CN1268043C - Perpendicular internal conical surface reflector laser resonant cavity - Google Patents

Perpendicular internal conical surface reflector laser resonant cavity Download PDF

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CN1268043C
CN1268043C CN 200410012717 CN200410012717A CN1268043C CN 1268043 C CN1268043 C CN 1268043C CN 200410012717 CN200410012717 CN 200410012717 CN 200410012717 A CN200410012717 A CN 200410012717A CN 1268043 C CN1268043 C CN 1268043C
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laser
inner conical
mirror
cavity
reflecting mirror
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CN1558477A (en
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李宏棋
程祖海
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Huazhong University of Science and Technology
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Abstract

The present invention discloses a laser resonant cavity of a right-angle inner conical surface reflecting mirror, which comprises a total reflecting mirror, a plane output mirror and a laser working medium, wherein the total reflecting mirror is a right-angle inner conical surface reflecting mirror; an apex corner of the total reflecting mirror is at a right angle, and an axial line of the apex corner is perpendicular to the bottom plane; the inner surface of the total reflecting mirror is a reflecting surface which is plated with a highly reflecting membrane. The apex of the right-angle inner conical surface reflecting mirror is positioned on an optical axis of a laser cavity, and the bottom plane is perpendicular to the optical axis. The laser resonant cavity has the advantages of solid parallel light beam output, uniform near-field light spot intensity distribution, far-field light energy centralization, small divergence angle, large mode volume, convenient adjustment and stable operation. The present invention can be used for a gas laser, a solid laser, a high power laser, a medium power laser or a small power laser.

Description

直角内圆锥面反射镜激光谐振腔Right angle inner conical mirror laser resonator

技术领域technical field

本发明涉及一种激光谐振腔。The invention relates to a laser resonant cavity.

背景技术Background technique

高能激光器件设计中的主要问题是,如何获得尽可能大的模体积和好的横模鉴别能力,以实现高能量单模运转,从而既能从激活物质中高效率地提取能量,又能保持高的光束质量。The main problem in the design of high-energy laser devices is how to obtain the largest possible mode volume and good transverse mode discrimination ability to achieve high-energy single-mode operation, so as to extract energy efficiently from the active material while maintaining high beam quality.

常用的激光谐振腔有稳定腔、非稳腔和临界腔。稳定腔的主要优点是损耗低,在所有稳定腔中,傍轴光线的几何偏折损耗均为零,而且只要腔的菲涅尔数不太小,衍射损耗通常也小到可以忽略。稳定腔存在的主要缺点是:模体积小,对于典型的稳定腔激光器,基模体积通常只占整个激活介质体积的很小一部分。实际上,稳定腔的高斯基模就像一条细长的带子一样处在激活物质的轴线附近,大部分激活能量都不能有效地转化为高斯基模的激光能量。特别值得指出的是,对非涅尔数较大的稳定腔,光斑半径及基模体积与腔的横向尺寸(它通常由气体放电管或固体激光棒的直径决定)无关。因此,当腔长一定时,我们不可能用增大激活物质的横向尺寸的办法来增加基模体积,从而提高激光器的输出功率。相反地,激活物质的横向尺寸越大,工作物质的利用系数越低。稳定腔另一个缺点是,当腔的菲涅尔数较大时,若干较低阶横模的衍射损耗都小到可以忽略,因而谐振腔也就实际上失去了横模选择能力。这将不可避免地导致多模运转,从而降低光束质量。稳定腔运转于多模状态可以增大模体积,从而提高激活物质的利用系数并增加输出功率。因为稳定腔模体积随模的阶次增大而增大,当足够的厄米高斯(或拉盖尔高斯)模形成震荡时,即可提高激活物质的利用系数,但这时光束质量将比基模光束差得多。Commonly used laser resonators include stable cavity, unstable cavity and critical cavity. The main advantage of stable cavities is low loss. In all stable cavities, the geometric deflection loss of paraxial rays is zero, and the diffraction loss is usually negligibly small as long as the Fresnel number of the cavity is not too small. The main disadvantage of the stable cavity is that the mode volume is small. For a typical stable cavity laser, the fundamental mode volume usually only accounts for a small part of the volume of the entire active medium. In fact, the Gaussian mode of the stable cavity is like a long and thin ribbon near the axis of the activated material, and most of the activation energy cannot be effectively converted into the laser energy of the Gaussian mode. It is particularly worth pointing out that for a stable cavity with a large Fresnel number, the spot radius and the fundamental mode volume have nothing to do with the lateral size of the cavity (which is usually determined by the diameter of the gas discharge tube or solid-state laser rod). Therefore, when the cavity length is constant, it is impossible for us to increase the volume of the fundamental mode by increasing the lateral size of the active material, thereby increasing the output power of the laser. Conversely, the larger the lateral dimension of the active substance, the lower the utilization coefficient of the working substance. Another disadvantage of the stable cavity is that when the Fresnel number of the cavity is large, the diffraction losses of several lower-order transverse modes are negligibly small, so the resonant cavity actually loses the transverse mode selection ability. This will inevitably lead to multimode operation, thereby reducing beam quality. Stable cavity operating in a multi-mode state can increase the mode volume, thereby improving the utilization factor of the activated material and increasing the output power. Because the volume of the stable cavity mode increases with the order of the mode, when enough Hermitian-Gaussian (or Laguerre-Gauerian) modes form oscillations, the utilization factor of the activated material can be improved, but the beam quality will be lower than that of The fundamental mode beam is much worse.

在实践中最重要,最常用的非稳腔是虚共焦非稳腔。它由一凹面镜和一凸面镜组成。凹面镜的实焦点和凸面镜的虚焦点重合,公共焦点在腔外。通过选择反射镜的尺寸,平面波将有效地通过全部工作物质。这时激活物质的利用效率最高并能获得准直的,均匀的输出光束。对圆形镜腔其远场图就是一个被平面波均匀照明的圆环的衍射图样。虚共焦非稳定腔的不足之处,就是圆环衍射图样的能量分布相对于圆孔衍射,将有相当的能量分布在周围亮环上,远场能量分布不够集中。虚共焦非稳腔的调整过程复杂,要求高。The most important and most commonly used unstable cavity in practice is the virtual confocal unstable cavity. It consists of a concave mirror and a convex mirror. The real focus of the concave mirror coincides with the virtual focus of the convex mirror, and the common focus is outside the cavity. By choosing the dimensions of the mirrors, the plane wave will efficiently pass through the entire working substance. At this time, the utilization efficiency of the active substance is the highest and a collimated and uniform output beam can be obtained. The far-field pattern of a circular mirror cavity is the diffraction pattern of a ring uniformly illuminated by a plane wave. The disadvantage of the virtual confocal unstable cavity is that the energy distribution of the circular ring diffraction pattern will have a considerable energy distribution on the surrounding bright ring compared with the circular hole diffraction, and the far-field energy distribution is not concentrated enough. The adjustment process of the virtual confocal unstable cavity is complex and demanding.

平行平面腔由一平面全反镜和一平面输出镜组成。两平面镜相互平行。输出均匀平行光束。平平腔的主要优点是:光束发散角小,模体积较大,比较容易获得单模振荡。其主要缺点是:调整精度要求极高且容易失调,苛刻的平行度要求严重限制了它的应用。The parallel plane cavity is composed of a plane total reflection mirror and a plane output mirror. Two plane mirrors are parallel to each other. Output a uniform parallel beam. The main advantages of the flat cavity are: the beam divergence angle is small, the mode volume is large, and it is relatively easy to obtain single-mode oscillation. Its main disadvantages are: the adjustment accuracy is extremely high and it is easy to get out of adjustment, and the strict parallelism requirement severely limits its application.

申请号99816848.3公开了一种《谐振腔含有陀螺形圆锥棱镜的激光器》。将平行平面腔的全反镜用直角圆锥棱镜取代,利用直角圆锥棱镜的逆向反射特性组成直角圆锥棱镜腔,可以大大降低腔的调整要求。同时,由于该腔的准相位共轭特性,还可以对由于激活介质增益分布不均匀导致的光强分布不均匀进行补偿,从而提高了光束质量。直角圆锥棱镜腔除具有平行平面腔的大模体积,小发散角的优点外,还具有高稳定性。但是直角圆锥棱镜腔存在以下缺点:棱镜相对平面反射镜或球面反射镜较多吸收光能而发热,且散热冷却困难,故直角圆锥棱镜腔的热稳定性低,不能用于高能激光情况;另外,由于工作在某些波段的棱镜需要光学晶体制造,这些光学晶体价格昂贵。Application No. 99816848.3 discloses a "Laser with Gyro-shaped Conical Prism in Resonant Cavity". The total reflection mirror of the parallel plane cavity is replaced by a right-angle conical prism, and the right-angle conical prism cavity is formed by using the retroreflection characteristic of the right-angle conical prism, which can greatly reduce the adjustment requirements of the cavity. At the same time, due to the quasi-phase conjugate characteristic of the cavity, the inhomogeneous light intensity distribution caused by the inhomogeneous distribution of the active medium gain can also be compensated, thereby improving the beam quality. In addition to the advantages of large mode volume and small divergence angle of the parallel plane cavity, the rectangular conical prism cavity also has high stability. However, the right-angle conical prism cavity has the following disadvantages: the prism absorbs more light energy than the plane reflector or spherical reflector and generates heat, and heat dissipation and cooling are difficult, so the right-angle conical prism cavity has low thermal stability and cannot be used in high-energy laser situations; in addition , because prisms working in certain wavelength bands require optical crystals to be manufactured, and these optical crystals are expensive.

发明内容Contents of the invention

本发明的目的在于克服上述现有技术散热冷却困难、热稳定性低、不能用于高能激光的不足之处,提供一种直角内圆锥面反射镜激光谐振腔,该激光谐振腔不仅抗失调能力强、免调试、改善了光束质量,而且具有高热稳定性,可以用于大功率激光器。The purpose of the present invention is to overcome the disadvantages of the above-mentioned prior art, such as difficulty in heat dissipation and cooling, low thermal stability, and inability to be used for high-energy lasers, and provide a laser resonator with a right-angle inner conical mirror, which not only has the ability to resist misalignment Strong, free of debugging, improved beam quality, and has high thermal stability, can be used in high-power lasers.

为达到上述目的,本发明采用的技术方案是:一种直角内圆锥面反射镜激光谐振腔,包括全反射镜、平面输出镜及激光工作介质,全反射镜为直角内圆锥面反射镜。In order to achieve the above object, the technical solution adopted by the present invention is: a right-angle inner conical mirror laser resonator, including a total reflection mirror, a plane output mirror and a laser working medium, and the total reflection mirror is a right-angle inner conical mirror.

本发明与现有技术相比,具有以下优点和效果:Compared with the prior art, the present invention has the following advantages and effects:

1、本发明具有大模体积,小发散角,平面波光场以及准相位共轭性质,创造而且该腔便于冷却散热,其激光输出同时具有高能量、高光束质量和高稳定性。1. The invention has large mode volume, small divergence angle, plane wave light field and quasi-phase conjugation property, and the cavity is easy to cool and dissipate heat, and its laser output has high energy, high beam quality and high stability at the same time.

2、由于直角内圆锥面反射镜没有折射现象,近场光斑分布均匀,远场光能集中,光腔更便于调整,工作更稳定。2. Since there is no refraction phenomenon in the right-angle inner conical mirror, the near-field light spots are evenly distributed, the far-field light energy is concentrated, the optical cavity is easier to adjust, and the work is more stable.

3、使用直角内圆锥面反射镜可以降低制造成本。3. The manufacturing cost can be reduced by using the right-angle inner conical reflector.

附图说明Description of drawings

图1为本发明一种实施例的结构示意图。Fig. 1 is a schematic structural diagram of an embodiment of the present invention.

图2为图1中直角内圆锥面反射镜的一种安装结构简图。Fig. 2 is a schematic diagram of an installation structure of the right angle inner conical reflector in Fig. 1 .

图3为图1中直角内圆锥面反射镜一种实施例的结构示意图。FIG. 3 is a schematic structural view of an embodiment of the right-angled inner conical reflector in FIG. 1 .

图4为图3的左视图。Fig. 4 is a left side view of Fig. 3 .

图5为本发明另一种实施例的结构示意图。Fig. 5 is a schematic structural diagram of another embodiment of the present invention.

具体实施方式Detailed ways

由图1和图2所示,一种直角内圆锥面反射镜激光谐振腔,包括全反射镜1、平面输出镜2及激光工作介质3,全反射镜1为直角内圆锥面反射镜,反射镜1的顶角是直角,其内表面为反射面,反射面可镀反射膜,轴线最好垂直于底平面。安装时,直角内圆锥面反射镜1的顶点最好位于激光腔的光轴上,底平面与光轴垂直。可将直角内圆锥面反射镜1通过螺纹联接或用螺钉固定等方式固定在座板4上,再将座板4通过螺栓等连接方式固定在光桥支撑座5上,且座板4的光孔中心线与支撑座5的光腔中心线重合。平面输出镜2垂直光轴放置,其外表面可镀增透膜,内表面可镀部分反射膜。直角内圆锥面反射镜1的光学性质是:任何方向的入射光线经内圆锥面反射后,反射光线与入射光线平行。或者说,只要入射光线方向不变,无论直角内圆锥面反射镜1绕其顶点如何晃动,反射光线的方向始终不变,与入射光线方向保持一致。根据这一性质,谐振腔输出光线的方向与平面输出镜的法线方向相同,且当直角内圆锥面反射镜1顶点位于光轴附近,底平面与光轴近似垂直时即可出光,出光能量与光束质量没有明显下降。As shown in Fig. 1 and Fig. 2, a laser resonator of a right-angled inner conical reflector comprises a total reflection mirror 1, a plane output mirror 2 and a laser working medium 3, the total reflector 1 is a right-angled inner conical reflector, and the reflection The vertex angle of the mirror 1 is a right angle, and its inner surface is a reflective surface, which can be coated with a reflective film, and the axis is preferably perpendicular to the bottom plane. When installing, the apex of the right-angle inner conical reflector 1 is preferably located on the optical axis of the laser cavity, and the bottom plane is perpendicular to the optical axis. The right-angle inner conical reflector 1 can be fixed on the seat plate 4 through threaded connection or fixed with screws, etc., and then the seat plate 4 can be fixed on the optical bridge support seat 5 through bolts, etc., and the center of the light hole of the seat plate 4 Line coincides with the center line of the optical cavity of the support seat 5. The plane output mirror 2 is placed perpendicular to the optical axis, its outer surface can be coated with an anti-reflection coating, and its inner surface can be coated with a partial reflection coating. The optical properties of the right-angle inner conical reflector 1 are: after the incident light in any direction is reflected by the inner conical surface, the reflected light is parallel to the incident light. In other words, as long as the direction of the incident light remains unchanged, no matter how the right-angled inner conical reflector 1 shakes around its apex, the direction of the reflected light remains unchanged, consistent with the direction of the incident light. According to this property, the direction of the light output by the resonator is the same as the normal direction of the plane output mirror, and when the apex of the right-angled inner conical mirror 1 is located near the optical axis, and the bottom plane is approximately perpendicular to the optical axis, the light can be emitted, and the light energy with no apparent degradation in beam quality.

由图3和图4所示,本发明应用于大功率激光器时,直角内圆锥面反射镜1和平面输出镜2应用水冷却,以防止过热而损坏。可采用通常结构:在直角内圆锥面反射镜1上开有水槽6,用流动自来水冷却。直角内圆锥面反射镜1和平面输出镜2可选用导热性能好的,如铜、硅晶体材料制成,使反射镜1和输出镜2的热变形保持在较低程度。而用于中、小功率激光器时,可以不必冷却。As shown in Fig. 3 and Fig. 4, when the present invention is applied to a high-power laser, the right-angle inner conical mirror 1 and the plane output mirror 2 should be cooled with water to prevent damage due to overheating. Common structure can be adopted: a water tank 6 is provided on the right-angle inner conical reflector 1, which is cooled with flowing tap water. The right-angle inner conical reflector 1 and the plane output mirror 2 can be made of materials with good thermal conductivity, such as copper and silicon crystals, so that the thermal deformation of the reflector 1 and the output mirror 2 can be kept at a low level. And when it is used for medium and small power lasers, it does not need to be cooled.

由于加工精度的原因,在直角内圆锥面反射镜1的顶部有一微孔,孔直径与金刚石超精密光学加工车床的刀具有关,要求尽可能的小。现精度已能达到纳米级,其孔为通孔或盲孔。若制成通孔,通孔用透光镜片密封,此时可通过小孔处释放的光能检测谐振腔的振荡功率或能量。Due to machining accuracy, there is a microhole on the top of the right-angled inner conical mirror 1, the diameter of which is related to the tool of the diamond ultra-precision optical machining lathe, and is required to be as small as possible. Now the precision has reached the nanometer level, and the holes are through holes or blind holes. If a through hole is made, the through hole is sealed with a light-transmitting lens. At this time, the oscillation power or energy of the resonant cavity can be detected through the light energy released from the small hole.

由图5所示,当本发明用于固体激光器时,在激光棒7的输出端镀部分反射膜,以取代平面输出镜2。另外,在激光棒7的输入端最好镀增透膜,激光棒7的中心线为激光腔的光轴。As shown in FIG. 5 , when the present invention is used in a solid-state laser, the output end of the laser rod 7 is coated with a partial reflection film to replace the flat output mirror 2 . In addition, it is better to coat the input end of the laser rod 7 with an anti-reflection coating, and the centerline of the laser rod 7 is the optical axis of the laser cavity.

本发明可用于气体激光器、固体激光器,高功率激光器或中、小功率激光器等。The invention can be used in gas lasers, solid lasers, high power lasers or medium and small power lasers and the like.

Claims (7)

1、一种直角内圆锥面反射镜激光谐振腔,包括全反射镜、平面输出镜及激光工作介质,其特征在于:全反射镜为直角内圆锥面反射镜(1)。1. A right-angle inner conical reflector laser resonator, comprising a total reflection mirror, a plane output mirror and a laser working medium, characterized in that the total reflection mirror is a right-angle inner conical reflector (1). 2、根据权利要求1所述的激光谐振腔,其特征在于:直角内圆锥面反射镜(1)的顶点位于激光腔的光轴上,底平面与光轴垂直。2. The laser resonator according to claim 1, characterized in that: the apex of the right-angle inner conical reflector (1) is located on the optical axis of the laser cavity, and the bottom plane is perpendicular to the optical axis. 3、根据权利要求1或2所述的激光谐振腔,其特征在于:在直角内圆锥面反射镜(1)上开有水槽(6)。3. The laser resonator according to claim 1 or 2, characterized in that a water groove (6) is opened on the right-angle inner conical reflector (1). 4、根据权利要求1或2所述的激光谐振腔,其特征在于:在直角内圆锥面反射镜(1)的反射面镀反射膜。4. The laser resonator according to claim 1 or 2, characterized in that: the reflective surface of the right-angled inner conical mirror (1) is coated with a reflective film. 5、根据权利要求1或2所述的激光谐振腔,其特征在于:在直角内圆锥面反射镜(1)的顶部有一通孔,通孔用透光镜片密封。5. The laser resonator according to claim 1 or 2, characterized in that there is a through hole at the top of the right-angle inner conical reflector (1), and the through hole is sealed with a light-transmitting lens. 6、根据权利要求1或2所述的激光谐振腔,其特征在于:在激光棒(7)的输出端镀部分反射膜,以取代平面输出镜(2)。6. The laser resonator according to claim 1 or 2, characterized in that: the output end of the laser rod (7) is coated with a partial reflection film to replace the flat output mirror (2). 7、根据权利要求6所述的激光谐振腔,其特征在于:在激光棒(7)的输入端镀增透膜,激光棒(7)的中心线为激光腔的光轴。7. The laser resonator according to claim 6, characterized in that an anti-reflection coating is coated on the input end of the laser rod (7), and the center line of the laser rod (7) is the optical axis of the laser cavity.
CN 200410012717 2004-02-11 2004-02-11 Perpendicular internal conical surface reflector laser resonant cavity Expired - Fee Related CN1268043C (en)

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