CN1997767A - 金属化方法和设备 - Google Patents

金属化方法和设备 Download PDF

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Publication number
CN1997767A
CN1997767A CNA2005800182973A CN200580018297A CN1997767A CN 1997767 A CN1997767 A CN 1997767A CN A2005800182973 A CNA2005800182973 A CN A2005800182973A CN 200580018297 A CN200580018297 A CN 200580018297A CN 1997767 A CN1997767 A CN 1997767A
Authority
CN
China
Prior art keywords
metal
vacuum
bell
vacuum bell
metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800182973A
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English (en)
Chinese (zh)
Inventor
P·托托洛恩
C·奥尔斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Metalnova S R L
Original Assignee
Metalnova S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metalnova S R L filed Critical Metalnova S R L
Publication of CN1997767A publication Critical patent/CN1997767A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CNA2005800182973A 2004-04-08 2005-04-08 金属化方法和设备 Pending CN1997767A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO2004A000221 2004-04-08
ITTO20040221 ITTO20040221A1 (it) 2004-04-08 2004-04-08 Procedimento di mtallizzazione

Publications (1)

Publication Number Publication Date
CN1997767A true CN1997767A (zh) 2007-07-11

Family

ID=34967759

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800182973A Pending CN1997767A (zh) 2004-04-08 2005-04-08 金属化方法和设备

Country Status (4)

Country Link
EP (1) EP1733068A2 (it)
CN (1) CN1997767A (it)
IT (1) ITTO20040221A1 (it)
WO (1) WO2005098077A2 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105671513A (zh) * 2016-02-25 2016-06-15 深圳市众诚达应用材料科技有限公司 一种新型的真空彩色镀膜工艺

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE675731C (de) * 1935-10-06 1939-05-17 Bernhard Berghaus Verfahren zur Herstellung von homogenen Schichten oder Koerpern aus Metallen auf einem Grundkoerper durch Kathodenzerstaeubung, thermische Verdampfung oder thermische Zersetzung von Metallverbindungen
US3856647A (en) * 1973-05-15 1974-12-24 Ibm Multi-layer control or stress in thin films
US4022947A (en) * 1975-11-06 1977-05-10 Airco, Inc. Transparent panel having high reflectivity for solar radiation and a method for preparing same
JP2840502B2 (ja) * 1992-06-03 1998-12-24 三洋電機株式会社 高機能材料膜形成方法
DE19804751C2 (de) * 1998-01-12 2000-08-31 Fraunhofer Ges Forschung Verfahren zum Beschichten von Folie aus Nickel oder einer Nickellegierung und beschichtete Folie aus Nickel oder einer Nickellegierung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105671513A (zh) * 2016-02-25 2016-06-15 深圳市众诚达应用材料科技有限公司 一种新型的真空彩色镀膜工艺

Also Published As

Publication number Publication date
ITTO20040221A1 (it) 2004-07-08
EP1733068A2 (en) 2006-12-20
WO2005098077A2 (en) 2005-10-20
WO2005098077A3 (en) 2006-05-18

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C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication