CN201940407U - Constant volume precise automatic liquid supply device - Google Patents

Abstract

A constant-volume precise automatic rehydration device, including a liquid storage tank, a mechanical rehydration pump, a calibrating tank, an upper liquid level sensor, a lower liquid level sensor, a float, a U-shaped float rod, a constant volume sensor, a scale, and an electromagnetic changer. There are directional valves, cleaning tanks and control systems. An upper liquid level sensor and a lower liquid level sensor are installed on the inner wall of the sizing tank. Through the diameter of the sizing tank and the downward distance of the floating ball, the volume of the primary liquid replenishment can be known. The descending distance of the ball is controlled by the constant volume sensor, and the electromagnetic reversing valve is opened during liquid replenishment. When the constant volume sensor moves down a predetermined distance, the constant volume sensor sends a signal to the control system, and immediately closes the electromagnetic reversing valve, so that the cleaning tank can be cleaned. Precise replenishment of liquid keeps the concentration of the solution in the cleaning tank stable, fundamentally guaranteeing the quality of silicon wafer cleaning.

Description

Constant volume precise automatic liquid replenishment device

Technical field:

The utility model relates to a solar silicon chip cleaning device, in particular to a liquid replenishing device in a fully automatic cleaning device.

Background technique:

In the production process of solar cells, the cleaning process of silicon wafers is a very important process, and the cleaning quality directly affects the photoelectric conversion performance of solar cells. In the silicon wafer cleaning equipment, due to the chemical reaction between the silicon wafer and the cleaning solution, the relevant chemical components in the cleaning solution will be consumed. If it is not replenished in time, the cleaning effect of the silicon wafer will be directly affected. In order to improve the stability of the silicon wafer cleaning process, corresponding chemical liquid must be added to the cleaning solution after cleaning for a certain number of times. Ordinary washing machines use manual addition method for rehydration, and manual addition has the defect of inaccurate rehydration volume, and human factors have a great influence on the accuracy of rehydration. In order to overcome the defects of artificial liquid replenishment, a centralized liquid replenishment system is installed in advanced silicon wafer cleaning machines. The centralized liquid replenishment system replenishes liquid to the cleaning tank regularly by a mechanical liquid replenishment pump. During the operation of the cleaning equipment, according to the unit The amount of liquid cleaning consumption within a certain period of time, determine the corresponding flow rate of the mechanical liquid replenishment pump, and the control system replenishes liquid to the cleaning tank every predetermined time interval. The accuracy of rehydration is not high, and the rehydration interval is determined every ten times of cleaning. In this way, the chemical concentration of the cleaning solution fluctuates greatly, and the cleaning quality of silicon wafers also fluctuates greatly. To further improve the cleaning quality of silicon wafers, It is necessary to replenish the liquid in time to reduce the fluctuation value of the chemical concentration of the cleaning liquid. Therefore, the applicant has designed a constant pressure automatic liquid replenishment device. When the cleaning tank washes a batch of silicon wafers, the liquid replenishing device will replenish liquid in the cleaning tank in a timely manner. This is what people call the micro-quantity replenishing device. Changing the fluctuation value can be effectively controlled, thereby improving the cleaning quality of the silicon wafer.

Utility model content:

In order to overcome the deficiencies of the liquid replenishment device in the existing silicon wafer cleaning machine, the utility model provides a constant-volume precision automatic liquid replenishment device for silicon wafer cleaning equipment. The cleaning tank is replenished with constant volume and precise liquid in time to ensure that the cleaning liquid in the cleaning tank is accurately replenished after each batch of silicon wafers are cleaned, so that the concentration of the cleaning liquid can be controlled more accurately, thereby ensuring the cleaning quality of silicon wafers.

The technical scheme adopted in the utility model is:

The fixed-capacity precise automatic liquid replenishing device is characterized in that it includes a liquid storage tank, a mechanical liquid replenishing pump, a calibration tank, an upper liquid level sensor, a lower liquid level sensor, a floating ball, a U-shaped floating ball rod, a fixed Capacity sensor, scale, electromagnetic reversing valve, cleaning tank and control system. The liquid storage tank is set next to the automatic silicon wafer cleaning machine. The liquid storage tank stores the solution to be replenished. There is a liquid filling opening on the top of the liquid storage tank. The operator adds solution to it, and the mechanical replenishment pump is set between the sizing tank and the liquid storage tank, and the upper liquid level sensor and the lower liquid level sensor are arranged on the side wall of the sizing tank, and the liquid level sensor drawn from the bottom of the sizing tank The liquid replenishment pipe leads to the cleaning tank through the electromagnetic reversing valve, the float ball is placed in the sizing tank, the inner rod of the U-shaped float rod passes through the upper cover of the sizing tank and is screwed on the float ball, the U-shaped float rod The outer rod extends downward along the outer wall of the sizing tank. A constant volume sensor is arranged on the outer rod, and a scale is arranged on the side corresponding to the constant volume sensor. The upper liquid level sensor, the lower liquid level sensor, the constant volume sensor and the electromagnetic switch The directional valves are all electrically connected to the control system.

Since the solution to be replenished in the liquid storage tank is first input into the calibrating tank through the mechanical replenishment pump, the upper liquid level sensor and the lower liquid level sensor are arranged on the side wall of the calibrated tank in turn, and the switch of the mechanical replenishment pump is controlled by the upper and lower liquid level sensors. The liquid level sensor and the lower liquid level sensor are controlled to ensure that the liquid level in the sizing tank is within the predetermined height range. Through the diameter of the sizing tank and the downward movement distance of the float, the volume of liquid released by the drop of the float per unit size can be known. Then, according to the amount of solution consumed by the cleaning tank to quantitatively clean the silicon wafers each time, the distance that the floating ball should drop for each rehydration can be obtained through calculation. This distance is controlled by the constant volume sensor. The reversing valve is turned on for liquid replenishment. When the constant volume sensor moves down a predetermined distance, the constant volume sensor sends a signal to the control system and immediately closes the electromagnetic reversing valve, so that the cleaning tank can be accurately replenished with liquid, so that the concentration of the solution in the cleaning tank remains constant. Stable, fundamentally guarantee the quality of silicon wafer cleaning. At the same time, the frequency of starting and stopping of the mechanical pump is reduced, the damage to the mechanical pump is reduced, and the use efficiency of the automatic cleaning machine is greatly improved.

Description of drawings:

Fig. 1 is a structural representation of the utility model;

In the figure: 1-liquid storage tank; 2-mechanical replenishment pump; 3-calibration tank; 31-upper cover; 4-upper liquid level sensor; 5-lower liquid level sensor; 6-float ball; 7-U-shaped float Ball bar; 71-inner rod; 72-outer rod; 8-constant volume sensor; 9-scale; 10-electromagnetic reversing valve; 11-cleaning tank; 12-control system; 13-infusion tube;

Detailed ways:

The specific embodiment of the utility model is described in detail according to the accompanying drawings:

The fixed-volume precision automatic liquid replenishment device, as shown in Figure 1, includes a liquid storage tank 1, a mechanical liquid replenishment pump 2, a calibration tank 3, an upper liquid level sensor 4, a lower liquid level sensor 5, and a floating ball 6 , U-shaped floating ball rod 7, constant volume sensor 8, scale 9, electromagnetic reversing valve 10, cleaning tank 11 and control system 12, the liquid storage tank 1 is arranged next to the automatic silicon wafer cleaning machine, and the liquid storage tank 1 stores To replenish the solution, a liquid filling opening is provided on the top of the liquid storage tank 1 for the operator to add solution to it. The mechanical replenishment pump 2 is arranged between the liquid storage tank 1 and the sizing tank 3. The upper liquid level sensor 4 and the lower liquid level sensor 5 are arranged on the wall, and the liquid replenishing pipe 14 drawn from the bottom of the sizing tank 3 leads to the cleaning tank 11 through the electromagnetic reversing valve 10, and the floating ball 6 is placed in the sizing tank 3, The inner rod 71 of the U-shaped floating ball rod 7 passes through the loam cake 31 of the calibrating tank 3 and is screwed on the floating ball 6, and the outer rod 72 of the U-shaped floating ball rod 7 extends downwards along the outer wall of the calibrating tank 3, Outer rod 72 is provided with constant volume sensor 8, is provided with scale 9 on the side corresponding to constant volume sensor 8, upper liquid level sensor 4, lower liquid level sensor 5, constant volume sensor 8 and electromagnetic reversing valve 10 are all connected with control System 12 is electrically connected.

Concrete use method of the present utility model is as follows:

The control system 12 starts the mechanical replenishment pump 2 to input the replenishment liquid in the liquid storage tank 1 into the calibration tank 3 through the infusion tube 13. When the liquid height reaches the upper liquid level sensor 4, it sends a signal to the control system 12 to automatically shut down the mechanical pump. The replenishment pump 2 stops pumping liquid, and the cleaning machine starts to clean the silicon wafers. After the silicon wafers are cleaned, the control system 12 enables the electromagnetic reversing valve 10 to be powered on. In the cleaning tank 11, when the constant volume sensor 8 fixed on the outer rod 72 of the U-shaped floating ball rod 7 moves down to a predetermined height, the control system 12 receives the signal from the constant volume sensor 8 and immediately closes the electromagnetic reversing valve. 10. At this time, the solution in the cleaning tank 11 has been accurately replenished, and the cleaning machine is transferred to the cleaning of the next batch of silicon wafers, and so forth.

Claims (1)

1. accurate automatic liquid supply device of constant volume type, it is characterized in that: it comprises fluid reservoir (1), machinery fluid infusion pump (2), sizing jar (3), last liquid level sensor (4), following liquid level sensor (5), ball float (6), U-shaped ball lever (7), constant volume sensor (8), scale (9), solenoid directional control valve (10), rinse bath (11) and control system (12), fluid reservoir (1) is arranged on by the full-automatic silicon wafer cleaner, deposit in the fluid reservoir (1) and treat make-up solution, be provided with the liquid feeding opening at fluid reservoir (1) top, supply operating personnel to the solution of wherein annotating, machinery fluid infusion pump (2) is arranged between fluid reservoir (1) and the sizing jar (3), on the sidewall of sizing jar (3), be provided with liquid level sensor (4) and following liquid level sensor (5), the liquid supplementation pipe (14) of drawing in sizing jar (3) bottom feeds rinse bath (11) through solenoid directional control valve (10), ball float (6) is placed in the sizing jar (3), the interior bar (71) of U-shaped ball lever (7) passes the loam cake (31) of sizing jar (3) and is rotated with on ball float (6), the outer bar (72) of U-shaped ball lever (7) extends downwards along the outer wall of sizing jar (3), bar (72) is provided with constant volume sensor (8) outside, be provided with scale (9) in side, last liquid level sensor (4) corresponding to constant volume sensor (8), following liquid level sensor (5), constant volume sensor (8) and solenoid directional control valve (10) all are electrically connected with control system (12).

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