CS266216B1 - Semiconductor tensor resistor - Google Patents

Abstract

The strain gauge contains an insulating pad made of semi-insulating arsenide gel and a strain-sensitive layer made of plastically deformed single-crystal f11qu heavily alloyed germanium, which allows the operating temperature range to be extended to 4.5 K*.

Description

1 266216

3ΠΗΟΑΗΗΕ H3OEPETEHHÍI K ABTOPCKOMY CBHflETEJIBCTBY 3aHBneHo: 24.11.82 3aaBKa Ks 3532256 / 25-28 Í1KH4 G01B 7/18

AeTopbi: H.T.ropGanyK, Π.Α, CaKHflOH, ΚΚΑ.Τχορκκ hO.M.lllBapu;

3aHBHTenb: οηοτητυτ nojiynpoaoflHMKOB AKaneMHH Hayx YicpaHHCKoň CCP

HaBBaHHe ΗΗΗοόρετβΗΗΗ: ΠΟΒΥΠΡΟΒΟ, ΠΗΗΚΟΒΜίί TEH30PE3HCT0P

Il3o6peTeHHé othochtch to HBMepHTen &amp; Pursue fexHHKe and ΗΜβΗΗο κ-nonynpOBOflHH KOBblM TeH3Ope3HCTOpaM $ Η MOX6T ÓblTb HCnOnb3OBaHO nPH H3MepeHHH fle <t> OpMaUHÍI ByCJIOBHHX KpHOrGHHbK TeMTiepaŤyp B 3ΠβΚΤρθΗΗΚΘ, MeflHBHHe, 3JieKTpO3HepreTHKe Hflpyrnx oÓnacTHx HayKH Texmnw h. IÍ3BeCTeH nanynpOBOflHHKOBwft ΤβΗ3θρβ3ΗβΤθρ, COflepjKamnň H3OJIHBHOHHyi0 nofljiox xy-H3 CHTanna hjih KepaMHKH H TeHsonyBCTBHTenbHbiň cNon = hs nonHKpHCTajuiHHec-kon unenKH repMaHHH £ l J · ÓffHaKo 3This TeH3ope3HCTop He oÓecneHHE eT TpeóyeMOň tohhocth H3MepeBnH bycnOBHHX HH3KHX TeMnepaTyp (HHXe 293 ° K) B CBH3H C ΒΟ3ΗΗΚΗΟΒβΗΗβΜ BHyrpeHHHXTeMnepaTypHbix HanpHxeHHft H3-3a pasnHHHbix TeMijepaTypHbix κοβΦΦηηηθητοβ JiHHen-Horo pacumpeHHB repMaHHH h MaTepnana ποηηοχκκ.

HanSonee Ójihskhm to H30ÓpeTeHHio no TexHHnecKoň cymHocra h flocraraeMOMy 3φ-φβκτγ ΗΒΠΗβτοΗ nanynpoBOffHHKOBbiň TeH3Ope3HCTop, coflepwainnň H3onHUHOHHyio non jioxxy to oTBepxneHHoro cBH3yK> mer.o and TeH3o <íyBCTBHTenbHbiň cnoft H3 MOHOKpHCTan-jiHnecKoro CHiibHOJiernpoBaHHoro repMaHHH [2].

H3BecTHbiii naTnuK He oóecneuHBaeT TpeóyeMoň tohhocth HSMepeHnň bycnoBHHX HH3KHX TeMnepaTyp b cbh3h c Βθ3ΗΗΚΗ0ΒβΗΗ6Μ βηυτρθηηηχ TeMnepaTypHbix

HanpHeHHnOn and HajiOrHHHbMM npHHHHaM. 1

Uejibio H3o6peTeHHH HBJHeTCfl noBbHHe touhocth η pacuiHpeHHe paonero nna-na3pHa TeMneparyp TeH3ope3HCTopa no 4.2 ° K.

Uenb noc THraerca τθμ, hto b nánynpoBOflHHKOBOM TeH3ope3HCTope, conepxameMH30JiHnHOHHyio nonnoxKy h TeH3onyBCT3HTenbHbi cnoft H3 cnnbHOJiernpoBaHHoro rep-mhhhh. HsonHiJHOHHaH noflnoxxa BwnojiHeHa H3 nonyH30JiHpyiomero apceHHna rannHH, - 2 - - 266216 and TeH3OMyBCTBHTeJIbHbln CJIOfl - H3 nnaCTHWeCKH ΑθφορΜΗρΟΒβΗΗΟίί MOHOKpMCTaJlnH-Hecxoft njienKH. noitynpoBOflHHKOBMň Teu3ope3HCTop conepjKHT H3onHUHOHHyra Nonno »Ky H3 nonyl HsojTHpyioincro apceHHfla rannHH on KOTopyio HaHeceH TeHaouyBCTBHT &amp; nbHbiň c.noňH3 rmacTi-mecKH neibopMHpoBaHHoň MOHOKpHCTajijiHnecKoň ruieHKH CHjibHonerHpoBaH-Horo repMamifl. IIoJiynpoBOflHHKOBbi TeH3ope3HCTop pa6oTaeT cJieayiotUHM o6pa30M.

Tip πρκποχθΗΗΗ κ nanynpoBOflHHKOBOMy TeH3opesHCTOpy no $ QPMaij (HH HSMeHaeTcHero 3JieKTpHMecKoe conpoTHBneHne. Tax XAX HejiHHeňHOCTb not <i> opMauHOHHoň xapaK- 'TepHCTHKH CHJlbHOJierHpOBaHHOrO MOHOKpHCTajUIHHeCKOrO repMaHHH B .UHanaaOMe TEM nepaTyp 4,2-450 ° K H3MeHaeTCH HecyntacTBeuHO and τβΜπβρβτγρΗΜβ κόβΦΦηηηθητμ SOUTH ηθηηογο pacumpeHHH repMaHHH h apceroma one hundred meters rajuiHH b «Hana3OHe TeMnepaTypÓJIH3KH, tO BeíIHHHHa ΗβΠΗΗβήΗΟΟΤΗ rpaftyHpOBOHHOň XapaKTepHCTHKH TeH3Ope3HC-Top Ile MenneTCH ot TeMnepaTypbi MTO ποΒΒοπΗβτ HcnonbsoBaTb npefljioaceHHbiň τβΗ-b 3ope3HCTop uwpoKOM paSoneM flHana30He TeMnepaTyp 4.2 K no. Οηηχθηηιο BHyTpeH HHX-HanpHHceHHíi cnocoScTByeT η to, hto MOHOKpHCTajiJiHHecKaa iuieHKa b nponecΗ3ΓΟΤΟΒΠβΗΗΗ TeH3Ope3HCTOpa rtOflBepraeTCH rUiaCTHqeCKOH ηβφορΜ3ηΗΗ. aHe TeMnepaTyp, biuiotb no κρηογθηημχ TeMnepaTyp, h o6ec-nenHBaeT nHHenHyro rpanyHpoBOHHyro xapaxTepHCTHKy b paciuHpeHHOM onana3OHe H3M6 · paeMbix ηεφορΜβΗΗή no 1,5 x10-3OTH.en.

ΦΟΡΜΥΠΑ H3OBPETEHHS riOJiynpOBOnHHKOBblH ΤβΗ3θρβ3Η0Τθρ, COnepwaiHHň H3OnHHHOHHyro nOflJIOJKKy Η ΤβΗ-3OHyBCTBHTeJlbHblň CJIOň H3 CHJlbHOJlerHpOBaHHOrO repMaHHH O. T Π Η and JO H m H n -C Η ΤβΜ MTO C neJIbW ΠΟΒΜΒίβΗΗΗ TOHHOCTH H paCJUHpeHHH paĎOWerO flHana3OHaTeMnepaTyp 4.2 ° K, n3ojiHUHOHHaH nonnoatKa BbmojiHeHa hs nonyH3onHpy »mero ap-ceHHfla rajuiHH, and TeH3onyBCTBHTenbHbn cnoN - · H3nnacTHnecKH ηθΦορΜΗροΒβΗΗοήMOHOjqJHCTajiJTHnecKOfl nneHKH. i UCTOHHHKH ΗΗφορΜβμΗΗ, ΠρΗΗΗΤΜβ BO ΒΗΗΜβΗΗβ ΠρΗ 3KCnepTH3e ίj. Πβηκοβ IO.M., BbponiHJio Γ.Η., MapbHMOBa H.H. HccnenoBaHHe bo3mojkhocth coanaHHH nonynpoBOHHHKOBbix npeoSpasoBaTejieft Ha ocHoee τοηκηχ nneHOK repMa-hhh. Te3HCbt noKJiaflOB pecny6nHKaHCKoň κοΗφερεΗΐίΗΗ "CTpyKTypa η φΗΒΗΗβοΚΗβCBOňCTBa TOHKHX nneHOK repMaHHH." 2. US, A, 3254529 (προτοτΗπ)

P ΕΦΕΡ A T

NOJIynPOBOČÍHHKOBMří TEH30PE3HCT0P

TeHSopesHCTop conepacHT HaanunHOHHyro Nonno »Ky nQnyH3onHpyromero apceHH HS-Fla rajuiHH h TeH3OHyBCTBHfenbHHň cNon = hs nnacTircecKH ηβφορΜΗροΒΒΗΗοΰ they may KpHCTaJIJIHHeCKOň ΠηβΗΚΗ CWIbHOJlerHpOBaHHOrO repMaHHH, ΗΤΟΠ03ΒΟΠΗβΤρ33ΠΙΗ-PHTbpaSoHHň rtnana30H TeMnepaTyp 4,2PK no. Π θ θ θ θ θ θ θ θ θ C C C C C C C θ θ θ θ C C C C C C C C C C C C C C C C C C C C C C C

Claims (1)

BACKGROUND OF THE INVENTION A semiconductor tensor resistor comprising an insulating substrate with a high-sensitivity layer of highly alloyed germany, characterized in that, in order to increase the accuracy and reduce the minimum working temperature to 4.2 ° K, the insulating pad is formed of a semi-insulating arsenidugal and a tensile sensitive layer is made of plastically deformed monocrystalline foil. Uigórodský výrobn ^ -polygrafická podnik, Oagarina, 101, UzgorodΝ 1871, Price 2,40 Kčs