CN1851402A - Space-resonance type micro-light electromechanical gyro - Google Patents

Abstract

The invention discloses a space resonant micro-optical electromechanical gyroscope, which is composed of a gyroscope detection circuit module and a photoelectric hybrid integrated module. The photoelectric hybrid integrated module is composed of a light source, a first detector, a second detector, a multi-channel optical power divider and a space Composed of a resonant cavity, the output end of the light source is optically coupled to the input end of the multi-channel optical power splitter, and the output end of the multi-channel optical power splitter is optically coupled to the space resonant cavity, the first detector, and the second detector; the multi-channel optical power One path of parallel light output by the splitter enters the space resonant cavity through Fresnel microlens A, and forms parallel light propagating clockwise in the space resonant cavity, and the parallel light propagating clockwise passes through Fresnel microlens B The other path of parallel light output by the multi-channel optical power splitter enters the space resonant cavity through the Fresnel microlens B, and forms parallel light propagating counterclockwise in the space resonant cavity. The parallel light transmitted by the hour hand is emitted to the first detector through the Fresnel microlens A; the first detector and the second detector convert the light into an electrical signal and output it to the gyro detection circuit, and the gyro detection circuit outputs a driving signal to the light source.

Description

Spatial resonant micro-opto-electromechanical gyroscope

technical field

The present invention relates to an angular velocity measuring device, specifically, refers to a kind of light transmission in space optical path based on the optical SAGNAC effect, which is processed by micro-electromechanical technology and integrated optical technology, and which is processed by resonance technology and digital closed-loop Micro-opto-electromechanical gyroscope for measurement.

Background technique

Optical gyroscopes are based on the Sagnac effect. In inertial space, the Sagnac effect can usually be described as: "In the same closed loop, two The rotation of a beam of light around an axis perpendicular to the loop will cause a change in the phase difference between the two beams, and the magnitude of the phase difference is proportional to the rotation rate of the light loop."

Since the SAGNAC effect is very small, a common method is to use a circular resonant cavity to circulate light many times in the cavity and then interfere again to enhance the SAGNAC effect caused by rotation. This kind of optical gyroscope is called a resonant optical gyroscope. In the resonant optical gyroscope, two beams of counterpropagating light waves enter the cavity through the input and output mirrors, and output from the input and output mirrors through a closed optical path. At rest, since the cavity lengths are equal in both directions, the emission frequencies of the two beams are equal. When the cavity rotates, due to the SAGNAC effect, there is a small difference in the cavity lengths of the two waves propagating in opposite directions, resulting in a frequency difference between the two output beams ${\mathrm{\Δf}}_R=4\frac{A}{\mathrm{\λB}}\·\mathrm{\Ω},$ In the formula, A is the closed area of the ring cavity, B is the circumference, and λ is the wavelength of the incident light at rest. The angular velocity Ω of cavity rotation can be calculated by measuring the frequency difference Δf _R .

Compared with the interferometric micro-opto-electromechanical gyroscope, the resonant micro-opto-electromechanical gyroscope has the following advantages: (1) Under the condition of the same sensitivity, the required optical path length is short; (2) the drift caused by temperature inhomogeneity is small; (3) using High coherence and stable light source; (4) Measure the angular velocity by measuring the frequency, which can easily achieve high precision and large measurement dynamic range. With the development of application fields, higher requirements are put forward for the size and weight of gyroscopes, which require smaller volume and lower cost. However, the size of the fiber optic gyroscope is limited by the fiber optic ring. Therefore, the research on micro-opto-electromechanical gyroscopes that integrate miniaturization and high optical sensitivity has attracted widespread attention in the world.

Contents of the invention

The object of the present invention is to provide a space resonant micro-opto-electromechanical gyroscope. In order to reduce the size and weight of the system, the gyroscope has optimized the structure of the rotation-sensitive structural optical path, and uses micro-machining technology to process the reflective surface of the optical ring cavity. , and the four mirrors forming the annular cavity are solidified together according to a certain space size requirement, and the optical path resonance is realized in a small space, so that the optical path is extended. Cooperate with optical path, circuit, device structure and other components to form a resonant micro-optical electromechanical gyroscope with a spatial optical path.

The invention is a space resonant micro-optical electromechanical gyroscope, which is composed of a gyroscope detection circuit module and a photoelectric hybrid integrated module. The photoelectric hybrid integrated module is composed of a light source, a first detector, a second detector, a multi-channel optical power divider and Composed of a space resonant cavity, the output end of the light source is optically coupled to the input end of the multi-channel optical power splitter, and the output end of the multi-channel optical power splitter is optically coupled to the space resonant cavity, the first detector, and the second detector;

The multi-channel optical power splitter is composed of a _LiNbO3 substrate, a Fresnel microlens A and a Fresnel microlens B, on the _LiNbO3 substrate, a groove and an L-shaped platform are drawn by a micro-etching mask process, and then The groove is made into a waveguide groove by annealing proton exchange method or titanium diffusion method; Fresnel microlens A and Fresnel microlens B are fixed on the L-shaped stage by bonding, and Fresnel microlens A and Fresnel microlens Fresnel microlens B remains parallel;

The intersection of the waveguide grooves on the _LiNbO3 substrate constitutes three Y-branch couplers, namely Y-branch coupler A, Y-branch coupler B, and Y-branch coupler C; wherein, at the B output end of Y-branch coupler A Electrode A and electrode B are arranged on it, and electrode A and electrode B are arranged in parallel on both sides of the waveguide groove; among them, electrode C and electrode D are arranged on the C output end of Y branch coupler A, and electrode C and electrode D are arranged in parallel on the Both sides of the waveguide groove; electrode A and electrode B constitute phase shifter A after power-on; electrode C and electrode D constitute phase shifter B after power-on;

The mirror surface of the Fresnel microlens A is connected to the B output terminal of the Y branch coupler B of the multi-channel optical power divider; the mirror surface of the Fresnel microlens B is connected to the B of the Y branch coupler C of the multichannel optical power divider connected to the output;

The light source is coupled to the A input end of the Y branch coupler A of the multi-channel optical power splitter;

One path of parallel light output by the multi-channel optical power splitter enters the space resonant cavity through the Fresnel microlens A, and forms parallel light propagating clockwise in the space resonant cavity, and the parallel light propagating clockwise passes through the Fresnel microlens A The ear microlens B is emitted to the second detector; the other parallel light output by the multi-channel optical power divider is injected into the space resonant cavity through the Fresnel microlens B, forming parallel light propagating counterclockwise in the space resonant cavity , the parallel light propagating counterclockwise is emitted into the first detector through the Fresnel microlens A;

The first detector and the second detector convert the optical signal into an electrical signal and output it to the gyro detection circuit.

In the space resonant micro-opto-electromechanical gyroscope, the electrode A, electrode B, electrode C and electrode D are plated with gold thin films on both sides of the waveguide groove of the LiNbO ₃ substrate by electroplating process.

Described space resonant micro-optical electromechanical gyroscope, its space resonant cavity is provided with input-output mirror, micromirror A, micromirror B, micromirror C on the base, input-output mirror, micromirror A, micromirror B, micromirror C are respectively installed on the edge of the base.

In the space resonant micro-opto-electromechanical gyroscope, the light propagating in the space resonant cavity is two beams of light, which propagate counterclockwise and clockwise respectively, forming a closed optical path.

The advantages of the micro-optical electromechanical gyroscope of the present invention are: (1) the micro-optical electromechanical gyroscope has no moving parts, and the system has a strong ability to resist environmental interference; (2) the light beam propagates in a free space, and the loss is small, which is easy to improve the measurement accuracy; (3) no Polarization coupling and backscattering problems, the error of the optical path is small; (4) the optical path can be crossed, so that the space can be fully utilized, and it is easy to realize three-axis integration; (5) the use of micro-processed micromirrors to construct a ring resonant optical path is easy to achieve monolithic integration and miniaturization; (6) low cost, simple process, and easy mass production; (7) adopting an optical frequency closed-loop detection circuit, which effectively improves the anti-interference ability and the dynamic range of gyroscope testing.

Description of drawings

Fig. 1 is a functional block diagram of the micro-optical electromechanical gyroscope of the present invention.

Fig. 2 is a structural diagram of the multi-channel optical power splitter of the present invention.

Fig. 3 is a schematic structural diagram of a quadrilateral space resonant cavity.

Fig. 3A is a schematic diagram of the direction of the light path of the quadrilateral spatial resonant cavity.

Fig. 4 is a schematic structural diagram of a triangular space resonator.

Fig. 4A is a schematic diagram of the optical path of a triangular space resonant cavity.

Figure 5 is a block diagram of the gyro detection circuit.

In the figure: 1. Multi-channel optical power splitter 101. Substrate 102. Y branch coupler A103. Y branch coupler B 104. Y branch coupler C 105. L-shaped table 106. Fresnel microlens A 107. Phenyl Neil microlens B 108. Waveguide groove 111. Electrode A 112. Electrode B 113. Electrode C 114. Electrode D2. Space resonant cavity 201. Quadrilateral base 202. Input and output mirror 203. Micromirror A 204. Micromirror B205. Micromirror C 211. Triangular base 212. Input-output mirror 213. Micromirror A 214. Micromirror B3. Light source 4. First detector 5. Second detector 6. Gyro detection circuit

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings.

The present invention is a resonant micro-optical electromechanical gyroscope with a spatial optical path, which is composed of a photoelectric hybrid integrated module and a gyro detection circuit 6. Please refer to FIG. 1. The photoelectric hybrid integrated module consists of a light source 3, a first detector 4, and a second Two detectors 5, a multi-channel optical power splitter 1, and a space resonant cavity 2 are formed, the output end of the light source 3 is optically coupled to the input end of the multi-channel optical power splitter 1, and the output end of the multi-channel optical power splitter 1 is connected to the space resonance The cavity 2, the first detector 4, and the second detector 5 are optically coupled and connected. One path of parallel light output by the multi-channel optical power splitter 1 enters the space resonant cavity 2 through the Fresnel microlens A107, and forms parallel light propagating clockwise in the space resonant cavity 2, and the parallel light propagating clockwise It is emitted into the second detector 5 through the Fresnel microlens B106; another path of parallel light output by the multi-channel optical power splitter 1 is injected into the space resonant cavity 2 through the Fresnel microlens B106, and in the space resonant cavity 2 The counterclockwise parallel light is formed, and the counterclockwise parallel light is emitted into the first detector 4 through the Fresnel microlens A107; the first detector 4 and the second detector 5 convert the optical signal into an electrical signal output to the gyro detection circuit 6.

In the present invention, as shown in FIG. 2, the multi-channel optical power splitter 1 is composed of a LiNbO ₃ substrate 101, a Fresnel microlens A107 and a Fresnel microlens B106, and a microlens is used on the LiNbO ₃ substrate 101. The etching mask process is used to describe the groove (the depth of the groove is 3-10um, and the width is 3-10um) and the L-shaped platform 105, and then the groove is made into a waveguide groove 108 ( The refractive index of the waveguide groove is higher than that of the surrounding medium, and the light coupled into the waveguide groove from the light source 3 propagates along the waveguide groove based on the principle of total light reflection); Fresnel microlens A107 and Fresnel microlens B106 are fixed by bonding On the L-shaped platform 105, and the Fresnel microlens A107 and the Fresnel microlens B106 remain parallel;

A Y-branch coupler is formed at the intersection of the waveguide grooves 108 on the LiNbO substrate _101. According to the design requirements of the present invention, there are three Y-branch couplers, namely, the Y-branch coupler A102, the Y-branch coupler B103 and the Y-branch coupler. device C104; where,

An electrode A111 and an electrode B112 are provided on the B output end of the Y branch coupler A102, and the electrode A111 and the electrode B112 are arranged in parallel on both sides of the waveguide groove 108; wherein,

An electrode C113 and an electrode D114 are provided on the C output end of the Y branch coupler A102, and the electrode C113 and the electrode D114 are arranged on both sides of the waveguide groove 108 in parallel;

After the electrode A111 and the electrode B112 are powered on, based on the electro-optic effect, the phase modulation of the output light and the frequency shift of the output light are realized, which constitutes the phase shifter A;

After the electrode C113 and the electrode D114 are powered on, based on the electro-optical effect, the phase modulation and frequency shift of the output light are realized, which constitutes the phase shifter B;

The Fresnel microlens A107 is made based on the principle of binary optics. The Fresnel microlens A107 is fixed on the L-shaped stage 105 by bonding. The mirror surface of the Fresnel microlens A107 and the multi-channel optical power splitter The B output terminal of the Y branch coupler B103 of 1 is connected;

The Fresnel microlens B106 is made based on the principle of binary optics. The Fresnel microlens A106 is fixed on the L-shaped table 105 by bonding. The mirror surface of the Fresnel microlens A106 and the multi-channel optical power splitter The B output terminal of the Y branch coupler C104 of 1 is connected;

The C output end of the Y branch coupler C104 is optically coupled to the second detector 5;

The C output terminal of the Y branch coupler B103 is optically coupled to the first detector 4 .

In the present invention, the light propagating in the space resonant cavity 2 requires two beams of light propagating counterclockwise and clockwise respectively to form a closed optical path. A space resonant cavity with three mirrors, or four mirrors, or six mirrors, or eight mirrors is designed according to the requirements of the optical path, and its base (for mirror installation) is designed to be triangular or quadrilateral. , hexagons and octagons. Please refer to Fig. 3, shown in Fig. 4, described space resonant cavity 2 is installed with input-output mirror 202, micromirror A203, micromirror B204, micromirror C205 sequentially on a quadrangular base 201, input-output mirror 202, Micromirror A203 , micromirror B204 , and micromirror C205 are installed on each side of the base 201 respectively. Each micromirror adopts a plane mirror and a spherical mirror with a high reflectance of 90-99.9999%, and the input and output mirrors adopt a plane mirror and a spherical mirror with a high reflectance of 90-99.99%. The four sides of the input-output mirror 202, the micromirror A203, the micromirror B204, the micromirror C205 and the base 201 can be installed coincidently, or the four sides can not be overlapped and installed, and the distance between them is 0.01-5mm; or the input-output mirror 202 The sides of the base 201 are not coincident, and the distance is 0.01-5mm. The micromirror A203 , the micromirror B204 , and the micromirror C205 are installed coincidently with the four sides of the base 201 . When the base 211 is a triangle (as shown in Figure 4 and Figure 4A), three mirrors are installed on the angles of the triangle base 211 respectively. An input-output mirror 212, a micromirror A213, and a micromirror B214 are sequentially installed on each corner.

The light propagation direction of the space resonant micro-optical electromechanical gyroscope of the present invention is: the light output by the light source 3 is divided into two beams of light by the Y branch coupler A102 of the multi-channel optical power distributor 1, and one beam of light (by the Y branch coupler A102) The light output by terminal B) is frequency-shifted by phase frequency shifter A (the function of electrode A111 and electrode B112 after power-on), and then injected into the Y-branch coupler B103, and then output to the Philippine by the B-terminal of the Y-branch coupler B103 The collimated Neil microlens A107 outputs parallel light to the space resonant cavity 2; in the present invention, the light injected into the space resonant cavity 2 through the Fresnel microlens A107 is called clockwise propagating light (CW). The other beam of light (the light output from the C terminal of the Y-branch coupler A102) is injected into the Y-branch coupler C104 after being frequency-shifted by the phase frequency shifter B (the function of the electrodes C113 and D114 after they are powered on), and then Output parallel light to the space resonant cavity 2 after being collimated by the B end of the Y branch coupler C104 to the Fresnel microlens B106; The light is called counterclockwise propagating light (CCW). The trend of light in the space resonant cavity 2 (as shown in Figure 3A and Figure 4A) is: the parallel light emitted by the Fresnel microlens A107 is incident on the input and output mirror 202, and the parallel light is incident on the micromirror after being reflected by the micromirror A203 On B204, the parallel light is incident on the micromirror C205 after being reflected by the micromirror B204, and the parallel light returns to the input and output mirror 202 after being reflected by the micromirror D205, forming a clockwise optical path (CW); the Fresnel microlens B106 emits The parallel light is incident on the input and output mirror 202, the parallel light is incident on the micromirror B204 after being reflected by the micromirror C205, the parallel light is incident on the micromirror A202 after being reflected by the micromirror B204, and the parallel light is reflected by the micromirror A202 and then returns to the On the input-output mirror 202, a counterclockwise optical path (CCW) is formed. The parallel light of the clockwise optical path is output from the input and output mirror 202 and then hits the Fresnel microlens B106, becomes convergent light and is coupled into the B end of the Y branch coupler C104, and is split by the C end of the Y branch coupler C104 The light is input to the second detector 5; the parallel light of the counterclockwise optical path is output from the input and output mirror 202 and then hits the Fresnel microlens A107, becomes convergent light, is coupled into the B end of the Y branch coupler B103, and is split Then, the light is input to the first detector 4 by the C terminal of the Y branch coupler B103; the two beams of light output by the multi-channel optical power splitter 1 enter the space resonant cavity 2 to form clockwise and counterclockwise propagation optical paths. When the gyro rotates, the two beams of light produce a frequency difference in the resonant cavity. After the frequency difference information is processed by the detection circuit, the value of the angular velocity of the gyroscope can be obtained. Since the propagation medium of light in the resonant cavity is air, there is no error introduced by the Kerr effect, polarization effect, back reflection and Rayleigh scattering. Gyro noise and optical path noise are greatly reduced, effectively improving the gyro detection accuracy.

A kind of gyro detection circuit for micro-opto-electromechanical gyroscope at least includes central processing unit (FPGA+DSP), signal acquisition unit and control signal generation unit (referring to Fig. 5), and described central processing unit comprises FPGA processor and DSP Processor; Signal acquisition unit comprises signal acquisition unit A and signal acquisition unit B, and the circuit structure of signal acquisition unit A and signal acquisition unit B is identical, and signal acquisition unit A is made of first preamplifier circuit, filter and A/D The converter is formed, and the signal acquisition unit B is formed by a second preamplifier circuit, a filter and an A/D converter; the control signal generation unit includes a step wave generation circuit for controlling the first phase frequency shifter, for The ladder wave generating circuit for controlling the second phase frequency shifter and the voltage conversion circuit for controlling the light source, the ladder wave generating circuit for the first phase frequency shifter has the same structure as the ladder wave generating circuit for the second phase frequency shifter. The signal acquisition unit A amplifies and filters the light intensity and voltage signal output by the first detector through the first preamplifier circuit, and then converts and outputs the digital signal through the A/D converter to the FPGA processor for receiving; The signal acquisition unit B amplifies and filters the light intensity and voltage signal output by the second detector through the second preamplifier circuit, and the digital signal converted and output by the A/D converter is received by the FPGA processor;

The central processor outputs the frequency compensation voltage signal to the D/A converter and the voltage conversion circuit of the light source voltage conversion circuit of the control signal generation unit after processing the two digital signals received, thereby outputting the wavelength signal for controlling the light source, so that the clockwise The interference light intensity of the transmitted light is constant at the resonance point;

The central processor outputs two signals after processing the received two digital signals, one signal outputs a current signal to the analog amplifier A after passing through the D/A converter, and outputs a ladder wave signal to the first phase after being amplified by the analog amplifier A The frequency shifter adjusts the frequency so that the interference light intensity of the counterclockwise transmitted light is constant at the resonance point; the other signal passes through the D/A converter and outputs the current signal to the analog amplifier B, which outputs a fixed ladder wave after being amplified by the analog amplifier B signal to the second phase shifter.

The overall signal flow of the space resonant micro-opto-electromechanical gyroscope of the present invention can be divided into two parts: an optical path and a circuit. The optical path part is composed of a photoelectric hybrid integrated module, and the circuit part is composed of a gyro detection circuit. Wherein, the first detector 4, the second detector 5, the phase frequency shifter A, and the phase frequency shifter B complete photoelectric and electro-optical signal conversion respectively. The voltage conversion circuit provides a high and stable driving current to the light source 3 to make the light source emit light. The light emitted by the light source 3 passes through the Y-branch coupler A102, the Y-branch coupler B103 and the Y-branch coupler C104 to the phase frequency shifter A and the phase frequency shifter B to complete light splitting and load control signals, and the light signal is sent to the first detector 4 , The photoelectric conversion is completed in the second detector 5, the analog amplification and filtering are completed by the pre-amplifier circuit, and then converted into digital signals by the A/D converter, and the demodulation, filtering, integration and other work of the signal are completed by the FPGA to output four channels signal, in which the first channel outputs the angular velocity measurement signal; the second channel generates a fixed double-frequency ladder wave for the phase frequency shifter B on the Y branch coupler A102 to perform optical wave frequency scanning, so as to find the optical resonance circuit and the back-end circuit for optical wave scanning. frequency lock. The third path is converted by the D/A converter and then output to the voltage change circuit to control the central wavelength of the light output by the light source, so that the clockwise transmission light resonates; The fourth path is converted by the D/A converter and output to the drive circuit of the phase frequency shifter A. After demodulation by the circuit, the output voltage signal respectively controls the phase of the phase frequency shifter A-, and changes the optical frequency of the counterclockwise transmitted light, so that Resonance phenomenon occurs in the light of your hour hand; in this way, the full digital closed-loop control of the control part is realized. The closed-loop control artificially introduces a frequency difference equal to and opposite to the Sagnac phase shift between the two beams of light propagating in opposite directions to offset the Sagnac frequency shift, so that the system always works in the zero state, thereby expanding the dynamic range of the system . Phase frequency shift technology refers to the technology of artificially introducing non-reciprocal phase into the optical path, thereby changing the phase and frequency of light. It is one of the main technologies in resonant optical gyroscopes. device 1 to achieve. The multi-channel optical power splitter 1 is a multifunctional device, which can realize the functions of polarization, frequency shifting of two optical paths, and optical splitting of multiple optical paths.

Claims (8)

1. The utility model provides a space resonance formula shimmer electromechanical top comprises top detection circuitry module (6) and the mixed integrated module of photoelectricity which characterized in that: the photoelectric hybrid integrated module consists of a light source (3), a first detector (4), a second detector (5), a multi-channel optical power distributor (1) and a space resonant cavity (2), wherein the output end of the light source (3) is in optical coupling connection with the input end of the multi-channel optical power distributor (1), and the output end of the multi-channel optical power distributor (1) is in optical coupling connection with the space resonant cavity (2), the first detector (4) and the second detector (5);

the multichannel luminous power divider (1)From LiNbO₃A substrate (101), a Fresnel microlens A (107) and a Fresnel microlens B (106), in LiNbO₃A groove and an L-shaped platform (105) are carved on a substrate (101) by adopting a micro-etching mask process, and then the groove is processed into a waveguide groove (108) by adopting an annealing proton exchange method or a titanium diffusion method; the Fresnel micro lens A (107) and the Fresnel micro lens B (106) are fixed on the L-shaped table (105) in a bonding mode, and the Fresnel micro lens A (107) and the Fresnel micro lens B (106) are kept parallel;

in LiNbO₃The junction of the waveguide grooves (108) on the substrate (101) forms three Y-branch couplers, namely a Y-branch coupler A (102), a Y-branch coupler B (103) and a Y-branch coupler C (104); an electrode A (111) and an electrode B (112) are arranged on the output end B of the Y-branch coupler A (102), and the electrode A (111) and the electrode B (112) are arranged on two sides of the waveguide slot (108) in parallel; an electrode C (113) and an electrode D (114) are arranged on the C output end of the Y-branch coupler A (102), and the electrode C (113) and the electrode D (114) are arranged on two sides of the waveguide slot (108) in parallel; the electrode A (111) and the electrode B (112) form a phase frequency shifter A after being electrified; the electrode C (113) and the electrode D (114) form a phase shifter B after being electrified;

the mirror surface of the Fresnel micro lens A (107) is connected with the output end B of the Y-branch coupler B (103) of the multi-channel optical power distributor (1);

the mirror surface of the Fresnel micro lens B (106) is connected with the B output end of the Y-branch coupler C (104) of the multi-channel optical power divider (1);

the light source (3) is coupled with the input end A of a Y-branch coupler A (102) of the multi-channel optical power divider (1);

one path of parallel light output by the multi-channel optical power distributor (1) is emitted into the space resonant cavity (2) through the Fresnel micro lens A (107), parallel light which is transmitted clockwise is formed in the space resonant cavity (2), and the parallel light which is transmitted clockwise is emitted into the second detector (5) through the Fresnel micro lens B (106);

the other path of parallel light output by the multi-channel light power distributor (1) is emitted into the space resonant cavity (2) through the Fresnel micro lens B (106), parallel light which propagates anticlockwise is formed in the space resonant cavity (2), and the parallel light which propagates anticlockwise is emitted into the first detector (4) through the Fresnel micro lens A (107);

the first detector (4) and the second detector (5) convert the optical signals into electric signals and output the electric signals to the gyro detection circuit (6).

2. The spatially resonant micro-opto-electromechanical gyro of claim 1, wherein: and plating a gold film on the electrode A (111), the electrode B (112), the electrode C (113) and the electrode D (114) by adopting an electroplating process₃The waveguide groove (108) of the substrate (101) is provided on both sides thereof.

3. The spatially resonant micro-opto-electromechanical gyro of claim 1, wherein: the spatial resonant cavity (2) is provided with an input and output mirror (202), a micro mirror A (203), a micro mirror B (204) and a micro mirror C (205) on a base (201), and the input and output mirror (202), the micro mirror A (203), the micro mirror B (204) and the micro mirror C (205) are respectively arranged on the edge of the base (201).

4. The spatially resonant micro-opto-electromechanical gyro of claim 1, wherein: the spatial resonant cavity (2) is provided with an input and output mirror (212), a micromirror A (213) and a micromirror B (214) on a trilateral base (211), and the input and output mirror (212), the micromirror A (213) and the micromirror B (214) are respectively arranged on the edge of the trilateral base (211).

5. The spatial resonance type micro-opto-electro-mechanical gyroscope of claim 3 or 4, characterized in that: the micro-mirror adopts a plane mirror and a spherical mirror with high reflectivity of 90-99.9999%, and the input and output mirrors adopt a plane mirror and a spherical mirror with high reflectivity of 90-99.99%.

6. The spatially-resonant micro-opto-electro-mechanical gyroscope of claim 3, wherein: the base (201) is polygonal and at least comprises a quadrangle, a hexagon and an octagon.

7. The spatially-resonant micro-opto-electro-mechanical gyroscope of claim 3, wherein: the input and output mirror (202), the micro mirror A (203), the micro mirror B (204), the micro mirror C (205) and the base (201) are overlapped at the edge, or the input and output mirror (202) and the base (201) are not overlapped at the edge and are separated by 0.01-5 mm, the micro mirror A (203), the micro mirror B (204), the micro mirror C (205) and the base (201) are overlapped at the edge, or the input and output mirror (202), the micro mirror A (203), the micro mirror B (204), the micro mirror C (205) and the base (201) are not overlapped at the edge and are separated by 0.01-5 mm.

8. The spatially resonant micro-opto-electromechanical gyro of claim 1, wherein: the light transmitted in the space resonant cavity (2) is two beams of light which are transmitted along the counterclockwise direction and the clockwise direction respectively to form a closed light path.

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