CS220088A1 - Method of photoresist layers' surface treatment,applicated on semiconductor plate - Google Patents

Method of photoresist layers' surface treatment,applicated on semiconductor plate

Info

Publication number
CS220088A1
CS220088A1 CS882200A CS220088A CS220088A1 CS 220088 A1 CS220088 A1 CS 220088A1 CS 882200 A CS882200 A CS 882200A CS 220088 A CS220088 A CS 220088A CS 220088 A1 CS220088 A1 CS 220088A1
Authority
CS
Czechoslovakia
Prior art keywords
applicated
surface treatment
photoresist layers
semiconductor plate
semiconductor
Prior art date
Application number
CS882200A
Other languages
English (en)
Other versions
CS269152B1 (cs
Inventor
Milos Ing Rothbauer
Zdenek Ing Novotny
Original Assignee
Rothbauer Milos
Novotny Zdenek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rothbauer Milos, Novotny Zdenek filed Critical Rothbauer Milos
Priority to CS882200A priority Critical patent/CS269152B1/cs
Publication of CS220088A1 publication Critical patent/CS220088A1/cs
Publication of CS269152B1 publication Critical patent/CS269152B1/cs

Links

CS882200A 1988-03-31 1988-03-31 Způsob úpravy povrehu fotorasistových vrstev nanesených na polovodičové desce CS269152B1 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS882200A CS269152B1 (cs) 1988-03-31 1988-03-31 Způsob úpravy povrehu fotorasistových vrstev nanesených na polovodičové desce

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS882200A CS269152B1 (cs) 1988-03-31 1988-03-31 Způsob úpravy povrehu fotorasistových vrstev nanesených na polovodičové desce

Publications (2)

Publication Number Publication Date
CS220088A1 true CS220088A1 (en) 1989-09-12
CS269152B1 CS269152B1 (cs) 1990-04-11

Family

ID=5358426

Family Applications (1)

Application Number Title Priority Date Filing Date
CS882200A CS269152B1 (cs) 1988-03-31 1988-03-31 Způsob úpravy povrehu fotorasistových vrstev nanesených na polovodičové desce

Country Status (1)

Country Link
CS (1) CS269152B1 (cs)

Also Published As

Publication number Publication date
CS269152B1 (cs) 1990-04-11

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