CS266221B1 - Photoelectric sensor and method of controlling its sensitivity - Google Patents

Abstract

The sensor will find application in optoelectronics, optical connections, etc. The photoelectric sensor includes a p-i-n structure based on GaAs, where the region - i - is doped with a symmetry donor/^, whose photoionization cross section for the process with the transition of an electron from the valence band to the impurity level is at least an order of magnitude higher than the photoionization cross section for the process with the transition of an electron from the impurity level to the conduction band, while the activation energy of the impurity is related to the position of the Permian level Ef in the region - i - by the ratio: Et + 2kŤ<Bf <Et + 6kT, where k-Boltzmann constant, T-temperature in degrees Kelvin. Increasing the sensitivity of the photoelectric sensor in the spectral range 1-1.4 with the simultaneous application of an electric voltage U in the forward direction is carried out by creating ionization of impurities by applying a voltage U according to the relationship: 103 < 7 < 4.1Ο3, where i dj-thickness,- i —.

Description

- 1 - 266221

OnHCAIIHE H3OBPETEIW5I TO ABTOPCKOMY CBHflETEJIECTBY 3aHBJieHo: 01.06.82 3a «Bxa ø» 3466573 / 18-25 LK H 01 L 31/00 ') H 01 L 31/06

Abtophí Berni flyηλη3μ, flyČeuxH ΦρβΗΤΗΐπβκ, Me »HHCXH Kap oji, Mopbnu MapnaH (HCCP), H.M. Α.Φ.Ηοφφβ

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HepiocTaTxoM ero HBJiHeTCH Hepa6oTocnoco6HOCTb β cnexTpanbHOM flHana3OHe 1 -1,4 mkm. EbicTpofleftcTBHe ero cocTasnaeT Ί? 10- <®ο.

IlaHČojiee 6πη3κημ TexHHnecxHM peraeHHeM ηβπηθτοη φοτοπρπβΜΗΗΚ, BxnwMaiomHňp-in CTpyxTypy Ha ocHoee GaAs H- o6nacTb κοτοροή JierHpoBaHa npHMecbio c3Heprneň axTHBainiH E |, cpaBHHMofl c nnípnnoň aanpeiqeHHoň 3ohh and ToniHHHa i-06-nacTH Ile npeBbnnaeT oépaTHoň βθπηηηηη χρΒφφΗΐριβΗΤβ nornomeHHH CEET b npHMec-hon oSnacTH [2]. B 3TOn CTpyxType i-ofinacTb cosffaHa ηκφφνβΗβή rnyCoxon npw-HecH.Gr b n-MaTep «aji c KOHHeHTpanpeft HocHTeneft Toxa 10u - 10 n cm'3.

Han6ojiee 6jih3xhm TexHHnecxHM peraeHHeM b wth cnoco6a ηβπηθτοη cnočo6 yn-paBJíeHHH HyBCTBHTenbHOCTbIO φΟΤΟΠρΗβΜΗΗΚβ, BXníOHaiOIUHÍi OCBemeHHe i-H3 o6naCTHcBeTOM cnexTpaJibHoro HHTepBana 1-1.4 mxm NPH oflHOBpeMeHHOM npwioxeHHHanexTpHnecxoro HanpHxeHHň β πρημομ HanpaBneHHH [2]

HejtJOCTaTXOM TaXHX φΟΤΟΠρΗβΜΗΗΧΟΒ H cnoco6a HCnQnbSOBáHHH HX ΗΒΠΗβΤΟΗ TOs HTO tiyBCTBHTejIbHOCTb npHMeCHOň B &amp; nacTH 1-1.4 MXM HHJKe HyBCTBHTenbHOCTH BcoGcTBeHHoft &amp; 0.85 nacTH c6nn3H MXM and 6bicTpoaeňcTBHe, onpeaenneMoe rjihhoh _ 2-266221 ΑΗφφγ3ΗΟΗΗΟΓΟ CMGIH6HHH ΗβΟΟΗΟΒΗΜΧ ΗΟΟΗΤβΠΘΗ Tokai COCTaBnaeT f = 10 "9" 1 Ó ', 0C.Πριι H3M6HeHHH οηεκτρΗηecKoro HanpHKeHHH ByBCTBHTeJibHocTB b, n; CBH3H TpeByiOT CO3flaHHH SblCTpOfByMIHHX BbIC OKOHyBCTBH “TenbHbix φοτοπρπθΜΗΗΚοΒ, b ocoSHHocTH una cneKTpanbHoro flHana30Ha 1-1,4 mkm.

UejiBK) HacToninero Η3θ6ρετβΗΗΗ. HBnaeTca noBbniieHne nyBCTBHTenbHocra b οπεκτ-panbHOM HHTepBane 1-1,4 mkm c coxpaHeHHeM GbiCTpoenaCTBHa npn6opa. (IIocTaBJíeHHaH PENB flocTuraeTca τθμ, ητο b φοτοπρπβΜΗΗκε, BKnronawineM p - i - nCTpyKTypy Ha ocHOBe GaAs, i-o6nacTb κοτοροη nerapoBaHa npHMecbio c SHeprneňaKTHBaunH E ^., CpaBHHMoň c iBHpHHoň 3anpemeHHoň 3OHM and ToniHHHa t-o6nacTH nenpeBbnuaeT oGpaTHoň β &amp; γιηηηηη κοβΦΦηρηθητη nornoineHHa CBet b npHMecHoň o6nac-th, i-o6nacTb nerupoBaHa flOHopHoň npuMecBK) cHMMeTpHH, cenenne Φοτοηοηη33-Ηηη κοτοροΗ nna nponecca c nepexoflOM sjíeKTpoHa H3 BaneHTHoň 3ohm Ha npHMec-Hbiň ypoBeHb no KpaňHeň Mepe Ha nopanoK 6onbiue BenHHHHbí ceneHHa Φοτοηοηη33-ujih flna npopecca c nepexonoM sneKTpoHa c npuMecHoro ypoBHH b 3ony npoBOflu-MOCTH, 3ΗβρΓΗΗ aKTHBapHH npHMeCH Ep ΟΤΠΗΗΗΚ> Π13ΗΟΗ OT 3HaneHHn nOJHi3nHHbl3anpemeHHoon He 6onee neM Ha 3 KT, cBH3aHa c nonoxemieM υρρβ E "b i-o6nacTH

Et + 2kT <Ep E t + 6KT and TanujHHa i oGnacra d {npeBbnuaeT nnHiiy HOHHaanjiH npHMecH sneKTpoHaMH, rsek - nočTOHHHaH BonbixMana, and T - TeMnepaTypa b rpaflycax KenbBHHa, IIocTaBneHHaH Yenbo pocTHraeTca those ητο b cnocoSe ynpaBJíeHHH nyBCTBHTenb-HOCTbio φοτοπρΗβΜΗΗΚβ, BKmonawmeM ocBemeHHe t-o6nacTH οβθτομ H3 cneKTpanbHo-ro HHTepBana 1-1.4 mcm of NPH / iHOBpeMeHHOM πρηηοκθΗΗΗ ΒηεκτρκηεοκοΓΟ hANP-JKeHHH B npHMOM Η3ΠΡ3ΒΗΘΗΗΗ, COSflaiOT yflapHyiO HOHH3aiíHK> npHMecH Nyree npiIJIO-χθηηη HanpHJKeHHH U ypopneTBopaioinero cooTHomeHHio: HP <- · < 4 -HPd.

CyniHOCTb H3o6peTeHHH 3aKmonaeTCH b cneflyromeM. SKcnepHMeHTanbHO ycTaHosneHHeoneBHflHbiň φεκτ, ητο b φοτοπρΗβΜΗΗκε Ha ocHOBe GaAs p-i-n CTpyKTypw, RP EI-oSnacTb nerapoBaHa rnySoKoň npHMecbio, μοκηο 3HanHTenbHo ποβηοητβ nyBCTBH-TeribHocTb 3a CNET μοηοποπηρηοη HOHH3apnH stack πρημθοη, ecJiH BbmonHHTb cne- · nyroiUHe ycnoBHH. Πρημθοη b i-oČnacTH flonJKHa 6biTb noHopcKoro early c CHMMeTpHen Γ &amp; . 3το ye-noBHe o3HanaeT, ητο npHMecb ηβπηθτοη ypOBHeM 1-c early h CBH33Ha.c 3OHoňnpobo / ihmocth, a He c BaneHTHoň 3ohoh. BwnonHeHHe ycnoBHH PNA ceneHHň φοτοκό-HH3auHH: έθ V - cenenne PNA nepexopa sneKTpoHa H3 BaneHTHoň 3ohm Ha-npHMec Hbiň ypoBenb no KpaňHeň Mepe Ha πορπροκ Gonbiue not «fy c - ceneHHe PNA nepexopa sneKTpoHa e πρημθοη b 3OHy iipobophmocth - 03HanaeT, ητο npopecc ne-pexopa θηβκτροΗΟΒ H3 BaneHTHon 3ohm Ha npHMecb, to ecTb ee 3anonHeHHe, κρβτ6onee SbicTpo, ητο onycTOineHne πρημθοη. Ha πρημθοηομ ypoBHe BCE BpeMa cymecT-BywT aneKTpoHbí, KOTopbie Ballad npHHHMaTb ynacTHe b nponecce, ypapHoň HOHH3aipiH.B cnynae oSpaTHoro οοοτηοιπθηηη Mexcpy ceneHHHMH BCE HMeroinHeca Ha npHMecH snail-1TpOHM 6bicTpo 6yayT nepeBepeHbí οβθτομ b 3OHy npoBopHMocTH, npHMecb onycToina-eTca h cranHOHapHbiH nponecc ypapHoň η η B io B B B B B B κ B B B B B B B B B B B t t t t t t t t t t t t t t t t t t t t t t t t. 3to BaxHo pn οτο6μ CBeT H3 o6nac- .th npHMecHoro nOrjtoméHHH nepeBoflHji οηεκτροΗω κβκ H3 BaneHTH ň n HHMecHoro ypoBHH b 3OHy npoBoflHOCOCTH. Ecnn npHMecb 6y- -3 - 266221, π, βτ jiewaTb 6nnxe κ oRHoon H3 soh, ηθμ βτογο τρεδγβτ 3ap, aHHoe ycnoBHe, το, bo-nepBbix, yxc ^ HM H3 HHTepecyromero Hac cneKTpanbHoro RHana3OHa, bo-btopmx, nyB-CTBHTenbHocTb H3-3a HapynieHHH paBHOBecHH Mexican nepexoflaMH snexTpoHOBH flblpOX.

KoHueHTpauHH HOCHTenen 3aps.ua bi oÏnacTH CBH3aHa c ποποχβΗΗβΜ ypoBHHΦερΜΗ η Μοχετ 6mtb 3a «aHa ycnoBHeM E ^ + 2 kT <E £ <E £ +6 kT, O3HanaK> mHM <^ E £ + 6 kT) He He ποπηοοτβμ onycTomeHa (E £ + 2 kT <Ejj).

ToniUHHa i -o6 «acTH nojixHa 6brrb Sonbiue ηοηη33ηηη npHMecH anexTpo-HaMH flna, ητοβω Morna hrth 3aMeTHaa yflapHaa ηοηη3 &amp;

Ecjih φοτσπρΗβΜΗΗΚ, BbmojiHeHHbiň npn co6mofleHHH yKa3aHHbix Bbmie ycnoBHň oc-BeTHTb CBeTOM »3 cneKTpanbHoro HHTepBana 1-1.4 mxm η πρηηοχητβ anexTpHHecxoeHanpaxeHHe b πρημομ ηβτιρηβπθηηη, senHHHHa xoToporo ynoaneTBopaeT ycnoBHw10 'B / cm <" [7; ^ 4 · 10 "B / cm το 3a cw MonononapHoň ynapHoň ηοηη38βηη my- ČOKoft npHMecH flocTHraeTca γββπΗΗβΗΗβ nyBCTBHTenbHocTH b yKa3aHHOM cnexTpanb-HOM HHTepBane πρκ COXpaHeHHH SblCTpOfleňCTBHH. ÓTflHHHe b OT H3BeCTHbJX JláBHHHblX φΟΤΟΑΗΟΑΟΒ, ρββΟΤΒΙΟΠξΗΧ b peWHMe ΜβΧ3ΟΗ ~ Pursue ynapHoft HOHH3aipm NPH npnnoweHnn očpaTHoro HanpHxeHHH, npeflJioxeHHHH φο-τοπρκβΜΗΗκ ha ocHOBe GaAs p - in CTpyXTypbi paČOTaeT NPH πρημομ CMenieHHHjřípu 3TOM BCE aneKTPHwecKoe. ManpaxeHHe φβκτΗΜβοκΗ npHnoxeHo κ i o6nacTH, bKOTOpOft npOHCXOflHT npHMeCHan yflapHaH HOHH3aflHH. ΠθΠΗ, ΜβΗΒΠΙβ 10 'B / cm He-HocTaTOHHbí ajih saMeTMoň ηοηη3 ιιηη npHMecH h qyecTBHTejibHocTb NPH 3tom riafla-ET. ΠΟΠΗΧ B <4 -10 · B / cm ΜΟΧβΤ HMeTb ΜβΟΤΟ ΗΒΠβΗΗβ flBOňHOň HHXeXflKH, co- TOPA QyaeT HaicnaAbiBaTbcfl Ha μοηοποπηρηυιο yflapHyft HOHHsaflHio Η πρΗΒΟΑβτ κcHJibHOMy yBejiHBeHHio ypoBHá myMOB and cnefloBaTenbHo, κ citHxeHHio nonoxHTenbHoroοφφβχτβ., B yxasaHHOM φοτοπρΗβΜΗκκβ ĎbicTpofleňcTBHe, oripeflenaeMoe xρβΜβΗβΜ nponeTaHOCHTeneň BÍ-o &amp; naeTH, coxpaHHeTca He,

Yours

TpOHOBj dt> 3C ΟτΜβΤΗΜ, hto nponecc npHMecHoň yqapHoň HOHHsaqHH b saHBnaeMOM φοτοπρΗβΜ-ββ HBJIHeTCH MOHOnOnapHblM. 3tO BO3MOXHOCTB CO3flaTb ΤΟοΤΟΠρΗβΜΗΗΚ C HH3-khm ypoBHeM HsCbrroHHbix myMOB [3) h nonynHTb Bbicoxoe ycHnemie φοτοτοκβ npHROCTACToHo-ManbK sHaneHHHX HanpaxeHHH Ha í-o6nacTH (U x10 B). HaοτοηρΗβΜΗΗκ h cnoco6 ynpaBneHHH ero ^ OTonyBCTBHTenbHocTbio npeflCTaBneHuHa φΗΓ.1 h 2. Ha .1ηγ.1 noxasaHu cxeMaTHuecxoe HsoCpaxeHHe KOHCTpyxfHH φοτο-npHeMHHKa h cnoco6 ero HcnonbsoBaHHH. Ha Φηγ, 2 noKa3aHo cnexTpanbnoe pacnpe-fleneHKe φοτοηγΒΟΤΒΗτβηι, οοοτΗ GaAs p - i - n CTpyxTypbi πρκ flByx sHaneHHX anex-TpHatecKoro HanpHxeHHH. ΜΗΗΚοτσπρΗβΜΗΗΚ Ha .1ηγ.1 Βκπκηιββτ P * -oťSnacTb 1, i-o6nacTb 2 ToniqHHÓò d ;, n + -odnacTb 3, κοητβκτηηη cHCTeMa 4, GaTapea 5 NightsHOHHoro Toxa HanpaxeHHH Úg. , PoňcT at least tBo paCoTaeT cneflyionsI oCpasoM. Πρκ ooBememm i-oftnacTH 2 inupHHon | ceeTOM H3 cneKTpanbHoro HHTepBana 1-1,4 mxm η πρκ npHnoxeHHH snexTpHnec-xoro HanpaxeHHH H3 HHTepeana 12 B> 3 B, Tax, HtoGm (-) GaTapen 5 ποοτοηη — ηογο Toxa 6bin nonaH Ha 3, a (+) Ha 1 , HcnonbsyH xoHTaxTHy »CHCTeMy 4, snex-TpOHM C npHMeCHOrO ypOBHH ΠβρβΒΟΗΗΤΟΗ B 3OHy npOBOHHMOCTH, Ffi ρβ3ΓΟΗΗ» ΤΟΗ □ nexrpHnecxHM noneM ro OHeprHn, RocTaTOHHbjx nnH HOHHaaRHH snexTpoHa c rny6-pexHMe «10" '° c τοπΦηηβ H- ofSnacTHé cm2 / B '* c - ρ, ρεήφοΒβΗ cxopocTb anex- - 4 - · 266 221 ΚΟΓΟ npHMeCHOrO ypOBHH ,. HTO npHBOflHT K yBGJIHH GHHIO KOJIHHGCTBa SJIGKTpOHOB B3ΟΗβ npOBOflHMOCTH, CJIGJJCTBHGM Nero HBJIHGTCH nOBbHBGHHG φθΤOWyBCTBHTGJIbHOCTHb paccMaTpHBaeMoň očjiacra cneKTpa Rip coxpaHGHHH SbicTpofleňcTBHH, κοτοροε pg o Μ ih Μ Μ Μ Μ n Μ Μ s Μ Μ Μ J iac J J B B B B B B B B B B B B B B B B B CTΦγγOBaHOΐΙΓ ΐΙΓΦγ...... Aγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγγ =γ = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = 1B (E = 31 C2B / cm), 7ρ = = U U U U = = = = 10 ·B (E = 3103B / cm). SKcnepHMeHTanbHbie kphbhg cneKTpajibHoň Φοτοηυβοτβη- .tgjibhocth GbinH nonyHGHbí πρκ HCCJiejřOBaHHH φοτοπρΗβΜΗΗκε Ha ochobg GaAs p - i - nCTpyKTypbi, cosepacameň i-o &amp; nacTb, nanyneHHyio jiernpoBariHeM KOMiuieKcaMH xpoMa.ΠρΗ 3TOM CO3flaBaJICH rjiyĎOKHH npHMGCHbIH ypOBGHb flOHOpHOrO THIia C ~ CHMMGTpHGftJ gt HTO 6blno yCTaHOBJIGHO H3 COnOCTaBJIGHHH xapaKTGpa 3KCnepHMGHTajIbHO H3M6pGH ”HOH CnGKTpaJIbHOH φοΤΌΗγΒΟΤΒΗΤΘΠΒΗΟΟΤΗ C TGOpGTHHeCKOne. ΟτΗΟΙΙΙβΗΗθ CeMeHHft φθ-TOHOHH3aX (HH GV / Og C COCTaBJIHJIO 12 HTO yflOBJIGTBOpHeT yCJIOBHIO, npHBefleHHOMyB φορΜΥΠΘ. IIOJIOXHTejlbHblň 3φφβκτ - nOBblDIGHHG φΟΤΟΗγΒΟΤΒΗΤΘΗΒΗΟϋΤΗ CÍI6KT B-1 paJIbHOM HHTGpBajIG -1,4 MKM - 6blJI ncaiyHGH Ha npHMGCH SHGprHCH aKTHBaxprME ^ C = 0.75 aB, hto cooTBGTCTBosajio ycjiobhk) pacnonoaceHHH ee b 3anpemeHHOH 30-HG, yKa3aHHOMy B φορΜΥϊΙβ. KoHIIGHTpaiIHH CBO6oflHbIX HOCHTeJIGH B i oSnaCTH COC-10® TaBJIHJia CM-10 ^ '\ HTO COOTBGTČTBOBajlO HCKOMOMy nOJIOJKGHHIO ypOBHH ΦβρΜΗ, ToranHHa i o6jiacTH cocTaBjínjia d = 30 $ μκμ πρκ 3tom flJXHHa ηοηη33ιιηη b sjigkt-PHHGCKHX ΙΙΟΠΗΧ, npHBtín eiIHblX φορΜγΠβ B, 6bDia 1 '¢ 1 MKM.

CrpyRTypa ocBemanacb cbgtom H3 cneKTpajibHoň ofinacTH 1-1,4 mkm. CnocoťS yn-paBJIGHHH HyBCTBHTGJIbHOCTbK) yCTpOHCTBa 6bUI OCyiHGCTBJICH ΠρΗ ΒΚΠΙΟΗΘΗΗΗ CTpyKTy- »pbl B ΠΡΗΜΟΜ HanpaBJIGHHH ΠρΗ npHJIO3K6HHH. =3ΠΡΗ5ΚβΗΗΗ U = 10B T3K, HTO IIpOIJGCCYHapHOHH3aIHH npHMGCHOFO UGHTpa npOH3BOflHJICH npH 3J1GKTPHHGCKOM HanpH »e-hhh U = 10 B (E = 3 · 103 B / cm). 1-1Ηomomomom 1-1omom 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1 1-1,4,4 1-1.4 mkmnpOHCXOflHJIO nOBbniIGHHG ΤΟΗθΤΟΗγΒΟΤΒΗΤ &amp; ΠΒΗΟΟΤΗ á 3 3 ΠΟρΗβΚΗ (M = 103 3 ΠΟ CpaB ”HGHHIO C ΟΤΟΟΤΒΘΤΟΜΟΤΟΟΤΒΘΤΟΜ ΠρΗ ΠρΗ 3TOM COCTaBJIHJIO 1 0 '”ceK.

Takhte O6pa3OM, Β, ΗΗΗΗΟΜ φΟΤΟΠρΗΘΜΗΗΚε H cnoco6e ynpaBJIGHHH aero-HyBCTBH TenbfiqČTbK) npGflCTaBnHWIHHMH co6oň GflHHblň H3o6peTaTenbCKHH 3aMbICGJI, ÁOCTHr-HYT HoBbiň nonojKHTGJibHbiň 3φφβκτ - noBbiniGHHG φοτοΗγΒοτΒΗτεπΒΗΟϋτΗ b cnéKTpaJib HHTGpBajIG HOM-1 ~ 1 WH 3 4 MKM nOpHflKa ΠΡΗ COXpaHGHHH GbICTpOflGHCTBHH. ΚρΟΜβ ΤΟΓΟ, flOCTOHHCTBaMH y ΚΟΓΟ ΟΤΟ Η Η Η Ο pa me me O me G me me me me me me me me me me me me me me me me me me J J J J J J. Η36ΜΤΟΗΗΟΓΟ fflyMa, flOCTHl’HyTbBi 3a CHGT yflapHiHHHaiiai] HH HOCHTGJIH 3apHfla 3HaKa, and TaraKG BO3MOJKHOCTb nOJHytHGHHH 6oJIb-ΙΗΧΙΗΧCHJIGHHnnnHHCGHHHX.

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Claims (2)

- 6 - 266221 OBJECT OF THE INVENTION What is claimed is: 1. A photoelectric sensor comprising a pi-nn structure based on GaAs, wherein - i - is an area doped with an activating energy B1, comparable to the width of the forbidden band, and the thickness of the region - i - does not exceed the inverse of the light absorption coefficient in the admixture region, characterized by in that the -i region is doped with a simulation Q whose cross-section of the photoionization for the electron transition from the valence band to the directing level is at least an order of magnitude higher than that of the photoionization with the transition of the electron from the admixture to the conductivity the activation energy of the admixture E 1, differing the half-width of the restricted band, not more than 3 kT, connected to the phenol level E 1 in the range -i ratio: Et + 2kT <Bf <Et + 6kT and the thickness of the region -id ^ exceeds the direct electron ionization length, k - Beltzmann constant, and T - Kelvin degrees * 2, a method for controlling the sensitivity of the photoelectric sensor according to clause 1, comprising illuminating the area with a light from the spectral interval I - 1.4 / Km while applying a direct / directional electrical voltage, characterized in that it produces ionization by the admixture by application of voltage U, matching relation:! (? << - ζ 4. 1O3