CN209727262U - Broadband high-resolution spectral imaging information simultaneous acquisition device - Google Patents

Broadband high-resolution spectral imaging information simultaneous acquisition device Download PDF

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CN209727262U
CN209727262U CN201920871223.3U CN201920871223U CN209727262U CN 209727262 U CN209727262 U CN 209727262U CN 201920871223 U CN201920871223 U CN 201920871223U CN 209727262 U CN209727262 U CN 209727262U
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mirror
diffraction grating
imaging
acquisition device
resolution
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李颖
张振铎
薛永琪
刘瑀
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Dalian Maritime University
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Abstract

The utility model discloses a broadband high resolution spectral imaging information acquisition device simultaneously, specifically include plane mirror, diffraction grating, imaging mirror and the area array photoelectric detector of incident slit, collimating mirror, layering setting, under the operating condition: the radiation energy passing through the entrance slit of the spectrometer is firstly collimated by the collimating mirror, then reflected by the plane reflector, split by the diffraction grating and finally focused and imaged on the photoelectric detector by the imaging mirror at the same time by the dispersive spectrum of each layer corresponding to different wave band ranges. The device can realize the simultaneous acquisition of the wide spectrum wave band range, the high spectrum resolution and the imaging information. The target with rapid optical characteristic change is subjected to spectral imaging detection, multi-dimensional information is obtained at the same time, and the inversion and identification precision of the target can be remarkably improved.

Description

一种宽波段高分辨率光谱成像信息同时获取装置A device for simultaneous acquisition of broadband and high-resolution spectral imaging information

技术领域technical field

本实用新型涉及光学仪器技术领域,尤其涉及一种宽波段高分辨率光谱成像信息同时获取装置。The utility model relates to the technical field of optical instruments, in particular to a device for simultaneously acquiring broadband and high-resolution spectral imaging information.

背景技术Background technique

在成像光谱仪领域,常规的光栅或棱镜机械扫描方法,可在较宽的光谱范围实现高光谱分辨能力,但这种时间串联机械扫描型测量模式无法实现所有光谱信息的同时获取,且在长时间机械扫描测量过程中的重复测量精度和可靠性较低。采用无机械扫描的一维和二维面阵探测器方式可实现光谱信息同时测量,但受探测器物理尺寸和像元分辨率限制,无法同时满足高光谱分辨率、宽光谱响应范围和宽成像视场的要求。In the field of imaging spectrometers, conventional grating or prism mechanical scanning methods can achieve high spectral resolution in a wide spectral range, but this time-series mechanical scanning measurement mode cannot achieve simultaneous acquisition of all spectral information, and in a long time Repeated measurement accuracy and reliability during mechanical scanning measurements are low. One-dimensional and two-dimensional area array detectors without mechanical scanning can realize simultaneous measurement of spectral information, but limited by the physical size of the detector and pixel resolution, it is impossible to simultaneously meet high spectral resolution, wide spectral response range and wide imaging field of view. field requirements.

二维多光栅折叠光谱技术将具有不同闪耀角和色散特性的多个光栅进行集成组合,各子光栅按一定的角度有序排列,使得不同子光栅的衍射光谱都落在几乎相同的衍射张角内,被双焦距反射镜聚焦到探测器上。在光路中设计了滤波器来实现不同光谱波段的滤波探测,能够实现宽波段高分辨率光谱成像信息同时获取。但是为了实现不同光谱波段的滤波探测,利用双焦距反射镜和滤波器,使得光谱成像的空间分辨率较低。还存在一种光谱仪结构型式,即通过在传统光谱仪光路中加入平面反射镜,采用切换不同的、整块平面反射镜的方式,实现宽波段高分辨率光谱成像探测,但由于该探测方式需要分时进行,无法同时获得宽波段高分辨率光谱成像信息。Two-dimensional multi-grating folding spectroscopy technology integrates multiple gratings with different blaze angles and dispersion characteristics, and arranges each sub-grating in an orderly manner at a certain angle, so that the diffraction spectra of different sub-gratings fall at almost the same diffraction angle. Inside, it is focused onto the detector by a double focal length mirror. Filters are designed in the optical path to realize filter detection of different spectral bands, which can realize simultaneous acquisition of broadband and high-resolution spectral imaging information. However, in order to realize the filter detection of different spectral bands, the spatial resolution of spectral imaging is relatively low due to the use of dual focal length mirrors and filters. There is also a spectrometer structure type, that is, by adding a plane reflector to the optical path of the traditional spectrometer, and switching between different, whole plane reflectors, to achieve broadband high-resolution spectral imaging detection, but because this detection method requires a separate It is impossible to obtain broadband and high-resolution spectral imaging information at the same time.

实用新型内容Utility model content

根据现有技术存在的问题,本实用新型公开了一种宽波段高分辨率光谱成像信息同时获取装置,具体结构包括:According to the problems existing in the prior art, the utility model discloses a device for simultaneously acquiring broadband and high-resolution spectral imaging information. The specific structure includes:

入射狭缝、准直镜、分层设置的平面反射镜、衍射光栅、成像镜和面阵光电探测器,经过光谱仪入射狭缝的辐射能量首先经过准直镜准直,再经平面反射镜反射、经衍射光栅分光后最后通过成像镜将每层对应的不同波段范围的色散光谱同时聚焦成像在面阵光电探测器上。The incident slit, collimating mirror, layered plane mirror, diffraction grating, imaging mirror and area array photodetector, the radiant energy passing through the incident slit of the spectrometer is first collimated by the collimating mirror, and then reflected by the plane mirror , After being split by the diffraction grating, the dispersion spectrum corresponding to each layer in different band ranges is focused and imaged on the area array photodetector at the same time through the imaging mirror.

进一步的,根据待测目标的反射、辐射光谱范围和所要求探测的光谱分辨率确定平面反射镜的层数。Further, the number of layers of the plane reflector is determined according to the reflection of the target to be measured, the radiation spectral range and the spectral resolution required for detection.

进一步的,其中不同层面的平面反射镜沿平行于衍射光栅刻线方向排列,不同层的平面反射镜分别具有不同的放置位置、方位角和俯仰角,其中设入射光线方向为Z轴方向,平行于衍射光栅刻划方向为X轴方向,垂直于衍射光栅刻划方向为Y轴方向,方位角为绕X轴转动角度,俯仰角轴为绕Y轴转动角度。Further, the planar reflectors of different layers are arranged along the direction parallel to the reticle lines of the diffraction grating, and the planar reflectors of different layers have different placement positions, azimuth angles and elevation angles, wherein the direction of the incident light is set as the Z-axis direction, parallel to The scribed direction of the diffraction grating is the X-axis direction, the direction perpendicular to the scribed direction of the diffraction grating is the Y-axis direction, the azimuth angle is the rotation angle around the X-axis, and the pitch angle axis is the rotation angle around the Y-axis.

由于采用了上述技术方案,本实用新型提供的一种宽波段高分辨率光谱成像信息同时获取装置,可实现宽光谱波段范围、高光谱分辨率以及成像信息的同时获取。对于光学特性变化快速的目标进行光谱成像探测,实现多维信息的同时获取,可显著提升对目标的反演和识别精度。本实用新型具有较低的成本和高可靠性,将在高性能成像光谱仪中获得更广泛的推广和应用。Due to the adoption of the above technical solution, the utility model provides a device for simultaneously acquiring broadband and high-resolution spectral imaging information, which can realize simultaneous acquisition of wide spectral band range, high spectral resolution and imaging information. For targets with rapidly changing optical properties, spectral imaging detection can achieve simultaneous acquisition of multi-dimensional information, which can significantly improve the accuracy of inversion and recognition of targets. The utility model has lower cost and high reliability, and will be widely popularized and applied in high-performance imaging spectrometers.

附图说明Description of drawings

为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请中记载的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments described in this application. Those skilled in the art can also obtain other drawings based on these drawings without creative work.

图1为本实用新型装置的俯视结构示意图;Fig. 1 is the top view structure schematic diagram of the utility model device;

图2为本实用新型装置的侧视结构示意图;Fig. 2 is the side view structural representation of the utility model device;

图3为本实用新型成像光谱仪系统分层结构理想成像结果示意图。Fig. 3 is a schematic diagram of the ideal imaging result of the layered structure of the imaging spectrometer system of the present invention.

1、入射狭缝,2、准直镜、3、平面反射镜、4、衍射光栅,5、成像镜,6、面阵光电探测器。1. Incident slit, 2. Collimating mirror, 3. Plane mirror, 4. Diffraction grating, 5. Imaging mirror, 6. Area array photodetector.

具体实施方式Detailed ways

为使本实用新型的技术方案和优点更加清楚,下面结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚完整的描述:In order to make the technical solutions and advantages of the utility model clearer, the technical solutions in the embodiments of the utility model are clearly and completely described below in conjunction with the drawings in the embodiments of the utility model:

如图1-图3所示的一种宽波段高分辨率光谱成像信息同时获取装置,具体包括入射狭缝1、准直镜2、分层设置的平面反射镜3、衍射光栅4、成像镜5和面阵光电探测器6,工作状态如下:经过光谱仪入射狭缝1的辐射能量首先经过准直镜准直2,再经平面反射镜3反射、经衍射光栅4分光后最后通过成像镜5将每层对应的不同波段范围的色散光谱同时聚焦成像在面阵光电探测器6上。A device for simultaneously acquiring broadband and high-resolution spectral imaging information as shown in Figures 1-3, specifically including an incident slit 1, a collimating mirror 2, a layered plane mirror 3, a diffraction grating 4, and an imaging mirror 5 and the area array photodetector 6, the working conditions are as follows: the radiant energy passing through the incident slit 1 of the spectrometer is firstly collimated by the collimating mirror 2, then reflected by the plane mirror 3, split by the diffraction grating 4, and finally passes through the imaging mirror 5 The dispersion spectra corresponding to different wavelength ranges of each layer are focused and imaged on the area array photodetector 6 at the same time.

进一步的,根据待测目标的反射、辐射光谱范围和所要求探测的光谱分辨率确定平面反射镜3的层数。Further, the number of layers of the plane mirror 3 is determined according to the reflection of the target to be measured, the radiation spectral range and the spectral resolution required for detection.

进一步的,其中不同层面的平面反射镜3沿平行于衍射光栅刻线方向排列,不同层的平面反射镜3分别具有不同的放置位置、方位角和俯仰角,其中设入射光线方向为Z轴方向,平行于衍射光栅刻划方向为X轴方向,垂直于衍射光栅刻划方向为Y轴方向,方位角为绕X轴转动角度,俯仰角轴为绕Y轴转动角度。Further, the plane reflectors 3 of different layers are arranged along the direction parallel to the reticle lines of the diffraction grating, and the plane reflectors 3 of different layers have different placement positions, azimuth angles and elevation angles, wherein the direction of the incident light is set as the Z-axis direction , the direction parallel to the scribed direction of the diffraction grating is the X-axis direction, the direction perpendicular to the scribed direction of the diffraction grating is the Y-axis direction, the azimuth angle is the rotation angle around the X-axis, and the pitch angle axis is the rotation angle around the Y-axis.

其中经过平面反射镜3的分层出射光线对光栅具有不同的入射角,在确保光栅尺寸面积不变的情况下,同时实现多个波段范围内光谱的独立色散。Wherein the layered outgoing light rays passing through the plane reflector 3 have different incident angles to the grating, while ensuring that the size and area of the grating remain unchanged, the independent dispersion of spectra in multiple bands can be realized simultaneously.

其中平面反射镜3的每个单层结构都对应一个波段范围,利用多层平面镜之间俯仰角的不同,确保多层对应的多个不同波段范围能量汇聚成像在探测器的不同位置。Each single-layer structure of the plane mirror 3 corresponds to a waveband range, and the different pitch angles between the multilayer plane mirrors are used to ensure that the energy of multiple different waveband ranges corresponding to the multilayers is converged and imaged at different positions of the detector.

对平面反射镜3的分层设置具体采用如下方式,如把整个平面反射镜分成10层(就变成了分层反射镜),不同层平面反射镜都具有不同的放置位置、方位角和俯仰角,因此经过分层反射镜反射出来的光线对于下一个光学元件光栅来讲,具有不同的入射角,入射在光栅4的不同位置,然后入射在成像镜5的不同位置,最后入射在面阵光电探测器6的不同位置。The layered setting of the plane mirror 3 is specifically adopted in the following manner, such as dividing the entire plane mirror into 10 layers (which becomes a layered mirror), and the plane mirrors of different layers have different placement positions, azimuths and pitches Angle, so the light reflected by the layered mirror has different incident angles for the next optical element grating, incident on different positions of the grating 4, then incident on different positions of the imaging mirror 5, and finally incident on the surface array Different positions of the photodetector 6.

进一步的,平面反射镜3中的每层平面反射镜具有不同的放置位置、方位角和俯仰角,确保对应同一块衍射光栅。Further, each layer of plane mirrors in the plane mirrors 3 has different placement positions, azimuth angles and elevation angles, ensuring that they correspond to the same diffraction grating.

以上所述,仅为本实用新型较佳的具体实施方式,但本实用新型的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本实用新型揭露的技术范围内,根据本实用新型的技术方案及其实用新型构思加以等同替换或改变,都应涵盖在本实用新型的保护范围之内。The above is only a preferred embodiment of the utility model, but the scope of protection of the utility model is not limited thereto. The equivalent replacement or change of the new technical solution and the concept of the utility model shall be covered by the protection scope of the utility model.

Claims (3)

1. a kind of broadband high-resolution spectroscopy image-forming information while acquisition device, it is characterised in that including entrance slit, collimation Mirror, the plane mirror of layering setting, diffraction grating, imaging lens and face battle array photodetector, by entrance spectrometer slit Radiation energy first pass around collimating mirror collimation, then through plane mirror reflection, after diffraction grating is divided finally by imaging lens By the dispersion spectrum of every layer of corresponding different-waveband range while focal imaging is on the battle array photodetector of face.
2. a kind of broadband high-resolution spectroscopy image-forming information according to claim 1 while acquisition device, feature is also It is: plane mirror is determined according to the spectral resolution of the reflection of object to be measured, radiation spectrum range and required detection The number of plies.
3. a kind of broadband high-resolution spectroscopy image-forming information according to claim 1 while acquisition device, feature is also Be: wherein the plane mirror of different level is arranged along diffraction grating groove direction is parallel to, the plane mirror of different layers It is respectively provided with different placement locations, azimuth and pitch angle, wherein setting incident ray direction as Z-direction, is parallel to diffraction Grating ruling direction is X-direction, is Y direction perpendicular to diffraction grating delineation direction, and azimuth is to turn about the X axis angle, Pitch angle axis is around Y-axis rotational angle.
CN201920871223.3U 2019-06-11 2019-06-11 Broadband high-resolution spectral imaging information simultaneous acquisition device Withdrawn - After Issue CN209727262U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110118602A (en) * 2019-06-11 2019-08-13 李颖 Broadband high-resolution spectral imaging information simultaneous acquisition device
CN111093311A (en) * 2019-12-09 2020-05-01 中国科学院西安光学精密机械研究所 Deep ultraviolet waveband composite sensitivity spectrometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110118602A (en) * 2019-06-11 2019-08-13 李颖 Broadband high-resolution spectral imaging information simultaneous acquisition device
CN110118602B (en) * 2019-06-11 2023-10-03 大连海事大学 Device for simultaneously acquiring broadband high-resolution spectral imaging information
CN111093311A (en) * 2019-12-09 2020-05-01 中国科学院西安光学精密机械研究所 Deep ultraviolet waveband composite sensitivity spectrometer

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