CS267678B1 - Evaporator - Google Patents

Abstract

The evaporator comprises a crucible (3), a steam pipe, in the central part (5) of which a membrane (6) is located with thermal screens (17) on both sides, collimating membranes (10, 11) and a heater (2) which surrounds the steam pipe up to the level of the thermal screens (17) on the side of the crucible (3). The opening in the discharge membrane (6) is made in the shape of a converging and diverging nozzle (7).

Description

KhGBCKhA nOJIHTeXHHHeCKHfi HHCTHTyT HM6HH 50 “JieTHH ΒβΑΗΚΟΗ OKTÍIÓpbCKOA COUHaAHCTHHGCKOA peBOJIIOUHH

HasBaHHC Η3ο <5Ρ6τθιιηή ^; HCIIAPHTEJIL ·

KrjrjfipeTeHHe othochtcsi k HaHeceiiHio ποκρμτηη b BaKyyxe η Μθ * βτ <suTb HcnoAbaoBano aas HanwJieHHsi παθηοκ AoporocTonuiHX MaTepwaaoB aOB hahe

MaBGCTHO ycTpoAcTBO aasi HaHeceHHR πλθηοκ b BaKyyxe. cohepMatuce THreab c buxoahum ΟΒΗΗΗΗΜρΟΦΗΑΗρΟΒΗΗΗΗΜ KSHaJlOM. npHHGM THTGAb H BUXOAHOA ΚβΗβΑ ΠΟΜΘΗΙθΗΜ B paAHaUHOHHUH ΤΘΠΑΟΒΟΜ

ŮAOK. ·

TaKoe ycT leastcTBO He orsecneHHBaeT aocTaTOMHo ηκβκογο pacxoaa MarepnaJia wa-aa τογο, hto b ποτοκθ BuxoAHuiero napa HMeioTcn naCTHUw, oTpa> xenκτη to ecTb c noTepeA nepBOHanaAbHOH ckopocth HanpaBAeHHoro abhmghhh noTOKa.

MaeecTeu TaKwe HcnapHTeAb HanpaBAeHHoro AeHCTBHH. coAepwauiHH THreAb, cbexHuA cHMweTpHHHUH naponpoBOA, HcnycKawmyio η KOJiJiHMHpynmyio AHa «parMU. narpeBaTejib h TenJiortue oKpaHu.

BepxHHH nacTb naponpOBoaa, He norpyweHHan b HarpesaTeab. HMeei <5OAee HHaKyio TewnepaTypes.

new HHiKHSia nacTb η THreab. flosTowy waTepnaa H3 HapywHUX caoee Bwxoflnuiero nepea naponpoeoa noTOKa napa, kotopuh ne noaaeT Ha noAAOMKy. ocawaaeTca Ha BHyTpeHHio »noaepxiiocTb oepxHen * iacTH naponpOBOaa. Nanοοαο nanujiennsi πρη hoboh aarpyaxe MaTepnaaa naponpoBoa ycTanaBAHBaioT Tax, HTO6M CKOHAeHCHpOBaBUlHHCH MSTepHaA OKaaaACSl BHHay H ÓUA HCnOAbSOBaHeHHAHH OAaroAapsi sTowy β τβκοκ ncnapHTeae CHnwen pacxoa Hcnapsieworo waTepnaaa.

HeAOCTaTKOM H3BecTnoro ncnapHTean nBAneTCH HH3Ka $ i ckopoctL · HanuAeuH ». orpaHHHeHHasi nonBAGHHeM 6pH3r πρκ ee noBHweHHH. BosHHKHOBeHHe típuar oeycAOBAeHo Tew, HTO πρη HanuaenHH TewnepaTypa naponpoBOAa Η3ΜΘΗ $ ιβτοΊ οτ Tewnepaxypu KOHAencauHH b BepxiieA hscth, npoxoan nee 3ΗβΗβΗΗ $ we ι> Kay 3ΤΗΜΗ xeMiiepaTypaMH, BKAioHan h TewnepaTypy, NPH κοτοροΑ KOHAeHcaunsi hpohcxoaht b HiHAKyjo 4-aay. 3Ta «aaa naxoAHTcn npeHwymecTBeHHo b enae KaneAb. KQTOpue npH noBUiueuHM ckopocth nanuAeHHsi 3axBaTMBa »Tcsi opoxoashuhm no naponpoBOAy ποτοκομ h nepeiiooircx Ha noBepxiiocTb πολαοκκη. KanAH ηηκροηηογο paawepa Ha noaKao * Ke nonBAsnoTcn yn <e πρη ckopocth HaneceiiHSi 70 A / c. Ρκ υβθαηηθηηη ckopocth HanuaenHS nyTGM noButueHHn TewnepaTypu ncnapenuvi paawep KaneAb yBeAHHHBaeTcn.

3tot HcnapHTeab TaK * e HMeeT ooAbiuoH ολιιιηΑ AHawerp oceň HanuAnewoH παοηκη πρκ Maaow pauwepe ποαοβηοΑ aonu HanuAenKH. to ecTb aotiu. β kotopoK nepaBnoMepnacTb toauihhm njienKH AonycTKMa aan paawemenHsi b HeA HanuAneHwx noaaoweK. BcaeacTBHe οτογο noBuwaeTcn pacxoa MunapHOMoro MaTepwaaa.

Ue.nh H3Gůr »eTeiiHíi - noBUtueitHe ckopocth HanujieHHn h cnHweiiHe pacxoaa HcnapneMoro Ma'repMaAa.

yKaaaimax ugal AOCTHraercn rex. hto β HcnapHTeAG. coAepwameM threAb. cbeMHMH CHMMCTpHHHUA ΠβρΟΠΡΟΒΟΑ C HCnyCKaKW ~ * H M KOAAHMMpy »tUe A AHa4parMaMH. HarpeBaTGAb H TGOAOBMe oKpaiuj. HcnycKanmaH AHa «parHa paaMemena π cpgahgA hscth iiaponpouuAa. TeiinoHwe rjKpaiuj pacnoAOHiCHU no ona ctgpqhm HcnycKanmeA AHa ^ parwu οαηη προτηβ apyroro, a KarpeuaToal · oxBaTUBaeT naponpoeoA ao ypOBHH TenaoBUX SKpaHOB co ctopλλ τλλ. πρηηθμ OTeepCTHe b HcnycKaiomeA AHa «parMe Bunoaneno b bhag cxoAnmGrocn-pacxoAnuterocn conaa, a naponpoBoa CHa6H <eH

AByMSl AOnOAHKTGAbHUMH

KOAAHMHpyiOmHMH ΑΚ3ΦΡ3ΓΜβΜΗ.

pacnOAOMeHHblMH CHMMGTpHHHO ΠΟ OCG CTOpOHU

267 678

HcnycKanuieH ana®parMM n ouncuiHeHHHMH b onne ahckob c κοαβη6βμμη προρθβμμη.

YcTanoBKa b cpeaueň MacTH naponpoeoaa HcnycKaiomeň AHa «parMM c TennoBUMH aKpauaMH no3BoaaeT ocymecTBHTb KOHaeHcauH» toabko b TBepayn «asy, τβκ ksk Bepxiiaahhpp oTaeaeHHaa ot cpeaiieří hscth SKpanaMH. meeT TeMiiepaTypy Hnme TewnepaTypH naaBaeHHa. Cpeanaa sacTb naponpoBoaa BMecTe c HcnycKanuieH AHa «parMOH paawemeHa b oenacTH He« «y eepxHHM cpeaoM« arpenaTena eaaroaaps MenbiueMy ceieimio narpeBa. or.ecne'icmiOMy * opMofi mean. HMeeT eoaee bmcokv »TewnepaTypy H ocymecTBaseT aonoanHTeai> nMH iioaeoa TenaoBoň aiieprHH κ cpeaueň 'tacTn naponpoBoaa. KOMnencnpyiomHH noBMUiciniMe ποτορη a · H3-sa H3.nyMeiin> i c HciiycKaiomoií ληβφρλγμοΚ. Naοοτομυ na cpeaiieň uicth naponpoKijaa H HcnycKaioiitcH λιι.ιφρηγηι · ixior.iiic hct Kóii / icucauHM. Otcvtctuhc whakoh «a3u b cpeaiieň MacTH ycTpaiiscT uobmojkuoctb -. <Axi <aTa uc noTOKOM h nepenoca na noaaoiKKy. χτο ποββοαποτ noBucHTb ckopocti · iianwaeHnsi.

Kpowe toto. HaaHHHe anaeparMH b cpeaneň xaciH naponpoBoaa naei bo3moh <hoctL · yMeHBiiJHTb λμβμθτρ Bceií naouiaan, na KOTopy »ocawaaeTcn HcnapeHHMH Marepnaa. h tom canuM υμοηβιμητι »cooTHOiueHHe Meway stoh naomaai ·» h naneaHoň naouiaabn bohu nanMaeHHS. rae oeecneHHBaeTcs TpeeyeMWH pasepoc no ToauiHHe naeHKH. Stρη stoh 3a npeaeaaMH noaesiioH bohu nanwaeiiHs naeinca ΗΜθβτ eoaee pe3KHň cnaa ToauiHHU. mto CHHxtaeT pacxoa HcnapseMoro MaTepnaaa.

□ TBepcTne b HcnycKanmeň anaoparMe b enae cxoaamerocH-pacxoasuieroca conaa ycTpaHsei TypeyaeHTHMe 3aBHxpeHHs euxoasiuero ποτοκΒ πρη bhcokoh ckopocth 3to BeaeT κ paciunpeHH »bohu HamueiiHa, a BHawT. η κ CHHweHH »pacxoaa HanuaseMoro MaTepnaaa.

KoaaHMHpynuiHe anaeparMM c κμιμοβημη npopessMH ocyiuecTBasnoT aonoaHHTeabHyio κορρεκιΐΗ »anarpaMMH iianpaeaeHHocTH ncnapHTeas. B dec. aetaaiuen b ueHTpe noaaomKH. nacTt anatparHu. orpaHHMeHHaa KoattieBoií npopestio. saTenseT onpeaeaeHHy »wen OTBepcTHS HcnycKaioiueH aHatparMu. Chapter B. cMeiueHHoň b ctopohy ot uenTpa noaaowKH, oTKpuBaeTca eoai> uias (actio. OTBepCTns. It ecTi> ero yBeaHHHBaeTCfl 3 * «eKTHBiias ncnycKaioiuas noeepxHocTb, ίτο KowneHcapyeT CNAA nepBOHaMaai.noři anarpaMMH HanpaBaeiiHocTH HcnycKaiomeH AHA" PARM. B KoaaHMHpynuiHx ληβφρογηβχ c npopeasiMH Ballad euTB BbinoaHeitbi TaKme OTBepcTHsi. ocywecTBasiiouiHe aonoannTejibny »koppokuh» anarpaMMM HanpanaeiiHOCTH, npn'ieM 3naHHTeai> io noBuiuaeTca paBHOMcpiiocTb HaiiocnMux naenoK. and 31ιβ · ιητ. pacuiHpseTca noaesHaa 3ona NANM «ENHA, it ecTb CHHMeTcs pacxoa HanNaaeMoro MaTepnaaa.

KpoMe Toro. pacuinpeHne noae3Hofi bohu Hanbiaeimn npn HaHeceHHH naeHKH Ha noaaowKy onpeaeaeHnoro pa3Mepa no3BoaseT υηθηβιβητι. paccToanne ot HcnapHTeas ao noaaowKH. Ckopocti. iianeceHHa πρκ stoh TaK »e BospacTaeT. TaK κοκ ona ηβηοηηοοτοη ospamo nponopnHOHaai.iio KBaapaTy 3ΤΟΓΟ PaCCTOStHHSl. Ha «ΗΓ.1 Hsoepaweii npeaaaraeMMří HcnapHTenb, paspea; na Fig.2 - White A Ha Fig.1.

KcnapHTeab coaepBHT pacnoaomenHue b BaKyyMHoií KaMepe noaaowKy 1 h HarpeuaTeab 2 c yCTaHOBaeHHMMH B ΗβΜ ΤΗΓΑθΜ 3 C HCnapSieMblM HaTepHMOM 4 Η CteMHOMOBpH CMHH naponpoeoa coctoht H3 cpeaneH aacTH 5c HcnycKaiomeH AHA-parMOH sixth otbcpcthb b kotopoh Bunoaneno b Bnae cxoastuierocs-pacxoaHmeroca CONAA seventh KonaencaTopoB h 8 h ninth ua Topuax kotopux ycTaiioBaeuM TopHOBue KoaaHMHpynuine AHA «Parma 10 h 11 c otbopcthxmh no« OPME πομοκκη h aonoaHHTeatHue KoaaHMHpyioiuHe anaeparMM 12 h 13 b euae anc-KOB c kojimobumh προροβλμη h OTDepcTHaMH. yKpenaeHiiue Ha MoaneaenoBux oaaKax 14 n 15. Kpaa ποααο * κη 1 h otbopcthh b TopuoBoň h HcnycKanuieH ana®parwax 10. 6 aewaT na npaMoií, ooo3iia'iennoň ηιτρηρπυκ. KoHaeHcaTOpu 8, 9, what coeannetibi cpeaueň xacTb »naponpoaoaa 5 h HcnycKaiouieH ληηφρογμοη 6 nocpeacTBOM MOAHeaeitoBux ιβτηφτοβ 16th Πο about <ctopohm the HcriycKaioiueH anaeparMM ycTaiioB.nenu TcnaoBue SKpaHM 17th HarpeBaTeab 2 OKpymeH MoaHeaenoBUMH OKpanaMH 18h BunoaneHHUMH Ka oauo ueaue c um axpaaaHH 19th KpoMe Toro. iiarpeBaTeai · 2 HMeeT TOKonoaeoaia 20. npeaiia3Ha'iennMe Tame h aaa KpenaeiiHa ecero ycTpoiciBa b aepmaTeaax BaKyyMiioH ycTanoBKH. T-oepaanaa weai. iiarpenaTeaa 2, oeoBHaieHiias nyiiKTHpiiou AHHHeH. oKaHMHBaeTca Ha yposiie HHWHero Topua HcnycKaiomeH aHa.iparMu 6. npHMeM ceaeHHe HarpeeaTeaa 2 b sepxiieň aacTH MeHbuie. Hew β ηηχιηοη.

HarpeuaTeat. 2 oxeaTunaOT naponpoeoa ao ypoBHs Tenaoaux axpanoB 17 co ctopohm τηγαη 3. Hcnapmejib mokot outb Bunoanen hb γροφητο ηλη apyroro BucoxoTeHiiepaTypnoro MaTepnaaa. npeaaaraeMHfi HcnapnTeai. paeoTaeT caeaymuiHM oepasoM.

nocae OTKaaKH BaKyyMHoň xaHepu h nporpeea naaaowKH 1 BKanHaioT IiarpeBaTeai. 2 π πόμμτ ao

267 678 pabonen TeMiiepaxypy τηγα »3 c ncnapneMUH MaTepnaAOM 4. Ao 3toH me TexnepaTypu iiarpeuaeTCH h hh * hhk KOHAencaTop 9 co cpeaneň lacThM 5 naponpoBoaa, Ana MacTb napoB. ne nonaaaioiuHX na noAAOwKy 1. ocawaaeTca na aepxucM KoiiAencaTOpe 8, HMeiomeH e * OAee HHSKyn TewnepaTypy.

IIocAe oKoiriaiiHa ukkas HanuAeiiHsi μθη $ βοτ ποααομκυ first β τηγθαβ 3 aorpywaioT HcnapseMUH μθτθρηβα and naponposoA nepesopa'iHBaioT KOHAencaTopoM 8 bhhs rax MTO occbuihíí b ηθη ματθρκθα HcnoAtsyeTCsi B CAeAyniueM unoe HanuAeHHSi napasne c MaTepnaAOM 4 Β τηγαθ third

YcTaiiOBAenHaa Ha βθρχηθμ κοηβθ naponpoBOAa TopuoBan AHaoparua 10 φορηηρυθτ ποτοκ b OTBepcTHH c KOH »HrypauHei <nanHAHeMoh ποααοικκη 1 co. AeTHiunii 3a ee προΑβΑΗ. C 4HafparHu 11, HaxoaauieHca β τηγαθ 3 b to Bpewa wcnapaeTca HaTepHaA, oceBuiHH b npeauayuieM πηκαθ nanuAeHHa.

AHa «-parMa 12 coenpaer na cees HacTb MaTepHaAa, AeTamero b ueiiTp 3onu nanuAeHHa. ηηηογο ne eepeT hah oeper Menbuiyn sacTt H3 τογο MaTepHaAa, kotopuh αθτητ Ha Kpan ποαθβηοη 3onu nanuAeHHa. nosuuiaa paBHOMepHOCTb παθηκη h pacuiHpaa TaKHM oepasOM noAesnyn sony HanuAenHa. C AHa4-parMU 13. HaxoAauieiica β τηγαθ 3. b sto Bpewa Hcnapaerca HaTepHaA. oceBuinR Ha Hee b npeauAymeM πηκαθ nanuAeHHa.

HanpameHHe κ HarpenaTCAio 2 noABOAHTca aepes τοκοποαβοαν 20. EAaroAapa HeHbiueMy cegeHHio HarpeaaTeAa 2 β BepxHeA aacTH oh HMeeT noBuuieHHyn TeMnepaTypy. KOMneHCHpya AonoAKHTeAbHue ΗίοτορΗ Teiuia b osaíicth cpeAiieň aacTH 5 naponpoBOAa.

npeAAOHieHHUH HCnapHTeAb C AAHHOH naponpoBOAa 70 MM H BHVTpeHHHM AHaMeTpOM 20 HM. and TaKMte C MHHHMaAbHUM AHaMeTpOM 8 MH COBA 7 BpH HanUAeHHH Ha nOAAOHiKy 1 pa3MepaHH 60x48 HM oeecne'iHBaeT κοβφφηκκβητ ποαθ3ηογο HcnoAbsoeaHHa (ΚΠΗ) HcnapaeMoro MaTepHaAa 24¾ πρκ paaepoce well TOAuiHHe HanuAaeMoK παθηκη + 2.5¾. τт ecTb ποββοαηθτ β 2,4 pasa chhshtb pacxoA MaTepHaAa no cpaBHenH »c H3BecTnuM ycTpořícTBOM πρη tom we pasepoce no τοαιιιηηθ. YcTanoBKa na paccroanHH 14 mm ot conAa 7 AHaaparMU 12 c KOAbueBoň npopeabio HapytKHUM AHaMeTpOM 20 mm h BHyTpenHHM 4.5 mm CHHwaeT pacxoA MaTepHaAa eme b 1,75 pasa, osecnen. TopuoBaH AnaeparHa 10 c OTBepCTHeM well φορηθ ποααομκη 1 b 1.4 yMenbiuaeT pacxoA strip (KΠH-34¾>. Οαηοβρθμθηηαη ycTaHOBKa topuoboK ληλφρβγμη CHHmaeT pacxoA HaTepnaAa b 2.45 Pasa. OeecneMHBaa ΚΠΜ 59¾. Takhte oepasoM. B npeAAuwenuoM ycTpořícTBe pacxoA MaTepHaAa CHHmeH b 5.9 pasa no cpaBneHH »c HSBecTHUM.

npcAAoiKennoe ycTpoícTBO oeecnemwaeT ckopoctb Hanecennsi 320 A / c. with b 4.5 pass Buuie .. ten y HSBecTHoro.

267 678 4

ΦΟΙΉΥΛΛ H30SPETEIIHH

1. HcnapHTejri *. coAepwaiUHH τηγθλβ. cteMiibiří οημμοτρηίημΑ naponpoBOA c ncnycKaioiueH h KonJiHMHpyioiueň AHaoparMaMU, HarpenaTeAi * h τθπαοβηο oKpaHM. otahhaiouihhcm that HTO, c uejii> n noowiueuHM CKopocTH HanujreHHR h CHH> xeHH $ i pacxoAa HcnapaeMoro MaiepHajfa, ncnycKanuiaM AHA »Parhami paaMcuiena b cpeaneH uacTH naponpOBoaa, TenAOBwe oKpanw pacnoAoweHu no OOe ctopohm HcnycKaiomcH ΛΗβΦρβΓΜΝ oahh προτηβ Apyroro and HarpeoaTejiL · oxBamBaeT naponpoBOA and ypoouM TOHAOBUX OKpaHOB CO CTOpOHH ΤΗΓ.Π51.

2. KcnapHTOAb no n.l, ο τ a η h a »ui η m cm tcm. οτο οτΒορατκβ η HcnycK <nomoA aHa ^ parwe βμποαηοηο b bhag cxoARiuoroca-pacxoAHiiierocsi conAa.

3. HcnapHTCAi »no n.l. ο tah h a io iuhh cm Tew, ίτο naponpOBoa ciiaowcii abymm ΑΟΠΟΑΗΗΤΟΑΙ> Η) · ΙΜΗ KOAAHMHpyKUIlHMM ΑΗάφραΓΜβΜΗ »paCIIOAOMeHHHMH CHMMOTpH'IHO IIO O <5O C npHnew ΑΗβΦρβΓΗΜ βμποαηθηη b bkag akckob c KOABuet ^ uMn npopeaMMn.

HcTOMIIHKH HHiOpMaUHH =

1. SU. A. 397567.

2. SU. A. 684934.

267 678

P E «Ε Ρ Λ T

HCIIAPHTEU

HaoepeTeHHe othochtc8 k ycT MinimcTBax ana HaHeceHHH ποκρυτκΗ b BaKyyxe.

HcnapxTejib coaepmHT THrexb ¢ 3). naponpoooa. b cpeaneH sacTH (5) κοτορογο pasxoiuexa HcnycKanuiaa AHa «parxa (6) c τθχλλββχη OKpaxaHH (17) no oee ctopohu ot nee. KOJiAHXHpynmxe ΛΗβ «ρβΓΜΜ CIO, 11) h HarpesaTeAb (2). KOTopuR oxsaTUBaeT naponpoBoa ao ypoBHS τοπαοβηχ SKpaxoB (17) co ctopohu τηγλη (3). OTBepcTHe b HcnycKawmeR anaeparxe (6) βνποαηβηο b «opxe cxoastuieroCH-pacxoAMiueroca conaa (7).

Claims (3)

An evaporator comprising a crucible, a removable symmetrical steam line with a discharge and collimation membrane, a heater and heat screens, characterized in that in order to increase the deposition rate and reduce the consumption of vaporized material, the discharge membrane is located in the middle of the steam line; on both sides of the discharge membrane against each other, and the heater surrounds the steam line up to the level of the thermal screens on the crucible side. 2. Evaporator according to claim 1, characterized in that the opening in the discharge membrane is formed in the shape of a converging and diverging nozzle. 3. An evaporator according to claim 1, characterized in that the steam line is provided with two additional collimation membranes located symmetrically on both sides of the discharge membrane, the membranes being in the form of disks with annular cut-outs.