CS258213B1 - Temperature chamber contactor with frost protection - Google Patents

Abstract

The solution relates to a temperature chamber contactor with protection against icing. The essence of the solution is that openings are formed in the middle body leading to cavities formed in the lower body.

Description

258213 2

BACKGROUND OF THE INVENTION The invention relates to a temperature chamber contactor with anti-icing contactor contacts in the measurement of semiconductor components at a temperature below freezing.

The temperature chamber contactor is placed in the tempered space and its contacts pass into the ambient temperature. In the contactor, the measured component is connected to the electronic circuitry of the test device, which evaluates its electrical parameters. The measuring and testing technique connects to the contactor outside the tempered space. The quality of the measurement depends on the mechanical, but also the electrical connection, which affects the transition resistances, inductance, insulation resistance between the inlets, mechanical reliability, durability.

The contactor is located in an extremely low temperature area and the connecting element of the contactor and the measuring electronics is in ambient temperature. This leads to heat transfer, cooling of the connection member, and the possibility of condensation steam being present in the surrounding environment. With the formation of condensates, the insulation properties of the entire system are deteriorated and thus the measurement of electrical quantities is prevented. So far known solutions use essentially two types of protection against condensation steam formation, namely heating the critic parts of the contactor together with the connection electronics higher than the dew point temperature The second method is to supply liquid nitrogen or other liquid coolant to critical parts to evaporate and thereby form an aqueous vapor-free atmosphere. Advantageous solutions are needed in the first instance to provide an auxiliary heat source and the associated increase in electricity consumption, and in the second, the need for a secondary supply of liquid cooling medium and more complex node contactor.

The aforementioned disadvantages are eliminated and the technical problem is solved by a frost-protection thermal chamber contactor, which is based on the fact that in the central body there are openings which follow the cavities formed in the lower body. The advantage of the anti-icing temperature chamber contactor according to the invention is that it eliminates the need for a secondary heat source to heat critical parts and, in a second mode of protection, eliminates the need for secondary supply of liquid refrigerant to form a protective atmosphere. Another advantage is the simplicity of the node solution. A further advantage of the temperature chamber contactor with the secondary fluid supply method is that the heated medium flows to the critical contactor parts by removing the heat of the primary tempered space. The supply of heat through the connection member to the ambient contacts is then sufficient for the critical point with the dew point temperature to be in the contactor cavities.

The frost protection temperature chamber contactor is exemplified by the attached drawing, where the drawn contactor is in front view in partial section.

The iced-temperature temperature chamber contactor consists of an intrinsic contact 11, a central contactor body 2 which separates the tempered space 2 from the environment 4 with the ambient temperature, and a lower body in the middle body is formed with holes 9 bonding to the cavities 10 formed in the bottom body 5. The cavities 10 are closed by a connecting member of the measuring electronics. Contacts 2 are placed in cavities 10 · Measured component J3 · is placed on top of contactor 2

The function of the temperature chamber with the frost protection is as follows: In the tempering space 2, where the contactor itself is located, the overpressure of the protective atmosphere 6 is caused by the evaporation of the cooling medium. Through the openings 2 formed in the central body 3, the protective atmosphere 6 flows into the cavities 10 and partly around the connecting members 12 into the environment 4 with ambient temperature. The cavities 10 are closed at the measuring point 11 by a metering electronics connecting member 12, thereby forming a protective atmosphere overpressure 6 in the cavities 10.

Claims (1)

The anti-icing temperature chamber contactor comprising its own contactor located in the tempering space, the central body which separates the tempered space from the surrounding environment and the lower body, characterized in that openings (9) are provided in the central body (3) extending onto cavities (10) formed in the lower body (5).