CN1528050A - 表面声波传感器 - Google Patents

表面声波传感器 Download PDF

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Publication number
CN1528050A
CN1528050A CNA028102142A CN02810214A CN1528050A CN 1528050 A CN1528050 A CN 1528050A CN A028102142 A CNA028102142 A CN A028102142A CN 02810214 A CN02810214 A CN 02810214A CN 1528050 A CN1528050 A CN 1528050A
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CN
China
Prior art keywords
layer
sensor
piezoelectric
acoustic wave
surface acoustic
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Pending
Application number
CNA028102142A
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English (en)
Chinese (zh)
Inventor
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库鲁斯·卡兰塔尔－扎德
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沃伊泰克·沃达尔斯基
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Microtechnology Centre Management Ltd
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Microtechnology Centre Management Ltd
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Publication date
Application filed by Microtechnology Centre Management Ltd filed Critical Microtechnology Centre Management Ltd
Publication of CN1528050A publication Critical patent/CN1528050A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

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  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
CNA028102142A 2001-05-21 2002-05-20 表面声波传感器 Pending CN1528050A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPR5076 2001-05-21
AUPR5076A AUPR507601A0 (en) 2001-05-21 2001-05-21 Surface acoustic wave sensor

Publications (1)

Publication Number Publication Date
CN1528050A true CN1528050A (zh) 2004-09-08

Family

ID=3829056

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028102142A Pending CN1528050A (zh) 2001-05-21 2002-05-20 表面声波传感器

Country Status (6)

Country Link
US (1) US7027921B2 (fr)
EP (1) EP1393441A4 (fr)
JP (1) JP4147116B2 (fr)
CN (1) CN1528050A (fr)
AU (1) AUPR507601A0 (fr)
WO (1) WO2002095940A1 (fr)

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US8451231B2 (en) 2006-08-03 2013-05-28 Samsung Display Co., Ltd. Touch screen panel, method of manufacturing the same, and display having the same
CN103399593A (zh) * 2013-07-30 2013-11-20 四川大尔电气有限责任公司 一种高压开关柜无源无线温度测控系统及方法
CN103917866A (zh) * 2011-11-01 2014-07-09 日本无线株式会社 弹性表面波传感器
CN108593765A (zh) * 2018-04-04 2018-09-28 深圳大学 一种基于声表面波模式的生物传感器及其检测方法
CN108956760A (zh) * 2018-08-01 2018-12-07 京东方科技集团股份有限公司 检测装置及检测系统
CN111641399A (zh) * 2020-06-01 2020-09-08 中国电子科技集团公司第二十六研究所 一种设置有SiO2钝化层的RF滤波器
CN114113313A (zh) * 2021-10-27 2022-03-01 山东师范大学 用于检测大肠杆菌的悬臂梁式声表面波传感器及工作方法

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AU2005217460B2 (en) * 2004-02-26 2008-12-04 Mnt Innovations Pty Ltd Layered surface acoustic wave sensor
WO2005083882A1 (fr) * 2004-02-26 2005-09-09 Mnt Innovations Pty Ltd Capteur d'ondes acoustiques de surface en couches
JP2005331326A (ja) * 2004-05-19 2005-12-02 Japan Radio Co Ltd 弾性波センサ
JP2005351799A (ja) * 2004-06-11 2005-12-22 Ulvac Japan Ltd 表面弾性波素子、バイオセンサー装置及び表面弾性波素子による測定方法
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US7544755B2 (en) 2005-09-30 2009-06-09 3M Innovative Properties Company Crosslinked polymers with amine binding groups
US7544754B2 (en) 2005-09-30 2009-06-09 3M Innovative Properties Company Crosslinked polymers with amine binding groups
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TWI330461B (en) * 2006-01-12 2010-09-11 Ind Tech Res Inst Surface acoustic wave bio-chip
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US20080001685A1 (en) * 2006-01-18 2008-01-03 Honeywell International Inc. Acoustic wave sensor system
JP2009534651A (ja) * 2006-04-20 2009-09-24 ヴェクトロン インターナショナル，インク 高圧環境用の電気音響センサ
US7836769B2 (en) * 2006-08-10 2010-11-23 Akrion Systems Llc Apparatus and method of measuring acoustical energy applied to a substrate
JPWO2008102577A1 (ja) 2007-02-19 2010-05-27 株式会社村田製作所 弾性表面波センサー装置
US8089196B1 (en) 2008-03-05 2012-01-03 University Of South Florida Microcavity enhanced surface acoustic wave devices
US8436509B1 (en) * 2008-07-08 2013-05-07 Saudia Corporation High-frequency shear-horizontal surface acoustic wave sensor
CN102334289B (zh) * 2009-02-27 2015-10-07 精工爱普生株式会社 表面声波谐振器、表面声波振荡器以及电子设备
JP5678486B2 (ja) 2010-06-17 2015-03-04 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器および電子機器
JP5934464B2 (ja) 2010-08-26 2016-06-15 セイコーエプソン株式会社 弾性表面波共振子、および弾性表面波発振器、ならびに電子機器
JP2012060420A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060418A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060421A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060422A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060419A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
US20120266668A1 (en) * 2011-04-21 2012-10-25 Baker Hughes Incorporated Surface Wave Sensor for Downhole Applications
JP6043061B2 (ja) * 2011-12-22 2016-12-14 日本無線株式会社 弾性表面波センサ
JP6154569B2 (ja) * 2011-11-01 2017-06-28 日本無線株式会社 弾性表面波センサ
JP6154570B2 (ja) * 2011-11-01 2017-06-28 日本無線株式会社 弾性表面波センサ
WO2014119069A1 (fr) * 2013-01-30 2014-08-07 京セラ株式会社 Capteur
DE102014000343A1 (de) * 2014-01-11 2015-07-16 Dräger Safety AG & Co. KGaA Gasmessgerät
JP6481999B2 (ja) * 2015-03-09 2019-03-13 日本無線株式会社 表面弾性波センサ及び溶液物性測定方法
US10381998B2 (en) 2015-07-28 2019-08-13 Qorvo Us, Inc. Methods for fabrication of bonded wafers and surface acoustic wave devices using same
US10084427B2 (en) * 2016-01-28 2018-09-25 Qorvo Us, Inc. Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof
FR3054665B1 (fr) 2016-07-28 2021-09-03 Commissariat Energie Atomique Capteur chimique resonant comportant un dispositif de fonctionnalisation et son procede de realisation
DE102017111448B4 (de) * 2017-05-24 2022-02-10 RF360 Europe GmbH SAW-Vorrichtung mit unterdrückten Störmodensignalen
US11206007B2 (en) 2017-10-23 2021-12-21 Qorvo Us, Inc. Quartz orientation for guided SAW devices
MY200464A (en) 2020-04-30 2023-12-27 Silterra Malaysia Sdn Bhd A device for determining information of a substance in a matter

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8451231B2 (en) 2006-08-03 2013-05-28 Samsung Display Co., Ltd. Touch screen panel, method of manufacturing the same, and display having the same
CN103917866A (zh) * 2011-11-01 2014-07-09 日本无线株式会社 弹性表面波传感器
CN103917866B (zh) * 2011-11-01 2016-04-20 日本无线株式会社 弹性表面波传感器
CN103399593A (zh) * 2013-07-30 2013-11-20 四川大尔电气有限责任公司 一种高压开关柜无源无线温度测控系统及方法
CN108593765A (zh) * 2018-04-04 2018-09-28 深圳大学 一种基于声表面波模式的生物传感器及其检测方法
WO2019192125A1 (fr) * 2018-04-04 2019-10-10 深圳大学 Biocapteur basé sur un mode d'onde acoustique de surface et son procédé de test
CN108956760A (zh) * 2018-08-01 2018-12-07 京东方科技集团股份有限公司 检测装置及检测系统
US11585787B2 (en) 2018-08-01 2023-02-21 Boe Technology Group Co., Ltd. Detection device, detection method for detection device, and detection system
CN111641399A (zh) * 2020-06-01 2020-09-08 中国电子科技集团公司第二十六研究所 一种设置有SiO2钝化层的RF滤波器
CN114113313A (zh) * 2021-10-27 2022-03-01 山东师范大学 用于检测大肠杆菌的悬臂梁式声表面波传感器及工作方法
CN114113313B (zh) * 2021-10-27 2024-03-22 山东师范大学 用于检测大肠杆菌的悬臂梁式声表面波传感器及工作方法

Also Published As

Publication number Publication date
EP1393441A4 (fr) 2010-03-24
AUPR507601A0 (en) 2001-06-14
US7027921B2 (en) 2006-04-11
US20040133348A1 (en) 2004-07-08
JP2004526977A (ja) 2004-09-02
WO2002095940A1 (fr) 2002-11-28
JP4147116B2 (ja) 2008-09-10
EP1393441A1 (fr) 2004-03-03

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