CN217536135U - Crucible for electron beam evaporation and electron beam evaporation device - Google Patents

Abstract

The utility model discloses a crucible for electron beam evaporation and an electron beam evaporation device, which relate to the technical field of physical vapor deposition to solve the problem of low energy utilization rate of the electron beam evaporation device in the prior art. The crucible for electron beam evaporation comprises: a crucible body for accommodating the evaporation material to be deposited, and a conductive heat-preserving support covering the outer side of the crucible body, and the conductive heat-preserving support is used to heat the crucible body. The electron beam evaporation device includes the crucible for electron beam evaporation mentioned in the above technical solution. The crucible for electron beam evaporation and the electron beam evaporation device provided by the utility model are used to improve the energy utilization rate of the electron beam evaporation device.

Description

Crucible for electron beam evaporation and electron beam evaporation device

Technical Field

The utility model relates to a physical vapor deposition field especially relates to a crucible and electron beam evaporation device for electron beam evaporation.

Background

The electron beam evaporation plating utilizes the cooperation of an electromagnetic field to accurately realize the bombardment of evaporation materials in the crucible by high-energy electrons, so that the evaporation materials are heated and evaporated and then deposited on a substrate to be plated to plate a high-purity high-precision film. In the prior art, a crucible is usually a copper crucible, and the evaporation temperature of evaporation materials contained in the crucible is much lower than that of the crucible, so that the electron beam bombardment range is only on the evaporation materials, and the temperature generated by electron beam bombardment only meets the temperature required by evaporation of the evaporation materials, thereby avoiding evaporation of the crucible as much as possible. Because the temperature of crucible is higher, inconvenient direct placement is on bearing the weight of the object, causes high temperature to bear the weight of the object easily and damages, consequently, the crucible body outside is provided with water cooling system, reduces the outside temperature of crucible body through water cooling system, makes water cooling system with bear the weight of the object contact, avoids the high temperature damage to bearing the weight of the object. However, the water cooling system reduces the temperature of the crucible, and further influences the temperature of the evaporation material in the crucible, so that the energy loss of the electron beam evaporation device is large, and the utilization rate of the energy is low.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an electron beam is crucible and electron beam evaporation device for evaporation plating for improve electron beam evaporation device and to the utilization ratio of energy.

In order to achieve the above object, the present invention provides the following technical solutions:

a crucible for electron beam evaporation, comprising:

the crucible body is used for containing an evaporation material to be deposited;

and the conductive heat-insulation support is used for insulating the crucible body, and the conductive heat-insulation support is arranged on the outer side of the crucible body in a coating manner.

Compared with the prior art, the crucible for electron beam evaporation provided by the utility model comprises the conductive heat preservation support arranged outside the crucible body, which plays a role in heat preservation for the crucible body, reduces the dissipation of heat generated by electron bombardment evaporation materials in the crucible body, replaces the existing water cooling system through the conductive heat preservation support, reduces the heat loss of the crucible and improves the efficiency of electron beam heating; in addition, the conductive heat preservation support has conductivity, electrons bombarded to the evaporation material can be smoothly guided out through the conductive heat preservation support, and the conductive heat preservation support has the effect of isolating heat, so that the crucible can be conveniently placed on a bearing object through the conductive heat preservation support, and the bearing object cannot be damaged at high temperature. Based on this, the utility model provides an electron beam is crucible for coating by vaporization can improve the efficiency of electron beam heating, and then improves electron beam coating by vaporization device to the utilization ratio of energy, simultaneously, compares in prior art, and the heat loss reduces in the crucible body, and evaporation material evaporation capacity grow in the same time satisfies the electron beam coating by vaporization when evaporating the demand in batches greatly.

Optionally, in the above crucible for electron beam evaporation, the conductive heat insulating support includes a plurality of heat insulating layers disposed outside the crucible body layer by layer. Adopt a plurality of heat preservation successive layers to set up in the outside of crucible body, make the heat conduction efficiency between each heat preservation descend, reduce the heat conduction speed between each heat preservation, further reduce the heat loss, play better thermal-insulated effect, increase electron beam heating's efficiency, simultaneously, adopt the convenient manufacturing of a plurality of heat preservation.

Optionally, in the above crucible for electron beam evaporation, the insulating layer is a metal layer, a conductive ceramic layer or a graphite layer.

Under the condition of adopting above-mentioned technical scheme, metal level, conductive ceramic layer and graphite layer all have electric conductivity, can make the electron that bombards the evaporation material derive smoothly through metal level and conductive ceramic layer.

Alternatively, in the above crucible for electron beam evaporation, each adjacent two insulating layers are different.

Under the condition of adopting above-mentioned technical scheme, the material of two adjacent heat preservation is different, and the heat conductivity of the heat preservation of different materials is different, and the heat conduction efficiency between the layer descends, further reduces the heat loss.

Optionally, in the crucible for electron beam evaporation, the outermost side of the conductive heat insulating support is a graphite layer.

Under the condition of adopting the technical scheme, the graphite has good conductivity and higher melting point, so that electrons bombarded to the evaporation material can be smoothly guided out through the conductive heat-insulating support, and the graphite layer has good heat resistance and chemical stability; in addition, the thermal conductivity of the graphite is reduced along with the rise of the temperature, even at the extremely high temperature, the graphite becomes a thermal insulator, and when the graphite layer is arranged on the outermost side of the conductive heat-preservation support, the graphite layer can effectively reduce the energy loss of the conductive heat-preservation support in the electron beam evaporation process, so that the conductive heat-preservation support has better heat-preservation and heat-insulation properties, and the utilization rate of the electron beam evaporation device to energy is improved.

Optionally, in the above crucible for electron beam evaporation, every two adjacent insulating layers are abutted;

or, every two adjacent heat-insulating layers are fixedly connected through the conductive supporting piece, and a heat-insulating cavity is formed between every two adjacent heat-insulating layers.

Under the condition of adopting the technical scheme, every two adjacent heat-insulating layers are abutted, and the two adjacent heat-insulating layers are mechanically combined, so that the structure is simple and stable, and the processing and the assembly are convenient; every two adjacent heat preservation layers are fixedly connected through the conductive support piece, so that a heat insulation cavity is formed between every two adjacent heat preservation layers, heat cannot be directly transferred through the two adjacent heat preservation layers, the heat conduction efficiency between the layers is reduced, the heat dissipation is further reduced, the utilization rate of the electron beam evaporation device on energy is improved, and the conductive support piece has conductivity, so that electrons bombarded to the evaporation material can be transferred through the conductive support piece; more preferably, the conductive support member is a high temperature resistant material, and the conductive support member is guaranteed to have better chemical stability in the heat preservation process.

Optionally, in the crucible for electron beam evaporation, the conductive support is a support block disposed between adjacent insulating layers and located at the bottom of the insulating layer;

and/or, the supporting block is arranged between the adjacent heat-insulating layers and positioned on the side edge of the heat-insulating layer;

and/or a plurality of supporting ribs arranged between the adjacent heat-insulating layers.

Under the condition of adopting above-mentioned technical scheme, it is fixed through supporting shoe or support arris between the adjacent heat preservation for when being formed with thermal-insulated cavity between every two adjacent heat preservation, simple structure is stable.

Optionally, in the above crucible for electron beam evaporation, the conductive insulating support includes a first insulating layer and a second insulating layer alternately arranged at intervals; the first heat preservation layer is a metal layer, a conductive ceramic layer or a graphite layer;

the second heat-insulating layer is made of graphite felt.

Under the condition of adopting the technical scheme, the first heat-insulating layers and the second heat-insulating layers are alternately arranged at intervals, so that the heat conduction efficiency between the layers can be reduced, and the heat dissipation is reduced; the graphite felt has the performances of high temperature resistance, corrosion resistance and small heat conductivity coefficient, ensures that the second heat-insulating layer has good working stability and heat-insulating property in the working process, has certain elasticity, and improves the shock resistance of the electric conduction heat-insulating support.

Optionally, the crucible for electron beam evaporation further includes a conductive base supported and disposed at the bottom of the conductive heat insulation support, and the conductive base has a shape of a flat plate, a groove, or a cube.

Adopt under the circumstances of above-mentioned technical scheme, bear crucible body and electrically conductive heat preservation through electrically conductive base and hold in the palm for support electron beam evaporation coating and use the crucible, can drive electron beam evaporation coating and use the crucible rotation through electrically conductive base cooperation electron beam evaporation coating and coating equipment's slewing mechanism simultaneously, electrically conductive base can derive the electron in the crucible simultaneously.

Optionally, in the above crucible for electron beam evaporation, the conductive base is a metal base or a conductive ceramic base.

Under the condition of adopting above-mentioned technical scheme, metal base and electrically conductive ceramic base all have electric conductivity, can make the electron that bombards the evaporation material derive smoothly through electrically conductive base.

The utility model also provides an electron beam coating by vaporization device, including foretell crucible for electron beam coating by vaporization.

Compared with the prior art, the utility model provides an electron beam evaporation device's beneficial effect is with above-mentioned technical scheme the electron beam evaporation is the same with the beneficial effect of crucible, and the no longer elaboration is done here.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

FIG. 1 is a cross-sectional view of a crucible for electron beam evaporation in the prior art;

fig. 2 is a cross-sectional view of a crucible for electron beam evaporation according to an embodiment of the present invention;

fig. 3 is a cross-sectional view of another crucible for electron beam evaporation according to an embodiment of the present invention;

fig. 4 is a cross-sectional view of another crucible for electron beam evaporation according to an embodiment of the present invention.

Reference numerals:

1-a crucible body; 2-a water cooling system; 3-conductive heat preservation support; 31-an insulating layer; 311-graphite layer; 32-a conductive support; 4-a conductive base.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

The electron beam evaporation plating utilizes the cooperation of an electromagnetic field to accurately realize the bombardment of evaporation materials in the crucible by high-energy electrons so as to ensure that the evaporation materials are heated and evaporated and then deposited on a substrate to be plated to plate a high-purity high-precision film. In the prior art, a crucible is usually a copper crucible, the evaporation temperature of evaporation materials contained in the crucible is much lower than that of the crucible, and the evaporation materials are usually aluminum, so that when the electron beam bombardment range is ensured to be only on the evaporation materials, the temperature generated by electron beam bombardment only meets the temperature required by evaporation of the evaporation materials, and the evaporation of the crucible is avoided as much as possible. Because the temperature of crucible is higher, inconvenient direct placement is on bearing the weight of the object, cause high temperature to bear the weight of the object easily and damage, therefore, as shown in figure 1, crucible body 1 outside is provided with water cooling system 2, reduce the outside temperature of crucible body 1 through water cooling system 2, make water cooling system 2 with bear the weight of the object contact, avoid the high temperature damage to bearing the weight of the object, but water cooling system has reduced crucible body 1's temperature, and then the temperature of the evaporation material in the influence crucible body 1, make electron beam evaporation device's energy loss great, it is lower to the utilization ratio of energy.

In order to solve the above technical problem, referring to fig. 2, 3 and 4, an embodiment of the present invention provides a crucible for electron beam evaporation, hereinafter referred to as crucible, which includes a crucible body 1 and a conductive heat preservation support 3; the crucible body 1 is used for accommodating an evaporation material to be deposited, and an evaporation temperature of a material of the crucible body 1 is higher than an evaporation temperature of the evaporation material, for example, the material of the crucible body 1 may be copper, and the evaporation material may be aluminum. The conductive heat-insulating support 3 is coated on the outer side of the crucible body 1, as shown in fig. 2, the conductive heat-insulating support 3 is coated on the outer side wall and the bottom of the crucible body 1 and used for insulating the crucible body 1.

In the specific implementation process, an evaporation material to be deposited is placed in the crucible body 1, the evaporation material in the crucible is bombarded by the electron beams in the electron beam evaporation process, the evaporation material is heated and evaporated by the generated heat, and the heat is gathered in the crucible body 1 by coating the conductive heat-preservation support 3 arranged on the outer side of the crucible body 1, so that the heat dissipation is reduced, and the heat preservation and heat insulation effects are achieved; electrons bombarded to the evaporation material in the crucible can be smoothly guided out through the crucible body 1 and the conductive heat-preservation support 3.

Can know through the structure and the concrete implementation process of above-mentioned crucible, the utility model provides a pair of in crucible for electron beam evaporation, set up in the electrically conductive heat preservation in the outside of crucible body 1 holds in the palm 3, can play the thermal-insulated effect that keeps warm to the crucible, has reduced the produced thermal loss of electron bombardment evaporation material in the crucible body 1, holds in the palm 3 through electrically conductive heat preservation and has replaced current water cooling system 2, has reduced the calorific loss of crucible for the efficiency of electron beam heating improves. In addition, electrically conductive heat preservation holds in the palm 3 and has electric conductivity, and the electron that is convenient for bombard the evaporation material can hold in the palm 3 through electrically conductive heat preservation and derive smoothly, and electrically conductive heat preservation holds in the palm 3 and has isolated thermal effect to conveniently hold in the palm 3 with crucible body 1 through electrically conductive heat preservation and place on bearing the weight of the object, can not cause high temperature damage to bearing the weight of the object. Compare in prior art, heat dissipation reduces in the crucible body 1, and evaporation capacity grow of evaporation material satisfies big evaporation demand in the same time.

As shown in fig. 2, 3 and 4, further, in the present embodiment, the conductive heat-insulating support 3 includes a plurality of heat-insulating layers 31 disposed on the outer side of the crucible body 1 layer by layer. Adopt a plurality of heat preservation 31 successive layers to set up in the outside of crucible body 1, make the heat conduction efficiency between each heat preservation 31 descend, reduce the heat conduction speed between each heat preservation 31, further reduce the heat loss, play better thermal-insulated effect, the efficiency of increase electron beam heating, simultaneously, adopt a plurality of heat preservation 31 layering settings, the thickness of every heat preservation 31 is less, makes things convenient for manufacturing.

Specifically, in the above-described crucible for electron beam evaporation, the insulating layer 31 is a metal layer, a conductive ceramic layer, or a graphite layer. The metal layer, the conductive ceramic layer and the graphite layer are all conductive, so that electrons bombarded to the evaporation material can be smoothly guided out through the metal layer and the conductive ceramic layer.

Preferably, the metal layer is made of a high-temperature-resistant metal material, specifically, the metal layer may be made of high-temperature-resistant metal such as molybdenum, nickel, etc.; the conductive ceramic layer is made of high-temperature-resistant conductive ceramic, and specifically can be conductive ceramic doped with boron nitride, aluminum nitride or the like. So set up, prevent at electron beam coating by vaporization in-process, high temperature resistant metal material or high temperature resistant conductive ceramic soften the deformation under high temperature environment, guarantee that electrically conductive heat preservation holds in the palm 3 and have good stability, and can avoid the evaporation pollution of non-evaporation material as far as possible.

Specifically, in the above-described crucible for electron beam evaporation, the material of the insulating layer 31 is different between two adjacent insulating layers. So set up, the material of two adjacent heat preservation 31 is different, and the heat conductivity of the heat preservation 31 of different materials is different, and the heat conduction efficiency between the layer descends, further reduces the heat loss.

Illustratively, the conductive heat-insulating tray 3 includes a plurality of metal layers, each metal layer may be made of the same or different materials, each metal layer is independent of the other, and two adjacent metal layers are mechanically bonded without chemical mixing. Or, the conductive heat-insulating support 3 includes a plurality of conductive ceramic layers, the material of each conductive ceramic layer may be the same or different, each conductive ceramic layer is independent, and two adjacent conductive ceramic layers are mechanically combined without chemical mixing. Or, the conductive heat-preservation support 3 comprises a plurality of metal layers and a plurality of conductive ceramic layers, and the metal layers and the conductive ceramic layers can be arranged layer by layer in any order, for example, the metal layers are positioned on the inner layer, and the conductive ceramic layers are positioned on the outer layer; or the conductive ceramic layer is positioned on the inner layer, and the metal layer is positioned on the outer layer; or the metal layers and the conductive ceramic layers are alternately arranged from inside to outside, and the like, the materials of the metal layers and the conductive ceramic layers can be the same or different, and the adjacent two layers are mechanically combined without chemical mixing. Or, the conductive heat-insulating support 3 comprises a plurality of metal layers, a plurality of conductive ceramic layers and graphite layers, the metal layers, the conductive ceramic layers and the graphite layers can be arranged layer by layer in any order, the metal layers and the conductive ceramic layers can be made of the same or different materials, and the adjacent two layers are mechanically combined without chemical mixing. Because metal level, conductive ceramic layer and graphite layer all have electric conductivity, so set up, can make the electron that bombards the evaporation material lead out smoothly through electrically conductive heat preservation support 3, and metal level and conductive ceramic layer have certain heat preservation performance, and the thermal conductivity can be less than the thermal conductivity of crucible body 1.

Preferably, the conductive and thermal insulating support 3 comprises 6-10 metal layers or conductive ceramic layers, and illustratively, the conductive and thermal insulating support 3 comprises 6, 8 or 10 metal layers, or the conductive and thermal insulating support 3 comprises 6, 8 or 10 conductive ceramic layers, or the conductive and thermal insulating support 3 comprises any combination of 6, 8 or 10 metal layers and conductive ceramic layers. Through 6-10 metal layers or conductive ceramic layers, heat dissipation in the crucible body 1 can be further reduced, and the heat preservation performance is better.

In the present embodiment, the thickness of each metal layer is 0.05mm to 1mm, illustratively 0.05mm, 0.2mm, 0.4mm, 0.6mm, 0.8mm, or 1mm; each conductive ceramic layer has a thickness of 0.3mm to 2mm, and illustratively, each conductive ceramic layer has a thickness of 0.3mm, 0.7mm, 1.1mm, 1.5mm, or 2mm. Preferably, each metal layer has a thickness of 0.3mm to 0.5mm, illustratively 0.3mm, 0.4mm or 0.5mm; each of the conductive ceramic layers has a thickness of 0.8mm to 1mm, and illustratively, each of the conductive ceramic layers has a thickness of 0.8mm, 0.9mm, or 1mm. So set up, when guaranteeing that electrically conductive heat preservation holds in the palm 3 whole heat preservation performances, reduce electrically conductive heat preservation and hold in the palm 3 whole thickness.

Specifically, as shown in fig. 4, in the above-described crucible for electron beam evaporation, the outermost side of the conductive heat retaining plate 3 is a graphite layer 311. The graphite has good conductivity and higher melting point, so that electrons bombarded to the evaporation material can be smoothly guided out through the conductive heat-preservation support 3, and the electrons cannot be melted or deformed in the heat-preservation process; in addition, the thermal conductivity of the graphite is reduced along with the rise of the temperature, even at the extremely high temperature, the graphite becomes a thermal insulator, and when the graphite layer 311 is arranged on the outermost side of the conductive heat-preservation support 3, the graphite layer 311 can effectively reduce the energy dissipation of the conductive heat-preservation support 3 in the process of electron beam evaporation, so that the conductive heat-preservation support 3 has better heat-preservation and heat-insulation properties, and the utilization rate of the electron beam evaporation device to energy is improved.

Alternatively, as shown in fig. 3, in the above-mentioned crucible for electron beam evaporation, two adjacent insulating layers 31 are abutted. So arranged, every two adjacent heat-insulating layers 31 are abutted, two adjacent heat preservation 31 mechanical bond, simple structure is stable, and the processing equipment is convenient.

As another alternative, as shown in fig. 2, in the crucible for electron beam evaporation, each two adjacent insulating layers 31 are fixedly connected by a conductive support 32, a heat insulation cavity is formed between each two adjacent insulating layers 31, and the conductive support 32 is made of a high temperature resistant material. With the arrangement, each two adjacent heat-insulating layers 31 are fixedly connected with each other through the conductive support member 32, so that a heat-insulating cavity is formed between each two adjacent heat-insulating layers 31, heat cannot be directly transferred through the two adjacent heat-insulating layers 31, the heat conduction efficiency between layers is reduced, heat dissipation is further reduced, the utilization rate of the electron beam evaporation device on energy is improved, and the conductive support member 32 has conductivity, so that electrons bombarded to an evaporation material can be conveniently transferred through the conductive support member 32; preferably, the conductive support 32 is made of a high temperature conductive material, so that the conductive support 32 is not melted or deformed during the heat preservation process.

As an optional mode, in the crucible for electron beam evaporation, the conductive support 32 includes a support block disposed between the adjacent insulating layers 31 and located at the bottom of the insulating layer 31, and/or a support block disposed between the adjacent insulating layers 31 and located at the side of the insulating layer 31; illustratively, the conductive supporting member 32 includes a supporting block disposed between the adjacent insulating layers 31 at the bottom of the insulating layer 31, or the conductive supporting member 32 includes a supporting block disposed between the adjacent insulating layers 31 at the side of the insulating layer 31, or the conductive supporting member 32 includes a supporting block disposed between the adjacent insulating layers 31 at the bottom of the insulating layer 31 and at the side of the insulating layer 31.

As another alternative, in the above-mentioned crucible for electron beam evaporation, the conductive support 32 includes a plurality of support ribs disposed between the adjacent insulating layers 31.

According to the structure of the crucible for electron beam evaporation, the adjacent heat preservation layers 31 are fixed through the supporting blocks or the supporting edges, so that a heat insulation cavity is formed between every two adjacent heat preservation layers 31, and the structure is simple and stable.

As shown in fig. 3, the present embodiment provides another crucible for electron beam evaporation, wherein the conductive heat insulating support 3 includes a first heat insulating layer and a second heat insulating layer alternately disposed at an interval; the first heat preservation layer is a metal layer, a conductive ceramic layer or a graphite layer, and the second heat preservation layer is a graphite felt.

According to the structure of the crucible for electron beam evaporation, the first heat-insulating layer and the second heat-insulating layer are alternately arranged at intervals, so that the heat conduction efficiency between the layers can be reduced, and the heat dissipation is reduced; the graphite felt has the performances of high temperature resistance, corrosion resistance and small heat conductivity coefficient, ensures that the second heat-insulating layer has good working stability and heat-insulating property in the working process, has certain elasticity, and improves the shock resistance of the conductive heat-insulating support 3.

Further, in this embodiment, the above-mentioned crucible for electron beam evaporation further includes a conductive base 4 supported and disposed at the bottom of the conductive heat-insulating holder 3, and the shape of the conductive base 4 includes a flat plate shape, a groove shape or a cubic shape. So set up, bear crucible body 1 and electrically conductive heat preservation through electrically conductive base 4 and hold in the palm 3 for support the crucible for electron beam evaporation, can drive the crucible rotation for electron beam evaporation through electrically conductive base 4 cooperation electron beam evaporation equipment's slewing mechanism, electrically conductive base 4 can derive the electron in the crucible simultaneously.

Specifically, in the above crucible for electron beam evaporation, the conductive susceptor 4 is a metal susceptor or a conductive ceramic susceptor. The metal base and the conductive ceramic base both have conductivity, and electrons bombarded to the evaporation material can be smoothly led out through the conductive base 4.

Based on the described crucible for electron beam evaporation of above arbitrary embodiment, the embodiment of the utility model provides a still provides an electron beam evaporation device, including crucible and electron beam generating equipment, wherein, the crucible is the described crucible for electron beam evaporation of above arbitrary embodiment.

Compared with the prior art, the utility model provides an electron beam evaporation device's beneficial effect and above-mentioned technical scheme the electron beam evaporation is with the beneficial effect of crucible the same, and the no longer repeated description is done here.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (9)

1. A crucible for electron beam evaporation, comprising:

the crucible body is used for accommodating an evaporation material to be deposited;

the conductive heat-insulation support is used for insulating the crucible body, and is coated on the outer side of the crucible body; the conductive heat-insulating support comprises a plurality of heat-insulating layers which are arranged on the outer side of the crucible body layer by layer.

2. The crucible for electron beam evaporation according to claim 1, wherein the insulating layer is a metal layer, a conductive ceramic layer, or a graphite layer.

3. The crucible for electron beam evaporation according to claim 1, wherein each of the adjacent two insulating layers is different.

4. The crucible for electron beam evaporation according to claim 2, wherein the outermost side of the conductive heat retaining plate is a graphite layer.

5. The crucible for electron beam evaporation according to any one of claims 1 to 4, wherein each adjacent two of the insulating layers abut against each other;

or every two adjacent heat-insulating layers are connected through a conductive support piece, so that a heat-insulating cavity is formed between every two adjacent heat-insulating layers.

6. The crucible for electron beam evaporation according to claim 5, wherein the conductive support member is a support block disposed between the adjacent insulating layers and at the bottom of the insulating layers;

and/or the supporting blocks are arranged between the adjacent heat-insulating layers and positioned on the side edges of the heat-insulating layers;

and/or a plurality of supporting ribs arranged between adjacent heat-insulating layers.

7. The crucible for electron beam evaporation according to claim 1, wherein the conductive insulating holder includes a first insulating layer and a second insulating layer alternately arranged at intervals; the first heat-preservation layer is a metal layer, a conductive ceramic layer or a graphite layer;

the second heat-insulating layer is a graphite felt.

8. The crucible for electron beam evaporation according to claim 1, further comprising a conductive susceptor that is supported by a bottom of the conductive heat insulating holder.

9. An electron beam evaporation apparatus comprising a crucible, wherein the crucible is the crucible for electron beam evaporation according to any one of claims 1 to 8.

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