CN218242548U - High energy dual wavelength laser - Google Patents

High energy dual wavelength laser Download PDF

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CN218242548U
CN218242548U CN202222454107.6U CN202222454107U CN218242548U CN 218242548 U CN218242548 U CN 218242548U CN 202222454107 U CN202222454107 U CN 202222454107U CN 218242548 U CN218242548 U CN 218242548U
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wave plate
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刘民哲
赵坤
翟瑞占
贾中青
王丽莎
刘梦霖
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Laser Research Institute
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Abstract

The application provides a large-energy dual-wavelength laser, include: the laser oscillation module comprises a pyramid prism, the output end of the pyramid prism is sequentially provided with a polarizer, a first laser module and a Gaussian mirror, the input end of the pyramid prism is sequentially provided with an electro-optic Q-switch, a 1/4 wave plate and a reflector, nanosecond pulse laser generated in the laser oscillation module transmits the Gaussian mirror, and the first laser module is a semiconductor rod-shaped laser crystal side pump; the laser frequency doubling polarization switching module comprises a first half-wave plate and a first polaroid, wherein the first half-wave plate is arranged on an input light path of the first polaroid, a frequency doubling crystal and a third half-wave plate are sequentially arranged on a transmission light path of the first polaroid, a second polaroid is arranged on a reflection light path of the first polaroid, and a second half-wave plate is arranged on a reflection light path of the second polaroid. The laser is more suitable for the fields of laser ranging, laser photoelectric countermeasure, atmospheric detection and the like, and has higher requirements on the laser.

Description

大能量双波长激光器High energy dual wavelength laser

技术领域technical field

本申请涉及激光器技术领域,尤其涉及一种大能量双波长激光器。The present application relates to the technical field of lasers, in particular to a high-energy dual-wavelength laser.

背景技术Background technique

随着固体激光技术的发展,大能量固体激光器在越来越多的领域得到广泛应用,进而在激光测距、激光光电对抗、大气探测等领域对激光器的稳定性、可靠性以及环境适用性提出更高的要求,即对激光器的性能提升提出了更高的要求。With the development of solid-state laser technology, high-energy solid-state lasers have been widely used in more and more fields, and then the stability, reliability and environmental applicability of lasers in the fields of laser ranging, laser photoelectric countermeasures, and atmospheric detection have been proposed. Higher requirements, that is, higher requirements are put forward for the performance improvement of lasers.

为了适应激光测距、激光光电对抗、大气探测等领域对激光器性能的更高要求,目前提出了通过提升双波长激光输出的能量以及偏振可切换的技术思路。In order to meet the higher requirements for laser performance in the fields of laser ranging, laser photoelectric countermeasures, and atmospheric detection, a technical idea of increasing the output energy and polarization of dual-wavelength lasers has been proposed.

实用新型内容Utility model content

本申请提供了一种大能量双波长激光器,以便适应于激光测距、激光光电对抗、大气探测等领域对激光器的更高要求。This application provides a high-energy dual-wavelength laser to meet the higher requirements for lasers in the fields of laser ranging, laser photoelectric countermeasures, and atmospheric detection.

本申请提供的一种大能量双波长激光器,包括:激光振荡模块和激光倍频偏振切换模块,所述激光振荡模块和所述激光倍频偏振切换模块光连接,所述激光振荡模块用于产生波长为1064nm的纳秒脉冲激光,所述激光倍频偏振切换模块用于输出双波长偏振态可切换的激光;其中:A high-energy dual-wavelength laser provided by the present application includes: a laser oscillation module and a laser frequency doubling polarization switching module, the laser oscillation module and the laser frequency doubling polarization switching module are optically connected, and the laser oscillation module is used to generate A nanosecond pulsed laser with a wavelength of 1064nm, the laser frequency doubling polarization switching module is used to output a dual-wavelength polarization state switchable laser; wherein:

所述激光振荡模块包括角锥棱镜,所述角锥棱镜的输出端依次设置偏振器、第一激光模块和高斯镜,所述角锥棱镜的输入端依次设置电光调Q开关、1/4波片和反射镜,所述激光振荡模块内产生的纳秒脉冲激光透射所述高斯镜,所述第一激光模块为半导体棒状激光晶体侧面泵浦;The laser oscillation module includes a corner cube, the output of the corner cube is sequentially provided with a polarizer, the first laser module and a Gaussian mirror, and the input of the corner cube is sequentially provided with an electro-optical Q-switching switch, a 1/4 wave sheet and reflector, the nanosecond pulse laser generated in the laser oscillation module is transmitted through the Gaussian mirror, and the first laser module is side-pumped by a semiconductor rod-shaped laser crystal;

所述激光倍频偏振切换模块包括第一半波片和第一偏振片,所述第一半波片设置在所述第一偏振片的输入光路上,所述第一偏振片的透射光路上依次设置倍频晶体和第三半波片,所述第一偏振片的反射光路上设置第二偏振片,所述第二偏振片的反射光路上设置第二半波片。The laser frequency doubling polarization switching module includes a first half-wave plate and a first polarizer, the first half-wave plate is arranged on the input optical path of the first polarizer, and the transmission optical path of the first polarizer is A frequency doubling crystal and a third half-wave plate are set in sequence, a second polarizer is set on the reflection optical path of the first polarizer, and a second half-wave plate is set on the reflection light path of the second polarizer.

可选的,上述大能量双波长激光器中,还包括激光放大模块,所述激光放大模块设置在所述激光振荡模块到所述激光倍频偏振切换模块的传输光路上,用于所述激光振荡模块输出纳秒脉冲激光的能量放大;Optionally, the above-mentioned high-energy dual-wavelength laser further includes a laser amplification module, the laser amplification module is arranged on the transmission optical path from the laser oscillation module to the laser frequency doubling polarization switching module, and is used for the laser oscillation Energy amplification of nanosecond pulsed laser output by the module;

所述激光放大模块包括依次设置第一隔离器,第一扩束镜、第二激光模块、第二隔离器、第二扩束镜、第三激光模块、旋光器和第四激光模块;所述第二激光模块、第三激光模块和第四激光模块为板条侧面泵浦。The laser amplification module includes sequentially setting a first isolator, a first beam expander, a second laser module, a second isolator, a second beam expander, a third laser module, an optical rotator and a fourth laser module; The second laser module, the third laser module and the fourth laser module are slab side pumped.

可选的,上述大能量双波长激光器中,所述激光振荡模块还包括Optionally, in the above-mentioned high-energy dual-wavelength laser, the laser oscillation module also includes

第一45°反射镜,所述激光放大模块还包括第二45°反射镜、第三45°反射镜、第四45°反射镜和第五45°反射镜,所述激光倍频偏振切换模块包括第六45°反射镜;The first 45° reflector, the laser amplification module also includes a second 45° reflector, a third 45° reflector, a fourth 45° reflector and a fifth 45° reflector, the laser frequency doubling polarization switching module Including the sixth 45° reflector;

所述第二45°反射镜设置在所述第一45°反射镜的反射光路以及所述第一隔离器的入射光路上;所述第三45°反射镜和所述第四45°反射镜设置在所述第二激光模块和所述第二隔离器之间,且所述第三45°反射镜设置在所述第二激光模块的输出光路上,所述第四45°反射镜设置在所述第三45°反射镜的反射光路以及所述第二隔离器的入射光路上;所述第五45°反射镜设置在所述第四激光模块的输出光路上,所述第六45°反射镜设置在所述第五45°反射镜的反射光路上,且所述第六45°反射镜设置在第一半波片的输入光路上。The second 45° reflector is arranged on the reflected light path of the first 45° reflector and the incident light path of the first isolator; the third 45° reflector and the fourth 45° reflector It is arranged between the second laser module and the second isolator, and the third 45° reflector is arranged on the output optical path of the second laser module, and the fourth 45° reflector is arranged on The reflected light path of the third 45° reflector and the incident light path of the second isolator; the fifth 45° reflector is arranged on the output light path of the fourth laser module, and the sixth 45° The reflector is arranged on the reflected optical path of the fifth 45° reflector, and the sixth 45° reflector is arranged on the input optical path of the first half-wave plate.

可选的,上述大能量双波长激光器中,所述激光倍频偏振切换模块还包括第七45°反射镜和二向色镜,所述第七45°反射镜设置在所述第二半波片的输出光路上,所述二向色镜设置在所述第三半波片的输出光路上且位于所述第七45°反射镜的反射光路上。Optionally, in the above-mentioned high-energy dual-wavelength laser, the laser frequency doubling polarization switching module further includes a seventh 45° reflector and a dichroic mirror, and the seventh 45° reflector is arranged at the second half-wavelength On the output optical path of the plate, the dichroic mirror is arranged on the output optical path of the third half-wave plate and on the reflection optical path of the seventh 45° reflector.

可选的,上述大能量双波长激光器中,所述激光倍频偏振切换模块还包括聚焦透镜和准直透镜,所述聚焦透镜设置在所述第一偏振片和所述倍频晶体之间,所述准直透镜设置在所述倍频晶体和所述第三半波片之间。Optionally, in the above-mentioned high-energy dual-wavelength laser, the laser frequency doubling polarization switching module further includes a focusing lens and a collimating lens, and the focusing lens is arranged between the first polarizer and the frequency doubling crystal, The collimator lens is arranged between the frequency doubling crystal and the third half-wave plate.

可选的,上述大能量双波长激光器中,所述第二激光模块包括58个巴条,每个巴条功率为120W,单模块峰值功率为7000W,泵浦脉宽为270μs,板条晶体尺寸为155mm×40mm×6.5mm,两端未掺杂部分长度分别为10mm,中间部分Nd3+的掺杂浓度为0.5%。Optionally, in the above-mentioned high-energy dual-wavelength laser, the second laser module includes 58 bars, the power of each bar is 120W, the peak power of a single module is 7000W, the pump pulse width is 270μs, and the crystal size of the bars is It is 155mm×40mm×6.5mm, the lengths of undoped parts at both ends are 10mm respectively, and the doping concentration of Nd 3+ in the middle part is 0.5%.

可选的,上述大能量双波长激光器中,所述第三激光模块和所述第四激光模块均包括83个巴条,每个巴条功率为120W,单模块峰值功率为10000W,泵浦脉宽为270μs,板条晶体尺寸为180mm×50mm×8.5mm,两端未掺杂部分长度分别为15mm,中间部分Nd3+的掺杂浓度为0.7%。Optionally, in the above-mentioned high-energy dual-wavelength laser, the third laser module and the fourth laser module both include 83 bars, the power of each bar is 120W, and the peak power of a single module is 10000W. The width is 270μs, the size of the slab crystal is 180mm×50mm×8.5mm, the lengths of the undoped parts at both ends are 15mm respectively, and the doping concentration of Nd 3+ in the middle part is 0.7%.

可选的,上述大能量双波长激光器中,所述电光调Q开关波长300~1100nm,电压消光比>2000:1,1/4电压3.3kV,损伤阈值>500MW/cm2;所述1/4波片的镀膜中心波长1064nm,损伤阈值>20J/cm2Optionally, in the above-mentioned high-energy dual-wavelength laser, the wavelength of the electro-optic Q-switched switch is 300-1100 nm, the voltage extinction ratio is >2000:1, the 1/4 voltage is 3.3 kV, and the damage threshold is >500 MW/cm 2 ; the 1/ The coating center wavelength of the 4-wave plate is 1064nm, and the damage threshold is >20J/cm 2 .

可选的,上述大能量双波长激光器中,所述第一激光模块包括半导体泵浦和激光晶体,所述半导体泵浦波长为809.6nm,光谱宽度为1.4~2nm,单模块峰值功率为5000W,泵浦脉宽为300μs;所述激光晶体为Nd:YAG圆柱棒状晶体,Nd3+的掺杂浓度为0.5%,长度75~85mm,端面直径5~7mm,镀膜透过率>99%,损伤阈值>5GW/cm2Optionally, in the above-mentioned high-energy dual-wavelength laser, the first laser module includes a semiconductor pump and a laser crystal, the wavelength of the semiconductor pump is 809.6 nm, the spectral width is 1.4-2 nm, and the peak power of a single module is 5000 W. The pump pulse width is 300μs; the laser crystal is Nd:YAG cylindrical rod crystal, the doping concentration of Nd 3+ is 0.5%, the length is 75-85mm, the end face diameter is 5-7mm, the transmittance of the coating is >99%, and the damage Threshold >5GW/cm 2 .

可选的,上述大能量双波长激光器中,所述激光振荡模块还包括固定件,所述反射镜和所述高斯镜共同设置在所述固定件上。Optionally, in the above-mentioned high-energy dual-wavelength laser, the laser oscillation module further includes a fixing member, and the reflecting mirror and the Gaussian mirror are jointly arranged on the fixing member.

本申请提供的大能量双波长激光器,通过激光振荡模块和激光倍频偏振切换模块结合实现激光器输出偏振态可切换的双波长激光。在激光振荡模块中使用角锥棱镜进行纳秒脉冲激光折转构成U型折叠腔结构,既能有助于控制激光振荡模块的尺寸,便于使用,又能提升激光器的效率。且激光振荡模块中结合使用高斯镜有利于对有源介质的宽填充和在硬边孔上的弱衍射,有助于提升激光振荡模块输出激光近场和远场的光束质量。在激光倍频偏振切换模块中倍频晶体结合使用第一半波片、第二半波片和第三半波片实现纳秒脉冲激光的倍频以及偏振态切换。因此本申请提供的大能量双波长激光器,更加适用于激光测距、激光光电对抗、大气探测等领域对激光器的更高要求。The high-energy dual-wavelength laser provided by this application realizes the dual-wavelength laser with switchable polarization state output by the laser through the combination of a laser oscillation module and a laser frequency doubling polarization switching module. In the laser oscillation module, a corner cube prism is used to fold the nanosecond pulse laser to form a U-shaped folded cavity structure, which can not only help control the size of the laser oscillation module, facilitate use, but also improve the efficiency of the laser. Moreover, the combined use of Gaussian mirrors in the laser oscillation module is beneficial to wide filling of the active medium and weak diffraction on hard-edged holes, and helps to improve the beam quality of the near-field and far-field output lasers output by the laser oscillation module. In the laser frequency doubling polarization switching module, the frequency doubling crystal uses the first half-wave plate, the second half-wave plate and the third half-wave plate to realize the frequency doubling and polarization state switching of the nanosecond pulse laser. Therefore, the high-energy dual-wavelength laser provided by this application is more suitable for the higher requirements for lasers in the fields of laser ranging, laser photoelectric countermeasures, and atmospheric detection.

附图说明Description of drawings

为了更清楚地说明本申请实施例的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments or prior art. Obviously, the accompanying drawings in the following description are only some of the present application. Embodiments, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

图1为根据本申请一些实施例提供的一种大能量双波长激光器的结构示意图;FIG. 1 is a schematic structural diagram of a high-energy dual-wavelength laser provided according to some embodiments of the present application;

图2为根据本申请一些实施例提供的一种角锥棱镜的结构示意图;FIG. 2 is a schematic structural diagram of a corner cube provided according to some embodiments of the present application;

图3为根据本申请一些实施例提供的另一种大能量双波长激光器的结构示意图;FIG. 3 is a schematic structural diagram of another high-energy dual-wavelength laser provided according to some embodiments of the present application;

图4为根据本申请一些实施例提供的一种第二激光模块的结构示意图;Fig. 4 is a schematic structural diagram of a second laser module provided according to some embodiments of the present application;

图5为根据本申请一些实施例提供的一种大能量双波长激光器的最大输出能量及稳定性测试图;Fig. 5 is a maximum output energy and stability test diagram of a high-energy dual-wavelength laser provided according to some embodiments of the present application;

图6(a)为根据本申请一些实施例提供的一种激光波长曲线图一;Figure 6(a) is a laser wavelength curve diagram 1 provided according to some embodiments of the present application;

图6(b)为根据本申请一些实施例提供的一种激光波长曲线图二;Figure 6(b) is a laser wavelength graph 2 provided according to some embodiments of the present application;

图7为根据本申请一些实施例提供的一种大能量双波长激光器的输出激光脉冲宽度图。Fig. 7 is a diagram of the output laser pulse width of a high-energy dual-wavelength laser according to some embodiments of the present application.

其中:in:

100-激光振荡模块,101-角锥棱镜,102-偏振器,103-第一激光模块,104-高斯镜,105-电光调Q开关,106-1/4波片,107-反射镜,108-第一45°反射镜,200-倍频偏振切换模块,201-第一半波片,202-第一偏振片,203-倍频晶体,204-第三半波片,205-第二偏振片,206-第二半波片,207-聚焦透镜,208-准直透镜,209-反射镜,210-二向色镜,211-第六45°反射镜,300-激光放大模块,301-第一隔离器,302-第一扩束镜,303-第二激光模块,3031-第一热沉结构,3032-单侧面半导体泵浦阵列,3033-板条晶体,3034-第二热沉结构;304-第二隔离器,305-第二扩束镜,306-第三激光模块,307-旋光器,308-第四激光模块,309-第三45°反射镜,310-第四45°反射镜,311-第二45°反射镜,312-第五45°反射镜。100-laser oscillation module, 101-cube prism, 102-polarizer, 103-first laser module, 104-Gaussian mirror, 105-electro-optic Q-switch, 106-1/4 wave plate, 107-mirror, 108 -The first 45° mirror, 200-frequency doubling polarization switching module, 201-the first half-wave plate, 202-the first polarizer, 203-frequency doubling crystal, 204-the third half-wave plate, 205-the second polarization 206-second half-wave plate, 207-focusing lens, 208-collimating lens, 209-mirror, 210-dichroic mirror, 211-sixth 45°reflecting mirror, 300-laser amplification module, 301- The first isolator, 302-the first beam expander, 303-the second laser module, 3031-the first heat sink structure, 3032-single-sided semiconductor pump array, 3033-slab crystal, 3034-the second heat sink structure ; 304-the second isolator, 305-the second beam expander, 306-the third laser module, 307-optical rotator, 308-the fourth laser module, 309-the third 45° reflector, 310-the fourth 45° Reflector, 311-the second 45° reflector, 312-the fifth 45° reflector.

具体实施方式detailed description

为了使本技术领域的人员更好地理解本公开中的技术方案,下面将结合本公开实施例中的附图,对本公开实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本公开一部分实施例,而不是全部实施例。基于本公开中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本公开保护的范围。In order to enable those skilled in the art to better understand the technical solutions in the present disclosure, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described The embodiments are only some of the embodiments of the present disclosure, not all of them. Based on the embodiments in the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present disclosure.

图1为根据一些实施例提供的一种大能量双波长激光器的结构示意图。如图1所示,本申请实施例提供的大能量双波长激光器包括激光振荡模块100和激光倍频偏振切换模块200;激光振荡模块100用于产生1064nm的纳秒脉冲激光,激光倍频偏振切换模块200用于激光倍频和偏振态切换,以输出双波长偏振态可切换的激光;激光振荡模块100光连接激光倍频偏振切换模块200,激光振荡模块100产生的1064nm纳秒脉冲激光传输至激光倍频偏振切换模块200。在一些实施例中,激光振荡模块100产生的1064nm纳秒脉冲激光经能量放大后再传输至激光倍频偏振切换模块200。Fig. 1 is a schematic structural diagram of a high-energy dual-wavelength laser provided according to some embodiments. As shown in Figure 1, the high-energy dual-wavelength laser provided by the embodiment of the present application includes a laser oscillation module 100 and a laser frequency doubling polarization switching module 200; The module 200 is used for laser frequency doubling and polarization state switching to output dual-wavelength polarization state switchable laser; the laser oscillation module 100 is optically connected to the laser frequency doubling polarization switching module 200, and the 1064nm nanosecond pulse laser generated by the laser oscillation module 100 is transmitted to Laser frequency doubling polarization switching module 200. In some embodiments, the 1064nm nanosecond pulse laser generated by the laser oscillation module 100 is energy amplified and then transmitted to the laser frequency doubling polarization switching module 200 .

如图1所示,在一些实施例中,激光振荡模块100包括角锥棱镜101,角锥棱镜101用于实现激光振荡模块100的腔折叠,实现激光振荡模块100的平凹折叠腔设计,一方面能够替代两片及以上反射镜,减小激光器的体积,更加有利于实际应用;另一方面基于角锥棱镜的结构优势,提升激光器的光束质量和效率。As shown in Figure 1, in some embodiments, the laser oscillation module 100 includes a corner cube prism 101, the corner cube prism 101 is used to realize the cavity folding of the laser oscillation module 100, and realize the plano-concave folding cavity design of the laser oscillation module 100, a On the one hand, it can replace two or more mirrors, reduce the volume of the laser, and is more conducive to practical applications; on the other hand, based on the structural advantages of the corner cube, the beam quality and efficiency of the laser can be improved.

图2为根据一些实施例提供的一种角锥棱镜的结构示意图。如图2所示,角锥棱镜101的一端设置有三个互相垂直的反射面、另一端设置一个入射面,激光振荡模块100内激光自角锥棱镜101的入射面进入角锥棱镜101内,在角锥棱镜101的三个反射面上进行三次全反射,进而出射光总是平行于入射光但与入射光传输方向相反,光束在棱镜上的出射位置与入射位置总是相对于棱镜的光轴对称,即使激光入射角度不是零度,仍将被180°反射,对入射角的不敏感特性,能够大大提升激光振荡模块100结构的机械稳定性。Fig. 2 is a schematic structural diagram of a corner cube provided according to some embodiments. As shown in Figure 2, one end of the corner cube prism 101 is provided with three mutually perpendicular reflective surfaces, and the other end is provided with an incident surface, and the laser light in the laser oscillator module 100 enters the corner cube prism 101 from the incident surface of the corner cube prism 101, and The three reflective surfaces of the corner cube prism 101 perform three total reflections, and then the outgoing light is always parallel to the incident light but opposite to the transmission direction of the incident light, and the outgoing position and incident position of the light beam on the prism are always relative to the optical axis of the prism Symmetrical, even if the incident angle of the laser is not zero, it will still be reflected by 180°, and the insensitivity to the incident angle can greatly improve the mechanical stability of the structure of the laser oscillation module 100 .

在本申请一些实施例中,角锥棱镜101包括输入端和输出端,输入端和输出端穿过入射面,由于光路的可逆性,角锥棱镜101的输入端不限于用于向角锥棱镜101输入光、输出端不限于用于从角锥棱镜101向外输出光,即角锥棱镜101的输入端既能输入激光又能输出激光、角锥棱镜101的输出端既能输出激光又能输入激光。In some embodiments of the present application, the corner cube 101 includes an input end and an output end, and the input end and the output end pass through the incident surface. Due to the reversibility of the optical path, the input end of the corner cube prism 101 is not limited to be used for the direction of the corner cube prism. 101 The input light and the output end are not limited to be used to output light from the corner cube prism 101, that is, the input end of the corner cube prism 101 can both input laser light and output laser light, and the output end of the corner cube prism 101 can output laser light and can also output laser light. Enter the laser.

在本申请一些实施例中,角锥棱镜101的参数根据实际光路需求设计;示例地,外径d与高度h比例约为1.3,如外径d为150mm,高度h为115mm;三个相互垂直平面的角度公差<2′;波前畸变<λ/10@1064nm。In some embodiments of the present application, the parameters of the corner cube prism 101 are designed according to the actual optical path requirements; for example, the ratio of the outer diameter d to the height h is about 1.3, such as the outer diameter d is 150mm, and the height h is 115mm; three mutually perpendicular The angle tolerance of the plane is <2′; the wavefront distortion is <λ/10@1064nm.

在本申请一些实施例中,角锥棱镜101的输出端依次设置偏振器102、第一激光模块103和高斯镜104。第一激光模块103用于激光振荡模块100产生纳秒脉冲激光提供泵浦源和增益介质;偏振器102用于调整传输光路中激光的偏振态,保证激光振荡模块100输出的纳秒脉冲激光偏振态为线偏振;高斯镜104用于输出波长为1064nm的纳秒脉冲激光。In some embodiments of the present application, a polarizer 102 , a first laser module 103 , and a Gaussian mirror 104 are sequentially arranged at the output end of the corner cube prism 101 . The first laser module 103 is used for the laser oscillation module 100 to generate the nanosecond pulse laser to provide the pump source and the gain medium; the polarizer 102 is used to adjust the polarization state of the laser in the transmission optical path to ensure the polarization of the nanosecond pulse laser output by the laser oscillation module 100 The state is linearly polarized; the Gaussian mirror 104 is used to output nanosecond pulsed laser light with a wavelength of 1064nm.

在本申请一些实施例中,角锥棱镜101的输入端依次设置电光调Q开关105、1/4波片106和反射镜107。1/4波片106设置于电光调Q开关105和反射镜107之间,电光调Q开关105和1/4波片106共同实现激光器的加压式激光输出调节。反射镜107用作激光振荡模块的腔镜,镀膜中心波长为1064nm,反射率>99.9%。示例地,反射镜107采用平面反射镜。In some embodiments of the present application, the input end of the corner cube prism 101 is provided with an electro-optic Q-switching switch 105, a 1/4 wave plate 106 and a mirror 107 in sequence. The 1/4 wave plate 106 is arranged on the electro-optic Q-switching switch 105 and the mirror Between 107, the electro-optic Q-switching switch 105 and the 1/4 wave plate 106 jointly realize the pressurized laser output adjustment of the laser. The mirror 107 is used as the cavity mirror of the laser oscillation module, the central wavelength of the coating is 1064nm, and the reflectivity is >99.9%. Exemplarily, the mirror 107 is a plane mirror.

在一些实施例中,第一激光模块103为半导体棒状激光晶体侧面泵浦,便于使第一激光模块103具有较高的光束质量,有利于使激光振荡模块产生的纳秒脉冲激光具有较小的发散角,可以延长激光测距的范围等以适用于各领域对激光器更广的应用。示例地,第一激光模块103包括半导体泵浦和激光晶体,半导体泵浦波长为809.6nm,光谱宽度为1.4~2nm,单模块峰值功率为5000W,泵浦脉宽为300μs;激光晶体为Nd:YAG圆柱棒状晶体,Nd3+的掺杂浓度为0.5%,长度75~85mm,端面直径5~7mm,镀膜透过率>99%,损伤阈值>5GW/cm2@1064nm。In some embodiments, the first laser module 103 is side-pumped by a semiconductor rod-shaped laser crystal, so that the first laser module 103 has a higher beam quality, and the nanosecond pulse laser generated by the laser oscillation module has a smaller The divergence angle can extend the range of laser ranging, etc., so that it is suitable for wider applications of lasers in various fields. Exemplarily, the first laser module 103 includes a semiconductor pump and a laser crystal, the wavelength of the semiconductor pump is 809.6nm, the spectral width is 1.4-2nm, the peak power of a single module is 5000W, and the pump pulse width is 300μs; the laser crystal is Nd: YAG cylindrical rod-shaped crystal, Nd 3+ doping concentration is 0.5%, length 75-85mm, end face diameter 5-7mm, coating transmittance>99%, damage threshold>5GW/cm 2 @1064nm.

高斯镜104用作激光振荡模块100的激光腔镜,与传统方案采用的凹面反射镜相比,由于斯镜104是根据超高斯函数提供的圆对称反射率分布,在中心具有最高的反射率值,尤其对于非稳定平凹激光谐振腔来讲,非常有利于对有源介质的宽填充和在硬边孔上的弱衍射,因此更有助于更好的近场和远场光束质量。在一些实施例中,高斯镜104的镀膜中心波长为1064nm,基材材料为熔融石英,直径>4mm,激光损伤阈值>10J/cm2@1064nm,反射率65%~85%,曲率半径-800~-1300mm。The Gaussian mirror 104 is used as the laser cavity mirror of the laser oscillation module 100. Compared with the concave mirror used in the traditional solution, the Gaussian mirror 104 has a circularly symmetric reflectivity distribution provided by a super-Gaussian function, and has the highest reflectivity value in the center , especially for unstable plano-concave laser resonators, it is very beneficial to wide filling of active medium and weak diffraction on hard-edge holes, so it is more conducive to better near-field and far-field beam quality. In some embodiments, the coating center wavelength of the Gaussian mirror 104 is 1064nm, the base material is fused silica, the diameter is >4mm, the laser damage threshold is >10J/cm 2 @1064nm, the reflectivity is 65%-85%, and the radius of curvature is -800 ~-1300mm.

电光调Q开关105的电光调Q方式通常分为退压式和加压式两种,相比之下,加压式工作方式有利于电光晶体(硅酸镓镧、偏硼酸钡、磷酸二氢钾、铌酸锂)的使用寿命。具体实施方式为:通过调节第二延时控制高压在电光晶体上的持续时间,瞬间退掉λ/4电压,腔内阈值迅速提高,恢复到关断状态,通过调节λ/4电压的持续时间,对激光脉冲后延进行“斩断”,调节输出激光脉冲宽度。对于1/4波片,镀膜中心波长1064nm,损伤阈值>20J/cm2;电光调Q开关,波长300~1100nm,电压消光比>2000:1,1/4电压3.3kV,损伤阈值>500MW/cm2@1064nm,10ns。The electro-optic Q-switching method of the electro-optic Q-switching switch 105 is usually divided into two types: depressurization type and pressurization type. Potassium, lithium niobate) service life. The specific implementation method is: by adjusting the second time delay to control the duration of the high voltage on the electro-optic crystal, the λ/4 voltage is instantly withdrawn, the threshold in the cavity is rapidly increased, and it returns to the off state. By adjusting the duration of the λ/4 voltage , to "cut off" the laser pulse delay, and adjust the output laser pulse width. For 1/4 wave plate, coating center wavelength is 1064nm, damage threshold > 20J/cm 2 ; electro-optic Q-switched switch, wavelength 300-1100nm, voltage extinction ratio > 2000:1, 1/4 voltage 3.3kV, damage threshold > 500MW/ cm 2 @1064nm, 10ns.

在本申请实施例中,激光振荡模块100用于产生波长为1064nm的纳秒脉冲激光,进而在激光振荡模块100产生纳秒脉冲激光的过程中,激光在激光振荡模块100的谐振腔内振荡,最终由高斯镜104输出,激光振荡模块100能够实现的能量输出>120mJ@1064nm,15.5ns。In the embodiment of the present application, the laser oscillation module 100 is used to generate nanosecond pulse laser with a wavelength of 1064nm, and then in the process of generating nanosecond pulse laser by the laser oscillation module 100, the laser oscillates in the resonant cavity of the laser oscillation module 100, Finally, it is output by the Gaussian mirror 104, and the energy output that the laser oscillation module 100 can achieve is >120mJ@1064nm, 15.5ns.

在本申请一些实施例中,激光振荡模块100还包括固定件,高斯镜104和反射镜107共同设置在固定件上,用于协同调整高斯镜104和反射镜107的位置,有效降低外界温、湿度计振动对高斯镜104和反射镜107的位置产生扰动,便于进一步提升激光振荡模块100光路的稳定性。示例地,固定件具有较小的热膨胀系数。In some embodiments of the present application, the laser oscillation module 100 also includes a fixing part, and the Gaussian mirror 104 and the reflecting mirror 107 are arranged on the fixing part together, and are used to coordinately adjust the positions of the Gaussian mirror 104 and the reflecting mirror 107, effectively reducing the external temperature, The vibration of the hygrometer disturbs the positions of the Gaussian mirror 104 and the reflective mirror 107 , so as to further improve the stability of the optical path of the laser oscillation module 100 . Exemplarily, the fixing element has a small coefficient of thermal expansion.

激光倍频偏振切换模块200包括第一半波片201和第一偏振片202,第一半波片201设置在第一偏振片202的输入光路上,第一偏振片202的透射光路上依次倍频晶体203和第三半波片204,第一偏振片202的反射光路上依次设置第二偏振片205和第二半波片206,第二半波片206设置在第二偏振片205的反射光路上。The laser frequency doubling polarization switching module 200 includes a first half-wave plate 201 and a first polarizer 202, the first half-wave plate 201 is arranged on the input optical path of the first polarizer 202, and the transmission optical path of the first polarizer 202 is successively multiplied frequency crystal 203 and the third half-wave plate 204, the second polarizer 205 and the second half-wave plate 206 are arranged in turn on the reflection optical path of the first polarizer 202, and the second half-wave plate 206 is arranged on the reflection of the second polarizer 205 on the light path.

纳秒脉冲激光传输至激光倍频偏振切换模块200,经第一半波片201旋转后传输至第一偏振片202,该激光按照偏振态被第一偏振片202分为两束,P偏振光透射第一偏振片202并在第一偏振片202的透射光路上传输,S偏振光被第一偏振片202反射并在第一偏振片202的反射光路上传输。第一偏振片202透射光路上的激光传输至倍频晶体203,经倍频晶体203产生532nm的倍频激光。第一偏振片202反射光路上的激光经第二偏振片205反射,与第一偏振片202透射光路上的激光平行,使输出的双波长激光能够同向传输,便于使用。The nanosecond pulse laser is transmitted to the laser frequency doubling polarization switching module 200, and then transmitted to the first polarizer 202 after being rotated by the first half-wave plate 201. The laser is divided into two beams by the first polarizer 202 according to the polarization state, and the P polarized light The S-polarized light is reflected by the first polarizer 202 and transmitted on the reflection optical path of the first polarizer 202 . The laser light on the optical path transmitted by the first polarizer 202 is transmitted to the frequency doubling crystal 203, and the frequency doubling crystal 203 generates a 532nm frequency doubling laser. The laser light on the optical path reflected by the first polarizer 202 is reflected by the second polarizer 205, and is parallel to the laser light on the optical path transmitted by the first polarizer 202, so that the output dual-wavelength laser can be transmitted in the same direction, which is convenient for use.

在本申请实施例中,第一半波片201的镀膜中心波长为1064nm,用于旋转改变激光在P和S两个线偏振方向上的能量比,以实现最终输出1064nm和532nm波长下的能量可调;第三半波片204的镀膜中心波长为532nm,用于通过旋转改变偏振态,实现S和P两个偏振态的自由切换;第二半波片206的镀膜中心波长为1064nm,用于通过旋转改变偏振态,实现S和P两个偏振态的自由切换。示例地,第一半波片201、第三半波片204和第二半波片206采用消色差零级波片,优点是具有极高的损伤阈值,同时在波长范围内受环境影响不敏感,提升激光系统工程稳定性,材质均为氟化镁晶体,相位延迟精度需<λ/120,波前畸变<λ/8,损伤阈值>2GW/cm2,10J/cm2,20ns。In the embodiment of the present application, the central wavelength of the coating of the first half-wave plate 201 is 1064nm, which is used to rotate and change the energy ratio of the laser in the two linear polarization directions of P and S, so as to achieve the final output energy at the wavelength of 1064nm and 532nm Adjustable; the central wavelength of the coating of the third half-wave plate 204 is 532nm, which is used to change the polarization state through rotation to realize the free switching of the two polarization states of S and P; the central wavelength of the coating of the second half-wave plate 206 is 1064nm. In order to change the polarization state by rotation, the free switching between S and P polarization states can be realized. For example, the first half-wave plate 201, the third half-wave plate 204, and the second half-wave plate 206 use an achromatic zero-order wave plate, which has the advantage of having a very high damage threshold and being insensitive to environmental influences in the wavelength range , to improve the engineering stability of the laser system, the material is magnesium fluoride crystal, the phase delay accuracy should be <λ/120, the wavefront distortion should be <λ/8, and the damage threshold should be >2GW/cm 2 , 10J/cm 2 , 20ns.

第一偏振片202和第二偏振片205协作用于将激光中的P偏振光和S偏振光分开。示例地,第一偏振片202和第二偏振片205,偏振消光比>25dB,损伤阈值>20J/cm2The first polarizer 202 and the second polarizer 205 cooperate to separate P-polarized light and S-polarized light in the laser. Exemplarily, the first polarizer 202 and the second polarizer 205 have a polarization extinction ratio>25dB and a damage threshold>20J/cm 2 .

在本申请一些实施例中,倍频晶体203采用KTP晶体,KTP晶体与透射第一偏振片202的光轴成45°角,KTP晶体的端面镀膜透过率>99.8%@532nm,以便于获得最佳的倍频效率以及避免二次谐波输出波动。In some embodiments of the present application, the frequency doubling crystal 203 adopts a KTP crystal, the KTP crystal forms an angle of 45° with the optical axis that transmits the first polarizer 202, and the transmittance of the end face coating of the KTP crystal is >99.8%@532nm, so as to obtain Optimum frequency doubling efficiency and avoidance of second harmonic output fluctuations.

在本申请一些实施例中,激光倍频偏振切换模块200还包括聚焦透镜207和准直透镜208;聚焦透镜207设置在第一偏振片202和倍频晶体203之间,用于将透射第一偏振片202的激光聚焦传输至倍频晶体203;准直透镜208设置在倍频晶体203和第三半波片204之间,用于将倍频晶体203倍频输出的激光准直传输至第三半波片204。聚焦透镜207和准直透镜208能够有效调整倍频激光传输光路上的光斑大小。聚焦透镜207和准直透镜208的参数具体根据倍频晶体和实际需求设计,聚焦透镜207的透过率>99.9%@1064nm,损伤阈值>15J/cm2,准直透镜208的透过率>99.9%@532,损伤阈值>15J/cm2In some embodiments of the present application, the laser frequency doubling polarization switching module 200 further includes a focusing lens 207 and a collimating lens 208; The laser focusing of the polarizer 202 is transmitted to the frequency doubling crystal 203; the collimating lens 208 is arranged between the frequency doubling crystal 203 and the third half-wave plate 204, and is used to collimate and transmit the laser beam output by the frequency doubling crystal 203 to the first half-wave plate 204 Three-half wave plate 204. The focusing lens 207 and the collimating lens 208 can effectively adjust the spot size on the transmission optical path of the frequency-doubled laser. The parameters of the focusing lens 207 and the collimating lens 208 are specifically designed according to the frequency doubling crystal and actual needs. The transmittance of the focusing lens 207 is >99.9%@1064nm, the damage threshold is >15J/cm 2 , and the transmittance of the collimating lens 208 is > 99.9%@532, damage threshold >15J/cm 2 .

在本申请一些实施例中,激光倍频偏振切换模块200还包括第七45°反射镜209和二向色镜210,第七45°反射镜209设置在第二半波片206的输出光路上,二向色镜210设置在第七45°反射镜209的反射光路上且位于第三半波片204的输出光路上,二向色镜210用于透射第三半波片204输出的激光以及反射第七45°反射镜209反射的激光。二向色镜210用于激光倍频偏振切换模块200的最终输出镜,以实现波长1064nm激光和532nm激光同光路输出。示例地,二向色镜210镀膜参数为反射率>99.5@1064nm,同时透过率>99%@532nm。第七45°反射镜209的反射率>99.9%@1064nm,以及损伤阈值>20J/cm2In some embodiments of the present application, the laser frequency doubling polarization switching module 200 further includes a seventh 45° reflector 209 and a dichroic mirror 210, and the seventh 45° reflector 209 is arranged on the output optical path of the second half-wave plate 206 , the dichroic mirror 210 is arranged on the reflection optical path of the seventh 45° reflector 209 and is located on the output optical path of the third half-wave plate 204, and the dichroic mirror 210 is used for transmitting the laser light output by the third half-wave plate 204 and Reflect the laser light reflected by the seventh 45° reflector 209 . The dichroic mirror 210 is used as the final output mirror of the laser frequency doubling polarization switching module 200 to realize the output of the laser with a wavelength of 1064nm and the laser with a wavelength of 532nm in the same optical path. Exemplarily, the coating parameters of the dichroic mirror 210 are reflectance>99.5@1064nm and transmittance>99%@532nm. The reflectivity of the seventh 45° mirror 209 is >99.9%@1064nm, and the damage threshold is >20J/cm 2 .

本申请实施例提供的大能量双波长激光器,可实现单波长下S偏振或P偏振激光的输出,有助于满足不同的应用需求。The high-energy dual-wavelength laser provided in the embodiment of the present application can realize the output of S-polarized or P-polarized laser light at a single wavelength, which helps to meet different application requirements.

在本申请一些实施例中,激光振荡模块100产生的1064nm纳秒脉冲激光经激光放大模块能量放大后再传输至激光倍频偏振切换模块200。图3为根据一些实施例提供的另一种大能量双波长激光器的结构示意图。如图3所示,本申请实施例提供的大能量双波长激光器中还包括激光放大模块300,激光放大模块300设置在激光振荡模块100到激光倍频偏振切换模块200的传输光路上,用于激光振荡模块100产生的1064nm纳秒脉冲激光的能量放大,以进一步保证大能量双波长激光器能够具有大能量的激光输出。In some embodiments of the present application, the 1064nm nanosecond pulse laser generated by the laser oscillation module 100 is amplified by the laser amplification module and then transmitted to the laser frequency doubling polarization switching module 200 . Fig. 3 is a schematic structural diagram of another high-energy dual-wavelength laser provided according to some embodiments. As shown in FIG. 3 , the high-energy dual-wavelength laser provided in the embodiment of the present application also includes a laser amplification module 300, and the laser amplification module 300 is arranged on the transmission optical path from the laser oscillation module 100 to the laser frequency doubling polarization switching module 200 for The energy amplification of the 1064nm nanosecond pulsed laser generated by the laser oscillation module 100 further ensures that the high-energy dual-wavelength laser can have high-energy laser output.

示例地,如图3所示,在本申请一些实施例提供的激光放大模块300中,包括依次设置的第一隔离器301、第一扩束镜302、第二激光模块303、第二隔离器304、第二扩束镜305、第三激光模块306、旋光器307和第四激光模块308。但本申请实施例中,激光放大模块300不局限于图3中所示的结构。For example, as shown in FIG. 3 , in the laser amplification module 300 provided in some embodiments of the present application, a first isolator 301 , a first beam expander 302 , a second laser module 303 , and a second isolator are arranged in sequence. 304 , a second beam expander 305 , a third laser module 306 , an optical rotator 307 and a fourth laser module 308 . However, in the embodiment of the present application, the laser amplification module 300 is not limited to the structure shown in FIG. 3 .

在本申请实施例中,激光振荡模块100产生的1064nm纳秒脉冲激光,传输至激光放大模块300,依次经过第一隔离器301、第一扩束镜302、第二激光模块303、第二隔离器304、第二扩束镜305、第三激光模块306、旋光器307和第四激光模块308,最后实现激光能量的放大。In the embodiment of the present application, the 1064nm nanosecond pulse laser generated by the laser oscillation module 100 is transmitted to the laser amplification module 300, and passes through the first isolator 301, the first beam expander 302, the second laser module 303, and the second isolator in sequence. 304, the second beam expander 305, the third laser module 306, the optical rotator 307 and the fourth laser module 308, and finally realize the amplification of laser energy.

第一隔离器301用于阻隔第一隔离器301后端光路中自发辐射等产生的返回光反射回其前段的光路中,对第一隔离器301前端光路中的器件产生损害,以便于提升大能量双波长激光器的使用寿命。示例地,第一隔离器301的中心波长镀膜为1064nm,通光孔径10~20mm,损伤阈值>10J/cm2@1064nm,透过率>94%,峰值隔离度>35dB。The first isolator 301 is used to prevent the return light generated by spontaneous radiation in the optical path at the rear end of the first isolator 301 from being reflected back into the optical path at the front end of the first isolator 301, causing damage to the devices in the optical path at the front end of the first isolator 301, so as to facilitate large Lifetime of Energy Dual Wavelength Lasers. For example, the center wavelength coating of the first isolator 301 is 1064nm, the aperture is 10-20mm, the damage threshold is >10J/cm 2 @1064nm, the transmittance is >94%, and the peak isolation is >35dB.

第一扩束镜302用于将通过了第一隔离器301的激光进行扩束准直。通过第一扩束镜302扩束准直的激光光斑具有更大的模体积,能够使激光光斑直径与第二激光模块303的尺寸相匹配。示例地,第一扩束镜302的镜片镀膜对于1064nm激光损伤阈值>20J/cm2,扩束倍率1.2~1.5倍,扩束后光斑直径4.2~5.3mm,使传输在激光放大模块300的激光高耦合率的耦合进入第二激光模块303。The first beam expander 302 is used to expand and collimate the laser beam passing through the first isolator 301 . The laser spot expanded and collimated by the first beam expander 302 has a larger mode volume, which can match the diameter of the laser spot with the size of the second laser module 303 . As an example, the lens coating of the first beam expander 302 is 1064nm laser damage threshold>20J/cm 2 , the beam expansion magnification is 1.2-1.5 times, and the spot diameter after beam expansion is 4.2-5.3mm, so that the laser beam transmitted in the laser amplification module 300 The high coupling ratio is coupled into the second laser module 303 .

第二隔离器304用于阻隔第二隔离器304后端光路中自发辐射等产生的返回光反射回其前段的光路中,以防止返回光对第二隔离器304前端光路中的器件产生损害,以便于提升大能量双波长激光器的使用寿命。示例地,第二隔离器304的中心波长镀膜为1064nm,通光孔径10~20mm,损伤阈值>10J/cm2@1064nm,透过率>94%,峰值隔离度>35dB。The second isolator 304 is used to block the return light generated by spontaneous radiation in the optical path at the rear end of the second isolator 304 from being reflected back into the optical path at the front section, so as to prevent the returned light from damaging the devices in the optical path at the front end of the second isolator 304, In order to improve the service life of the high-energy dual-wavelength laser. For example, the center wavelength coating of the second isolator 304 is 1064nm, the aperture is 10-20mm, the damage threshold is >10J/cm 2 @1064nm, the transmittance is >94%, and the peak isolation is >35dB.

第二扩束镜305用于将通过了第二隔离器304的激光进行扩束准直。通过第二扩束镜305扩束准直的激光光斑具有更大的模体积,能够使激光光斑直径与第三激光模块306的尺寸相匹配。示例地,第二扩束镜305的镜片镀膜对于1064nm激光损伤阈值>20J/cm2,扩束倍率1.5~2倍,扩束后光斑直径5.3~7mm,使传输在激光放大模块300的激光高耦合率的耦合进入第三激光模块306。The second beam expander 305 is used to expand and collimate the laser beam passing through the second isolator 304 . The laser spot expanded and collimated by the second beam expander 305 has a larger mode volume, which can match the diameter of the laser spot with the size of the third laser module 306 . For example, the lens coating of the second beam expander 305 has a damage threshold of 1064nm laser > 20J/cm 2 , the beam expansion ratio is 1.5-2 times, and the spot diameter after beam expansion is 5.3-7mm, so that the laser beam transmitted in the laser amplification module 300 has a high The outcoupling of the coupling ratio enters the third laser module 306 .

旋光器307用于旋转线偏振光的偏振方向,提高激光放大能量,其中心波长为1064nm,旋转角为90°,透过率>99.5%。The optical rotator 307 is used to rotate the polarization direction of the linearly polarized light to increase the laser amplification energy. Its central wavelength is 1064nm, the rotation angle is 90°, and the transmittance is >99.5%.

在本申请实施例中,第二激光模块303、第三激光模块306和第四激光模块308是实现激光振荡模块100产生的1064nm纳秒脉冲激光放大的核心部件。示例地,第二激光模块303、第三激光模块306和第四激光模块308为板条侧面泵浦,既能有助于保证光束质量优势,又能兼备热效应低、转换效率高、体积小、寿命长等优点。In the embodiment of the present application, the second laser module 303 , the third laser module 306 and the fourth laser module 308 are the core components to realize the amplification of the 1064nm nanosecond pulse laser generated by the laser oscillation module 100 . As an example, the second laser module 303, the third laser module 306, and the fourth laser module 308 are slab-side pumped, which can not only help to ensure the advantages of beam quality, but also have low thermal effect, high conversion efficiency, small volume, Long life and other advantages.

图4为根据一些实施例提供的一种第二激光模块的结构示意图。如图4所示,第二激光模块303包括第一热沉结构3031、单侧面半导体泵浦阵列3032、板条晶体3033和第二热沉结构3034。单侧面半导体泵浦阵列3032的外侧紧贴第一热沉结构3031,泵浦光中心波长为809.2nm,沿着实线箭头方向由顶部入射到板条晶体3033。板条晶体3033采用键合晶体结构,两端为非掺杂的YAG,中间结构掺杂Nd3+,端面切角为45°,激光在板条内部为“之”字形,能够有效减少热效应,提高能量放大效率和控制光束质量。第二热沉结构3034与板条晶体3033紧密接触,通过高效率的水冷散热方式,对晶体实施精确温控,以防止光束质量受热效应影响而迅速恶化。第三激光模块306和第四激光模块308的结构可参见第二激光模块303的结构。Fig. 4 is a schematic structural diagram of a second laser module provided according to some embodiments. As shown in FIG. 4 , the second laser module 303 includes a first heat sink structure 3031 , a single-side semiconductor pump array 3032 , a slab crystal 3033 and a second heat sink structure 3034 . The outside of the single-sided semiconductor pumping array 3032 is in close contact with the first heat sink structure 3031, and the center wavelength of the pumping light is 809.2nm, which is incident on the slab crystal 3033 from the top along the direction of the solid arrow. The slab crystal 3033 adopts a bonded crystal structure, both ends are non-doped YAG, the middle structure is doped with Nd 3+ , the cut angle of the end face is 45°, and the laser is zigzag inside the slab, which can effectively reduce the thermal effect. Improve energy amplification efficiency and control beam quality. The second heat sink structure 3034 is in close contact with the slab crystal 3033, and through high-efficiency water cooling and heat dissipation, the crystal is precisely temperature-controlled to prevent the quality of the beam from rapidly deteriorating due to thermal effects. The structures of the third laser module 306 and the fourth laser module 308 may refer to the structure of the second laser module 303 .

在本申请一些实施例中,第二激光模块303包括58个巴条,每个巴条功率为120W,单模块峰值功率为7000W,泵浦脉宽为270μs,板条晶体尺寸为155mm×40mm×6.5mm,两端未掺杂部分长度分别为10mm,中间部分Nd3+的掺杂浓度为0.5%,前置激光经过第二激光模块303能量可放大至270mJ,对应提取效率约为7.9%。第三激光模块306和第四激光模块308均包括采用83个巴条,每个巴条功率为120W,单模块峰值功率为10000W,泵浦脉宽为270μs,板条晶体尺寸为180mm×50mm×8.5mm,两端未掺杂部分长度分别为15mm,中间部分Nd3+的掺杂浓度为0.7%,可将激光能量进一步提升至700mJ,对应提取效率约为10.7%。In some embodiments of the present application, the second laser module 303 includes 58 bars, the power of each bar is 120W, the peak power of a single module is 7000W, the pump pulse width is 270μs, and the crystal size of the bars is 155mm×40mm× 6.5mm, the length of the undoped part at both ends is 10mm, the doping concentration of Nd 3+ in the middle part is 0.5%, the energy of the front laser can be amplified to 270mJ through the second laser module 303, and the corresponding extraction efficiency is about 7.9%. The third laser module 306 and the fourth laser module 308 both include 83 bars, the power of each bar is 120W, the peak power of a single module is 10000W, the pump pulse width is 270μs, and the crystal size of the bars is 180mm×50mm× 8.5mm, the length of the undoped part at both ends is 15mm, and the doping concentration of Nd 3+ in the middle part is 0.7%, which can further increase the laser energy to 700mJ, and the corresponding extraction efficiency is about 10.7%.

在本申请一些实施例中,激光放大模块300还包括第三45°反射镜309和第四45°反射镜310,第三45°反射镜309和第四45°反射镜310设置在第二激光模块303和第二隔离器304之间,第三45°反射镜309设置在第二激光模块303的输出光路上,第四45°反射镜310设置在第三45°反射镜309的反射光路上,第二隔离器304设置在第四45°反射镜310的反射光路上。第三45°反射镜309和第四45°反射镜310配合实现激光放大模块300中激光折返,以构成U形光路结构,减少激光放大模块300的尺寸,进而减少大能量双波长激光器的体积。示例地,第三45°反射镜309和第四45°反射镜310的镀膜反射率>99.9%@1064nm,损伤阈值>20J/cm2In some embodiments of the present application, the laser amplification module 300 further includes a third 45° reflector 309 and a fourth 45° reflector 310, and the third 45° reflector 309 and the fourth 45° reflector 310 are arranged on the second laser Between the module 303 and the second isolator 304, the third 45° reflector 309 is arranged on the output light path of the second laser module 303, and the fourth 45° reflector 310 is arranged on the reflection light path of the third 45° reflector 309 , the second isolator 304 is disposed on the reflection light path of the fourth 45° mirror 310 . The third 45° reflector 309 and the fourth 45° reflector 310 cooperate to realize the laser return in the laser amplification module 300 to form a U-shaped optical path structure, reduce the size of the laser amplification module 300, and further reduce the volume of the high-energy dual-wavelength laser. Exemplarily, the coating reflectivity of the third 45° mirror 309 and the fourth 45° mirror 310 is >99.9%@1064nm, and the damage threshold is >20J/cm 2 .

在本申请一些实施例中,激光振荡模块100还包括第一45°反射镜108,激光放大模块300还包括第二45°反射镜311,第一45°反射镜108设置在高斯镜104的输出光路上,第二45°反射镜311设置在第一45°反射镜108的反射光路上且第二45°反射镜311位于第一隔离器301的输入光路上,进而经第二45°反射镜311反射的激光传输至第一隔离器301。第一45°反射镜108和第二45°反射镜311实现激光振荡模块100产生激光到激光放大模块300传输时的光路折返,有助于控制大能量双波长激光器的尺寸大小。示例地,第一45°反射镜108和第二45°反射镜311的反射率>99.9%@1064nm,以及损伤阈值>20J/cm2In some embodiments of the present application, the laser oscillation module 100 also includes a first 45° reflector 108, the laser amplification module 300 also includes a second 45° reflector 311, and the first 45° reflector 108 is arranged on the output of the Gaussian mirror 104 On the optical path, the second 45° reflector 311 is arranged on the reflection optical path of the first 45° reflector 108 and the second 45° reflector 311 is located on the input optical path of the first isolator 301, and then passes through the second 45° reflector The laser light reflected by 311 is transmitted to the first isolator 301 . The first 45° reflector 108 and the second 45° reflector 311 realize the reentry of the optical path when the laser light generated by the laser oscillation module 100 is transmitted to the laser amplifier module 300 , which helps to control the size of the high-energy dual-wavelength laser. Exemplarily, the reflectivity of the first 45° mirror 108 and the second 45° mirror 311 is >99.9%@1064nm, and the damage threshold is >20J/cm 2 .

在本申请一些实施例中,激光放大模块300还包括第五45°反射镜312,激光倍频偏振切换模块200还包括第六45°反射镜211,第五45°反射镜312设置在第四激光模块308的输出光路上,第六45°反射镜211设置在第五45°反射镜312的反射光路上且第六45°反射镜211设置在第一半波片201的输入光路上,进而经第六45°反射镜211反射的激光传输至第一半波片201。第五45°反射镜312和第六45°反射镜211实现激光放大模块300能量放大后激光到激光倍频偏振切换模块200传输时的光路折返,有助于进一步控制大能量双波长激光器的尺寸大小。示例地,第五45°反射镜312和第六45°反射镜211的反射率>99.9%@1064nm,以及损伤阈值>20J/cm2In some embodiments of the present application, the laser amplification module 300 also includes a fifth 45° reflector 312, the laser frequency doubling polarization switching module 200 also includes a sixth 45° reflector 211, and the fifth 45° reflector 312 is arranged on the fourth On the output light path of the laser module 308, the sixth 45° reflector 211 is arranged on the reflected light path of the fifth 45° reflector 312 and the sixth 45° reflector 211 is arranged on the input light path of the first half-wave plate 201, and then The laser light reflected by the sixth 45° mirror 211 is transmitted to the first half-wave plate 201 . The fifth 45° reflector 312 and the sixth 45° reflector 211 realize the reentry of the optical path when the laser beam is amplified by the laser amplification module 300 and transmitted to the laser frequency doubling polarization switching module 200, which helps to further control the size of the high-energy dual-wavelength laser size. Exemplarily, the reflectivity of the fifth 45° mirror 312 and the sixth 45° mirror 211 is >99.9%@1064nm, and the damage threshold is >20J/cm 2 .

图5为根据本申请一些实施例提供的一种大能量双波长激光器的最大输出能量图。如图5所示,通过采用Ophir公司的能量计(PE25BF-C)测试本申请实施例大能量双波长激光器的激光输出能量,激光振荡器产生激光能量120.7mJ,经过激光放大器能量提升至723.5mJ,且最大输出能量下4小时内能量不稳定性<1.83%rms。Fig. 5 is a maximum output energy diagram of a high-energy dual-wavelength laser provided according to some embodiments of the present application. As shown in Figure 5, by using the energy meter (PE25BF-C) of Ophir Company to test the laser output energy of the high-energy dual-wavelength laser of the embodiment of the present application, the laser oscillator generates laser energy of 120.7mJ, which is increased to 723.5mJ through the laser amplifier , and the energy instability within 4 hours under the maximum output energy is <1.83% rms.

通过设置激光衰减模块对能量进行衰减,然后采用YOKOGAWA(AQ6373B)光谱分析仪测试输出激光波长。图6(a)为根据本申请一些实施例提供的一种激光波长曲线图一,图6(b)为根据本申请一些实施例提供的一种激光波长曲线图二。如图6(a)所示和图6(b)所示,大能量双波长激光器产生的双波长激光的波长分别为1064.43nm和532.11nm,完全满足使用需求。Attenuate the energy by setting the laser attenuation module, and then use the YOKOGAWA (AQ6373B) spectrum analyzer to test the output laser wavelength. Fig. 6(a) is a laser wavelength graph 1 provided according to some embodiments of the present application, and Fig. 6(b) is a laser wavelength graph 2 provided according to some embodiments of the present application. As shown in Figure 6(a) and Figure 6(b), the wavelengths of the dual-wavelength lasers generated by the high-energy dual-wavelength laser are 1064.43nm and 532.11nm respectively, fully meeting the use requirements.

图7为根据本申请一些实施例提供的一种大能量双波长激光器的输出激光脉冲宽度数据图。如图7所示,采用RIGOL(DS2302A)示波器和Thorlabs(DET10A/M)硅基探测器实测最大能量输出激光的脉冲宽度达到18.3ns。因此本申请实施例提供大能量双波长激光器,能够实现线偏振大能量激光输出。Fig. 7 is a graph of output laser pulse width data of a high-energy dual-wavelength laser according to some embodiments of the present application. As shown in Figure 7, using RIGOL (DS2302A) oscilloscope and Thorlabs (DET10A/M) silicon-based detector to measure the pulse width of the maximum energy output laser reaches 18.3ns. Therefore, the embodiment of the present application provides a high-energy dual-wavelength laser, which can realize linearly polarized high-energy laser output.

大能量双波长激光器通常采用腔内多介质串接的方法虽然能够实现几百mJ单脉冲能量激光输出,但是其重复频率通常低于20Hz,另外由于采用谐振腔技术路线时,激光在谐振腔内往返振荡,多次经过具有畸变的激光介质,激光经往返多次后光束质量迅速恶化,较大的发散角严重影响激光测距的范围和精度。本申请将采用Nd:YAG侧面泵浦振荡器和两级侧面泵浦板条放大器的MOPA激光放大方法,能够兼具高光束质量和高能量输出的优势,最终解决目前50~100Hz重复频率下双波长激光能量进一步提升的难题,可实现1064nm和532nm双波长达到700mJ及以上能量输出。High-energy dual-wavelength lasers usually adopt the method of intracavity multi-media series connection, although they can achieve a single pulse energy laser output of several hundred mJ, but their repetition frequency is usually lower than 20Hz. The back-and-forth oscillation, passing through the distorted laser medium many times, the beam quality deteriorates rapidly after the laser goes back and forth many times, and the large divergence angle seriously affects the range and accuracy of laser ranging. This application will adopt the MOPA laser amplification method of Nd:YAG side-pumped oscillator and two-stage side-pumped slab amplifier, which can have the advantages of high beam quality and high energy output, and finally solve the problem of double laser amplification at the current repetition rate of 50-100Hz. The problem of further increasing the wavelength laser energy can achieve 1064nm and 532nm dual wavelengths to achieve energy output of 700mJ and above.

本实施例提供的大能量双波长激光器,还可以实现两种波长下不同偏振搭配的激光输出。以激光振荡模块100和激光放大器200输出的激光为P线偏振光为例进行说明。The high-energy dual-wavelength laser provided in this embodiment can also realize laser output with different polarization combinations at two wavelengths. The laser beam output by the laser oscillator module 100 and the laser amplifier 200 is P linearly polarized light as an example for illustration.

微调第一半波片,使激光由第一偏振片全部反射,再经由第二偏振片、第二半波片和第七45°全反镜,最终由二向色镜输出,测试1064nm单波长激光最大能量711.4mJ,能量略有降低主要来自于光学器件镀膜损耗,4小时内能量不稳定性<1.52%rms,通过调整第二半波片分别实现了S和P线偏振光输出,输出能量几乎一致;采用>30dB高偏振消光比的偏振分光棱镜分别对两种线偏振激光进行分光测试,偏振消光比均>22dB。说明本申请能够实现大能量1064nm激光输出,且能够对偏振态自由切换。Fine-tune the first half-wave plate so that the laser is fully reflected by the first polarizer, then passes through the second polarizer, the second half-wave plate, and the seventh 45° full-reflection mirror, and finally output by the dichroic mirror, testing 1064nm single wavelength The maximum energy of the laser is 711.4mJ. The slight decrease in energy is mainly due to the coating loss of the optical device. The energy instability within 4 hours is <1.52% rms. By adjusting the second half-wave plate, the output of S and P linearly polarized light is realized respectively, and the output energy Almost the same; the polarization extinction ratio of >30dB and high polarization extinction ratio is used to split the two kinds of linearly polarized laser beams respectively, and the polarization extinction ratio is >22dB. It shows that this application can realize high-energy 1064nm laser output, and can freely switch the polarization state.

微调第一半波片,将激光偏振态调成P线偏振光,经由第一偏振片透射,由于二向色镜对1064nm激光全反,因此最终实现532nm单一波长激光,最大能量391.3mJ,4小时内能量不稳定性<1.79%rms,同样通过调整第二半波片可以分别实现S和P线偏振光输出,采用>30dB高偏振消光比的偏振分光棱镜分别对两种线偏振激光进行分光测试,偏振消光比均>21dB。说明本申请能够实现大能量532nm激光输出,且能够对偏振态自由切换。Fine-tune the first half-wave plate to adjust the polarization state of the laser to P-linearly polarized light, which is transmitted through the first polarizer. Since the dichroic mirror completely reflects the 1064nm laser, a single-wavelength laser of 532nm is finally realized, with a maximum energy of 391.3mJ, 4 The energy instability within hours is less than 1.79% rms, and the output of S and P linearly polarized light can be achieved by adjusting the second half-wave plate, and the polarization beamsplitter prism with >30dB high polarization extinction ratio is used to split the two kinds of linearly polarized laser light Test, polarization extinction ratio> 21dB. It shows that this application can realize high-energy 532nm laser output, and can freely switch the polarization state.

调节第一半波片,使两个偏振态下的能量比例接近1:1,即激光经过第一偏振片透射光和反射光能量相等,最终实现1064nm和532nm双波长激光,通过二向色镜分光测试,1064nm波长的最大能量350.3mJ,532nm波长的最大输出能量200mJ,4小时内能量不稳定性均<2.3%rms。分别通过调节第二半波片和第三半波片可以实现S和P线偏振态切换,测试偏振消光比均>20dB。说明本申请能够同时实现大能量1064nm和532nm双波长激光输出,且能够对各自偏振态进行切换。Adjust the first half-wave plate so that the energy ratio of the two polarization states is close to 1:1, that is, the energy of the transmitted light and reflected light of the laser through the first polarizer is equal, and finally realize the dual-wavelength laser of 1064nm and 532nm, through the dichroic mirror Spectroscopic test, the maximum energy of 1064nm wavelength is 350.3mJ, the maximum output energy of 532nm wavelength is 200mJ, and the energy instability within 4 hours is less than 2.3% rms. S and P linear polarization state switching can be realized by adjusting the second half-wave plate and the third half-wave plate respectively, and the tested polarization extinction ratios are all >20dB. It shows that this application can simultaneously realize high-energy 1064nm and 532nm dual-wavelength laser output, and can switch the respective polarization states.

如此,本申请实施例提供的大能量双波长激光器,能够实现最大能量700mJ的激光输出,同时1064nm和532nm双波长下的能量比可调,偏振态能自由切换,非常有利于提升在激光测距等领域的实际应用效果,满足在激光测距等领域对激光器的更高要求。In this way, the high-energy dual-wavelength laser provided by the embodiment of the present application can achieve a laser output with a maximum energy of 700mJ. At the same time, the energy ratio at the dual wavelengths of 1064nm and 532nm can be adjusted, and the polarization state can be switched freely, which is very conducive to improving the laser distance measurement. The practical application effect in fields such as laser distance measurement can meet the higher requirements for lasers in fields such as laser ranging.

最后应说明的是:以上实施例仅用以说明本公开的技术方案,而非对其限制;尽管参照前述实施例对本公开进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本公开各实施例技术方案的精神和范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them; although the present disclosure has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent replacements are made to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present disclosure.

Claims (10)

1.一种大能量双波长激光器,其特征在于,包括:激光振荡模块和激光倍频偏振切换模块,所述激光振荡模块和所述激光倍频偏振切换模块光连接,所述激光振荡模块用于产生波长为1064nm的纳秒脉冲激光,所述激光倍频偏振切换模块用于输出双波长偏振态可切换的激光;其中:1. A high-energy dual-wavelength laser, characterized in that, includes: a laser oscillation module and a laser frequency doubling polarization switching module, the laser oscillation module is optically connected to the laser frequency doubling polarization switching module, and the laser oscillation module is used To generate a nanosecond pulse laser with a wavelength of 1064nm, the laser frequency doubling polarization switching module is used to output a dual-wavelength polarization state switchable laser; wherein: 所述激光振荡模块包括角锥棱镜,所述角锥棱镜的输出端依次设置偏振器、第一激光模块和高斯镜,所述角锥棱镜的输入端依次设置电光调Q开关、1/4波片和反射镜,所述激光振荡模块内产生的纳秒脉冲激光透射所述高斯镜,所述第一激光模块为半导体棒状激光晶体侧面泵浦;The laser oscillation module includes a corner cube, the output of the corner cube is sequentially provided with a polarizer, the first laser module and a Gaussian mirror, and the input of the corner cube is sequentially provided with an electro-optical Q-switching switch, a 1/4 wave sheet and reflector, the nanosecond pulse laser generated in the laser oscillation module is transmitted through the Gaussian mirror, and the first laser module is side-pumped by a semiconductor rod-shaped laser crystal; 所述激光倍频偏振切换模块包括第一半波片和第一偏振片,所述第一半波片设置在所述第一偏振片的输入光路上,所述第一偏振片的透射光路上依次设置倍频晶体和第三半波片,所述第一偏振片的反射光路上设置第二偏振片,所述第二偏振片的反射光路上设置第二半波片。The laser frequency doubling polarization switching module includes a first half-wave plate and a first polarizer, the first half-wave plate is arranged on the input optical path of the first polarizer, and the transmission optical path of the first polarizer is A frequency doubling crystal and a third half-wave plate are set in sequence, a second polarizer is set on the reflection optical path of the first polarizer, and a second half-wave plate is set on the reflection light path of the second polarizer. 2.根据权利要求1所述的大能量双波长激光器,其特征在于,还包括激光放大模块,所述激光放大模块设置在所述激光振荡模块到所述激光倍频偏振切换模块的传输光路上,用于所述激光振荡模块输出纳秒脉冲激光的能量放大;2. The high-energy dual-wavelength laser according to claim 1, further comprising a laser amplification module, the laser amplification module is arranged on the transmission optical path from the laser oscillation module to the laser frequency doubling polarization switching module , for the energy amplification of the nanosecond pulse laser output by the laser oscillation module; 所述激光放大模块包括依次设置第一隔离器、第一扩束镜、第二激光模块、第二隔离器、第二扩束镜、第三激光模块、旋光器和第四激光模块;所述第二激光模块、第三激光模块和第四激光模块为板条侧面泵浦。The laser amplification module includes a first isolator, a first beam expander, a second laser module, a second isolator, a second beam expander, a third laser module, an optical rotator and a fourth laser module; The second laser module, the third laser module and the fourth laser module are slab side pumped. 3.根据权利要求2所述的大能量双波长激光器,其特征在于,所述激光振荡模块还包括第一45°反射镜,所述激光放大模块还包括第二45°反射镜、第三45°反射镜、第四45°反射镜和第五45°反射镜,所述激光倍频偏振切换模块包括第六45°反射镜;3. The high-energy dual-wavelength laser according to claim 2, wherein the laser oscillation module also includes a first 45° reflector, and the laser amplification module also includes a second 45° reflector, a third 45° °reflector, the fourth 45°reflector and the fifth 45°reflector, the laser frequency doubling polarization switching module includes the sixth 45°reflector; 所述第二45°反射镜设置在所述第一45°反射镜的反射光路以及所述第一隔离器的入射光路上;所述第三45°反射镜和所述第四45°反射镜设置在所述第二激光模块和所述第二隔离器之间,且所述第三45°反射镜设置在所述第二激光模块的输出光路上,所述第四45°反射镜设置在所述第三45°反射镜的反射光路以及所述第二隔离器的入射光路上;所述第五45°反射镜设置在所述第四激光模块的输出光路上,所述第六45°反射镜设置在所述第五45°反射镜的反射光路上,且所述第六45°反射镜设置在第一半波片的输入光路上。The second 45° reflector is arranged on the reflected light path of the first 45° reflector and the incident light path of the first isolator; the third 45° reflector and the fourth 45° reflector It is arranged between the second laser module and the second isolator, and the third 45° reflector is arranged on the output optical path of the second laser module, and the fourth 45° reflector is arranged on The reflected light path of the third 45° reflector and the incident light path of the second isolator; the fifth 45° reflector is arranged on the output light path of the fourth laser module, and the sixth 45° The reflector is arranged on the reflected optical path of the fifth 45° reflector, and the sixth 45° reflector is arranged on the input optical path of the first half-wave plate. 4.根据权利要求1所述的大能量双波长激光器,其特征在于,所述激光倍频偏振切换模块还包括第七45°反射镜和二向色镜,所述第七45°反射镜设置在所述第二半波片的输出光路上,所述二向色镜设置在所述第三半波片的输出光路上且位于所述第七45°反射镜的反射光路上。4. The high-energy dual-wavelength laser according to claim 1, wherein the laser frequency doubling polarization switching module also includes a seventh 45° reflector and a dichroic mirror, and the seventh 45° reflector is set On the output optical path of the second half-wave plate, the dichroic mirror is arranged on the output optical path of the third half-wave plate and on the reflection optical path of the seventh 45° reflector. 5.根据权利要求1所述的大能量双波长激光器,其特征在于,所述激光倍频偏振切换模块还包括聚焦透镜和准直透镜,所述聚焦透镜设置在所述第一偏振片和所述倍频晶体之间,所述准直透镜设置在所述倍频晶体和所述第三半波片之间。5. The high-energy dual-wavelength laser according to claim 1, wherein the laser frequency doubling polarization switching module also includes a focusing lens and a collimating lens, and the focusing lens is arranged on the first polarizer and the Between the frequency doubling crystals, the collimator lens is arranged between the frequency doubling crystals and the third half-wave plate. 6.根据权利要求2所述的大能量双波长激光器,其特征在于,所述第二激光模块包括58个巴条,每个巴条功率为120W,单模块峰值功率为7000W,泵浦脉宽为270μs,板条晶体尺寸为155mm×40mm×6.5mm,两端未掺杂部分长度分别为10mm。6. The high-energy dual-wavelength laser according to claim 2, wherein the second laser module includes 58 bars, each bar has a power of 120W, a single module peak power of 7000W, and a pump pulse width of The slab crystal size is 155mm×40mm×6.5mm, and the lengths of the undoped parts at both ends are 10mm respectively. 7.根据权利要求2所述的大能量双波长激光器,其特征在于,所述第三激光模块和所述第四激光模块均包括83个巴条,每个巴条功率为120W,单模块峰值功率为10000W,泵浦脉宽为270μs,板条晶体尺寸为180mm×50mm×8.5mm,两端未掺杂部分长度分别为15mm。7. The high-energy dual-wavelength laser according to claim 2, wherein the third laser module and the fourth laser module both include 83 bars, each bar has a power of 120W, and the peak value of a single module The power is 10000W, the pump pulse width is 270μs, the size of the slab crystal is 180mm×50mm×8.5mm, and the lengths of the undoped parts at both ends are 15mm respectively. 8.根据权利要求1所述的大能量双波长激光器,其特征在于,所述电光调Q开关波长300~1100nm,电压消光比>2000:1,1/4电压3.3kV,损伤阈值>500MW/cm2;所述1/4波片的镀膜中心波长1064nm,损伤阈值>20J/cm28. The high-energy dual-wavelength laser according to claim 1, wherein the wavelength of the electro-optic Q-switched switch is 300-1100nm, the voltage extinction ratio is >2000:1, the 1/4 voltage is 3.3kV, and the damage threshold is >500MW/ cm 2 ; the coating center wavelength of the 1/4 wave plate is 1064nm, and the damage threshold is >20J/cm 2 . 9.根据权利要求1所述的大能量双波长激光器,其特征在于,所述第一激光模块包括半导体泵浦和激光晶体,所述半导体泵浦波长为809.6nm,光谱宽度为1.4~2nm,单模块峰值功率为5000W,泵浦脉宽为300μs;所述激光晶体为Nd:YAG圆柱棒状晶体,长度75~85mm,端面直径5~7mm,镀膜透过率>99%,损伤阈值>5GW/cm29. The high-energy dual-wavelength laser according to claim 1, wherein the first laser module includes a semiconductor pump and a laser crystal, the wavelength of the semiconductor pump is 809.6nm, and the spectral width is 1.4-2nm. The peak power of a single module is 5000W, and the pump pulse width is 300μs; the laser crystal is a Nd:YAG cylindrical rod crystal with a length of 75-85mm and an end diameter of 5-7mm. The transmittance of the coating is >99%, and the damage threshold is >5GW/ cm 2 . 10.根据权利要求1所述的大能量双波长激光器,其特征在于,所述激光振荡模块还包括固定件,所述反射镜和所述高斯镜共同设置在所述固定件上。10. The high-energy dual-wavelength laser according to claim 1, wherein the laser oscillation module further comprises a fixing member, and the reflecting mirror and the Gaussian mirror are jointly arranged on the fixing member.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120749516A (en) * 2025-08-22 2025-10-03 山东省科学院激光研究所 Mid-infrared laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120749516A (en) * 2025-08-22 2025-10-03 山东省科学院激光研究所 Mid-infrared laser

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