CN1286134C - 具有微型机电系统的微型开关 - Google Patents

具有微型机电系统的微型开关 Download PDF

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Publication number
CN1286134C
CN1286134C CNB038036908A CN03803690A CN1286134C CN 1286134 C CN1286134 C CN 1286134C CN B038036908 A CNB038036908 A CN B038036908A CN 03803690 A CN03803690 A CN 03803690A CN 1286134 C CN1286134 C CN 1286134C
Authority
CN
China
Prior art keywords
electrodes
electrode
contact
auxiliary
switching element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB038036908A
Other languages
English (en)
Chinese (zh)
Other versions
CN1630923A (zh
Inventor
M·梅克斯纳
L·P·布赫瓦尔特
J·L·伦德
H·德利加尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefonaktiebolaget LM Ericsson AB
International Business Machines Corp
Original Assignee
Telefonaktiebolaget LM Ericsson AB
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefonaktiebolaget LM Ericsson AB, International Business Machines Corp filed Critical Telefonaktiebolaget LM Ericsson AB
Publication of CN1630923A publication Critical patent/CN1630923A/zh
Application granted granted Critical
Publication of CN1286134C publication Critical patent/CN1286134C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays

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  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
CNB038036908A 2002-02-11 2003-02-10 具有微型机电系统的微型开关 Expired - Lifetime CN1286134C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP02002963.3 2002-02-11
EP020029633 2002-02-11
EP20020002963 EP1335398A1 (de) 2002-02-11 2002-02-11 Mikroschalter

Publications (2)

Publication Number Publication Date
CN1630923A CN1630923A (zh) 2005-06-22
CN1286134C true CN1286134C (zh) 2006-11-22

Family

ID=27589102

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038036908A Expired - Lifetime CN1286134C (zh) 2002-02-11 2003-02-10 具有微型机电系统的微型开关

Country Status (9)

Country Link
US (1) US6818843B2 (de)
EP (2) EP1335398A1 (de)
JP (1) JP4313210B2 (de)
KR (1) KR100977917B1 (de)
CN (1) CN1286134C (de)
AT (1) ATE299291T1 (de)
AU (1) AU2003215126A1 (de)
DE (1) DE60300981T2 (de)
WO (1) WO2003069646A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch
US6069540A (en) * 1999-04-23 2000-05-30 Trw Inc. Micro-electro system (MEMS) switch
US6143997A (en) * 1999-06-04 2000-11-07 The Board Of Trustees Of The University Of Illinois Low actuation voltage microelectromechanical device and method of manufacture
US6543286B2 (en) * 2001-01-26 2003-04-08 Movaz Networks, Inc. High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array

Also Published As

Publication number Publication date
EP1474817A1 (de) 2004-11-10
WO2003069646A1 (en) 2003-08-21
ATE299291T1 (de) 2005-07-15
JP4313210B2 (ja) 2009-08-12
KR100977917B1 (ko) 2010-08-24
JP2005518070A (ja) 2005-06-16
EP1474817B1 (de) 2005-07-06
CN1630923A (zh) 2005-06-22
US6818843B2 (en) 2004-11-16
DE60300981T2 (de) 2006-04-20
EP1335398A1 (de) 2003-08-13
AU2003215126A1 (en) 2003-09-04
KR20040111354A (ko) 2004-12-31
DE60300981D1 (de) 2005-08-11
US20040021151A1 (en) 2004-02-05

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20061122