CS259032B1

CS259032B1 - Equipment for electrolytic processing of metal samples for electron microscopes

Info

Publication number: CS259032B1
Application number: CS847209A
Authority: CS
Inventors: Ivan I Cemeris; Vasilij J Ryzkov; Nikolaj I Korotkorucko; Vilen N Kaplicnyj; Valerij V Skorobogatko; Michail J Tyscuk
Original assignee: Ivan I Cemeris; Vasilij J Ryzkov; Nikolaj I Korotkorucko; Vilen N Kaplicnyj; Valerij V Skorobogatko; Michail J Tyscuk
Priority date: 1984-09-25
Filing date: 1984-09-25
Publication date: 1988-09-16
Also published as: CS720984A1

Abstract

Reěení ee týká elektrochemického zpracování kovů, elektrochemického upřesnění vzorků, zkoumaných v prosvěcovaných elektronových mikroskopech. Zařízení obsahuje těleso s lůžkem pro držák objektivu a tryskou, spojenou s čerpadlem pročerpáni elektrolytu, držák objektivu se vzorkem, kladnou elektrodu ve tvaru sklenice, naplněné nevodící kapalinou, jejímž dnem je vzorek, elektrodu, zesilovač, napájecí zdroj, klíčové prvkyThe solution ee concerns electrochemical processing of metals, electrochemical refinement of samples examined in transmission electron microscopes. The device includes a body with a seat for the lens holder and a nozzle connected to a pump for pumping electrolyte, a lens holder with a sample, a positive electrode in the shape of a glass filled with a non-conducting liquid, the bottom of which is the sample, an electrode, an amplifier, a power supply, key elements

Description

OIMCAHHE H30BPETEHHM K ABTOPCKOMY CBHflETEJIbCTBy3asBJieHo: 10.01.83SaflBKa IP 3577963/22-02MKHa C 25 F 7/00 ABTopu: H.H.HeMepnc, B.B.Puxkob, H.H.KopoTKOpynKO, B.H.KaruiHMκωή,OIMCAHHE H30BPETEHHM TO ABTOPCKOMY CBHflETEJIbCTBy3asBJieHo: 10.01.83SaflBKa IP 3577963 / 22-02MKHa C 25 F 7/00 ABTop: H.H.HeMepnc, B.B.Puxkob,

B.B.CicopoCoraTbKO u M.E.TbiqyK 3βββμτ&πβ: CyMCKuň sasoA ΒΛβκτροΗΗωχ mhkpockoiiob hm. 50-neTHH BJ1KCMHaasanne Η3θ6ρβτβΗΗΗί yCTPOfiCTBO nim SJIEKTPOJMTIWECKOft OBPABOTKHMETAJDM- HECKHX 0BPA3H0B ΟΠΗ 3J1EKTP0HHEK ΜΗΚΡΟΟΚΟΠΟΒ Μ3θ6ρβΤβΗΗβ OTHOCHTCH K 3JieKTpOXHMHHeCKOň oGpaĎOTKe MeTaJUIOB, a HMeHHOκ 3JieKTpoxnMHuecKOMy υτοηίθηηιο oGpasqoB, HccjieAyeMwx b npocBeHHBawmHX anex-TpOHHblX MHKpOCKOnaX.B.B.CicopoCoraTbKO with M.E.TbiqyK 3βββμτ & πβ: CyMCKuň sasoA ΒΛβκτροΗΗωχ mhkpockoiiob hm. 50 neTHH BJ1KCMHaasanne Η3θ6ρβτβΗΗΗί yCTPOfiCTBO them SJIEKTPOJMTIWECKOft OBPABOTKHMETAJDM- HECKHX 0BPA3H0B ΟΠΗ 3J1EKTP0HHEK ΜΗΚΡΟΟΚΟΠΟΒ Μ3θ6ρβΤβΗΗβ OTHOCHTCH K 3JieKTpOXHMHHeCKOň oGpaĎOTKe MeTaJUIOB and HMeHHOκ 3JieKTpoxnMHuecKOMy υτοηίθηηιο oGpasqoB, HccjieAyeMwx b npocBeHHBawmHX an anion TpOHHblX MHKpOCKOnaX.

Oahhm ris Han6onee pacnpocTpaHeHHbix ΜβτοΑοβ nojiyqeHHH TaxHX oGpasyoB hbjiheTca 3JieKTponHTHuecKaH nonHpoBKa, πρπ κοτοροή b onpeAeneHHbtx pexHMax npoHc-xoflHT HenpepbiBHoe oCpasoBaroie h pacTBopenne naccHBnpyi<mero cjioh. IIpoapaMHanpfia sjíeKTpoHHoro jiyua TOJiiHHHa oGpasqa ο6ι>ιηηο nojiynaeTCH Ha xpaax oGpasywnie-rocH ηρκ sneKTpojiHTHHecKoň ποπκροΒκβ OTBepcTHH, a OTcyTCTBHe ηπη cBegeHHaκ MHHHMyMy HajiHHHfl naccnBnpy»meň rmeHKH mojkbt 6ητβ AOCTHPHyTO. BbiCopoM peaot-Ma ΠΟΠΗΡΟΒΒΗΗΒ H OflHOBpeMeHHblM npeKpameHHeM XHMHHeCKOrO TpSBJíeHHH H 3JieKTpOXHMHBecKoro pacTBopeHHfl naccHBHpyranero cjioh. Οαηθκο πρκ .oGpasoBaHHH OTBepc-THH HapymaeTCH oahopoahoctb 3JiexTpHuecxoro no jih, MaxcHMyM HanpHaceHHocTHajieKTpHuecKoro nojin ΗΜβετ MecTO Ha xpanx OTBepcraH. A HaHGoAwnan cKopocTbTpaBjíeHHH xax pas h cooTBeTCTByeT ynacTKaM c MaxcHManfaHoit HanpaxeHHocTBio.sjíeKTpHHecKoro nojiH. IIosTOMy τοηκηθ xpan oGpaaoBaBmeroca OTBepcTHH, hbjihw-mnecH HanOonee πρηγοαηημη p/M sjíeKTpoHHOMHKpocKommecKHX HCcneAOsaHHft,cTpaBjíHBaioTCB. 3thm HBJíeHHeM h o6ycJiaBjiHBaeTCH HeoCxoflHMOcTb npexpameHHHnpouecca 3JiexTponojiHpoBKH b MOMeHT oGpasoBaHHH OTBepcTHH. npHneM, xeM paHfa-rně CyAeT ββφΗκοκροΒβΗ μομθητ oOpasoBaHHH ero, τβΜ Bbnne xanecTBO πρΗΓοτοΒΠβ»Horo o6pa3Aa. 259032 H3BeCTHO yeTpoňcTBO ftnn SJíeXTpOnOJIHpOBXH ΤΟΗΚΟϋ MeTajUlHHeCKOŘ φΟΠΒΓΗ Bπροτοκβ sneKTpojiHTa, co^epatamee CHCTeMy notára anexTpojiHTa, hctohhhx πκτβ-HHH H CHCTeMy «JIH HaCjIIOfleHHH 3a npOUeCCOM [1] . OflHaKO yCTpoftCTBO ΠρΗΓΟβΗΟtojibko npH HcnojibsoBaHHH npoapanHoro ajieKTpojiHTa, a b npaxTHxe fljia ajiexTpo-JIHTHWeCKOft nOJIHpOBKH ΜΗΟΓΗΧ MeTajttlOB HCnOJItayiOTCH HenpO3patIHbie SJleKTpOJIHTbl,cogepwamHe xpoMOByro XHcnoTy." KpoMe roro, nocjie npexpdnteHHH no^ann snexTpo-jih Ta h oTKjiroueHHH θπθκτροπητθηηη (β ΜΟΜβΗτ Havana oGpasoBaHHH. oTsepcTHs),ripoflojracaeTCH o6pa3osaHHe naccHBMpywmero cjioh na nosepxHOCTH oSpaaija sa cneTocTaBWHxcH Ha noBepxHOCTH xanejiex sjíexTpojiHTa, β μομθητ oSpaaoBanHH OTsepc-THH 3a cneT HapymeHHH οαηοροληοοτη anexTpHuecxoro nojiH fleftcTByeT xpaesoň3φφβκτ, pacTBopHronmň HanSojiee TOHxyro nacTb o6pa3«a.Oahhm ris Han6onee pacnpocTpaHeHHbix ΜβτοΑοβ nojiyqeHHH TaxHX oGpasyoB hbjiheTca 3JieKTponHTHuecKaH nonHpoBKa, πρπ κοτοροή b onpeAeneHHbtx pexHMax npoHc-xoflHT HenpepbiBHo oCpasoBaroie h pacTBopenne naccHBnpyi <mero cjioh. IIpoapaMHanpfia sjíeKTpoHHoro Jiyuu TOJiiHHHa oGpasqa ο6ι> ιηηο nojiynaeTCH Ha xpaax oGpasywnie-Roche ηρκ sneKTpojiHTHHecKoň ποπκροΒκβ OTBepcTHH and OTcyTCTBHe ηπη cBegeHHaκ MHHHMyMy HajiHHHfl naccnBnpy »MEN rmeHKH mojkbt 6ητβ AOCTHPHyTO. BbiCopoM peaot-Ma ΟΟΟΗΡΟΒΒΗΗΒH OflHOBpeMeHHblM npeKpameHHeM XHMHHeCKOrO TpSBJiHHH H 3JieKTpOXHMHBecKoro pacTBopeHHfl naccHBHpyranero cjioh. Οαηθκο πρκ .oGpasoBaHHH OTBepc-THH HapymaeTCH oahopoahoctb 3JiexTpHuecxoro no south, MaxcHMyM HanpHaceHHocTHajieKTpHuecKoro nojin ecβετ MecTO Ha xpanx OTBepcraH. And HaHGoAwnan cKopocTbTpaBjíeHHH xax pas h cooTBeTCTByeT ynacTKaM c MaxcHManfaHoit HanpaxeHHocTBio.sjíeKTpHHecKoro nojiH. IIosTOMy τοηκηθ xpan oGpaaoBaBmeroca OTBepcTHH, hbjihw-mnecH hanOonee πρηγοαηημη p / M sjíeKTpoHHOMHKpocKommecKHX HCcneAOsaHHft, cTpaBjíHBaioTCB. 3thm HBJieHHeM h o6ycJiaBjiHBaeTCH HeoCxoflHMOcTb npexpameHHHnpouecca 3JiexTponojiHpoBKH b MOMeHT oGpasoBaHHH OTBepcTHH. npHneM, xeM paHfa-rne CyAeT ββφΗκοκροΒβΗ μομθητ oOpasoBaHHH ero, τβΜ Bbnne xanecTBO πρΗΓοτοΒΠβ »Horo o6pa3Aa. 259032 H3BeCTHO yeT leastcTBO ftnn SJíeXTpOnOJIHpOBXH ΤΟΗΚΟϋ MeTajUlHHeCKO φΟΠΒΓΗ Bπροτοκβ sneKTpojiHTa, co ^ epatamee CHCTeMy notary anexTpojiHTa, hctohhhx πκτβ-HHH H CHCTeMy «JH HaCjIIOfleHHH 3a npOUeCCOM [1]. OflHaKO yCTpoftCTBO ΠρΗΓΟβΗΟtojibko NPH HcnojibsoBaHHH npoapanHoro ajieKTpojiHTa ab npaxTHxe fljia ajiexTpo-JIHTHWeCKOft nOJIHpOBKH ΜΗΟΓΗΧ MeTajttlOB HCnOJItayiOTCH HenpO3patIHbie SJleKTpOJIHTbl, cogepwamHe xpoMOByro XHcnoTy. "KpoMe RoRo nocjie npexpdnteHHH NOx ann snexTpo-south Ta h oTKjiroueHHH θπθκτροπητθηηη (β ΜΟΜβΗτ Havana oGpasoBaHHH. OTsepcTHs) ripoflojracaeTCH o6pa3osaHHe naccHBMpywmero cjioh to nosepxHOCTH oSpaaija the cneTocTaBWHxcH Ha noBepxHOCTH xanejiex sjíexTpojiHTa, β μομθητ oSpaaoBanHH OTsepc-THH 3a CNET HapymeHHH οαηοροληοοτη anexTpHuecxoro nojiH fleftcTByeT xpaesoň3φφβκτ, pacTBopHronmň HanSojiee TOHxyro nacTb o6pa3 "and.

HanGojiee 6jih3khm k Η3ο6ρβτβΗΗΐο no TexHHnecKoft cjtiuhocth HBJíneTCH ycTpoftcT"bo απη aneKTpojiHTHHecKoft o6pa6oTKH MeTaiuiHHecxHX o6pa3HOB hjih 3ΠβκτροΗΗΜχΜΗκροεκοποΒ, coflepjKamee xopnyc c mesflOM ajih o6bexTOflep»aTejiH, CHCTeMy ipnp-KynaiiHH sneKTpojiHTa, hctohhhk ποπηροβχη, yciuiHTenb roxa HHflHxaiym, Hanajiao6pa3OBaHHH OTBepcTHH, o6T>eKTOflepjKaTeJib h CHCTeMy sjíexTpoflOB [2] . B «enH aneKTpofla ΒκπωηβΗ ycHJiHTenb, fleňcTBywmHň Ha pejie, riKjiwnawmee nerranOJIHpOBKH H HaCOCa. ΠρΗ nOHBJíeHHH OTBepCTHH npOCOHHBmuftCH SneKTpOJTHT sanoji-ΗΗβτ npocTpaHCTso Meatwy οβΐεχτοΜ h snexTpoflOM a coaflaeT npOBOflHMOCTb b yermycroiHTejiH OTXjnoneHHH pene. flaHHoe yeTpoňcTBO noasojineT pa6oraTb c HenpospanHHM sjíexTpojiHTOM, oflHaxo,o6jiaflaeT HH3xoň nyBCTBHTenbHocTbio (cHrHan, OTxnwnaKsuHíi pene, nocTynaeT tojib-ko nočně 3anoHHeHHH 3JieKTpojiHTOM oSbeMa Meaqqy o6pa3uoM η sjíekTpofloM. 06bexTHe 3aiUHn?eH ot fleňcTBHH ajiexTpojtHTa, ητο flenaeT yeTpoňcTBO HenpHroflHbíM npHpa6oTe c anexTpojiHTOM, χημπηθοκη pearHpywmHM c o6pa3ixoM, h He HcxjiwqaeTBJIHHHHH KpaeBOrO ΒφφβΚΤβ).HanGojiee 6jih3khm to Η3ο6ρβτβΗΗΐο no TexHHnecKoft cjtiuhocth HBJíneTCH ycTpoftcT "bo απη aneKTpojiHTHHecKoft o6pa6oTKH MeTaiuiHHecxHX o6pa3HOB hjih 3ΠβκτροΗΗΜχΜΗκροεκοποΒ, coflepjKamee xopnyc c mesflOM ajih o6bexTOflep» aTejiH, CHCTeMy ipnp-KynaiiHH sneKTpojiHTa, hctohhhk ποπηροβχη, yciuiHTenb Roxa HHflHxaiym, Hanajiao6pa3OBaHHH OTBepcTHH, o6T> eKTOflepjKaTeJib h CHCTeMy sjíexTpoflOB [2]. b "ENH aneKTpofla ΒκπωηβΗ ycHJiHTenb, fleňcTBywmHň Ha sing, riKjiwnawmee nerranOJIHpOBKH H HaCOCa. ΠρΗ nOHBJíeHHH OTBepCTHH npOCOHHBmuftCH SneKTpOJTHT Sano-ΗΗβτ npocTpaHCTso Meatwy οβΐεχτοΜ h snexTpoflOM and coaflaeT npOBOflHMOCTb b yermycroiHTejiH OTXjnoneHHH foam. flaHHoe yeTpoňcTBO noasojineT pa6oraTb c HenpospanHHM sjíexTpojiHTOM, oflHaxo , o6jiaflaeT HH3xoň nyBCTBHTenbHocTbio (cHrHan, OTxnwnaKsuHi pena, nocTynaeT tojib-ko night 3anoHHeHHH 3JieKTpojiHTOM oSbeMa Meaqqy o6pa3uoM η sjíekTpofloM. 06bexTHe 3aiUHn? eH ot fleňc TBHH ajiexTpojtHTa, ητο flenaeT yeT at least hPhroflHbIcNpHpa6oTe c anexTpojoM, h He HcxjiwqaeTBJIHHHHH KpaeBOrO ΒφφβΚΤβ).

Ue/ibio flaHHoro Η3θ6ρβτβΗΗΗ HBJíHeTCH noBhmteHHe xanecTBa o6pa6oTXH oSpasutanyTeM cHHKeHHH xpaeBbix 3φφβχτοΒ. IIoctaBJíeHHaH iiejib ,U0CTnraeTCH τβΜ, ητο ycrpoňcTBo íuih sjíeKTpOjiHTHHecxoiSio6pa6oTKH MeTajunmecKHX o6pa3u;oB hjih 3πβκτροΗΗΜχ MHxpocxonos, conepacameexopnyc c ΓΗβ3βθΜ λπη o6bexTOflepxaTeJiH, CHCTeMy iiHpKyjixuHH anexTpojiHTa, hc-towhhk Toxa nojrapoBKH, ycHJiHTejit Toxa HHfluxaííHH Hawajia oČpasoBaHHH oTBepc-thh , o6bexTOflep»aTejib h CHCTeMy snexTpoflOB, cornacHO Η3θ6ρβτβΗΗΐο cHaSxeHO ·xaMepoň c HeTOXonpoBOflítmeň «HflxocTbw, β χοτοροϋ ycTaHOBJíen anexTpo#, saxpen-neHHoň b o6bexTOflep»caTejie η connoM fljin noflann anexTpojiHTa, pacnojioweHHMM cflpyroň cTOpoHbí o6bexTOflep)xaTejriH, npHneM comro coeflHHeHO c hctohhhkom Toxa. H3o6peTeHňe noHCHHeTCH ηερτβχοΜ, r,ne npeflCTaBJíeHa φyHx^HOHaπbHaH cxeManpejviaraeMoro ycTpoiícTBa. yeTpoňcTBO coflepXHT xopnyc 1 c rHeSflOM fljin oGtexTOflepacaTejiH h coiuiom 2,coegHHeHHbíM c nacocoM 3 npoxaHXH anexTpojiHTa, o6texTOflepacaTeJib 4 c oSpasiioM5, ycTaHOBJíeHHbíM repMeTHHHO β o6bexTOflep»aTeJie, nojioKHTeJibHbiň ajiexTpofl 6,BbinojiHeHHbiň b BHfle cTaxaHa, 3anojiHeHHoro HeTOxonpoBOfljnueft XHflxocTbW, shomxoToporo ηβηηθτοη o6pa3eij, anexTpofl 7, onymeHHbiií β HeToxonpoBOffHiuyw χπρ;-xocTb CTaxaHa* ycwiHTejib ποοτοηηηογο Toxa 8, hctohhhk πητηηηη 9, xjiwneBoííajieMeHT 10, oTxjuonaiowHň hctohhhx πητηηηη Herm 3ίΐεκτροποπΗρθΒΧΗ h KjHoxeBoftpjieMeHT 12, OTXjnoHajomnň hctohhhx πητβηηη snexTpoffBHraTejiH Hacoca. yeTpoňcTBO paČoTaeT cneflyrontHM oSpaaoM. Β ηοχοαηομ coctohhhh CTaxaH nonojKHTejibHoro ajnexTpofla 6 3anojiHeH Ηβτοχο-npoBOflameň aomxocTbio, β χοτοριηο norpyxeH ajiexTpoff 7. Β stot μομθητ nenbycHJiHTejiH ποοτοηηηογο Toxa (ynT) 8 o6naflaeT hhsxoíí npoBOflHMocTbio, BxjnoneHbíHCTOHHHX ΠΗΤβΗΗΗ 9 H SJíeKTpOfíBHraTeJIb 11 Hacoca 3 CHCTeMbl HHpxyjTHHHH. IIoCTy-naKauan nepe3 conno cTpyn anexTpoíiHTa OMbiBaeT oSpaaei; 5 « 3aMbixaeT snexTpu- 259032Ue / ibio flaHHoro θ3θ6ρβτβΗΗΗ HBJiHeTCH noBhmteHHe xanecTBa o6pa6oTXH oSpasutanyTeM cHHKeHHH xpaeBbix 3φφβχτοΒ. IIoctaBJíeHHaH iiejib, U0CTnraeTCH τβΜ, ητο ycrpoňcTBo íuih sjíeKTpOjiHTHHecxoiSio6pa6oTKH MeTajunmecKHX o6pa3u; oB hjih 3πβκτροΗΗΜχ MHxpocxonos, conepacameexopnyc c ΓΗβ3βθΜ λπη o6bexTOflepxaTeJiH, CHCTeMy iiHpKyjixuHH anexTpojiHTa HC-towhhk Toxa nojrapoBKH, ycHJiHTejit Toxa HHfluxaííHH Hawajia oČpasoBaHHH oTBepc-THH, o6bexTOflep »aTejib h CHCTeMy snexTpoflOB, cornacHO Η3θ6ρβτβΗΗΐο cHaSxeHO · xaMepoň c HeTOXonpoBOflítmeň «HflxocTbw, β χοτοροϋ ycTaHOBJíen anexTpo #, saxpen-neHHoň b o6bexTOflep» caTejie η connoM fljin noflann anexTpojiHTa, pacnojioweHHMM cflpyroň cTOpoHbí o6bexTOflep) xaTejriH, nphnami Comrat coeflHHeHO c hctohhhkom Toxa. H3o6peTeHňe noHCHHeTCH ηερτβχοΜ, r, neFefActHaHxHxHHOHaπbHaHcxeManpejviaraeMoro ycTpoiecTBa. yeTpoňcTBO coflepXHT xopnyc 1 c rHeSflOM fljin oGtexTOflepacaTejiH h coiuiom 2 coegHHeHHbíM c nacocoM 3 npoxaHXH anexTpojiHTa, o6texTOflepacaTeJib 4c oSpasiioM5, ycTaHOBJíeHHbíM repMeTHHHO β o6bexTOflep »aTeJie, nojioKHTeJibHbiň ajiexTpofl 6 BbinojiHeHHbiň b BHfle cTaxaHa, 3anojiHeHHoro HeTOxonpoBOfljnueft XHflxocTbW, shomxoToporo ηβηηθτοη o6pa3eij, anexTpofl 7 , β onymeHHbiií HeToxonpoBOffHiuyw χπρ; -xocTb CTaxaHa * ycwiHTejib ποοτοηηηογο Toxa 8 hctohhhk πητηηηη 9 xjiwneBoííajieMeHT 10 oTxjuonaiowHň hctohhhx πητηηηη Herm 3ίΐεκτροποπΗρθΒΧΗ h KjHoxeBoftpjieMeHT 12 OTXjnoHajomnň hctohhhx πητβηηη snexTpoffBHraTejiH Hacoca. yeT at least tboTeT cneflyrontHM oSpaaoM. Β ηοχοαηομ coctohhhh CTaxaH nonojKHTejibHoro ajnexTpofla 6 3anojiHeH Ηβτοχο-npoBOflameň aomxocTbio, β χοτοριηο norpyxeH ajiexTpoff seventh Β one hundred tons μομθητ nenbycHJiHTejiH ποοτοηηηογο Toxa (YNT) 8 o6naflaeT hhsxoíí npoBOflHMocTbio, BxjnoneHbíHCTOHHHX ΠΗΤβΗΗΗ 9H SJíeKTpOfíBHraTeJIb 11 Hacoca 3 CHCTeMbl HHpxyjTHHHH. IIoCTy-naKauan nepe3 conno cTpyn anexTpoiHTa OMbiBaeT oSpaaei; 5 «3aMbixaeT snexTpu-259032

MeCKyiO nenb HCTOWHHXa ΠΗΤβΗΜΗ 9 . ΠθΑ AeRČŤBHeM 3ΠβΧΤρθΧΗΜΗΗβΟΧθή nOJIHpOBKHoCpaaen yTOHMaeTca. B μομθητ ofípaaoBaHHH OTBepcTHH MOJieKyjibi sjíeKTpojnrra nonaaawT b Ηβτοκοπρο-BOflHmyw xoHflKocTb aneKTpoaa 6, noBbnaaH προβοαημοοτβ ueim ΪΠΤ 8 ρ,ο cpačaTbiBa-hhh KJiioqeBbix ΘπβΜβΗΤΟΒ 10 h 12, OTXjrnoqaioiHHX 3JieKTpoABnraTejib 11 κ hctohhhxπκτβΗΗΗ 9. Πρπ 3tom noflana 3πβκτροσΐΗτβ b conno npexpamaeTca, a nepea oCpaao-BaBmeecH oTBepcrua HeTOKonpOBOflHmaa χηαχοοτβ npocaHHBaeTcn Ha oCpaTHyw cto-poHy oĎpaauia κ pasCaBnaeT ocTaBnmňca na ero noBepxHOCTH 3ηβχτροηκτ, ηθμCHH»aeTCH ero XHMHHecxoe fleiicTBHe.MeCKyiO not HCTOWHHXa ΠΗΤβΗΜΗ 9. ΠθΑ AeRČŤBHeM 3ΠβΧΤρθΧΗΜΗΗβΟΧθή nOJIHpOBKHoCpaaen yTOHMaeTca. B μομθητ ofípaaoBaHHH OTBepcTHH MOJieKyjibi sjíeKTpojnrra nonaaawT b Ηβτοκοπρο-BOflHmyw xoHflKocTb aneKTpoaa 6 noBbnaaH προβοαημοοτβ ueim ΪΠΤ 8 ρ, ο-cpačaTbiBa KJiioqeBbix ΘπβΜβΗΤΟΒ hhh h 10 12 11 κ OTXjrnoqaioiHHX 3JieKTpoABnraTejib hctohhhxπκτβΗΗΗ ninth Πρπ 3tom noflana 3πβκτροσΐΗτβ b conno npexpamaeTca and NEP oCpaao -BaBmeecH oTBepcrua HeTOKonpOBOflHmaa χηαχοοτβ npocaHHBaeTcn Ha oCpaTHyw-H au κ C C C T T e B B B B H H H H H H H H H H H H H.

Hcnonb3OBaHne αθηηογο ycTpoflcTBa ποβΒοηκβτ noBbicHTt KanecTBo oCpasijoB ηCHH3HTb TpyflOeMKOCTb HX Η3ΓΟΤΟΒΛβΗΗΗ HpH 3ΠβΧΤρ0ΗΗ0ΜΗΧρ00Χ0ΠΗΗβ0ΧΗΧ HCCJie-flOBaHHHx MerajuioB h nonynpoBOflHHxoB.Hcnonb3OBaHne αθηηογο ycTpoflcTBa ποβΒοηκβτ noBbicHTt KanecTBo oCpasijoB ηCHH3HTb TpyflOeMKOCTb HX Η3ΓΟΤΟΒΛβΗΗΗ HpH 3ΠβΧΤρ0ΗΗ0ΜΗΧρ00Χ0ΠΗΗβ0ΧΗΧ HCCJie-flOBaHHHx MerajuioB h nonynpoBOflHHxoB.

OflHOň H3 npHHHH, 3aTpyflHHKttUHX HCnOJIbSOBaHHe npOCBeHHBarontHX 3/ieKTpÓHHbIXΜΗΚΡΟΟΚΟΠΟΒ B ΜβΤβΛΠΟΒβββΗΗΗ, HBJÍHeTCH TpyflHOCTb ΠρΗΓΟΤΟΒΠβΗΗΑ H3 MaCCHBHbIXMaTepnanoB tohxhx oSpaanOB, npospaHHbix anexTpOHHOMy nyny. CymecTByxmHe honHcaHHbie b jiHTepaType ycTpoftcTBa He o6ecneuHBaioT cBoeepeMeHHoň οοτβηοβχηnpoijecca snexTpononHpoBxn, a cneflOBaTejibHO, h aBTOMaTHSHpoBaHHoe nojiyneHHeKawecTBeHHbix oSpasnoB. KcnonbaoBaHHe flaHHoro H3o6peTeHHH πρκ paspaCoTxenpnCopa yTOHneHHH MeTannHuecxHX oSpaayoB πο3βοπητ BbinojiHHTb ero Sonee npoc-TblM H ΤβΧΗΟΗΟΓΗΗΗΜΜ B Η3ΓΟΤΟΒΠβΗΗΗ H yAOÓHblM B 3K cruiy aT aUHH. OKOHOMnuecKHň 3φφβκτ ot BHeflpeHHH cocTaBHT 140000 t. pyOneft «a 100 πρκδο-POB B TOfl.H3 npHHHH, 3aTpyflHHKttUHX HCnOJIbSOBaHHe npOCBeHHBarontHX 3 / ieKTpÓHHbIXΜΗΚΡΟΟΚΟΠΟΒ B ΜβΤβΛΠΟΒβββΗΗΗ, HBJÍHeTCH TpyflHOCTb ΠρanΠβΗΗΑ H3 CymecTByxmHe honHcaHHbie b jiHTepaType ycTpoftcTBa He o6ecneuHBaioT cBoeepeMeHHoo οοτβηοβχηnpoijecca snexTpononHpoBxn, a cneflOBaTejibHO, h aBTOMaTHSHpoBaHHoe nojiyneHHeKawecTBeHHbix oSpasnoB. C ΧΗΟΗΟΓΗΗΗΜΜ fla bin bin c c c c c c bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin bin. OKOHOMnuecKHň 3φφβκτ ot BHeflpeHHH cocTaBHT 140000 t. PyOneft «and 100 πρκδο-POB B TOfl.

ΦΟΡΜΥΠΑ H30EPETEHHHΦΟΡΜΥΠΑ H30EPETEHHH

YcTpoftcTBO fljiH ajieKTpojiHTHHecKOft o6pa6oTXH MeTannHnecxHX oCpaauoB flnasjíeKTpoHHbix ΜΗκροοκοηοΒ, coflep»amee xopnyc c γηθβαομ ajih óCbexTOAepxaTenfl,CHCTeMy HHpKyBHHHH SneXTpOAHTa, HCTOHHHK TOX3 ΠΟΠΗρΟΒΚΗ, yCWIHTe/Ib TOKd HH“AHxanHH Hanajia oCpasoBamta OTBepcTHH, οβΐβκτοΑβρχθτβπΒ h CHCTeMy anexTponoB,OTjiHHaromeecH τβΜ, hto, c uéJibto noSbnneHHH xanecTBa oCpaCoTKH ny-τθμ cHuxeHHfl KpaeBbix οφφβκτοΒ, oho cHaCxeHo xaMepoň c ΗβτοκοπροΒΟΑΠπιβή xha-KOCTbio, b κοτοροΑ ycraHOBJíeH anexTpofl, aaxpenneHHbiň b oObexTOflepxaTene, hconnoM ívih noaaqH sjíeKTpojiHTa, pacnonoxeHHWM c flpyroň croponbi oCbexTOflepxa-τβη«, πρκπβΜ conno coeflHHeHO c hctohhhkom Toxa.YcTpoftcTBO fljiH ajieKTpojiHTHHecKOft o6pa6oTXH MeTannHnecxHX oCpaauoB flnasjíeKTpoHHbix ΜΗκροοκοηοΒ, coflep »Amee xopnyc c γηθβαομ ajih óCbexTOAepxaTenfl, CHCTeMy HHpKyBHHHH SneXTpOAHTa, HCTOHHHK TOX3 ΠΟΠΗρΟΒΚΗ, yCWIHTe / Ib Dokdo HH" AHxanHH Hanajia oCpasoBamta OTBepcTHH, οβΐβκτοΑβρχθτβπΒ h CHCTeMy anexTponoB, OTjiHHaromeecH τβΜ, HTO c uéJibto noSbnneHHH xanecTBa oCpaCoTKH NY-τθμ cHuxeHHfl KpaeBbix οφφβκτοΒ, Oho cHaCxeHo xaMepoň c ΗβτοκοπροΒΟΑΠπιβή XHA KOCTbio-b κοτοροΑ ycraHOBJíeH anexTpofl, aaxpenneHHbiň b oObexTOflepxaTene, hconnoM ívih noaaqH sjíeKTpojiHTa, pacnonoxeHHWM c flpyroň croponbi oCbexTOflepxa-τβη «πρκπβΜ conno coeflHHeHO c hctohhhkom Toxa.

Hcto^hhxh HHtbopManHH, npnHHTbie bo βηημβηηθ πρκ SKcnepTHse: 1. US, A, 630306. 2. J.M.Larson, R. Taggart, D.H.Polonia, - Rev Sej Instrument, 40,p. 1338, 1969.Hcto ^ hhxh HHtbopManHH, npnHHTbie bo βηημβηη πρκ SKcnepTHse: 1. US, A, 630306. 2. J. M.Larson, R. Taggart, D.H.Polonia, - Rev Sej Instrument, 40, p. 1338, 1969.

P E Φ E P A TP E Φ E P A T

yCTPOňCTBO flJIfl SJÍEKTPOJIHTHHECKOfl OBPAEOTKH METAJTJTHMECKHX 0EPA3I10B flJIH 3J1EKTP0HHWX MHKřO- ΟΚΟΠΟΒYCTPOONCTBO FLJIfl SJÍEKTPOJIHTHHECKOfl OBPAEOTKH METAJTJTHMECKHX 0EPA3I10B flJIH 3J1EKTP0HHWX MHKøO- ΟΚΟΠΟΒ

HaoÓpeTeHHH othochtch κ anexTpoxHMHHecKoň o6pa6oTKe ΜβτβηηοΒ, κ οηβχτρο-XHMHHecKOMy yTOHHeHHW oSpasnoB, HccjienyeMbix b npocBevHBaronmx snexTpoHHbixMHxpocKonax. ycTpoňcTBO coflepXHT xopnyc 1 c γηθ3αομ απη oĎ-bexTOAepxaTenH 4 κ connoM2, coeAHHeHHbíM c HacocoM 3 npoxanxH snexTponHTa, o6bexTOflepxaTenb 4 c oópaa-Uom 5, nojioxHTejibHbiň snexTpoA 6 B suflé cTaxaHa, sanonHeHHoro ΗβτοκοπροΒΟΑΗ- 259032 «eft «HflKOCTbio, ,πηομ κοτοροΓο ΛΒΠΗβτοΛ oSpaaeu 5, aneKTpofl 7, ycmiHTenb 8,KCTOHHHK 9 ΠΗΤβΗΗΗ, ΚΠΙΟΜβΒΜβ ΒΛΘΜβΗΤΗ 10 Η 12. ΟοπροΒΟχ,ηβιοηριϋ Μβρτβχ. ΠρΗ3ΗδΗο Η3ο6ρβτβΗΗβΜ no peáyjibTaTaM 9KcnepTH9bi, ocymecTBJíeHHoň TocyAapcTBeHHbíM ΚοΜΗτετοΜ CCCP no AenaM Η3θ6ρβτβΗΗή a otkpmth#. 1 uepTew 259032HaoÓpeTeHHH othochtch κ anexTpoxHMHHecKoň o6pa6oTKe ΜβτβηηοΒ, κ οηβχτρο-XHMHHecKOMy yTOHHeHHW oSpasnoB, HccjienyeMbix b npocBevHBaronmx snexTpoHHbixMHxpocKonax. ycTpoňcTBO coflepXHT xopnyc 1 c γηθ3αομ απη from 4-bexTOAepxaTenH κ connoM2, coeAHHeHHbíM c HacocoM npoxanxH snexTponHTa 3, c 4 o6bexTOflepxaTenb oópaa UOM-5, B 6 nojioxHTejibHbiň snexTpoA souffle cTaxaHa, sanonHeHHoro ΗβτοκοπροΒΟΑΗ- 259032 "EFT" HflKOCTbio,, πηομ κοτοροΓο ΛΒΠΗβτοΛ oSpaaeu 5, aneKTpofl 7, ycmiHTenb 8, KCTOHHHK 9 ΠΗΤβΗΗΗ, ΚΠΙΟΜβΒΜβ ΒΛΘΜβΗΤΗ 10 Η 12. ΟοπροΒΟχ, ηβιοηριϋ Μβρτβχ. Προ3ΗδΗο ο3ο6ρβτβΗΗβΜ no peáyjibTaTaM 9KcnepTH9bi, ocymecTBJíeHHoň TocyAapcTBeHHbíM ΚοΜΗτετοΜ CCCP no AenaM Η3θ6ρβτβΗΗή and otkpmth #. 1 uepTew 259032

Claims

BACKGROUND OF THE INVENTION An apparatus for electrolytic processing of metal samples for electron microscopes comprising a body support body, an electrolyte array, a polishing source, a current intensifier, an opening opening, an object holder, and an electrode assembly, characterized in that by providing the edge effect suppression pathway, the chamber is provided with a non-conductive liquid chamber in which the electrode is mounted in the object holder and the electrolyte supply nozzle located on the opposite side of the object holder, the nozzle being connected. current source. 259032