temperature, until the powder is discharged from the cooling tube 4, in sum up, can carry out continuous high-temperature graphitization and the whole course of working to the powder incessantly, wherein, through the toper stirring body, make the lower extreme of high-temperature tank 3 and preheating tank 2 can have certain heat preservation after being shutoff, prevent the flow of heat effectively.
The foregoing examples merely illustrate one or more embodiments of the invention, which are described in greater detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. The utility model provides an isostatic pressing graphite continuous high temperature graphitization equipment for semiconductor large silicon chip manufacturing, a serial communication port, including being vertical cauldron body (1), be equipped with preheating zone from top to bottom in proper order in cauldron body (1), high temperature zone and cooling zone, be equipped with preheating tank (2) in the preheating zone, be equipped with high temperature tank (3) in the high temperature zone, be equipped with cooling tube (4) in the cooling zone, preheating tank (2), high temperature tank (3) and cooling tube (4) are coaxial and end to end along vertical direction, all coaxial be equipped with the toper stirring body in preheating tank (2) and the high temperature tank (3), the heavy-calibre end of every toper stirring body all faces down, all coaxial be equipped with first pivot (5) on every toper stirring body, be equipped with between two toper stirring bodies and be used for with the coaxial first rotary connection piece of two first pivots (5), be equipped with in cooling tube (4) vertical spiral feeding axle (6), the upper end of cooling tube (4) is equipped with and is used for connecting first pivot (5) and second pivot (5) that are located high temperature tank (3) coaxial, the both upper end and upper end of each conical stirring body is equipped with the same high-diameter stirring mechanism (2) and two upper end respectively, the upper end of each conical stirring body is upwards connected with the high-diameter stirring body (2 respectively, the two lifting mechanisms are used for respectively driving the two first rotating shafts (5) to sequentially lift and accordingly realize the first opening and closing of the lower end of the high-temperature tank (3) and the rear opening and closing of the lower end of the preheating tank (2).
2. The continuous high-temperature graphitization equipment for manufacturing the large semiconductor silicon wafer according to claim 1 is characterized in that a supporting table (7) is formed at the center of the inner bottom of the kettle body (1), a first heat insulation pipe (8) which is vertical is fixedly arranged on the supporting table (7), a cooling pipe (4) is coaxially and fixedly arranged in the first heat insulation pipe (8), the high-temperature tank (3) is coaxially and fixedly arranged at the top of the first heat insulation pipe (8), a preheating tank (2) is coaxially and fixedly arranged at the top of the high-temperature tank (3), the inner diameter of the preheating tank (2) is smaller than the inner diameter of the high-temperature tank (3), the inner diameter of the first heat insulation pipe (8) is larger than the inner diameter of the high-temperature tank (3), a first conical pipe (9) with a large caliber end which is upward is coaxially and fixedly connected to the top of the preheating tank (2), a second heat insulation pipe (10) which is vertical and sleeved in the first conical pipe (9), the high-temperature tank (3) and the second heat insulation pipe (8) are coaxially arranged on the supporting table (7), a plurality of powder material inlets (12) are fixedly arranged at the top of the first heat insulation pipe (12) and are connected with a plurality of material inlets (12) from the top of the inner side of the kettle body (11), the top of the cooling pipe (4) is coaxially and fixedly connected with a two-cone pipe (13) which is used for enabling powder falling from the high-temperature tank (3) to enter the cooling pipe (4), and the bottom of the kettle body (1) is provided with a discharge outlet (14) which is communicated with the lower end of the cooling pipe (4).
3. The isostatic pressing graphite continuous high-temperature graphitization device for manufacturing the semiconductor large silicon wafer according to claim 2, wherein each conical stirring body is a conical shell (15), a plurality of stirring upright posts (16) are arranged on the conical shell (15), the stirring upright posts (16) are uniformly distributed along the circumferential direction of the conical shell (15), the lower end of each stirring upright post (16) is fixedly connected with the outer wall of the conical shell (15), sealing rings (17) are coaxially formed on the inner walls of the lower ends of the preheating tank (2) and the high-temperature tank (3), a circle of conical surface (18) is formed at the lower end of each sealing ring (17), the outer edge wall of the large caliber end of each conical shell (15) is tightly attached to the corresponding conical surface (18), each first rotating shaft (5) coaxially penetrates through the corresponding conical shell (15), and each first rotating shaft (5) is coaxially fixedly connected with the corresponding conical shell (15).
4. The continuous high-temperature graphitization equipment for manufacturing the large semiconductor silicon wafer according to claim 2, wherein the first rotary connecting piece and the second rotary connecting piece comprise cylindrical rotating bodies (19), rotating sleeves (20) and end shafts (21), the rotating sleeves (20) are coaxially formed at the tops of the cylindrical rotating bodies (19), the end shafts (21) are coaxially formed at the bottoms of the cylindrical rotating bodies (19), the two cylindrical rotating bodies (19) are coaxially and rotatably arranged in a high-temperature tank (3) and a second conical tube (13) respectively, the lower ends of the first rotary shafts (5) are downwards inserted into the second rotating sleeves (20) respectively, vertical springs (22) are arranged in the first rotary sleeves (20), two ends of each spring (22) are respectively abutted against the lower ends of the corresponding first rotary shafts (5) and the inner bottom walls of the rotating sleeves (20), a plurality of vertical limit strips (23) are formed on the inner walls of the two rotating sleeves (20), a plurality of limit strips (25) are formed on the outer walls of the lower ends of the first rotary shafts (5) respectively, a plurality of limit strips (25) are formed in the inner limit grooves (25) formed on the inner walls of the first rotary shafts (25) respectively, and a plurality of second limit grooves (27) matched with second limit strips (26) are formed in the outer wall of the upper end of the first rotating shaft (5), and an end shaft (21) of the second rotary connecting piece is fixedly connected with the upper end of the threaded feeding shaft in a coaxial mode.
5. The isostatic pressing graphite continuous high-temperature graphitizing equipment for manufacturing a large semiconductor silicon wafer according to claim 4 is characterized in that a first disc (28) and a second disc (29) are coaxially arranged in the high-temperature tank (3) and the second conical tube (13) respectively, the first disc (28) is connected with the inner wall of the high-temperature tank (3) through a plurality of first connecting rods (30) uniformly distributed along the circumferential direction of the first disc (28), the second disc (29) is connected with the inner wall of the second conical tube (13) through a plurality of second connecting rods (31) uniformly distributed along the circumferential direction of the second disc (29), first bearings (32) are coaxially embedded in the centers of the first disc (28) and the second disc (29), and the two columnar rotators (19) are coaxially fixedly connected with the inner rings of the first bearings (32) respectively.
6. The continuous high-temperature graphitization device for manufacturing the isostatic graphite for the large semiconductor silicon wafer according to claim 5 is characterized in that a central tube (33) is coaxially arranged in a first conical tube (9), the central tube (33) is connected with the inner wall of the first conical tube (9) through a plurality of third connecting rods (34) uniformly distributed along the circumferential direction of the central tube (33), a third disc (35) is coaxially and fixedly arranged in the central tube (33), a second bearing (52) is coaxially and fixedly connected with a second rotating shaft (36) vertically penetrating through the third disc (35) on the inner ring of the second bearing (52), a second vertical groove (37) is formed in the upper end of the first rotating shaft (5) in the preheating tank (2), the lower end of the second rotating shaft (36) is downwardly inserted into the second vertical groove (37), a plurality of third limiting strips (38) which are vertical are formed on the outer wall of the lower end of the second rotating shaft (36), a plurality of motors (38) are coaxially arranged on the inner wall of the second vertical groove (37), and the second limiting strips (38) are fixedly connected with the upper end of the second rotating shaft (40), and the lower end of the second rotating shaft (36) is fixedly connected with the upper end of the first motor (40).
7. The isostatic pressing graphite continuous high-temperature graphitizing equipment for manufacturing large semiconductor silicon chips according to claim 6, wherein each lifting mechanism comprises a rotary table (41) and two rolling elements uniformly distributed along the circumferential direction of the rotary table (41), the two rotary tables (41) are coaxially and fixedly connected with the upper ends of the first rotary shafts (5) respectively, each rolling element comprises a connecting column (42) and a ball (43), the connecting columns (42) are vertically and fixedly arranged at the tops of the corresponding rotary tables (41), the balls (43) are embedded in the upper ends of the corresponding connecting columns (42), the balls (43) in the lifting mechanism positioned above are in contact with the bottoms of the third rotary tables (35), the balls (43) in the lifting mechanism positioned below are in contact with the bottoms of the first rotary tables (28), the bottoms of the third rotary tables (35) are provided with first wave peaks (44) uniformly distributed along the circumferential direction of the third rotary tables (35), the bottoms of the first rotary tables (28) are provided with second wave peaks (45) uniformly distributed along the circumferential direction of the first rotary tables (28), and the second wave peaks (45) are distributed alternately.
8. The isostatic graphite continuous high-temperature graphitization device for manufacturing the semiconductor large silicon chips according to claim 1 is characterized in that a first induction coil (46) is fixedly sleeved on the outer wall of the preheating tank (2), and a second induction coil (47) is fixedly sleeved on the outer wall of the high-temperature tank (3).
9. The isostatic pressing graphite continuous high-temperature graphitizing device for manufacturing the semiconductor large silicon wafer according to claim 1 is characterized in that a circle of threaded condensing pipe (48) is fixedly sleeved on the outer wall of the cooling pipe (4), two ends of the threaded condensing pipe (48) sequentially penetrate out of the first heat insulating pipe (8) and the second heat insulating pipe (10), and a water inlet (49) and a water outlet (50) corresponding to two ends of the threaded condensing pipe (48) are formed in the outer wall of the kettle body (1).
10. The isostatic graphite continuous high-temperature graphitization device for manufacturing the large semiconductor silicon wafer according to claim 2 is characterized in that an insulation layer coated at the upper end of the second heat insulation pipe (10) is fixedly arranged in the kettle body (1), and the insulation layer contains a soft and hard combined insulation carbon felt (51).
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| CN202410515837.3A CN118111237B (en) | 2024-04-26 | 2024-04-26 | Isostatic graphite continuous high-temperature graphitizing equipment for manufacturing large semiconductor silicon wafer |
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| JP2009236367A (en) * | 2008-03-26 | 2009-10-15 | Koyo Thermo System Kk | Heat treatment device |
| CN101968313A (en) * | 2010-11-24 | 2011-02-09 | 茂名重力石化机械制造有限公司 | Cylindrical tube type heating furnace capable of being assembled |
| CN108043264A (en) * | 2017-11-07 | 2018-05-18 | 山东瀚星生物科技股份有限公司 | Temperature controls the molten paste agitating device of chlorophyll |
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| CN112265973A (en) * | 2020-10-10 | 2021-01-26 | 浙江宇耀新材料有限公司 | Preparation method of nano aluminum nitride powder |
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2024
- 2024-04-26 CN CN202410515837.3A patent/CN118111237B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009236367A (en) * | 2008-03-26 | 2009-10-15 | Koyo Thermo System Kk | Heat treatment device |
| CN101968313A (en) * | 2010-11-24 | 2011-02-09 | 茂名重力石化机械制造有限公司 | Cylindrical tube type heating furnace capable of being assembled |
| CN108043264A (en) * | 2017-11-07 | 2018-05-18 | 山东瀚星生物科技股份有限公司 | Temperature controls the molten paste agitating device of chlorophyll |
| CN110523274A (en) * | 2019-09-19 | 2019-12-03 | 泉州市五加一电子商务有限公司 | A new catalytic system for denitrification and desulfurization of cement kiln with double disc oar hourglass reversal |
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