CN1319246A - 绝缘栅电子场致发射器件及其制造工艺 - Google Patents

绝缘栅电子场致发射器件及其制造工艺 Download PDF

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Publication number
CN1319246A
CN1319246A CN00801523A CN00801523A CN1319246A CN 1319246 A CN1319246 A CN 1319246A CN 00801523 A CN00801523 A CN 00801523A CN 00801523 A CN00801523 A CN 00801523A CN 1319246 A CN1319246 A CN 1319246A
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CN
China
Prior art keywords
emitter
anode
gate electrode
insulating layer
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN00801523A
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English (en)
Chinese (zh)
Inventor
迈克尔D·波特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Vision Technologies Inc
Original Assignee
Advanced Vision Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Vision Technologies Inc filed Critical Advanced Vision Technologies Inc
Publication of CN1319246A publication Critical patent/CN1319246A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00—Vacuum tubes
    • H01J21/02—Tubes with a single discharge path
    • H01J21/06—Tubes with a single discharge path having electrostatic control means only
    • H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
CN00801523A 1999-07-26 2000-07-24 绝缘栅电子场致发射器件及其制造工艺 Pending CN1319246A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14557099P 1999-07-26 1999-07-26
US60/145,570 1999-07-26

Publications (1)

Publication Number Publication Date
CN1319246A true CN1319246A (zh) 2001-10-24

Family

ID=22513686

Family Applications (1)

Application Number Title Priority Date Filing Date
CN00801523A Pending CN1319246A (zh) 1999-07-26 2000-07-24 绝缘栅电子场致发射器件及其制造工艺

Country Status (6)

Country Link
EP (1) EP1116255A1 (de)
JP (1) JP2003505843A (de)
KR (1) KR20010075311A (de)
CN (1) CN1319246A (de)
CA (1) CA2355660A1 (de)
WO (1) WO2001008192A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060088865A (ko) * 2006-07-13 2006-08-07 정효수 광방출 소자, 그 제조방법 및 광방출 소자를 이용한 노광장치
EP2915161B1 (de) 2012-11-05 2020-08-19 University of Florida Research Foundation, Inc. Helligkeitskompensation bei einer anzeige

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2635913B1 (fr) * 1988-08-31 1990-11-09 Saint Louis Inst Diode a emission de champ
JPH0340332A (ja) * 1989-07-07 1991-02-21 Matsushita Electric Ind Co Ltd 電界放出型スウィチング素子およびその製造方法
JP2574500B2 (ja) * 1990-03-01 1997-01-22 松下電器産業株式会社 プレーナ型冷陰極の製造方法
DE4010909A1 (de) * 1990-04-04 1991-10-10 Siemens Ag Diode
US5289086A (en) * 1992-05-04 1994-02-22 Motorola, Inc. Electron device employing a diamond film electron source
US5534743A (en) * 1993-03-11 1996-07-09 Fed Corporation Field emission display devices, and field emission electron beam source and isolation structure components therefor
US5445550A (en) * 1993-12-22 1995-08-29 Xie; Chenggang Lateral field emitter device and method of manufacturing same
US5442193A (en) * 1994-02-22 1995-08-15 Motorola Microelectronic field emission device with breakdown inhibiting insulated gate electrode
US5629580A (en) * 1994-10-28 1997-05-13 International Business Machines Corporation Lateral field emission devices for display elements and methods of fabrication
WO1996036061A1 (en) * 1995-05-08 1996-11-14 Advanced Vision Technologies, Inc. Field emission display cell structure and fabrication process
US5644188A (en) * 1995-05-08 1997-07-01 Advanced Vision Technologies, Inc. Field emission display cell structure
US5604399A (en) * 1995-06-06 1997-02-18 International Business Machines Corporation Optimal gate control design and fabrication method for lateral field emission devices
AU6273396A (en) * 1995-06-13 1997-01-09 Advanced Vision Technologies, Inc. Laminar composite lateral field-emission cathode and fabrica tion process
AU6346496A (en) * 1995-07-05 1997-02-05 Advanced Vision Technologies, Inc. Direct electron injection field-emission display device and abrication process
AU6850496A (en) * 1995-09-06 1997-03-27 Advanced Vision Technologies, Inc. High-frequency field-emission device and fabrication process
EP1055248A1 (de) * 1998-02-09 2000-11-29 Advanced Vision Technologies, Inc. Geschlossene elektronenfeldemissionsvorrichtung und verfahren zur herstellung
CN1128461C (zh) * 1998-03-21 2003-11-19 韩国科学技术院 双板型扁平场发射显示器
CN1202576C (zh) * 1998-03-25 2005-05-18 韩国科学技术院 真空场效应晶体管

Also Published As

Publication number Publication date
CA2355660A1 (en) 2001-02-01
JP2003505843A (ja) 2003-02-12
EP1116255A1 (de) 2001-07-18
WO2001008192A1 (en) 2001-02-01
KR20010075311A (ko) 2001-08-09

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication