CN1237017C - Pressure forming equipment and method for optical element - Google Patents

Pressure forming equipment and method for optical element Download PDF

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CN1237017C
CN1237017C CN 00133892 CN00133892A CN1237017C CN 1237017 C CN1237017 C CN 1237017C CN 00133892 CN00133892 CN 00133892 CN 00133892 A CN00133892 A CN 00133892A CN 1237017 C CN1237017 C CN 1237017C
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glass material
closed
molding
chamber
cavity
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CN1295038A (en
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野村刚
宫崎直
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Canon Inc
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/005Pressing under special atmospheres, e.g. inert, reactive, vacuum, clean
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/66Means for providing special atmospheres, e.g. reduced pressure, inert gas, reducing gas, clean room

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  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

本发明提供了一种光学元件的压力成型设备及其成型方法,当实施只在压制过程中将成型气氛调节成真空的成型方法时,缩短了成型周期,并且极大减小了对在真空下的温度控制的影响。通过用一对上、下模具来压力成型热软玻璃材料、冷却玻璃材料并从模具中取出模制品的上述成型设备包括可替换其中的气氛的第一封闭腔;装在前者内且可独立地替换其中气氛的第二封闭腔;为第二封闭腔设置的成型装置;用于把装在第一封闭腔内的玻璃材料送往成型装置并将玻璃模制品送入第一封闭腔的玻璃输送装置。

The present invention provides a kind of pressure molding equipment and molding method for optical elements. When the molding method is implemented by adjusting the molding atmosphere to vacuum only during the pressing process, the molding cycle is shortened, and the impact on the vacuum is greatly reduced. The effect of temperature control. The above-mentioned forming apparatus for forming hot soft glass material by pressure with a pair of upper and lower molds, cooling the glass material and taking out the molded product from the mold includes a first closed chamber that can replace the atmosphere therein; contained in the former and can be independently A second enclosure for replacing the atmosphere therein; a forming unit provided for the second enclosure; glass delivery for feeding glass material contained in the first enclosure to the forming unit and for feeding glass moldings into the first enclosure device.

Description

光学元件的压力成型设备及其成型方法Pressure molding equipment for optical elements and molding method thereof

技术领域technical field

本发明涉及一种用于通过加压模制热玻璃材料而获得的光学元件的压力成型设备及其成型方法。The present invention relates to a pressure molding apparatus for an optical element obtained by pressure molding a hot glass material and a molding method thereof.

背景技术Background technique

作为不需要抛光过程的玻璃透镜的制造方法,过去曾采用一种加热玻璃材料并用一对上、下模具对其进行加压模制的方法。由于这种方法可以有效地生产出像非球面透镜那样的产品,所以它被开发应用到具有各种形状的透镜上。As a method of manufacturing a glass lens that does not require a polishing process, a method of heating a glass material and press-molding it with a pair of upper and lower molds has been used in the past. Since this method can efficiently produce products like aspheric lenses, it has been developed and applied to lenses with various shapes.

在该方法中,如何将模具的成型表面精确地复制到玻璃制品上是获得非常精密的光学元件的一个焦点问题。为了实现上述目的,在压制过程中,在模具的对应于光学元件的光学功能表面的成型面上不能有丝毫空气。为此,例如当要成型一个凸透镜时,将玻璃材料的曲率半径设定成小于模具的成型面的曲率半径,从而在模具与玻璃之间将不会留有空气。In this method, how to accurately replicate the molding surface of the mold onto the glass article is a focal problem in obtaining very precise optical elements. In order to achieve the above object, during the pressing process, there must not be any air on the molding surface of the mold corresponding to the optically functional surface of the optical element. For this reason, for example, when a convex lens is to be molded, the radius of curvature of the glass material is set to be smaller than the radius of curvature of the molding surface of the mold, so that no air will remain between the mold and the glass.

如果要生产如在非球面透镜中那样的具有大曲率(曲率半径小)或复杂形状的透镜,则不可能只通过改变玻璃材料的形状而模制出所需要的透镜。即使可以制造出该透镜,也会增大玻璃材料的成本。因此,近年来研究出了一种在压制工作中消除成型空气以便形成真空状态的方法。根据该方法,如果在成型过程的加热和冷却过程中也保持真空状态,则不会发生与空气的热交换(对流)。于是,可以延长加热/冷却时间,或者取决于模具与温度传感器如热电偶之间的接触状态(有/没有间隙)方面的差异的温度测量值会出现误差。此外,当处理玻璃材料时,不能通过真空夹紧来运送玻璃材料。这样,在恒定的真空状态下模制产品的方法具有许多不便之处并因而是不令人满意的。If a lens with a large curvature (small radius of curvature) or a complex shape is to be produced as in an aspheric lens, it is impossible to mold the desired lens only by changing the shape of the glass material. Even if the lens can be manufactured, it will increase the cost of the glass material. Therefore, in recent years, a method of eliminating molding air in order to form a vacuum state during the pressing work has been studied. According to this method, if the vacuum state is maintained also during the heating and cooling of the molding process, heat exchange (convection) with air does not occur. Then, the heating/cooling time may be extended, or errors may occur in temperature measurement values depending on the difference in contact state (with/without gap) between the mold and a temperature sensor such as a thermocouple. Furthermore, when handling glass materials, glass materials cannot be conveyed by vacuum clamping. Thus, the method of molding products in a constant vacuum state has many inconveniences and is thus unsatisfactory.

因此,一种仅在压制操作时形成真空状态的成型方法是有利的。在这种情况下,增加了在成型周期内抽真空和充填惰性气体的步骤数目。因此,必须尽可能地缩短抽真空和充填惰性气体的时间以便防止过度地延长生产周期。为了缩短成型周期,最好按照与过去的情况相同的方式在尽可能高的温度下从模具中取出模制品。因此,必须在惰性气体的气氛下取出模制产品以防止氧化。Therefore, a forming method in which a vacuum state is formed only during the pressing operation is advantageous. In this case, the number of steps of evacuation and inert gas filling in the molding cycle is increased. Therefore, the time for evacuation and inert gas filling must be shortened as much as possible in order to prevent the production cycle from being unduly extended. In order to shorten the molding cycle, it is best to remove the molded product from the mold at the highest possible temperature in the same way as in the past. Therefore, it is necessary to take out the molded product under an atmosphere of an inert gas to prevent oxidation.

现在将回顾一下传统的成型设备。在日本专利公开第3-177318号中描述的发明提出了一种用于在惰性气体气氛下进行模塑的设备。在该设备中,在一个成型腔内设置一个模具和一个用于将玻璃材料装到模具中或从模具中卸料的手柄。在成型腔后面设置一个载荷锁定腔。玻璃材料和模制品通过载荷锁定腔被送往外界并从外界运来,从而可以不削弱成型腔内的气氛地进行连续的成型。结果,可以在高温下不被氧化地取出成型后的模制品,由此极大地缩短了成型周期。Conventional molding equipment will now be reviewed. The invention described in Japanese Patent Laid-Open No. 3-177318 proposes an apparatus for molding under an inert gas atmosphere. In this device, a mold and a handle for loading and unloading glass material into and out of the mold are arranged in a forming cavity. A load lock cavity is provided behind the forming cavity. The glass material and molded product are sent to and brought from the outside through the load lock chamber, so that continuous molding can be performed without weakening the atmosphere in the molding chamber. As a result, the molded article can be taken out without being oxidized at high temperature, thereby greatly shortening the molding cycle.

当通过使用上述的传统成型设备来进行仅在压制过程中形成真空状态的成型方法时,出现了以下问题。更确切地说,在该成型设备中,由于模具、用于装卸模制品的手柄以及模具内的和来自模具的玻璃材料等位于一个成型腔内,所以成型腔变得比较大。因此,延长了用于除去空气的抽真空时间,这相应地延长了成型周期。另外,在成型周期内对模具与玻璃材料的温度控制变得不稳定。When a molding method in which only a vacuum state is formed during pressing is performed by using the conventional molding apparatus described above, the following problems arise. More specifically, in this molding apparatus, since the mold, the handle for loading and unloading the molded product, and the glass material in and out of the mold, etc. are located in one molding cavity, the molding cavity becomes relatively large. Therefore, the evacuation time for removing air is prolonged, which correspondingly prolongs the molding cycle. Additionally, temperature control of the mold and glass material becomes unstable during the molding cycle.

因而,成型腔必须尽可能地小。如果上述手柄只设置在成型腔外,则当要装卸玻璃材料时,使模具暴露在外界环境(大气)中。为了防止模具的氧化,必须在模具和玻璃模制品已被充分冷却之后才能取出它们,因此极大地延长了成型周期。Thus, the forming cavity must be as small as possible. If the above-mentioned handle is only arranged outside the molding cavity, then when the glass material is to be loaded and unloaded, the mold is exposed to the external environment (atmosphere). In order to prevent oxidation of the mold, the mold and the glass molding must be taken out after they have been sufficiently cooled, thus greatly extending the molding cycle.

发明内容Contents of the invention

鉴于上述情况,设想出了本发明。本发明的目的是提供一种光学元件的压力成型设备及其成型方法,其中当进行只在压制过程中将模制气氛设定成真空的成型方法时,缩短了成型周期,从而极大地减少了对在真空气氛中的温度控制产生的不利影响。The present invention has been conceived in view of the above circumstances. The object of the present invention is to provide a pressure molding apparatus for an optical element and a molding method thereof, wherein when performing a molding method in which the molding atmosphere is set to vacuum only during pressing, the molding cycle is shortened, thereby greatly reducing the Adverse effects on temperature control in a vacuum atmosphere.

为了解决上述问题并实现上述目的,根据本发明的光学元件的压力成型设备的特征是它具有以下结构。In order to solve the above-mentioned problems and achieve the above-mentioned object, a pressure molding apparatus for an optical element according to the present invention is characterized in that it has the following structure.

更确切地说,通过采用一对上、下模具来在压力下变形又热又软的玻璃材料、冷却该玻璃材料并从所述模具中取出玻璃模制品的光学元件的压力成型设备包括一个可替换其中的气氛的第一封闭腔、一个装在所述第一封闭腔内的且可以独立于第一封闭腔地替换其中的气氛的第二封闭腔、为第二封闭腔设置的且用于通过加压来模制成型热玻璃材料的成型装置以及用于把装在第一封闭腔内的玻璃材料送往在第二封闭腔内的所述成型装置并将由所述成型装置成型的玻璃模制品送入第一封闭腔的玻璃输送装置。More specifically, a pressure molding apparatus for deforming a hot and soft glass material under pressure by using a pair of upper and lower molds, cooling the glass material and taking out an optical element of a glass molded article from said molds includes a a first closed chamber for replacing the atmosphere therein, a second closed chamber housed in said first closed chamber and capable of replacing the atmosphere therein independently of the first closed chamber, provided for the second closed chamber and for Forming device for molding hot glass material by pressurization and for sending glass material contained in a first closed cavity to said forming device in a second closed cavity and glass formed by said forming device The moldings are fed into the glass conveyor of the first closed chamber.

一种根据本发明的光学元件的压力成型方法的特征在于它具有以下配置。A pressure molding method of an optical element according to the present invention is characterized in that it has the following configuration.

更确切地说,一种通过采用一对上、下模具来压力成型热软玻璃材料、冷却该玻璃材料并从所述模具中取出玻璃模制品的光学元件的压力成型方法,其特征在于,该方法采用了这样一种成型设备,即所述成型设备包括一个可替换其中的气氛的第一封闭腔、一个装在所述第一封闭腔内且可以独立于所述第一封闭腔地替换其中的气氛的第二封闭腔以及用于替换所述第一封闭腔与第二封闭腔内的气氛的装置,所述方法包括以下步骤:将玻璃材料装入所述第一封闭腔内;在装载玻璃材料之前或之后,用惰性状态替换所述第一封闭腔的内部气氛;在上述替换步骤之后,在惰性状态下将玻璃材料引入在所述第二封闭腔内的所述成型装置中;在把玻璃材料引入所述第二封闭腔之后,在第二封闭腔内加热所述玻璃材料;将所述第二封闭腔的内部抽成真空;通过所述的成型设备加压模制玻璃材料;在加压模制玻璃材料后将惰性气体引入所述第二封闭腔内;并在所述第二封闭腔内冷却模制品;以及在冷却步骤之后,通过所述第一封闭腔取出模制品。More specifically, a pressure molding method of an optical element by pressure molding a hot soft glass material using a pair of upper and lower molds, cooling the glass material, and taking out a glass molding from said mold, characterized in that the The method employs a molding apparatus comprising a first closed chamber in which the atmosphere can be replaced, a closed chamber housed in said first closed chamber and capable of being replaced independently of said first closed chamber. A second closed chamber with atmosphere and a device for replacing the atmosphere in the first closed chamber and the second closed chamber, the method comprises the following steps: loading glass material into the first closed chamber; Before or after the glass material, replacing the internal atmosphere of the first closed chamber with an inert state; after the above replacement step, introducing the glass material into the forming device in the second closed chamber in an inert state; After introducing the glass material into the second closed cavity, heating the glass material in the second closed cavity; evacuating the inside of the second closed cavity; pressurizing the glass material through the molding device; introducing an inert gas into the second closed cavity after pressure molding the glass material; and cooling the molded article in the second closed cavity; and taking out the molded article through the first closed cavity after the cooling step.

这样,当环绕模具新设置一个具有最小所需容积的腔室时,可以只有模具周围的气氛在压制前被调定成真空状态,而且可以在惰性气体气氛下为模具装卸玻璃材料。Thus, when a cavity having the minimum required volume is newly provided around the mold, only the atmosphere around the mold can be set to a vacuum state before pressing, and the mold can be loaded and unloaded with glass material under an inert gas atmosphere.

根据本发明的一个实施例,在一个光学元件的压力成型设备中,在一个位于第一封闭腔附近的位置上形成一个可以独立于第一封闭腔地替换其中的气氛的玻璃载荷锁定腔,该载荷锁定腔能够敞开和气密地封闭。结果,只有容积比较小的载荷锁定腔的气氛被替换了,而没有改变其容积因玻璃输送装置等而相对增大的第一封闭腔的气氛,从而总是可以向第一封闭腔供应玻璃并从其中取出玻璃。According to an embodiment of the present invention, in a pressure molding apparatus for an optical element, a glass load lock chamber capable of replacing the atmosphere therein independently of the first closed chamber is formed at a position near the first closed chamber, the The load lock chamber can be open and hermetically closed. As a result, only the atmosphere of the load lock chamber, which has a relatively small volume, is replaced without changing the atmosphere of the first closed chamber, whose volume is relatively increased by the glass delivery device, etc., so that glass can always be supplied to the first closed chamber and Remove the glass from it.

附图说明Description of drawings

对于本领域中的普通技术人员来说,根据以下对本发明的一个优选实施例的描述可以清楚地了解除上述特征和优点外的其它的特征和优点。在说明书中,参考构成说明书一部分的附图进行说明,这些附图示出了本发明的一个例子。但是,这样的例子不是毫无遗漏地例举出了本发明的各个实施例,因此,为了限定本发明的范围,还要参见在说明书之后的权利要求书的内容。For those skilled in the art, other features and advantages besides the above-mentioned features and advantages can be clearly understood from the following description of a preferred embodiment of the present invention. In the specification, reference is made to the accompanying drawings which form a part hereof, and which illustrate an example of the invention. However, such examples do not exhaustively exemplify the various embodiments of the invention, therefore, in order to define the scope of the invention, reference is also made to the content of the claims following the description.

图1是根据本发明第一实施例的处于压制操作状态下的光学元件的压力成型设备的纵向剖视图;1 is a longitudinal sectional view of a pressure molding apparatus for an optical element in a pressing operation state according to a first embodiment of the present invention;

图2是处于玻璃充填状态下的光学元件的压力成型设备的纵向剖视图;以及Figure 2 is a longitudinal sectional view of a pressure molding apparatus for an optical element in a glass-filled state; and

图3是根据本发明第二实施例的光学元件的压力成型设备的纵向剖视图。Fig. 3 is a longitudinal sectional view of a pressure molding apparatus for an optical element according to a second embodiment of the present invention.

具体实施方式Detailed ways

以下将参见图1-3来具体地描述本发明的优选实施例。图1和2是根据本发明第一实施例的光学元件的压力成型设备的纵向剖视图,其中图1示出了压力成型的状态,而图2示出了玻璃充填的状态。图3是根据本发明第二实施例的光学元件的压力成型设备的纵向剖视图。A preferred embodiment of the present invention will be specifically described below with reference to FIGS. 1-3 . 1 and 2 are longitudinal sectional views of a pressure molding apparatus for an optical element according to a first embodiment of the present invention, wherein FIG. 1 shows a state of pressure molding, and FIG. 2 shows a state of glass filling. Fig. 3 is a longitudinal sectional view of a pressure molding apparatus for an optical element according to a second embodiment of the present invention.

(第一实施例)(first embodiment)

参见图1、2,外腔1具有用于使其内部气氛与外界空气隔绝的封闭结构。一个闸式阀13被固定在外腔1的进出口上并且可以由一个驱动装置21启闭。一个载荷锁定腔3是这样形成的,即可以通过一个不同的驱动装置17使它紧密接触闸式阀13和使之脱离所述闸式阀。可通过另一个不同的驱动装置20垂直移动的支架12被设置在载荷锁定腔3内。Referring to Figures 1 and 2, the outer cavity 1 has a closed structure for isolating its internal atmosphere from the outside air. A gate valve 13 is fixed on the inlet and outlet of the outer cavity 1 and can be opened and closed by a driving device 21 . A load lock chamber 3 is formed in such a way that it can be brought into close contact with the gate valve 13 and released from said gate valve by a different drive 17 . A carriage 12 which is movable vertically by a different drive 20 is arranged in the load lock chamber 3 .

一个筒形模具8被固定在外腔1中并且它具有垂直穿过其中心轴线的通孔。一个上模6可垂直滑动地装配在上通孔内。A barrel mold 8 is fixed in the outer cavity 1 and it has a through hole perpendicular to its central axis. A patrix 6 is vertically slidably fitted in the upper through hole.

上模6的下表面具有压制玻璃材料9从而将理想的光学功能表面转移到玻璃材料的表面上的成型面。在上模6的上方且在外腔1之外,设置了一个驱动装置14以便产生要施加到玻璃材料9上的压力,一个用于传递压力的上杆4穿过外腔1。在筒形模具8的上部内设置了一个用于加热上模6的加热器10。The lower surface of the upper mold 6 has a molding surface that presses the glass material 9 to transfer a desired optically functional surface onto the surface of the glass material. Above the upper mold 6 and outside the outer chamber 1 , a driving device 14 is arranged to generate the pressure to be applied to the glass material 9 , through which an upper rod 4 for transmitting the pressure passes. A heater 10 for heating the upper mold 6 is provided in the upper portion of the cylindrical mold 8 .

一个下模7可垂直滑动地装配在筒形模具8的下通孔内。A lower die 7 is vertically slidably fitted in the lower through hole of the cylindrical die 8 .

下模7的上表面具有用于将一个理想的光学功能表面转移到玻璃材料9的下表面上的成型面。在下模7的下面且在外腔1之外,设置了一个驱动装置15,一个与该驱动装置15相连的下杆5穿过外腔1。在筒形模具8的下部内设置了另一个用于加热下模7的加热器10。The upper surface of the lower mold 7 has a molding surface for transferring a desired optically functional surface onto the lower surface of the glass material 9 . Below the lower mold 7 and outside the outer chamber 1 , a driving device 15 is arranged, and a lower rod 5 connected to the driving device 15 passes through the outer chamber 1 . Another heater 10 for heating the lower mold 7 is provided in the lower part of the barrel mold 8 .

在外腔1中,环绕筒形模具8地设置一个内腔2,以便盖住整个筒形模具,从而使其中的气氛与外腔1的气氛隔绝开。内腔2可以独立于上杆4地由一个安装在外腔1外的驱动装置16移动。当内腔2的下开口与外腔1的底部紧密接触时,可以形成一个密闭空间。In the outer cavity 1 , an inner cavity 2 is provided around the cylindrical mold 8 so as to cover the entire cylindrical mold so as to isolate the atmosphere therein from the atmosphere of the outer cavity 1 . The inner chamber 2 can be moved independently of the upper rod 4 by a drive 16 mounted outside the outer chamber 1 . When the lower opening of the inner cavity 2 is in close contact with the bottom of the outer cavity 1, a closed space can be formed.

在外腔1中设置一个手柄11,以便将玻璃材料9和模制品29送入内腔2或送出该内腔。可以通过一个安装在外腔1外的驱动装置18使手柄11转动并通过一个不同的驱动装置19使其垂直移动,从而可以在下模7与支架12之间传递玻璃材料9和模制品29。A handle 11 is provided in the outer chamber 1 in order to feed the glass material 9 and the molding 29 into the inner chamber 2 or out of it. The handle 11 can be rotated by a drive 18 mounted outside the outer chamber 1 and moved vertically by a different drive 19 so that the glass material 9 and the molding 29 can be transferred between the lower mold 7 and the support 12 .

外腔1、内腔2和载荷锁定腔3都分别与一个氮气输入管和一个真空排气管相连。为这些氮气输入管和真空排气管配备了启闭阀N1-N3及V1-V3和泄漏阀R1-R3。The outer chamber 1, the inner chamber 2 and the load lock chamber 3 are all connected to a nitrogen gas input pipe and a vacuum exhaust pipe respectively. These nitrogen inlet pipes and vacuum exhaust pipes are equipped with opening and closing valves N1-N3 and V1-V3 and leakage valves R1-R3.

分别为氮气供应源和真空排气源配备了启闭阀N0和V0。例如,当氮气供应源的氮气阀N0关闭而外腔1和载荷锁定腔3的氮气阀N1和N3开启时,外腔1和载荷锁定腔3可以彼此相通,从而可以将外腔和载荷锁定腔调整成具有相同压力的气氛。The opening and closing valves N0 and V0 are equipped for the nitrogen supply source and the vacuum exhaust source respectively. For example, when the nitrogen valve N0 of the nitrogen supply source is closed and the nitrogen valves N1 and N3 of the outer chamber 1 and the load lock chamber 3 are opened, the outer chamber 1 and the load lock chamber 3 can communicate with each other, so that the outer chamber and the load lock chamber can be connected to each other. Adjust to an atmosphere with the same pressure.

以下将描述用具有上述结构的设备来模制透镜的过程。首先,如图1所示,关闭在外腔1的进出口处的闸式阀13,使内腔2移动到较上位置并开启该内腔。也打开氮气供应源的氮气阀N0和真空排气源的真空阀V0。A process of molding a lens using the apparatus having the above structure will be described below. First, as shown in FIG. 1 , the gate valve 13 at the inlet and outlet of the outer chamber 1 is closed to move the inner chamber 2 to an upper position and open the inner chamber. Also open the nitrogen valve N0 of the nitrogen supply source and the vacuum valve V0 of the vacuum exhaust source.

在这种状态下,将外腔1的真空阀V1打开,以便将外腔抽成真空。当外腔1的内部达到预定真空度时,关闭真空阀V1。随后,开启外腔1的氮气阀N1,以便向其供应氮气。当外腔1的内部达到预定压力时,关闭氮气阀N1,于是完成了外腔1内的气氛替换。In this state, the vacuum valve V1 of the outer chamber 1 is opened to vacuum the outer chamber. When the inside of the outer chamber 1 reaches a predetermined vacuum degree, the vacuum valve V1 is closed. Subsequently, the nitrogen valve N1 of the outer chamber 1 is opened to supply nitrogen gas thereto. When the inside of the outer chamber 1 reaches a predetermined pressure, the nitrogen valve N1 is closed, thus completing the replacement of the atmosphere in the outer chamber 1 .

将位于外腔1外侧的玻璃材料9送入模具中。首先,如图1所示,通过一个外手柄(未表示)将玻璃材料9送到等候在外腔1外的支架12上。载荷锁定腔3向上移动以与关闭的闸式阀13紧密接触,由此形成了一个密闭空间。将载荷锁定腔3的真空阀V3打开并将其抽成真空。当载荷锁定腔3的内部达到预定的真空度时,关闭真空阀V3。随后,开启载荷锁定腔3的氮气阀N3以便向载荷锁定腔输送氮气。当载荷锁定腔3的内部达到预定压力时,关闭氮气阀N3,由此完成了载荷锁定腔3内的气氛替换。接着,开启闸式阀13并使支架12如图2所示地上移,从而玻璃材料9停置在外腔1中。The glass material 9 located outside the outer cavity 1 is fed into the mould. First, as shown in FIG. 1, the glass material 9 is delivered to the support 12 waiting outside the outer chamber 1 through an outer handle (not shown). The load lock chamber 3 moves upward to come into close contact with the closed gate valve 13, thereby forming a closed space. Open the vacuum valve V3 of the load lock chamber 3 and evacuate it. When the inside of the load lock chamber 3 reaches a predetermined vacuum degree, the vacuum valve V3 is closed. Subsequently, the nitrogen valve N3 of the load lock chamber 3 is opened to deliver nitrogen gas to the load lock chamber. When the inside of the load lock chamber 3 reaches a predetermined pressure, the nitrogen valve N3 is closed, thereby completing the atmosphere replacement in the load lock chamber 3 . Next, the gate valve 13 is opened and the holder 12 is moved up as shown in FIG. 2 , so that the glass material 9 stops in the outer chamber 1 .

事先使上模6相对于筒形模具8向上滑动,由此它与下模7分开。在这种状态下,手柄11支承着玻璃材料9并通过筒形模具8的开口把玻璃材料送到下模7的成型面上。这个过程是这样进行的。首先,手柄11向下移动,从而使其的用于玻璃材料9的夹持部分靠近安放在支架12上的玻璃材料9。在例如通过真空夹紧而夹持玻璃材料9之后,手柄11上移并通过转动使其远端穿过筒形模具8的开口。当玻璃材料9来到下模7的上方时,停住手柄11并使其下移。当玻璃材料9靠近下模7时,使玻璃材料离开手柄11并被安放在下模7上。The upper die 6 is slid upward relative to the barrel die 8 in advance, whereby it is separated from the lower die 7 . In this state, the handle 11 supports the glass material 9 and delivers the glass material to the molding surface of the lower mold 7 through the opening of the cylindrical mold 8 . The process works like this. First, the handle 11 is moved downwards so that its gripping portion for the glass material 9 approaches the glass material 9 resting on the holder 12 . After clamping the glass material 9 , for example by vacuum clamping, the handle 11 is moved up and its distal end passed through the opening of the barrel mold 8 by turning. When the glass material 9 came above the lower mold 7, the handle 11 was stopped and moved down. When the glass material 9 approaches the lower mold 7 , the glass material leaves the handle 11 and is placed on the lower mold 7 .

在这个过程中,通过加热器10将上模6和下模7调整到对应于预定成型条件的温度。In this process, the upper mold 6 and the lower mold 7 are adjusted to temperatures corresponding to predetermined molding conditions by the heater 10 .

当玻璃材料9被送到下模7的成型面上时,将一个加热器(未示出)通过筒形模具8的开口插入筒形模具8中,以便加热玻璃材料9。或者,可以事先在模具外加热玻璃材料9并将热玻璃材料送入模具内。当上模6和下模7以及玻璃材料9达到压制操作前所需的预定温度时,将加热器(未示出)回撤到筒形模具8的外面。内腔2马上下移以便紧密接触外腔1的底面,由此形成一个密闭空间。接着,开启内腔2的真空阀V2,以便将内腔抽成真空。当模具周围的气氛达到预定的真空度且上、下模6和7达到预定的加压温度时,启动上模6的驱动装置14,以便通过加压成型玻璃材料9。当上模6的凸缘的下表面抵靠在筒形模具8的上表面上时,玻璃材料9的成型操作结束。When the glass material 9 is fed to the molding surface of the lower mold 7, a heater (not shown) is inserted into the barrel mold 8 through the opening of the barrel mold 8 to heat the glass material 9. Alternatively, the glass material 9 can be heated outside the mold beforehand and the hot glass material can be fed into the mold. When the upper mold 6 and the lower mold 7 and the glass material 9 reach a predetermined temperature required before the pressing operation, the heater (not shown) is withdrawn to the outside of the barrel mold 8 . The inner cavity 2 immediately moves down so as to closely contact the bottom surface of the outer cavity 1, thereby forming a closed space. Next, open the vacuum valve V2 of the inner chamber 2 to evacuate the inner chamber into a vacuum. When the atmosphere around the mold reaches a predetermined degree of vacuum and the upper and lower molds 6 and 7 reach a predetermined pressurization temperature, the driving device 14 of the upper mold 6 is activated to form the glass material 9 by pressurization. When the lower surface of the flange of the upper mold 6 abuts on the upper surface of the barrel mold 8, the molding operation of the glass material 9 ends.

随后,进行冷却过程。此时,内腔2的真空阀V2被关闭,而内腔2的氮气阀N2被打开,以便给内腔输送氮气。当内腔2的内部达到预定压力时,关闭氮气阀N2。打开内腔2的泄漏阀R2,以便将内腔2的内部调定到与外腔1中相同的压力。随后,关闭泄漏阀R2。或者,在关闭内腔2的真空阀V2之后,马上开启泄漏阀R2,以便从外腔1中引入氮气,从而将内腔2的内部调节到与外腔1相同的氮气压力。Subsequently, a cooling process is performed. At this time, the vacuum valve V2 of the inner chamber 2 is closed, and the nitrogen valve N2 of the inner chamber 2 is opened so as to deliver nitrogen gas to the inner chamber. When the inside of the inner chamber 2 reaches a predetermined pressure, the nitrogen valve N2 is closed. The leak valve R2 of the inner chamber 2 is opened in order to set the interior of the inner chamber 2 to the same pressure as in the outer chamber 1 . Subsequently, the leakage valve R2 is closed. Alternatively, after closing the vacuum valve V2 of the inner chamber 2, immediately open the leakage valve R2 to introduce nitrogen from the outer chamber 1, thereby adjusting the interior of the inner chamber 2 to the same nitrogen pressure as the outer chamber 1.

使内腔2移向较上位置并开启,从而释放积蓄在内腔中的热量,以提高冷却效率。氮气或类似气体通过氮气输入管(未示出)被喷射到模具上以促进冷却。当模具被冷却到理想温度时,由下模7从下面对模制品29施加压力,从而模制品29的表面形状将不会变形。在这种状态下,继续冷却。当模具达到预定温度时,解除由下模7施加的压力。The inner cavity 2 is moved to an upper position and opened, thereby releasing the heat accumulated in the inner cavity to improve cooling efficiency. Nitrogen or similar gas is sprayed onto the mold through a nitrogen inlet tube (not shown) to facilitate cooling. When the mold is cooled to a desired temperature, the molded product 29 is pressed from below by the lower mold 7 so that the surface shape of the molded product 29 will not be deformed. In this state, continue to cool. When the mold reaches a predetermined temperature, the pressure applied by the lower mold 7 is released.

随后,继续进行冷却。当模具达到预定温度时,使上模6上移,并且按照与将玻璃材料注入模具内时的操作相反的程序通过手柄11经筒形模具8的开口地将下模7上的模制品29取出到支架12上。支架12具有两个位置,即一个用于放置玻璃材料9的位置和一个用于放置模制品29的位置。当手柄11把玻璃材料9送入模具内并进行模制时,支架12从外腔1外接收一块新的玻璃材料9并返回外腔1中。因此,手柄11拉出模制品29并将新的玻璃材料9送入模具内。接着,重新开始成型过程。Subsequently, cooling is continued. When the mold reaches a predetermined temperature, the upper mold 6 is moved up, and the molded product 29 on the lower mold 7 is taken out through the opening of the cylindrical mold 8 through the handle 11 according to the reverse procedure of the operation when the glass material is injected into the mould. onto bracket 12. The holder 12 has two positions, namely a position for placing the glass material 9 and a position for placing the molding 29 . When the handle 11 sends the glass material 9 into the mold for molding, the bracket 12 receives a new piece of glass material 9 from outside the outer cavity 1 and returns it to the outer cavity 1 . Thus, the handle 11 pulls out the molding 29 and feeds new glass material 9 into the mould. Next, the molding process starts again.

模制品29被卸到外腔1的外面。这是按照以下方式进行的。首先,支架12下移而进入载荷锁定腔3,然后关闭闸式阀13以便封闭外腔1。打开载荷锁定腔3的泄漏阀R3。在载荷锁定腔3中的氮气压力被降低到大气压力时,关闭泄漏阀R3。使载荷锁定腔3下移并使其内部与大气相通。The moldings 29 are discharged outside the outer chamber 1 . This is done in the following way. First, the bracket 12 moves down to enter the load lock chamber 3 , and then the gate valve 13 is closed to seal the outer chamber 1 . Open the leak valve R3 of the load lock chamber 3. When the nitrogen pressure in the load lock chamber 3 is reduced to atmospheric pressure, the leak valve R3 is closed. The load lock chamber 3 is moved down and its interior is communicated with the atmosphere.

在这种状态下,用一个外手柄(未示出)抽出支架12上的模制品29。将新的玻璃材料9放置在支架12上并再次通过载荷锁定腔3送入外腔1,然后使手柄处于等候下次成型开始的状态。按照上述方式重复进行压力成型。In this state, the molding 29 on the holder 12 is withdrawn with an outer handle (not shown). The new glass material 9 is placed on the support 12 and sent into the outer chamber 1 through the load lock chamber 3 again, and then the handle is in the state of waiting for the next molding to start. Press forming is repeated in the above-mentioned manner.

以下将以照相机中的镜头为例具体地描述成型条件。在这种情况下,将直径为10毫米、厚3.5毫米的盘状冕牌厚玻璃(折射率:1.58,阿贝数:59.4,转变点:506℃)用作玻璃材料9,以便成型一个直径为12毫米且中心厚度为2.5毫米的双凸透镜,从而它具有一个曲率半径为40毫米的下凸面和一个上凸球形面(曲率半径约为29毫米)。The molding conditions will be specifically described below taking a lens in a camera as an example. In this case, disc-shaped crown glass (refractive index: 1.58, Abbe number: 59.4, transition point: 506°C) with a diameter of 10 mm and a thickness of 3.5 mm was used as the glass material 9 so that a diameter of A biconvex lens with a diameter of 12 mm and a central thickness of 2.5 mm, such that it has a lower convex surface with a radius of curvature of 40 mm and an upper convex spherical surface (with a radius of curvature of about 29 mm).

首先,将玻璃材料9注入到下模7的成型面上。当上模6和下模7的温度达到570℃(对应于109.5泊)并且玻璃材料9的温度也达到570℃(对应于109.5泊)时,关闭内腔2,并进行抽真空,从而内腔2中的真空度变成2.7帕或更小。继续进行加热。当上模6和下模7的温度达到580℃(对应于109.0泊)时,用2900牛顿的力致动上模6的驱动装置14达40秒。接着,结束上模6的推进操作。即使在此之后,也保持抵靠在筒形模具8上的上模6的压力。然后,开始冷却并马上将氮气引入内腔2,以便把内腔2中的压力调节成等于外腔1中的压力的压力。随后,使内腔2上移并开启。First, glass material 9 is injected onto the molding surface of lower mold 7 . When the temperature of the upper mold 6 and the lower mold 7 reaches 570°C (corresponding to 109.5 poise) and the temperature of the glass material 9 also reaches 570°C (corresponding to 109.5 poise), the inner cavity 2 is closed and vacuumized, thereby The degree of vacuum in the inner chamber 2 becomes 2.7 Pa or less. Continue heating. When the temperature of the upper mold 6 and the lower mold 7 reached 580° C. (corresponding to 10 9.0 Poise), the driving means 14 of the upper mold 6 was actuated with a force of 2900 Newtons for 40 seconds. Next, the pushing operation of the upper mold 6 is ended. Even after this, the pressure of the upper mold 6 against the barrel mold 8 is maintained. Then, cooling is started and nitrogen gas is immediately introduced into the inner chamber 2 to adjust the pressure in the inner chamber 2 to a pressure equal to the pressure in the outer chamber 1 . Subsequently, the lumen 2 is moved up and opened.

当温度达到560℃(对应于109.8泊)时,用下模7对模制品29施加2000牛顿的力并继续进行冷却。当温度达到490℃(对应于1013.5泊)时,下模7上的压力被解除。继续进行冷却,直到达到470℃(对应于1015.2泊)。接着,使上模6上移并打开模具,脱出模制品29。When the temperature reached 560° C. (corresponding to 10 9.8 poise), a force of 2000 N was applied to the molded article 29 with the lower mold 7 and cooling was continued. When the temperature reached 490° C. (corresponding to 10 13.5 poise), the pressure on the lower mold 7 was released. Cooling was continued until 470°C was reached (corresponding to 10 15.2 poise). Next, the upper mold 6 is moved up to open the mold, and the molded product 29 is ejected.

通过上述的一系列操作来成型透镜。即使当使用盘状透镜材料时,没有留下任何的空气并且可以获得表面精度高的模制品。A lens is molded through the series of operations described above. Even when a disk-shaped lens material is used, no air is left and a molded product with high surface accuracy can be obtained.

将内腔2抽成真空所需的时间为20秒或更少,一次加料所需的成型周期也可以被调节到5分钟或更少的时间。由于外腔1具有大容积,所以它需要5分钟或更多的时间来抽成真空。The time required to evacuate the inner cavity 2 is 20 seconds or less, and the molding cycle required for one charge can also be adjusted to 5 minutes or less. Since the outer chamber 1 has a large volume, it takes 5 minutes or more to be evacuated.

(第二实施例)(second embodiment)

图3是根据本发明第二实施例的光学元件的压力成型设备的纵向剖视图。这个成型设备基本上与第一实施例的设备相同,它与第一实施例的设备的区别在于以下方面。首先,该成型设备没有载荷锁定腔。一个支架42被固定在外腔31中。在支架42侧上,在外腔31的侧面上形成了一个进出口,以便为外腔31装卸玻璃材料。外腔31通过一个闸式阀43与外界大气隔绝开。Fig. 3 is a longitudinal sectional view of a pressure molding apparatus for an optical element according to a second embodiment of the present invention. This molding apparatus is basically the same as that of the first embodiment, and it differs from the apparatus of the first embodiment in the following respects. First, the molding equipment does not have a load lock cavity. A bracket 42 is fixed in the outer cavity 31 . On the support 42 side, an inlet and outlet are formed on the side of the outer chamber 31 to load and unload the outer chamber 31 with glass materials. The outer cavity 31 is isolated from the outside atmosphere through a gate valve 43 .

除了构建于筒形模具8内的加热器10外,还在内腔32的内侧面上形成一个用于加热模具和玻璃的加热器40。在内腔32的外侧面上形成一个水冷套或喷气式冷却机构22。内腔32可以以与第一实施例中相同的方式垂直移动。除此之外,第二实施例与第一实施例相同,因此省略了对其的具体描述。In addition to the heater 10 built in the barrel mold 8, a heater 40 for heating the mold and glass is formed on the inner side of the cavity 32. As shown in FIG. A water cooling jacket or jet cooling mechanism 22 is formed on the outer side of the inner cavity 32 . The lumen 32 can be moved vertically in the same manner as in the first embodiment. Other than that, the second embodiment is the same as the first embodiment, and thus a detailed description thereof is omitted.

以下将描述用具有上述结构的设备成型透镜的过程。首先,如图3所示,关闭在外腔31的进出口处的闸式阀43,使内腔32移向较上位置并打开内腔。也打开氮气供应源的氮气阀N0和真空排气源的真空阀V0。The process of molding a lens with the apparatus having the above structure will be described below. First, as shown in FIG. 3 , the gate valve 43 at the inlet and outlet of the outer chamber 31 is closed to move the inner chamber 32 to an upper position and open the inner chamber. Also open the nitrogen valve N0 of the nitrogen supply source and the vacuum valve V0 of the vacuum exhaust source.

在这种状态下,外腔31的真空阀V1被打开,以便将外腔抽成真空。当外腔31的内部达到预定的真空度时,关闭真空阀V1。随后,开启外腔31的氮气阀N1,以便为其供应氮气。当外腔1的内部达到预定压力时,关闭氮气阀N1,于是完成了外腔1内的气氛替换。In this state, the vacuum valve V1 of the outer chamber 31 is opened to evacuate the outer chamber. When the inside of the outer chamber 31 reaches a predetermined vacuum degree, the vacuum valve V1 is closed. Subsequently, the nitrogen valve N1 of the outer chamber 31 is opened to supply nitrogen thereto. When the inside of the outer chamber 1 reaches a predetermined pressure, the nitrogen valve N1 is closed, thus completing the replacement of the atmosphere in the outer chamber 1 .

使内腔32向下移动以便盖住模具,从而它与外腔31底面一起形成了一个密闭空间。模具被加热器10加热到注入玻璃材料所需的预定温度并被保持在该温度下。将在外腔31外的玻璃材料送入模具内。当内腔32处于较下位置上时,开启外腔31的泄漏阀R1,以使外腔31中的氮气压力降低到大气压。开启闸式阀43。由一个外手柄(未示出)直接将玻璃材料从外腔31的外面带到外腔31中的支架42上并安放在支架42上。The inner cavity 32 is moved downward so as to cover the mold, so that it forms a closed space together with the bottom surface of the outer cavity 31 . The mold is heated by the heater 10 to a predetermined temperature required to inject the glass material and maintained at the temperature. The glass material outside the outer cavity 31 is fed into the mould. When the inner chamber 32 is at a lower position, the leakage valve R1 of the outer chamber 31 is opened to reduce the nitrogen pressure in the outer chamber 31 to atmospheric pressure. Open gate valve 43. The glass material is brought directly from the outside of the outer chamber 31 to the holder 42 in the outer chamber 31 by an outer handle (not shown) and placed on the holder 42 .

随后,重新进行外腔31中的气氛替换。在外腔31中的气氛回复到氮气气氛之后,向上移动并开启内腔32。在支架42上的玻璃材料按与第一实施例中相同的方式被手柄11送到下模37的成型面上。在这个操作中,如上所述地通过加热器10把上模36和下模37调整到等于预定成型条件的温度。Subsequently, the replacement of the atmosphere in the outer chamber 31 is carried out again. After the atmosphere in the outer chamber 31 returns to the nitrogen atmosphere, move up and open the inner chamber 32 . The glass material on the support 42 is delivered to the molding surface of the lower mold 37 by the handle 11 in the same manner as in the first embodiment. In this operation, the upper mold 36 and the lower mold 37 are adjusted to temperatures equal to predetermined molding conditions by the heater 10 as described above.

使内腔32向下移动并再次关闭,而加热器10、40加热上模36和下模37以及玻璃材料。当上模36和下模37以及玻璃材料达到压制操作前所需的预定温度时,马上开启内腔2的真空阀V2,以便把内腔抽成真空。随后,当模具周围的气氛达到预定真空度且上模36和下模37达到预定的加压温度时,致动上模36的驱动装置14以便通过加压来成型玻璃材料。The cavity 32 is moved down and closed again, while the heaters 10, 40 heat the upper and lower molds 36, 37 and the glass material. When the upper mold 36 and the lower mold 37 and the glass material reach the desired predetermined temperature before the pressing operation, the vacuum valve V2 of the inner cavity 2 is opened at once to vacuum the inner cavity. Subsequently, when the atmosphere around the mold reaches a predetermined vacuum degree and the upper mold 36 and the lower mold 37 reach a predetermined pressurization temperature, the driving device 14 of the upper mold 36 is activated to shape the glass material by pressurization.

此后,进行冷却过程。此时,关闭内腔32的真空阀V2并开启内腔32的氮气阀N2以便输送氮气。当内腔32的内部达到预定压力时,关闭氮气阀N2。在第二实施例中,在内腔32位于较下位置并处于关闭状态时,继续进行冷却。在这种状态下,氮气或类似气体通过氮气输入管(未示出)被喷到模具上以促进冷却。内腔32中的加热器40被关闭,并且通过冷却机构22也冷却内腔32本身。因此,尽管内腔32保持关闭状态,也促进了冷却。Thereafter, a cooling process is performed. At this time, close the vacuum valve V2 of the inner chamber 32 and open the nitrogen valve N2 of the inner chamber 32 to deliver nitrogen gas. When the inside of the inner chamber 32 reaches a predetermined pressure, the nitrogen valve N2 is closed. In the second embodiment, cooling continues while the inner chamber 32 is in the lower position and closed. In this state, nitrogen gas or the like is sprayed onto the mold through a nitrogen gas inlet pipe (not shown) to promote cooling. The heater 40 in the interior 32 is switched off and the interior 32 itself is also cooled by the cooling mechanism 22 . Thus, cooling is promoted despite the cavity 32 remaining closed.

当模具被冷却到理想温度时,用下模37对模制品39施加压力,由此模制品39的表面形状将不会变形。当模具达到预定温度时,解除由下模37所施加的压力。When the mold is cooled to a desired temperature, pressure is applied to the molded product 39 with the lower mold 37, whereby the surface shape of the molded product 39 will not be deformed. When the mold reaches a predetermined temperature, the pressure applied by the lower mold 37 is released.

随后,继续进行冷却。当模具达到预定温度时,开启内腔32的泄漏阀R2,以便把内腔32的内部调节成具有与外腔31相同的氮气压力。关闭泄漏阀R2并使内腔32移动到较上位置然后打开。另外,使上模36向上移动,并利用手柄11通过筒形模具8的开口地将位于下模37上的模制品39拉向支架42。Subsequently, cooling is continued. When the mold reaches a predetermined temperature, the leak valve R2 of the inner cavity 32 is opened to adjust the inside of the inner cavity 32 to have the same nitrogen pressure as that of the outer cavity 31 . Leakage valve R2 is closed and cavity 32 is moved to the upper position and then opened. In addition, the upper mold 36 is moved upward, and the molded product 39 on the lower mold 37 is pulled toward the holder 42 through the opening of the barrel mold 8 using the handle 11 .

支架42具有两个位置,即一个用于放置玻璃材料的位置和一个用于放置模制品39的位置。当手柄11把玻璃材料送入模具内并进行成型操作时,支架42从外腔31的外面接收一块新的玻璃材料并等候在一旁。于是,手柄11拉出模制品39并将新的玻璃材料送入模具内。接着,关闭内腔32并重新开始成型过程。The holder 42 has two positions, one for the glass material and one for the molding 39 . While the handle 11 feeds the glass material into the mold and performs the molding operation, the support 42 receives a new piece of glass material from outside the outer cavity 31 and waits aside. The handle 11 then pulls out the molding 39 and feeds new glass material into the mould. Next, the cavity 32 is closed and the molding process restarts.

模制品29被卸到外腔1的外面。这是按照以下方式进行的。在内腔32关闭之后,开启外腔31的泄漏阀R1。使外腔31中的氮气压力降低到大气压力,并关闭泄漏阀R1。在开启闸式阀43后,用一个外手柄(未示出)抽出模制品39。将新的玻璃材料放在支架42上。关闭闸式阀43并重新进行在外腔31中的气氛替换。使手柄处于等候下次成型开始的状态下。按照上述方式反复地进行压力成型操作。The moldings 29 are discharged outside the outer chamber 1 . This is done in the following way. After the inner chamber 32 is closed, the leakage valve R1 of the outer chamber 31 is opened. Reduce the nitrogen pressure in the outer chamber 31 to atmospheric pressure, and close the leak valve R1. After opening the gate valve 43, the molded product 39 is withdrawn by an external handle (not shown). Place new glass material on support 42. The gate valve 43 is closed and the replacement of the atmosphere in the outer chamber 31 takes place again. Put the handle in the state of waiting for the start of the next molding. The press forming operation was repeatedly performed in the above-mentioned manner.

以下将按照与第一实施例中相同的方式以照相机所用的镜头为例详细地描述成型条件。Hereinafter, molding conditions will be described in detail in the same manner as in the first embodiment, taking a lens used for a camera as an example.

将其形状与最终产品相似、由磷酸盐玻璃(折射率:1.56,阿贝数:60.8,转变点:345℃)制成并具有两个被抛光成具有与最终形状相同的曲率半径的表面的坯料用作玻璃材料,以便成型出一个具有双凸透镜形状的衍射光学元件,该元件的直径为34毫米,中心厚度为5.4毫米,因此它具有曲率半径为62毫米的下凸面和一个曲率半径为96毫米的上凸面,结果它具有由大量深10微米且间距为100微米-1毫米的同心圆形凹槽构成的微观结构。Shaped similar to the final product, made of phosphate glass (refractive index: 1.56, Abbe number: 60.8, transition point: 345°C) and having two surfaces polished to have the same radius of curvature as the final shape The blank was used as a glass material to form a diffractive optical element in the shape of a biconvex lens with a diameter of 34 mm and a central thickness of 5.4 mm, so that it has a lower convex surface with a radius of curvature of 62 mm and a radius of curvature of 96 mm. mm, and as a result it has a microstructure consisting of a large number of concentric circular grooves 10 μm deep with a pitch of 100 μm-1 mm.

首先,将玻璃材料注入到下模37的成型面上。关闭内腔32并进行加热。当上模36和下模37的温度达到390℃(对应于玻璃粘度的109.0泊)并且玻璃材料的温度也达到390℃(对应于玻璃粘度的109.0泊)时,开始如此地进行抽真空的操作,以致内腔32中的真空度变成2.7帕或更小。继续进行加热。当上模36和下模37的温度达到395℃(对应于玻璃粘度的108.7泊)时,以5900牛顿的力致动上模36的驱动装置14工作60秒。接着,结束上模36的推进操作。即使在此之后,也保持抵靠在筒形模具8上的上模36的压力。First, a glass material is injected onto the molding surface of the lower mold 37 . The lumen 32 is closed and heated. When the temperature of the upper mold 36 and the lower mold 37 reaches 390° C. (corresponding to 10 9.0 poise of the glass viscosity) and the temperature of the glass material also reaches 390° C. (corresponding to 10 9.0 poise of the glass viscosity), start vacuuming in this way operation so that the degree of vacuum in the inner cavity 32 becomes 2.7 Pa or less. Continue heating. When the temperature of the upper mold 36 and the lower mold 37 reached 395° C. (corresponding to 10 8.7 poise of glass viscosity), the driving device 14 of the upper mold 36 was actuated with a force of 5900 Newtons for 60 seconds. Next, the pushing operation of the upper die 36 is ended. Even after this, the pressure of the upper mold 36 against the barrel mold 8 is maintained.

随后,开始冷却并马上将氮气注入内腔32中,以便在内腔32中连续冷却。当温度达到380℃(对应于玻璃粘度的109.7泊)时,由下模37对模制品39施加4900牛顿的力并且继续冷却。当温度达到325℃(对应于玻璃粘度的1014.5泊)时,解除下模37上的压力。Subsequently, cooling is started and nitrogen gas is immediately injected into the inner cavity 32 to continue cooling in the inner cavity 32 . When the temperature reached 380° C. (corresponding to 10 9.7 Poise of glass viscosity), a force of 4900 Newtons was applied to the molding 39 from the lower mold 37 and cooling was continued. When the temperature reached 325° C. (corresponding to 10 14.5 poise of glass viscosity), the pressure on the lower mold 37 was released.

继续进行冷却,直到达到320℃(对应于玻璃粘度的1015.3泊),并且将内腔32中的压力调节成等于外腔31中的氮气压力。接着,使内腔32向上移动并开启。使上模36进一步上移并打开模具,由此取出模制品39。Cooling is continued until 320° C. (corresponding to 10 15.3 Poise of glass viscosity) is reached, and the pressure in inner chamber 32 is adjusted to be equal to the nitrogen pressure in outer chamber 31 . Next, the lumen 32 is moved upward and opened. The upper mold 36 is further moved up and the mold is opened, whereby the molded product 39 is taken out.

利用上述的一系列操作来模制衍射光学元件。带凹槽的微观结构被精确地转印了下来,而且没有留下任何气体,由此可以获得表面转印性能优良的模制品。将内腔32抽成真空所需的时间为20秒或更少,而一次加料所需的成型周期也被调节到8分钟或更少时间。由于外腔31具有大容积,所以它需要5分钟或更多的时间来抽成真空。The diffractive optical element is molded using the series of operations described above. The grooved microstructure is precisely transferred without leaving any gas, whereby molded articles with excellent surface transfer properties can be obtained. The time required to evacuate the inner cavity 32 is 20 seconds or less, and the molding cycle required for one charge is also adjusted to 8 minutes or less. Since the outer chamber 31 has a large volume, it takes 5 minutes or more to be evacuated.

由于第二实施例没有载荷锁定腔,所以可以只在关闭内腔时为外腔装卸玻璃材料。另外,由于外腔的气氛替换是在每次输送时进行的,所以氮气的消耗量增加了。另外,简化了整体设备。可以根据整个系统的成型形式来选择任何一种设备(第一实施例或第二实施例)。Since the second embodiment has no load lock chamber, the outer chamber can be loaded and unloaded with glass material only when the inner chamber is closed. In addition, since the atmosphere replacement of the outer chamber is performed at each delivery, the consumption of nitrogen gas increases. In addition, the overall equipment is simplified. Either device (first embodiment or second embodiment) can be selected according to the molding form of the whole system.

由于所述设备分别在内腔的内外具有一个加热器和冷却机构,所以可以不大幅度降低冷却效率地提高加热效率。由于使内腔不受冷却和加热的影响,所以尽管冷却效率比当保持内腔敞开时的情况略微低一些,但可以使模具周围的气氛与外界隔绝开。因此,模具和玻璃的温度分布变小,并且可以获得更精密的模制品。也可以根据玻璃模制品所需的精确度和成本来选择这种方法。Since the device has a heater and a cooling mechanism inside and outside the inner cavity, the heating efficiency can be improved without greatly reducing the cooling efficiency. Since the cavity is not affected by cooling and heating, the atmosphere around the mold can be isolated from the outside world, although the cooling efficiency is slightly lower than when the cavity is kept open. Therefore, the temperature distribution of the mold and the glass becomes smaller, and more precise moldings can be obtained. This method can also be chosen according to the required precision and cost of the glass moldings.

(其它实施例)(other embodiments)

通过例举成型普通透镜和衍射光学元件的例子而描述了上述实施例。但是,本发明并不局限于此,本发明可以被用于各种产品,例如具有自由曲面的透镜或矩形透镜,对于这些透镜来说,玻璃材料的形状很难调整并因此可能留下气体。在上述实施例中,描述了从一个坯料成型一个产品的例子。但是,本发明当然也可被用于用一个坯料或许多坯料成型制造许多产品的情况。The above-mentioned embodiments have been described by citing examples of molding ordinary lenses and diffractive optical elements. However, the present invention is not limited thereto, and the present invention can be applied to various products such as lenses having free-form surfaces or rectangular lenses for which the shape of the glass material is difficult to adjust and thus may leave gas. In the above embodiments, an example in which one product is formed from one blank has been described. However, the invention can of course also be used in the case of forming a number of products from one blank or from many blanks.

在本发明的第一实施例中,模具由在筒形模具内的加热器加热。如何加热或冷却模具不应受到特别的限制。如在第二实施例中那样,可以采用设置在内腔中的加热器或冷却机构。至于内腔启闭的时刻,只要内腔至少在压制操作中被关闭并被抽成真空就可以。在从加热到冷却的过程中,可以使内腔保持关闭状态。可以根据所需产品的精度和成本(成型周期、设备成本)来事先决定这些供选方案的技术组合方式。In a first embodiment of the invention, the mold is heated by heaters inside the barrel mold. How to heat or cool the mold should not be particularly limited. As in the second embodiment, a heater or cooling mechanism provided in the inner cavity may be employed. As for the timing of the opening and closing of the inner cavity, it is sufficient as long as the inner cavity is closed and evacuated at least during the pressing operation. The lumen can be kept closed from heating to cooling. The technical combination of these alternatives can be determined in advance according to the precision and cost of the required product (molding cycle, equipment cost).

相似地,在本发明的第二实施例中,加热器可以设置在筒形模具内以便加热模具。在对第二实施例的说明部分中,每一次加料,都为外腔装卸一个玻璃坯料。或者,可以扩大支架尺寸,从而可以一次为外腔装卸其数目等于几次加料量的玻璃坯料。因此,尽管手柄的运动多少变得有些复杂了,但无需每次进行外腔内部的气氛替换,从而可以减少氮气的消耗量。Similarly, in the second embodiment of the present invention, a heater may be provided inside the barrel mold to heat the mold. In the description of the second embodiment, one glass blank is loaded and unloaded for the outer chamber for each feeding. Alternatively, the size of the support can be enlarged so that the outer cavity can be loaded and unloaded with a number of glass blanks equal to several feeds at one time. Therefore, although the movement of the handle becomes somewhat complicated, it is not necessary to replace the atmosphere inside the outer chamber every time, thereby reducing the consumption of nitrogen gas.

如上所述,根据上述实施例,在至少一次地在压制操作前调节出真空气氛并随后开始压制操作的压力成型设备及其成型方法中,在第一封闭腔内设置了具有环绕模具的最小所需容积的第二封闭腔。因此,可以获得许多效果。例如,可以极大地缩短在压制操作前抽真空所需的时间,并可以减少要随后加入的惰性气体的使用量。As described above, according to the above-mentioned embodiments, in the pressure molding apparatus and the molding method thereof that adjust the vacuum atmosphere before the pressing operation at least once and then start the pressing operation, a minimum of the surrounding mold is provided in the first closed cavity. A second closed chamber of required volume. Therefore, many effects can be obtained. For example, the time required for evacuation before the pressing operation can be greatly shortened, and the amount of inert gas to be added later can be reduced.

由于手柄设置在第二封闭腔外并且在第一封闭腔内,以便为模具装卸玻璃材料,所以可以在惰性气体气氛下装卸玻璃。因此,在模具被加热到高温的情况下,可以不氧化模具地装卸玻璃。结果,可以极大地缩短成型周期。Since the handle is arranged outside the second closed cavity and inside the first closed cavity to load and unload the glass material for the mould, the glass can be loaded and unloaded under an inert gas atmosphere. Therefore, when the mold is heated to a high temperature, glass can be attached and detached without oxidizing the mold. As a result, the molding cycle can be greatly shortened.

由于设置了载荷锁定腔,所以可以在第一封闭腔及其外界之间运送玻璃材料,而无论第二封闭腔是开启的,还是关闭的。因此,可以根据成型条件来自由地设定第二封闭腔开启或关闭的时刻。另外,载荷锁定腔的容积与第一封闭腔相比要小得多。因此,可以大幅度降低当在第一封闭腔及其外界之间输送玻璃材料时所需的惰性气体的用量。Due to the provision of the load lock chamber, glass material can be transported between the first closed chamber and its environment, regardless of whether the second closed chamber is open or closed. Therefore, the timing of opening or closing the second closed cavity can be freely set according to molding conditions. In addition, the volume of the load lock chamber is much smaller than that of the first closed chamber. Thus, the amount of inert gas required when transporting the glass material between the first closed chamber and its surroundings can be substantially reduced.

当以在加热和冷却过程中处于惰性气体气氛下并在压制操作中处于真空气氛下的上述设备进行成型操作时,可以以较短的成型周期获得具有良好的转印性能且不引起残余气体问题的模制品,而无论产品具有什么形状,也不用管玻璃材料有什么形状。When the molding operation is performed with the above equipment under inert gas atmosphere during heating and cooling and under vacuum atmosphere during pressing operation, good transfer performance can be obtained with short molding cycle without causing residual gas problems moldings, regardless of the shape of the product or the shape of the glass material.

本发明不局限于上述实施例,可以在本发明的精神和范围内设想出各种变化和修改。因此,为了告知公众本发明的保护范围而拟订了以下的权利要求书。The present invention is not limited to the above-described embodiments, and various changes and modifications can be conceived within the spirit and scope of the present invention. Therefore, to inform the public of the scope of protection of the present invention, the following claims are drawn up.

Claims (3)

1.一种用于通过使用一对上、下模具来压力成型热软玻璃材料、冷却该玻璃材料并从所述模具中取出玻璃模制品的光学元件的压力成型设备,其特征在于,它包括以下部件:1. A pressure molding apparatus for an optical element that press-forms a hot soft glass material by using a pair of upper and lower molds, cools the glass material and takes out a glass molding from said mold, characterized in that it comprises The following components: 一个可替换其中的气氛的第一封闭腔;a first closed chamber in which the atmosphere can be replaced; 一个装在所述第一封闭腔内且可以独立于所述第一封闭腔地替换其中的气氛的第二封闭腔;a second enclosed chamber housed within said first enclosed chamber and capable of replacing the atmosphere therein independently of said first enclosed chamber; 为第二封闭腔设置的且用于通过加压来成型热玻璃材料的成型装置;以及forming means provided for the second closed cavity and for forming hot glass material by pressurization; and 用于把装在所述第一封闭腔内的玻璃材料送往在所述第二封闭腔内的所述成型装置并将由所述成型装置模制成型的玻璃模制品送入所述第一封闭腔的玻璃输送装置。for sending the glass material contained in the first closed chamber to the molding device in the second closed chamber and sending the glass moldings molded by the molding device into the first closed chamber. Glass delivery device with closed cavity. 2.如权利要求1所述的设备,其特征在于,在所述第一封闭腔的附近形成一个可以独立于所述第一封闭腔地替换其中的气氛的玻璃载荷锁定腔,所述载荷锁定腔能够开启和气密地封闭。2. The apparatus according to claim 1, wherein a glass load-lock cavity capable of replacing the atmosphere therein independently of the first closed cavity is formed in the vicinity of the first closed cavity, the load-locked cavity The cavity can be opened and closed gas-tight. 3.一种通过采用一对上、下模具来压力成型热软玻璃材料、冷却该玻璃材料并从所述模具中取出玻璃模制品的光学元件的压力成型方法,其特征在于,该方法采用了这样一种成型设备,即所述成型设备包括一个可替换其中的气氛的第一封闭腔、一个装在所述第一封闭腔内且可以独立于所述第一封闭腔地替换其中的气氛的第二封闭腔以及用于替换所述第一封闭腔与第二封闭腔内的气氛的装置,所述方法包括以下步骤:3. A pressure molding method of an optical element by pressure molding a hot soft glass material by using a pair of upper and lower molds, cooling the glass material and taking out the glass molded product from said mold, characterized in that the method adopts Such a molding device, that is, the molding device includes a first closed chamber in which the atmosphere can be replaced; A second closed chamber and a device for replacing the atmosphere in the first closed chamber and the second closed chamber, the method comprising the following steps: 将玻璃材料装入所述第一封闭腔内;loading glass material into the first closed cavity; 在装载玻璃材料之前或之后,用惰性状态替换所述第一封闭腔的内部气氛;replacing the internal atmosphere of said first closed chamber with an inert state before or after loading glass material; 在上述替换步骤之后,在惰性状态下将玻璃材料引入在所述第二封闭腔内的所述成型装置中;introducing glass material in an inert state into said forming device in said second closed chamber after the above replacement step; 在把玻璃材料引入所述第二封闭腔之后,在第二封闭腔内加热所述玻璃材料;heating the glass material within the second enclosed chamber after introducing the glass material into the second enclosed chamber; 将所述第二封闭腔的内部抽成真空;evacuating the interior of the second closed cavity into a vacuum; 通过所述的成型设备加压模制玻璃材料;pressure-molding the glass material by the molding device; 在加压模制玻璃材料后将惰性气体引入所述第二封闭腔内;并introducing an inert gas into said second closed cavity after pressure molding the glass material; and 在所述第二封闭腔内冷却模制品;以及cooling the molded article within said second closed cavity; and 在冷却步骤之后,通过所述第一封闭腔取出模制品。After the cooling step, the moldings are removed through said first closed cavity.
CN 00133892 1999-11-09 2000-11-09 Pressure forming equipment and method for optical element Expired - Fee Related CN1237017C (en)

Applications Claiming Priority (2)

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JP318611/1999 1999-11-09
JP31861199A JP3717102B2 (en) 1999-11-09 1999-11-09 Optical element press molding apparatus and molding method thereof

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CN1295038A CN1295038A (en) 2001-05-16
CN1237017C true CN1237017C (en) 2006-01-18

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CN106430915A (en) * 2015-08-10 2017-02-22 Hoya株式会社 Optical element forming device and optical element forming method
CN104445878B (en) * 2013-09-17 2017-04-12 东芝机械株式会社 device for forming glass product

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JP4686929B2 (en) * 2001-08-03 2011-05-25 コニカミノルタホールディングス株式会社 Press forming equipment
JP4718230B2 (en) * 2005-04-15 2011-07-06 東芝機械株式会社 Molding equipment
JP5690475B2 (en) * 2009-03-25 2015-03-25 東芝機械株式会社 Molding apparatus and method for manufacturing molded product
JP6991783B2 (en) 2017-08-23 2022-01-13 キヤノン株式会社 Article transport method, article transport device, optical element manufacturing method, optical element manufacturing device, program, recording medium
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CN106430915A (en) * 2015-08-10 2017-02-22 Hoya株式会社 Optical element forming device and optical element forming method

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