CN1997767A - 金属化方法和设备 - Google Patents

金属化方法和设备 Download PDF

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Publication number
CN1997767A
CN1997767A CNA2005800182973A CN200580018297A CN1997767A CN 1997767 A CN1997767 A CN 1997767A CN A2005800182973 A CNA2005800182973 A CN A2005800182973A CN 200580018297 A CN200580018297 A CN 200580018297A CN 1997767 A CN1997767 A CN 1997767A
Authority
CN
China
Prior art keywords
metal
vacuum
bell
vacuum bell
metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800182973A
Other languages
English (en)
Chinese (zh)
Inventor
P·托托洛恩
C·奥尔斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Metalnova S R L
Original Assignee
Metalnova S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metalnova S R L filed Critical Metalnova S R L
Publication of CN1997767A publication Critical patent/CN1997767A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CNA2005800182973A 2004-04-08 2005-04-08 金属化方法和设备 Pending CN1997767A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO20040221 ITTO20040221A1 (it) 2004-04-08 2004-04-08 Procedimento di mtallizzazione
ITTO2004A000221 2004-04-08

Publications (1)

Publication Number Publication Date
CN1997767A true CN1997767A (zh) 2007-07-11

Family

ID=34967759

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800182973A Pending CN1997767A (zh) 2004-04-08 2005-04-08 金属化方法和设备

Country Status (4)

Country Link
EP (1) EP1733068A2 (it)
CN (1) CN1997767A (it)
IT (1) ITTO20040221A1 (it)
WO (1) WO2005098077A2 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105671513A (zh) * 2016-02-25 2016-06-15 深圳市众诚达应用材料科技有限公司 一种新型的真空彩色镀膜工艺

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE675731C (de) * 1935-10-06 1939-05-17 Bernhard Berghaus Verfahren zur Herstellung von homogenen Schichten oder Koerpern aus Metallen auf einem Grundkoerper durch Kathodenzerstaeubung, thermische Verdampfung oder thermische Zersetzung von Metallverbindungen
US3856647A (en) * 1973-05-15 1974-12-24 Ibm Multi-layer control or stress in thin films
US4022947A (en) * 1975-11-06 1977-05-10 Airco, Inc. Transparent panel having high reflectivity for solar radiation and a method for preparing same
JP2840502B2 (ja) * 1992-06-03 1998-12-24 三洋電機株式会社 高機能材料膜形成方法
DE19804751C2 (de) * 1998-01-12 2000-08-31 Fraunhofer Ges Forschung Verfahren zum Beschichten von Folie aus Nickel oder einer Nickellegierung und beschichtete Folie aus Nickel oder einer Nickellegierung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105671513A (zh) * 2016-02-25 2016-06-15 深圳市众诚达应用材料科技有限公司 一种新型的真空彩色镀膜工艺

Also Published As

Publication number Publication date
EP1733068A2 (en) 2006-12-20
WO2005098077A2 (en) 2005-10-20
WO2005098077A3 (en) 2006-05-18
ITTO20040221A1 (it) 2004-07-08

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Legal Events

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C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication