CN201763565U - Vacuum pump system - Google Patents

Abstract

The utility model relates to a vacuum pump system, including a vacuum pump, a first intercommunication pipeline (L1), a control valve, a second intercommunication pipeline (L2), a third intercommunication pipeline (L3), and a check valve. The control valve group is arranged between the first communication pipeline and the second communication pipeline, the first communication pipeline is respectively connected to the air outlet end of the control valve and the suction side of the vacuum pump, the second communication pipeline is respectively connected to the air inlet end of the control valve and the exhaust side of the vacuum pump, and the third communication pipeline is respectively connected to the exhaust side of the vacuum pump and the air inlet end of the check valve. The suction side and the discharge side of the vacuum pump are selectively communicated by a control valve. Therefore, the energy-saving vacuum pump system is achieved with extremely low construction cost, and the subsequent maintenance cost is not high.

Description

Vacuum pump system

technical field

The utility model relates to a vacuum pump system, in particular to a vacuum pump system capable of achieving energy saving when the pump runs without load.

Background technique

The main purpose of vacuum pumps is to create a vacuum environment below atmospheric pressure, so as to create a cleaner environment, good process and product quality, so vacuum pumps are widely used in petrochemical industry, manufacturing and medical industry environments.

Under the conventional vacuum pumping system, when the vacuum condition of the process chamber is reached, the communication between the pump and the process chamber is cut off, and at the same time, the vacuum pump is in a no-load operation state. Due to the large pressure difference between the suction side and the discharge side, this no-load operation consumes a lot of power.

China Taiwan Patent Publication No. I267581 discloses a vacuum exhaust device, as shown in Figure 1, its main structure is that a check valve 2 is arranged on the discharge side of a main vacuum pump 1, and an auxiliary vacuum pump 3 and a check valve are additionally installed 2 in parallel. The pressure on the discharge side of the main vacuum pump 1 is reduced by the auxiliary vacuum pump 3 to reduce the pressure difference between the suction side and the discharge side, so as to save energy consumption of the main vacuum pump 1 in an idle state.

However, the above-mentioned known solution needs to provide an additional vacuum pump, which is obviously expensive, and the additional vacuum pump also requires maintenance, which adds to the overall cost burden of the system, so it is not very ideal.

Utility model content

The purpose of the utility model is to provide a vacuum pump system, which can save the power consumption of the vacuum pump in no-load operation.

For achieving the above object, the technical solution of the utility model is:

A vacuum pump system includes a first communication pipeline, a second communication pipeline, a third communication pipeline, a first control valve, a vacuum pump, and a check valve. The above-mentioned vacuum pump includes a suction side and a discharge side.

The above-mentioned first communication pipelines are respectively connected to an air outlet end of the first control valve and the suction side of the vacuum pump, the second communication pipelines are respectively connected to an air inlet end of the first control valve and the discharge side of the vacuum pump, and the third communication pipelines are respectively Connected to the discharge side of the vacuum pump and an air inlet port of the check valve. The suction side and the discharge side of the vacuum pump are selectively communicated through the first control valve. The above-mentioned check valve is arranged after the second communication pipeline.

The suction side of the vacuum pump can be connected to a process chamber through a fourth communication pipeline, and a second control valve can be assembled on the fourth communication pipeline.

Through the above system, when the process chamber connected to the suction side of the vacuum pump has reached the required pressure, and the second control valve connected between the process chamber and the vacuum pump has been closed, and the vacuum pump is in no-load operation, the first control The valve will be opened, and the gas on the discharge side of the vacuum pump will be led back to the suction side again, the gas will circulate inside the pump, and the pressure at both ends will be balanced, avoiding the situation where the gas on the discharge side is repeatedly compressed and consumes power, and the power consumption of the entire system will also be reduced. Greatly improved.

The vacuum pump system may also include a pressure sensor and a controller. The pressure sensor is located in the process chamber. The controller is electrically connected to the pressure sensor and the second control valve respectively. When the controller receives the pressure sensor, the reaction process chamber has reached The target pressure signal closes the second control valve.

There are at least the following two designs for the automatic control of the first control valve. One is to simultaneously control the first control valve through the controller of the above-mentioned second control valve; or, another dedicated controller is provided to be responsible for the opening and closing of the first control valve. Both designs can be set to automatically open the first control valve when receiving a signal that the second control valve between the process chamber and the vacuum pump is closed, so that the system enters an energy-saving mode.

The vacuum pump system may also include a muffler assembled at the gas outlet of the check valve.

The beneficial effect of the utility model is that, compared with the known existing patent case, an extra vacuum pump needs to be installed, the utility model only needs to install a solenoid valve, which not only has low initial manufacturing cost, but also obviously has an advantage in follow-up maintenance cost.

Description of drawings

Fig. 1 is a schematic diagram of a known vacuum pump system;

Fig. 2 is the schematic diagram of the vacuum pump system of the first preferred embodiment of the utility model;

Fig. 3 is a schematic diagram of a vacuum pump system in a second preferred embodiment of the present invention.

Description of main component symbols

Main vacuum pump 1 Check valve 2

Auxiliary vacuum pump 3

Process chamber 11 Vacuum pump 12

Suction side 121 Discharge side 122

The first control valve 13 Inlet ports 131, 141, 151

Gas outlet 132, 142, 152 Second control valve 14

Check valve 15 Muffler 16

Controller 17, 19 Pressure sensor 18

The first connecting line L1 The second connecting line L2

The third connecting pipeline L3 The fourth connecting pipeline L4

Detailed ways

Referring to FIG. 2 , the figure shows a vacuum pumping system used in a semiconductor process, including a semiconductor-related process chamber 11, a vacuum pump 12, a first control valve 13, a second control valve 14, a check valve 15, A muffler 16, a controller 17, and a pressure sensor 18.

The process chamber 11 and the vacuum pump 12 are connected through a fourth communication pipeline L4, and the second control valve 14 is set in the fourth communication pipeline L4, and the gas inlet port 141 of the second control valve corresponds to the process chamber body 11, and the gas outlet 142 corresponds to the vacuum pump 12. The discharge side 122 of the vacuum pump 12 is further connected to a third communication pipeline L3, and the check valve 15 and the muffler 16 are sequentially assembled in the third communication pipeline L3 from the discharge side 122 of the vacuum pump 12. The air inlet port 151 corresponds to the vacuum pump 12 , and the air outlet port 152 corresponds to the muffler 16 .

The first control valve 13 is assembled between a first communication pipeline L1 and a second communication pipeline L2, and the first communication pipeline L1 is respectively connected to the gas outlet 132 of the first control valve 13 and the suction side 121 of the vacuum pump. , the second communication pipeline L2 is respectively connected to the air inlet 131 of the first control valve 13 and the discharge side 122 of the vacuum pump. The check valve 15 is located after the second communication line L2.

The controller 17 is electrically connected to the first control valve 13 , the second control valve 14 , and the pressure sensor 18 respectively. The pressure sensor 18 is set inside the process chamber 11 to detect the degree of vacuum in the process chamber 11 . The controller 17 receives information from the pressure sensor 18 to determine the opening and closing of the first control valve 13 and the second control valve 14 .

When the vacuum pump 12 has completed the step of evacuating the process chamber 11 (that is, the pressure in the chamber has been lowered to a certain level), the pressure sensor 18 transmits the read pressure information to the controller 17, and the controller 17 starts to close The second control valve 14 and the first control valve 13 are opened.

At this time, due to the opening of the first control valve 13, the first communication pipeline L1 and the second communication pipeline L2 make the suction side 121 of the vacuum pump 12 communicate with the discharge side 122, and the gas on the discharge side 122 is guided back to the suction side 121, and the gas The convenience of the internal circulation of the vacuum pump 12 also means that the pressures at the two places are nearly balanced. Accordingly, even if the vacuum pump 12 continues to operate, the power consumption thereof is not high because the pressure difference between the suction side 121 and the discharge side 122 is extremely small.

The check valve 15 in the third communication line L3 can ensure that the pressure on the discharge side 122 of the vacuum pump 12 will not rise again. The muffler 16 is responsible for reducing the noise during pump operation.

It can be seen from the above that the utility model connects the two ends of the vacuum pump with pipelines, and sets a valve in the pipeline to selectively open and close the connection of the pipeline. When the connection of the pipeline is closed, it is suitable for the normal operation of the vacuum pump; When the pipeline is connected and opened, the gas circulates in the vacuum pump to prevent the discharge side gas from being repeatedly compressed and consuming work, which is suitable for the vacuum pump to run without load. According to the actual verification results, the vacuum pumping system of the utility model can save the current consumption of the vacuum pump, even up to 40%.

In contrast, the auxiliary vacuum pump of the aforementioned known patent operates simultaneously with the main vacuum pump, which obviously consumes more power than when the main vacuum pump operates alone. When the vacuum pump really starts to do its job, the overall power consumption starts to decrease. Moreover, the utility model eliminates the necessity of maintaining the auxiliary vacuum pump.

Referring to FIG. 3 , it is a schematic diagram of the vacuum pump system of the second embodiment. The difference between the system architecture of this embodiment and the first embodiment is that the opening and closing of the first control valve 13 is controlled by another controller 19 , and the controller 19 is of course also electrically connected to the second control valve 14 . When the signal of closing the second control valve 14 is received by the controller 19, the controller 19 opens the first control valve 13 to make the system enter the energy-saving mode.

The above-mentioned embodiments are only examples for convenience of description, and the scope of rights claimed by the utility model should be determined by the protection scope of the claims, rather than being limited to the above-mentioned embodiments.

Claims (7)

1. a vacuum pump system is characterized in that, comprising:

One first connecting pipeline;

One second connecting pipeline;

One third connecting pipe;

One first control valve is mounted between this first connecting pipeline and this second connecting pipeline;

One check valve; And

One vacuum pump, include a suction side, with one discharge side, wherein this first connecting pipeline is connected to an outlet side and this suction side of this first control valve, this second connecting pipeline is connected to an air inlet end and this discharge side of this first control valve, this third connecting pipe is connected to an air inlet end of this discharge side and this check valve, and this check valve is positioned at after this second connecting pipeline, is communicated with by this first control valve selecting type between this suction side of this vacuum pump and this discharge side.

2. the system as claimed in claim 1 is characterized in that, this suction side of described vacuum pump is communicated to a process cavity by one the 4th connecting pipeline.

3. system as claimed in claim 2 is characterized in that, also comprises one second control valve, is mounted in the 4th connecting pipeline.

4. system as claimed in claim 3 is characterized in that, also comprise a pressure transducer, with one first controller, this pressure transducer is located in this process cavity, this first controller is electrically connected on this pressure transducer and this second control valve respectively.

5. system as claimed in claim 4 is characterized in that, described first controller also is electrically connected on this first control valve.

6. system as claimed in claim 4 is characterized in that, also comprises one second controller, is electrically connected on this first control valve.

7. the system as claimed in claim 1 is characterized in that, also comprises a baffler, is mounted on an outlet side of this check valve.

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