CS215215B1 - Photoelectric master form and method of producing the same - Google Patents

Photoelectric master form and method of producing the same Download PDF

Info

Publication number: CS215215B1
Authority: CS; Czechoslovakia
Prior art keywords: photoelectric; layer; producing; coating; masking
Prior art date: 1978-10-30

Application number

CS708579A

Other languages

Czech (cs)

English (en)

Inventor

Nina M Gunina

Igor I Pojarkov

Ljudmila V Logutova

Konstantin A Lavrentev

Anatolij M Cernikov

Original Assignee

Nina M Gunina

Igor I Pojarkov

Ljudmila V Logutova

Konstantin A Lavrentev

Anatolij M Cernikov

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-10-30

Filing date

1979-10-18

Publication date

1982-08-27

1979-10-18 Application filed by Nina M Gunina, Igor I Pojarkov, Ljudmila V Logutova, Konstantin A Lavrentev, Anatolij M Cernikov filed Critical Nina M Gunina

1982-08-27 Publication of CS215215B1 publication Critical patent/CS215215B1/cs

Links

150000002500 ions Chemical class 0.000 claims description 3
229910052796 boron Inorganic materials 0.000 claims description 2
239000011248 coating agent Substances 0.000 claims 4
238000000576 coating method Methods 0.000 claims 4
230000000873 masking effect Effects 0.000 claims 3
238000005275 alloying Methods 0.000 claims 2
239000002184 metal Substances 0.000 claims 2
229910044991 metal oxide Inorganic materials 0.000 claims 2
150000004706 metal oxides Chemical class 0.000 claims 2
238000005554 pickling Methods 0.000 claims 2
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
229910052787 antimony Inorganic materials 0.000 claims 1
WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
230000007547 defect Effects 0.000 claims 1
239000011521 glass Substances 0.000 claims 1
238000004519 manufacturing process Methods 0.000 claims 1
239000000463 material Substances 0.000 claims 1
229910052698 phosphorus Inorganic materials 0.000 claims 1
239000011574 phosphorus Substances 0.000 claims 1
230000003068 static effect Effects 0.000 claims 1
239000000758 substrate Substances 0.000 claims 1
101000804764 Homo sapiens Lymphotactin Proteins 0.000 description 1
WTDRDQBEARUVNC-LURJTMIESA-N L-DOPA Chemical compound OC(=O)[C@@H](N)CC1=CC=C(O)C(O)=C1 WTDRDQBEARUVNC-LURJTMIESA-N 0.000 description 1
102100035304 Lymphotactin Human genes 0.000 description 1
101100481002 Mus musculus Tff1 gene Proteins 0.000 description 1
241001553014 Myrsine salicina Species 0.000 description 1
101000798993 Pseudomonas putida (strain ATCC 700007 / DSM 6899 / BCRC 17059 / F1) 2-hydroxy-6-oxo-2,4-heptadienoate hydrolase Proteins 0.000 description 1
101150115538 nero gene Proteins 0.000 description 1
229910000679 solder Inorganic materials 0.000 description 1
239000007787 solid Substances 0.000 description 1

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/56—Organic absorbers, e.g. of photo-resists
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Preparing Plates And Mask In Photomechanical Process (AREA)
Glass Compositions (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

CS708579A 1978-10-30 1979-10-18 Photoelectric master form and method of producing the same CS215215B1 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
SU782675175A SU938338A1 (ru)	1978-10-30	1978-10-30	Фотошаблон и способ его изготовлени

Publications (1)

Publication Number	Publication Date
CS215215B1 true CS215215B1 (en)	1982-08-27

Family

ID=20789759

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CS708579A CS215215B1 (en)	1978-10-30	1979-10-18	Photoelectric master form and method of producing the same

Country Status (6)

Country	Link
JP (1)	JPS5560946A (de)
CS (1)	CS215215B1 (de)
DD (1)	DD148177A3 (de)
DE (1)	DE2930416C2 (de)
FR (1)	FR2440568A1 (de)
SU (1)	SU938338A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3525800A1 (de) *	1985-07-19	1987-01-22	Philips Patentverwaltung	Schaltungsanordnung fuer einen fernsehempfaenger mit einem regelbaren zf-videosignalverstaerker
DE69133169D1 (de) *	1990-05-09	2003-01-16	Canon Kk	Verfahren zur Erzeugung einer Struktur und Verfahren zum Vorbereiten einer halbleitenden Anordnung mit Hilfe dieses Verfahrens
DE19721524A1 (de) *	1997-05-22	1998-11-26	Hsm Gmbh	Verfahren zur Herstellung eines Prägezylinders

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3622319A (en) *	1966-10-20	1971-11-23	Western Electric Co	Nonreflecting photomasks and methods of making same

1978
- 1978-10-30 SU SU782675175A patent/SU938338A1/ru active
1979
- 1979-07-26 DE DE19792930416 patent/DE2930416C2/de not_active Expired
- 1979-08-21 JP JP10562179A patent/JPS5560946A/ja active Pending
- 1979-09-27 FR FR7924060A patent/FR2440568A1/fr active Pending
- 1979-10-18 CS CS708579A patent/CS215215B1/cs unknown
- 1979-10-26 DD DD21649479A patent/DD148177A3/de not_active IP Right Cessation

Also Published As

Publication number	Publication date
DE2930416A1 (de)	1980-05-14
JPS5560946A (en)	1980-05-08
DE2930416C2 (de)	1982-05-13
SU938338A1 (ru)	1982-06-23
DD148177A3 (de)	1981-05-13
FR2440568A1 (fr)	1980-05-30

Similar Documents

Publication	Publication Date	Title
ATE43028T1 (de)	1989-05-15	Verfahren zum herstellen einer schichtstruktur.
DE3382697D1 (de)	1993-07-22	Verfahren zur herstellung einer abhebemaske mit sauerstoffsperrschicht.
CS215215B1 (en)	1982-08-27	Photoelectric master form and method of producing the same
DE3781312D1 (de)	1992-10-01	Verfahren zur haftung einer schicht aus einem metall mit hohem schmelzpunkt auf einem substrat.
US3522071A (en)	1970-07-28	Method of phosphor surface coating
ATE258538T1 (de)	2004-02-15	Zusammensetzung einer schwarzen glasur auf einem glassubstrat
DE3872417D1 (de)	1992-08-06	Ofenanlage zum erzeugen einer schwaerzenden oxidschicht auf einem duennen metallblech und verfahren zur erzeugung einer schwaerzenden oxidschicht auf der oberflaeche einer schattenmaske mit dieser ofenanlage.
IT1040127B (it)	1979-12-20	Procedimento per fabbricare un nastro inchiostrato anularead uno o pio colori e nastro inchio strato fabbricato secondo detto procedimento
JPS5297509A (en)	1977-08-16	Composite pantagraph and method of manufacturing the same
DE1291139B (de)	1974-01-24	Glaselektrode
US2980533A (en)	1961-04-18	Translucent objects decorated with designs or images
GB1528715A (en)	1978-10-18	Anticorrosion primer coating compositions
AT364801B (de)	1981-11-25	Verfahren zum ueberziehen der oberflaeche von glasgegenstaenden mit einer oxydschicht
GB1359789A (en)	1974-07-10	Method of covering a heater with an electrically insulating layer
SE7907873L (sv)	1980-03-26	Sett att samtidigt neutralisera positiva och negativa statiska elektriska laddningar pa ytor
CH554577A (de)	1974-09-30	Verfahren zur zusammensetzung von auf einer projektionsflaeche aus lichtpunkten gebildeten zeichen.
ATA427277A (de)	1981-04-15	Verfahren zum ueberziehen der oberflaeche eines traegers mit einer duennen metalloxydschicht
GB1441745A (en)	1976-07-07	Manufacture of a pattern on a substrate
GB1429908A (en)	1976-03-31	Method of making coloured photomasks
JPS58118610A (ja)	1983-07-14	テ−パ状光導波路の製造方法
DE2945450A1 (de)	1981-05-14	Verfahren zum herstellen von elektrischen kontakten an solarzellen
GB1113220A (en)	1968-05-08	Photoconductive targets
ES2115496B1 (es)	1999-07-01	Panel de acristalamiento y procedimiento para la formacion del mismo.
GB1384495A (en)	1975-02-19	Method for manufacturing a light guide
AT370780B (de)	1983-05-10	Verfahren zur herstellung eines silber-metalloxid-werkstoffes fuer elektrische kontakte mit einer loet- bzw. schweissbaren schicht