CN211264068U - exposure machine - Google Patents

Abstract

The utility model provides an exposure machine, it includes: the exposure platform, it has a table surface, large-span running gear, and it includes: the large-span walking frame is arranged along the X direction and positioned above the exposure platform, and the at least one first driving mechanism drives the large-span walking frame to walk along the Y direction; the exposure assembly is arranged on the large-span walking frame and is driven by the second driving mechanism to walk along the X direction; the span of the large-span walking frame along the X direction covers the width dimension of the exposure machine, and the motion stroke of the large-span walking frame along the Y direction covers the length dimension of the exposure machine. The utility model discloses an exposure machine can be suitable for the exposure of jumbo size half tone through large-span running gear, has increased the scope of exposure. Meanwhile, the motion of the large-span walking frame is driven by adopting a double-drive mode, so that the motion stability is improved, and the exposure precision is ensured.

Description

exposure machine

technical field

The utility model relates to the technical field of exposure, in particular to an exposure machine.

Background technique

Photolithography is used to print patterns with features on the surface of a substrate. Such substrates may include substrates for the manufacture of semiconductor devices, various integrated circuits, flat panel displays (eg, liquid crystal displays), circuit boards, biochips, micromechanical electronic chips, optoelectronic circuit chips, and the like.

Direct-write lithography is a very important method in the field of semiconductor and PCB production to replace the traditional direct transfer technology of exposed images such as masks or film negatives. The size of the exposure screen is an important factor affecting the exposure technology, especially for large-size products, it is necessary to provide a matching exposure machine. In addition, in actual production, it is necessary to expose different products such as stencils, PCB boards, PS boards, etc., and a single exposure machine cannot adapt to the above-mentioned products. Therefore, it is necessary to propose further solutions for the above problems.

Utility model content

The utility model aims to provide an exposure machine to overcome the deficiencies in the prior art.

For solving the above-mentioned technical problems, the technical scheme of the present utility model is:

An exposure machine comprising:

Exposure table, which has a work surface,

A large-span traveling mechanism, comprising: a large-span traveling frame arranged along the X direction and located above the exposure table, and at least one first driving mechanism for driving the large-span traveling frame to travel along the Y direction;

an exposure assembly, which is arranged on the large-span walking frame and is driven by the second driving mechanism to travel along the X direction;

The span of the large-span traveling frame along the X direction covers the width dimension of the exposure machine, and the movement stroke of the large-span traveling frame along the Y direction covers the length dimension of the exposure machine.

As an improvement of the exposure machine of the present invention, a plurality of vacuum suction holes are also opened on the work surface of the exposure table.

As an improvement of the exposure machine of the present invention, the plurality of vacuum suction holes are evenly distributed on the work surface of the exposure table in the form of an array.

As an improvement of the exposure machine of the present invention, there are two first drive mechanisms, the two first drive mechanisms synchronously drive the large-span travel frame to travel along the Y direction, and the two first drive mechanisms are located in the exposure on the table and symmetrically distributed on both sides of the work table.

As an improvement of the exposure machine of the present invention, the first driving mechanism is a first linear motor arranged along the Y direction, which includes a mover and a stator, and the mover moves in the Y direction along the stator, The end of the large-span walking frame is connected with the mover.

As an improvement of the exposure machine of the present invention, the exposure machine further includes a clamping mechanism, which is arranged on both sides of the work table, and the clamping mechanism on either side maintains a working distance from the edge of the work table.

As an improvement of the exposure machine of the present invention, the clamping mechanism on one side is fixed and the clamping mechanism on the other side is adjusted along the X direction, or the clamping mechanisms on both sides are adjusted along the X direction.

As an improvement of the exposure machine of the present invention, there are several clamping mechanisms on either side, the clamping mechanisms on both sides are symmetrically distributed, and the clamping mechanisms on either side include a pressing cylinder.

As an improvement of the exposure machine of the present invention, the exposure assembly includes: at least one exposure lens, which is vertically arranged toward the work table.

As an improvement of the exposure machine of the present invention, the second driving mechanism is a second linear motor arranged along the X direction, which includes a mover and a stator, and the mover moves in the X direction along the stator, so The exposure assembly is connected with the mover.

Compared with the prior art, the beneficial effects of the present utility model are: the exposure machine of the present utility model can be adapted to the exposure of large-size screen plates through the large-span traveling mechanism, thereby increasing the exposure range. At the same time, the movement of the long-span walking frame is driven by the double-drive method, which is beneficial to improve the stability of the movement and ensure the accuracy of exposure.

In addition, by setting a worktable with adsorption function and setting clamping mechanisms on both sides of the worktable, small-sized products can be adsorbed through the worktable, and large-sized products can be fixed with the clamping mechanisms on both sides, thereby realizing One exposure machine can adapt to the exposure needs of different products.

Description of drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are only some embodiments described in the present utility model. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

Fig. 1 is the three-dimensional schematic diagram of one embodiment of the exposure machine of the present invention;

Fig. 2 is a perspective view of an embodiment of the exposure machine of the present invention, wherein the exposed product is a stencil;

3 is a perspective view of an embodiment of the exposure machine of the present invention, wherein the exposed product is a PCB board;

4 is a schematic perspective view of an embodiment of the exposure machine of the present invention, wherein the exposed product is a PS board.

Detailed ways

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the implementations. example. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

As shown in FIG. 1 , an exposure machine according to an embodiment of the present invention includes an exposure table 1 , a large-span traveling mechanism 2 , and an exposure assembly 3 .

The exposure table 1 is used for placing and fixing the screen plate to be exposed. Specifically, the exposure table 1 has a work surface 11 on which the screen plate to be exposed can be placed and fixed. Correspondingly, a plurality of vacuum suction holes are also opened on the work surface 11 of the exposure table 1 . In one embodiment, the plurality of vacuum suction holes are evenly distributed on the work surface 11 of the exposure table 1 in an array form, so as to provide a uniform suction and fixing force.

The large-span traveling mechanism 2 is used to adapt to the exposure of large-size screen plates, thereby increasing the exposure range.

Specifically, the large-span traveling mechanism 2 includes: a large-span traveling frame arranged along the X-direction and located above the exposure table 1, and at least one first driving mechanism 22 for driving the large-span traveling frame 21 to travel along the Y-direction .

Wherein, the span of the large-span traveling frame 21 along the X direction covers the width dimension of the exposure machine. In one embodiment, the large-span traveling frame 21 is a gantry. The movement stroke of the large-span traveling frame 21 along the Y direction covers the length dimension of the exposure machine. This ensures that the screen plates placed on the exposure table 1 are all within the exposure range.

In one embodiment, in order to ensure the stability of the movement of the large-span walking frame 21 , two first driving mechanisms 22 are used to drive the large-span walking frame 21 to move synchronously. In this embodiment, due to the use of the large-span walking frame 21, if the single-drive mode is still adopted, the two sides will be out of synchronization, the exposure accuracy will be reduced, the mechanical equipment will be easily damaged, and the overall service life of the equipment will be affected.

In this embodiment, a dual-drive mode is adopted, and the two first drive mechanisms 22 are symmetrically distributed on both sides of the work surface 11 .

Specifically, the first driving mechanism 22 is a first linear motor arranged along the Y direction, which includes a mover and a stator, the mover moves in the Y direction along the stator, and the large-span walking frame One end of 21 is connected with the mover.

As shown in FIGS. 2-4 , in order to adapt to the exposure of products of different sizes, in the exposure machine according to an embodiment of the present invention, clamping mechanisms 23 are further provided on both sides of the exposure table 1 . Therefore, when a small-sized product is exposed, it can be fixed by the worktable 11; when a large-sized product needs to be exposed, the middle area of the product can be fixed by the worktable 11, and the two sides of the product can be fixed by the clamping mechanism 23. The side edge is clamped and fixed. There are several clamping mechanisms 23 on either side, the clamping mechanisms on both sides are symmetrically distributed, and the clamping mechanisms 23 on either side include a pressing cylinder.

In one embodiment, the clamping mechanism 23 maintains a working distance from the edges on both sides of the work surface 11 . Specifically, there are several clamping mechanisms 23 on either side, the clamping mechanisms 23 on both sides are symmetrically distributed, and the clamping mechanisms 23 on either side include a pressing cylinder. The clamping mechanism 23 on one side is fixed and the clamping mechanism 23 on the other side is adjusted along the X direction. Correspondingly, the exposure table 1 is provided with a guide rail that facilitates the movable adjustment of the clamping mechanism 23 . Alternatively, the clamping mechanisms 23 on both sides can be adjusted along the X direction. In addition, the exposure table 1 is also provided with a profile 231 that plays a supporting role.

In this way, when a large-sized product needs to be fixed, the product can be first aligned with the clamping mechanism 23 on the fixed side, and the pressing cylinder of the clamping mechanism 23 on the fixed side presses one edge of the product, and then the other side The pressing cylinder of the clamping mechanism 23 is adjusted to move to an appropriate position to press and fix the other side edge of the product.

The exposure assembly 3 is used to provide light during exposure. Specifically, the exposure assembly 3 is arranged on the large-span traveling frame 21, and is driven by the second driving mechanism to travel along the X direction.

In one embodiment, the exposure assembly 3 includes: at least one exposure lens, which is vertically disposed toward the work table 11 and is accommodated and installed in a protective casing. Wherein, the second driving mechanism is a second linear motor 31 arranged along the X direction, which includes a mover and a stator, the mover moves along the stator in the X direction, and the exposure assembly 3 is connected to the The movers are connected.

To sum up, the exposure machine of the present invention can be suitable for the exposure of large-size screen plates through the large-span traveling mechanism, and the exposure range is increased. At the same time, the movement of the long-span walking frame is driven by the double-drive method, which is beneficial to improve the stability of the movement and ensure the accuracy of exposure.

In addition, by setting a worktable with adsorption function and setting clamping mechanisms on both sides of the worktable, small-sized products can be adsorbed through the worktable, and large-sized products can be fixed with the clamping mechanisms on both sides, thereby realizing One exposure machine can adapt to the exposure needs of different products.

It will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, and that the present invention may be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments are to be considered in all respects as exemplary and not restrictive, and the scope of the present invention is defined by the appended claims rather than the foregoing description, and it is therefore intended that the All changes within the meaning and range of the required equivalents are embraced within the present invention. Any reference signs in the claims shall not be construed as limiting the involved claim.

In addition, it should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims (10)

1. An exposure machine, characterized by comprising:

an exposure stage having a table top,

Large-span running gear, it includes: the large-span walking frame is arranged along the X direction and positioned above the exposure table, and the at least one first driving mechanism drives the large-span walking frame to walk along the Y direction;

the exposure assembly is arranged on the large-span walking frame and is driven by the second driving mechanism to walk along the X direction;

the span of the large-span walking frame along the X direction covers the width dimension of the exposure machine, and the motion stroke of the large-span walking frame along the Y direction covers the length dimension of the exposure machine.

2. The exposure machine of claim 1, wherein the worktable of the exposure table is further provided with a plurality of vacuum suction holes.

3. Exposure machine according to claim 2, characterised in that the vacuum suction holes are evenly distributed in an array over the work surface of the exposure table.

4. The exposure machine according to claim 1, wherein the number of the first driving mechanisms is two, two first driving mechanisms drive the large-span traveling frame to travel in the Y direction synchronously, and two first driving mechanisms are located on the exposure stage and symmetrically distributed on both sides of the work table.

5. Exposure machine according to claim 1 or 4, characterised in that the first drive means is a first linear motor arranged in the Y-direction, comprising a mover and a stator, along which the mover is moved in the Y-direction, the end of the large-span walking frame being connected to the mover.

6. Exposure machine according to claim 1, characterised in that the exposure machine further comprises clamping means which are arranged on both sides of the table top, the clamping means on either side being at a working distance from the edge of the table top on which it is arranged.

7. Exposure machine according to claim 6, characterised in that the clamping means on one side are fixedly arranged and the clamping means on the other side are adjustably arranged in the X-direction or that both clamping means are adjustably arranged in the X-direction.

8. Exposure machine according to claim 6, characterised in that: the fixture on any side is a plurality of, and the fixture symmetric distribution of both sides, the fixture on any side includes one and compresses tightly the cylinder.

9. The exposure machine according to claim 1, wherein the exposure assembly comprises: and the at least one exposure lens is vertically arranged towards the working table top.

10. Exposure machine according to claim 1, wherein the second drive means is a second linear motor arranged in the X-direction and comprising a mover and a stator, the mover being movable in the X-direction along the stator, the exposure assembly being coupled to the mover.

Images