CN220169999U - Gas cooling device - Google Patents
Gas cooling device Download PDFInfo
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- CN220169999U CN220169999U CN202321541270.4U CN202321541270U CN220169999U CN 220169999 U CN220169999 U CN 220169999U CN 202321541270 U CN202321541270 U CN 202321541270U CN 220169999 U CN220169999 U CN 220169999U
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Abstract
本实用新型公开了一种气体冷却装置，该气体冷却装置包括多层管结构和连接管，多层管结构限定出气体通道和储液腔，气体通道具有进气端和出气端，进气端用于引入高温气体，储液腔具有进液口，连接管设在多层管结构的出气端，且连接管的入口与储液腔连通，连接管的出口与气体通道连通以朝向气体通道喷液。该气体冷却装置利用液体由液相变气相时需吸收大量热量的原理，让高温气体得以快速冷却，提升了冷却效果和冷却效率。
The utility model discloses a gas cooling device. The gas cooling device includes a multi-layer pipe structure and a connecting pipe. The multi-layer pipe structure defines a gas channel and a liquid storage cavity. The gas channel has an air inlet end and an air outlet end. The air inlet end It is used to introduce high-temperature gas. The liquid storage chamber has a liquid inlet. The connecting pipe is located at the gas outlet end of the multi-layer tube structure. The inlet of the connecting pipe is connected to the liquid storage cavity. The outlet of the connecting pipe is connected to the gas channel to spray toward the gas channel. liquid. This gas cooling device utilizes the principle that liquid needs to absorb a large amount of heat when changing from liquid phase to gas phase, allowing high-temperature gas to be quickly cooled, improving the cooling effect and cooling efficiency.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing equipment, in particular to a gas cooling device.
Background
The equipment that processes such as photovoltaic deposit or diffusion used is the hot stove, and hot stove in the course of the work, and the temperature can reach thousands of degrees centigrade the highest in the stove, and from hot stove exhaust gas need be through cooling just can discharge, and current exhaust cooling structure is winding cold water pipe on exhaust pipe usually to realize exhaust cooling, but this kind of cooling mode efficiency is relatively poor.
Therefore, there is a need for a gas cooling device that can achieve rapid cooling.
Disclosure of Invention
The utility model aims to provide a gas cooling device which has high cooling rate and high cooling efficiency.
In order to achieve the technical effects, the technical scheme of the utility model is as follows:
the utility model discloses a gas cooling device, comprising: a multi-layer tube structure defining a gas channel having a gas inlet end for introducing a high temperature gas and a gas outlet end, and a liquid storage cavity having a liquid inlet; the outlet of the connecting pipe is arranged at the air outlet end of the multilayer pipe structure, the inlet of the connecting pipe is communicated with the liquid storage cavity, and the outlet of the connecting pipe is communicated with the gas channel so as to spray liquid towards the gas channel.
In some embodiments, the gas channels are disposed at an incline and the gas inlet end is higher than the gas outlet end.
In some embodiments, the liquid inlet is located upstream of the inlet of the connecting tube in the direction of extension of the gas channel.
In some embodiments, the highest point of the connecting tube is higher than the planar position of the air intake end.
In some specific embodiments, the connecting tube comprises a first tube section and a second tube section, the first tube section is communicated with the liquid storage cavity, the second tube section is communicated with the gas channel, and the first tube section and the second tube section are connected at a position higher than the air inlet end of the gas channel.
In some specific embodiments, the connecting pipe further comprises a third pipe section, two ends of the third pipe section are respectively connected with the first pipe section and the second pipe section, and the third pipe section is higher than the air inlet end of the gas channel.
In some specific embodiments, the connecting pipe is a bent pipe, an inlet of the bent pipe is communicated with the liquid storage cavity, an outlet of the bent pipe is communicated with the gas channel, and a bent position of the bent pipe is higher than the air inlet end of the gas channel.
In some embodiments, the gas cooling device further comprises a fan connected to the gas outlet end of the gas channel, the fan being configured to drive a forced flow of gas within the gas channel.
In some specific embodiments, the gas cooling device further comprises an exhaust pipe, one end of the exhaust pipe is connected with the air outlet end of the gas channel, the other end of the exhaust pipe is used for installing the fan, and one end of the exhaust pipe for installing the fan is lower than one end connected with the air outlet end.
In some more specific embodiments, the gas cooling device further comprises an exhaust pipe connected to a side of the fan facing away from the exhaust pipe.
In some embodiments, the gas cooling device further comprises a liquid inlet tube connected to the multilayer tube structure and in communication with the liquid inlet, the liquid inlet tube being connected to an external liquid source.
The gas cooling device has the beneficial effects that: when the liquid is sprayed to the gas channel from the outlet of the connecting pipe, most of the liquid is quickly vaporized after encountering high-temperature gas, and a large amount of heat is absorbed in the vaporization process, so that the heat carried by the high-temperature gas is greatly consumed in the liquid vaporization process, and the cooling of the high-temperature gas is quickly realized. In addition, the existence of the liquid storage cavity can ensure that the temperature of the outer tube of the multilayer tube structure is relatively safe, the temperature of the outer wall cannot be higher than the boiling point temperature of water, and the temperature of the inner tube of the multilayer tube structure is reduced, so that the material of the multilayer tube structure can be a conventional stainless steel tube without adopting special heat-resistant materials, the manufacturing cost of the multilayer tube structure is reduced, the sealing property of the multilayer tube structure is ensured, and the phenomenon of liquid leakage is avoided.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
FIG. 1 is a schematic diagram of a gas cooling apparatus according to an embodiment of the present utility model;
FIG. 2 is a schematic view of a partial structure of a gas cooling apparatus according to an embodiment of the present utility model;
FIG. 3 is a cross-sectional view of the structure shown in FIG. 2;
fig. 4 is a schematic view of the internal structure of the structure shown in fig. 2.
Reference numerals:
100. a multilayer tube structure; 110. a gas channel; 111. an air inlet end; 112. an air outlet end; 120. a liquid storage cavity; 121. a liquid inlet;
200. a connecting pipe; 210. a first pipe section; 220. a third pipe section; 230. a second pipe section;
300. a connecting flange; 400. a blower; 500. an exhaust pipe; 600. an exhaust pipe; 700. a liquid inlet pipe.
Detailed Description
In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.
Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The specific structure of the gas cooling device according to the embodiment of the present utility model will be described below with reference to fig. 1 to 4.
The utility model discloses a gas cooling device, as shown in fig. 1, the gas cooling device of the embodiment comprises a multi-layer tube structure 100 and a connecting tube 200, the multi-layer tube structure 100 defines a gas channel 110 and a liquid storage cavity 120, the gas channel 110 is provided with an air inlet end 111 and an air outlet end 112, the air inlet end 111 is used for introducing high-temperature gas, the liquid storage cavity 120 is provided with a liquid inlet 121, an outlet of the connecting tube 200 is arranged at the air outlet end 112 of the multi-layer tube structure 100, an inlet of the connecting tube 200 is communicated with the liquid storage cavity 120, and an outlet of the connecting tube 200 is communicated with the gas channel 110 to spray liquid towards the gas channel 110.
It should be noted that, taking the liquid in the liquid storage cavity 120 as water as an example, the specific heat capacity of water is 4.2J (g·deg.c), and the vaporization latent heat at 100 deg.c is 2257.2kJ/kg, so the absorption heat energy is far greater than that of the conventional water cooling scheme during vaporization phase transition.
It can be appreciated that in the gas cooling device of this embodiment, when the liquid is sprayed from the outlet of the connection pipe 200 to the gas channel 110, most of the liquid is rapidly vaporized after encountering the high-temperature gas, and a large amount of heat is absorbed in the vaporization process, so that the heat carried by the high-temperature gas is greatly consumed in the liquid vaporization process, and the cooling of the high-temperature gas is rapidly realized. In addition, the existence of the liquid storage cavity 120 can ensure that the temperature of the outer tube of the multi-layer tube structure 100 is relatively safe, the temperature of the outer wall cannot be higher than the boiling point temperature of water, and the temperature of the inner tube of the multi-layer tube structure 100 is reduced, so that the material of the multi-layer tube structure 100 can be made of a conventional stainless steel tube without adopting a special heat-resistant material, the manufacturing cost of the multi-layer tube structure 100 is reduced, the sealing property of the multi-layer tube structure 100 is ensured, and the phenomenon of liquid leakage is avoided.
It should be noted that, in the present utility model, there may be only one or a plurality of connection pipes 200, and when there are a plurality of connection pipes 200, the plurality of connection pipes 200 may be distributed at intervals along the axial direction of the multilayer pipe structure 100, the plurality of connection pipes 200 may be distributed at intervals along the circumferential direction of the multilayer pipe structure 100, and the plurality of connection pipes 200 may be distributed at intervals along the axial direction of the multilayer pipe structure 100 in a plurality of circles, each circle including connection pipes 200 distributed at intervals along the circumferential direction of the multilayer pipe structure 100. Therefore, in the actual use process, the arrangement of the connecting pipes 200 can be selected according to the actual needs, and only a good cooling effect is required to be ensured.
In some embodiments, as shown in FIG. 1, the gas channels 110 are disposed at an incline, and the gas inlet end 111 is higher than the gas outlet end 112. It can be understood that the inclined arrangement of the gas channel 110 can enable the liquid storage cavity 120 located outside the gas channel 110 to be also inclined, and the air inlet end 111 is higher than the air outlet end 112 to avoid backflow of the liquid in the liquid storage cavity 120.
In some embodiments, as shown in fig. 1, the liquid inlet 121 is located upstream of the inlet of the connection pipe 200 in the extending direction of the gas passage 110. It can be appreciated that, since the liquid inlet 121 is located upstream of the inlet of the connecting tube 200, after the liquid enters the liquid storage cavity 120, the liquid storage cavity 120 is filled first and then flows into the connecting tube 200, so that enough cooling liquid can be provided in the liquid storage cavity 120, and thus, the temperature of the inner tube of the multi-layer tube structure 100 can be reduced well.
In some embodiments, as shown in FIG. 1, the highest point of the connecting tube 200 is higher than the planar position of the air intake end 111. It is understood that the highest point of the connection pipe 200 is higher than the highest point of the multi-layered tube structure 100 (the plane position of the inlet end 111), and when the liquid passes through the multi-layered tube structure 100, since the highest point of the connection pipe 200 is higher than the highest point of the multi-layered tube structure 100, it is ensured that the liquid fills the multi-layered tube structure 100 and can be stably injected into the gas passage 110, thereby ensuring the cooling effect.
In some embodiments, as shown in fig. 1-2, the connecting tube 200 includes a first tube segment 210 and a second tube segment 230, the first tube segment 210 being in communication with the reservoir 120, the second tube segment 230 being in communication with the gas channel 110, the first tube segment 210 and the second tube segment 230 being connected at a position above the gas inlet end 111 of the gas channel 110. It will be appreciated that the connection pipe 200 includes the first pipe section 210 and the second pipe section 230, which facilitates connection of the connection pipe 200 with the liquid storage chamber 120 and the gas channel 110, and the connection position of the first pipe section 210 and the second pipe section 230 is higher than the pressure of the liquid ejected from the second pipe section 230 at the gas inlet end 111 of the gas channel 110, so as to increase the total amount of the liquid, thereby increasing contact between the high-temperature gas and the liquid and cooling efficiency.
In some embodiments, the connection pipe 200 further includes a third pipe section 220, two ends of the third pipe section 220 are connected to the first pipe section 210 and the second pipe section (230), respectively, and the third pipe section 220 is higher than the gas inlet end 111 of the gas channel 110. It will be appreciated that the highest point of the connection pipe 200 (the position of the third pipe section 220) is higher than the highest point of the multi-layered pipe structure 100 (the inlet end 111), and that since the highest point of the U-shaped pipe is higher than the highest point of the multi-layered pipe structure 100 after the liquid passes through the multi-layered pipe structure 100, it is ensured that the liquid fills the multi-layered pipe structure 100 and can be stably injected into the gas passage 110, thereby ensuring the cooling effect.
In some particular embodiments, as shown in fig. 1, the third tube segment 220 is disposed horizontally, and both the first tube segment 210 and the second tube segment 230 are perpendicular to the third tube segment 220. Thereby, it is ensured that the liquid fills the multi-layered tube structure 100 and can be stably injected into the gas channel 110, thereby ensuring the cooling effect. Of course, in other embodiments of the present utility model, the angles of the first pipe section 210, the third pipe section 220 and the second pipe section 230 may be selected according to actual needs, and are not limited to the limitation of the present embodiment.
In some embodiments, the connection tube 200 is a bent tube, an inlet of the bent tube is communicated with the liquid storage cavity 120, an outlet of the bent tube is communicated with the liquid storage cavity 120, and a bent position of the bent tube is higher than the air inlet end 111 of the air channel 110. It can be understood that the highest point (bent point) of the connection pipe 200 is higher than the highest point (inlet end 111) of the multi-layered tube structure 100, and when the liquid passes through the multi-layered tube structure 100, since the highest point of the connection pipe 200 is higher than the highest point of the multi-layered tube structure 100, it is ensured that the liquid fills the multi-layered tube structure 100 and can be stably injected into the gas passage 110, thereby ensuring a cooling effect. Meanwhile, the connecting pipe 200 is manufactured by bending a straight pipe, so that the manufacturing of the connecting pipe 200 is facilitated.
In some embodiments, the connection tube 200 is a straight tube, the inlet of which is in communication with the liquid storage chamber 120, and the outlet of which is in communication with the gas channel 110, that is, the connection tube 200 is not limited to the U-shaped tube structure described above in the embodiments of the present utility model.
In some embodiments, as shown in fig. 2-4, the gas cooling apparatus further includes a connection flange 300 connected to the gas inlet end 111 of the gas passage 110, the connection flange 300 being for connection to an output pipe of the high temperature gas. It can be appreciated that the gas cooling device can be ensured to be connected with the output pipeline conveniently by connecting the connecting flange 300 with the output pipeline of the high-temperature gas, and the connection tightness of the gas cooling device and the output pipeline can be improved to avoid the leakage phenomenon of the high-temperature gas. In addition, the connecting flange 300 can also be used as a sealing plate of the liquid storage cavity 120 of the multi-layer tube structure 100, which is beneficial to improving the sealing performance of the liquid storage cavity 120, thereby reducing the probability of liquid leakage.
In some embodiments, as shown in fig. 1, the gas cooling device further includes a blower 400, where the blower 400 is connected to the gas outlet end 112 of the gas channel 110, and the blower 400 is used to drive the forced flow of the gas in the gas channel 110. It will be appreciated that the blower 400 is capable of driving the flow of gas within the gas channel 110, thereby increasing the flow rate of the gas within the gas channel 110, which is beneficial for improving the cooling efficiency.
In some embodiments, as shown in fig. 1, the gas cooling device further includes a gas extraction pipe 500, one end of the gas extraction pipe 500 is connected to the gas outlet end 112 of the gas channel 110, the other end is used for installing the blower 400, and one end of the gas extraction pipe 500 where the blower 400 is installed is lower than one end connected to the gas outlet end 112. It can be appreciated that the fan 400 is connected to the air outlet end 112 of the air channel 110 through the air extraction pipe 500, so that the air flow to the position of the fan 400 is ensured to be at a lower temperature, thereby avoiding the corrosion phenomenon to the fan 400 caused by relatively higher air flow temperature, and being beneficial to prolonging the service life of the fan 400.
In some more specific embodiments, as shown in FIG. 1, the gas cooling apparatus further comprises an exhaust pipe 600, the exhaust pipe 600 being connected to a side of the blower 400 facing away from the exhaust pipe 500. It can be appreciated that the additional exhaust pipe 600 can exhaust toward a designated position, and can exhaust harmful gas into a designated space when harmful gas exists in high temperature gas, thereby improving working safety.
In some embodiments, as shown in FIG. 1, a feed tube 700 is connected to the multi-layer tube structure 100 and communicates with the feed port 121, and the feed tube 700 is connected to an external fluid source. Therefore, in the actual working process, the external liquid source can continuously supplement liquid to the liquid storage cavity 120 through the liquid inlet pipe 700, so that the phenomenon that the cooling effect is reduced due to the lack of liquid in the liquid storage cavity 120 is avoided.
Embodiment one:
as shown in fig. 1, the gas cooling device of the present embodiment includes a multi-layered tube structure 100, a connection tube 200, a connection flange 300, a fan 400, an exhaust tube 500, an exhaust tube 600, and a liquid inlet tube 700, wherein the multi-layered tube structure 100 defines a gas channel 110 and a liquid storage chamber 120, the gas channel 110 has an inlet end 111 and an outlet end 112, the gas channel 110 is disposed obliquely, and the inlet end 111 is higher than the outlet end 112. The air inlet 111 is used for introducing high-temperature air, the liquid storage cavity 120 is provided with an air inlet 121, the connecting pipe 200 comprises a first pipe section 210, a third pipe section 220 and a second pipe section 230, the third pipe section 220 is horizontally arranged, and the first pipe section 210 and the second pipe section 230 are perpendicular to the third pipe section 220. The first tube segment 210 communicates with the reservoir 120 and the second tube segment 230 communicates with the gas channel 110. The third tube segment 220 is higher than the inlet end 111 of the gas channel 110. The connection flange 300 is connected to the inlet end 111 of the gas channel 110 and is used for being connected with an output pipeline of high-temperature gas, one end of the exhaust pipe 500 is connected with the outlet end 112 of the gas channel 110, the other end is used for installing the blower 400, and one end of the exhaust pipe 500, where the blower 400 is installed, is lower than one end connected with the outlet end 112. The exhaust pipe 600 is connected to a side of the blower 400 facing away from the exhaust pipe 500. The liquid inlet pipe 700 is connected to the multi-layer pipe structure 100 and is communicated with the liquid inlet 121, and the liquid inlet pipe 700 is connected with an external liquid source.
Embodiment two:
the structure of the gas cooling device of this embodiment is substantially similar to that of the first embodiment, except that the connection pipe 200 of this embodiment is not a multi-section pipe but a bent pipe with a bent inlet communicated with the liquid storage chamber 120 and a bent outlet communicated with the liquid storage chamber 120, and the bent position of the bent pipe is higher than the air inlet 111 of the gas channel 110.
The advantages of the gas cooling device of the first and second embodiments are as follows:
first: the principle that a large amount of heat is required to be absorbed when the liquid is changed from liquid to gas is utilized, so that the high-temperature gas can be rapidly cooled, and the cooling effect and the cooling efficiency are improved;
second,: the existence of the liquid storage cavity 120 can ensure that the temperature of the outer tube of the multilayer tube structure 100 is relatively safe, the temperature of the outer wall cannot be higher than the boiling point temperature of water, and the temperature of the inner tube of the multilayer tube structure 100 is reduced, so that the material of the multilayer tube structure 100 can adopt a conventional stainless steel tube, the manufacturing cost of the multilayer tube structure 100 is reduced, the sealing property of the multilayer tube structure 100 is ensured, and the phenomenon of liquid leakage is avoided;
third,: the highest point of the connection pipe 200 is higher than the highest point of the multi-layered tube structure 100, and when the multi-layered tube structure 100 is liquid, since the highest point of the connection pipe 200 is higher than the highest point of the multi-layered tube structure 100, it is ensured that the multi-layered tube structure 100 is filled with liquid and the gas passage 110 can be stably injected, thereby ensuring a cooling effect.
In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.
Claims (11)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321541270.4U CN220169999U (en) | 2023-06-16 | 2023-06-16 | Gas cooling device |
| PCT/CN2024/099451 WO2024255900A1 (en) | 2023-06-16 | 2024-06-14 | Gas cooling apparatus and heat furnace |
| US19/421,601 US20260104207A1 (en) | 2023-06-16 | 2025-12-16 | Gas cooling apparatus and heat furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321541270.4U CN220169999U (en) | 2023-06-16 | 2023-06-16 | Gas cooling device |
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| Publication Number | Publication Date |
|---|---|
| CN220169999U true CN220169999U (en) | 2023-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321541270.4U Active CN220169999U (en) | 2023-06-16 | 2023-06-16 | Gas cooling device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024255900A1 (en) * | 2023-06-16 | 2024-12-19 | 拉普拉斯新能源科技股份有限公司 | Gas cooling apparatus and heat furnace |
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2023
- 2023-06-16 CN CN202321541270.4U patent/CN220169999U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024255900A1 (en) * | 2023-06-16 | 2024-12-19 | 拉普拉斯新能源科技股份有限公司 | Gas cooling apparatus and heat furnace |
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