CS182562B1 - Generation of magnetoaktive plasma for thin layers esp.oxides forming on solid substrate method and apparatus - Google Patents

Generation of magnetoaktive plasma for thin layers esp.oxides forming on solid substrate method and apparatus

Info

Publication number
CS182562B1
CS182562B1 CS858775A CS858775A CS182562B1 CS 182562 B1 CS182562 B1 CS 182562B1 CS 858775 A CS858775 A CS 858775A CS 858775 A CS858775 A CS 858775A CS 182562 B1 CS182562 B1 CS 182562B1
Authority
CS
Czechoslovakia
Prior art keywords
magnetoaktive
esp
plasma
generation
solid substrate
Prior art date
Application number
CS858775A
Other languages
Czech (cs)
Inventor
Ladislav Bardos
Gojko Loncar
Jindrich Musil
Frantisek Zacek
Original Assignee
Ladislav Bardos
Gojko Loncar
Jindrich Musil
Frantisek Zacek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ladislav Bardos, Gojko Loncar, Jindrich Musil, Frantisek Zacek filed Critical Ladislav Bardos
Priority to CS858775A priority Critical patent/CS182562B1/en
Publication of CS182562B1 publication Critical patent/CS182562B1/en

Links

CS858775A 1975-12-16 1975-12-16 Generation of magnetoaktive plasma for thin layers esp.oxides forming on solid substrate method and apparatus CS182562B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS858775A CS182562B1 (en) 1975-12-16 1975-12-16 Generation of magnetoaktive plasma for thin layers esp.oxides forming on solid substrate method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS858775A CS182562B1 (en) 1975-12-16 1975-12-16 Generation of magnetoaktive plasma for thin layers esp.oxides forming on solid substrate method and apparatus

Publications (1)

Publication Number Publication Date
CS182562B1 true CS182562B1 (en) 1978-04-28

Family

ID=5436631

Family Applications (1)

Application Number Title Priority Date Filing Date
CS858775A CS182562B1 (en) 1975-12-16 1975-12-16 Generation of magnetoaktive plasma for thin layers esp.oxides forming on solid substrate method and apparatus

Country Status (1)

Country Link
CS (1) CS182562B1 (en)

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