CS271103B1 - Method of components coating with high melting temperature by means of pyrolytic carbon - Google Patents
Method of components coating with high melting temperature by means of pyrolytic carbon Download PDFInfo
- Publication number
- CS271103B1 CS271103B1 CS869538A CS953886A CS271103B1 CS 271103 B1 CS271103 B1 CS 271103B1 CS 869538 A CS869538 A CS 869538A CS 953886 A CS953886 A CS 953886A CS 271103 B1 CS271103 B1 CS 271103B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- pyrolytic carbon
- coating
- high melting
- melting temperature
- components coating
- Prior art date
Links
- 239000002296 pyrolytic carbon Substances 0.000 title claims abstract description 9
- 238000000576 coating method Methods 0.000 title claims description 11
- 239000011248 coating agent Substances 0.000 title claims description 10
- 238000000034 method Methods 0.000 title claims description 5
- 230000008018 melting Effects 0.000 title claims description 4
- 238000002844 melting Methods 0.000 title claims description 4
- 239000000758 substrate Substances 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
Description
Vynález se týká způsobu povlékání součástí o vysoké teplotě tání pyrolytickým uhlíkem· pyrolytický uhlík se nanáší ve vrstvě vysokoteplotním rozkladem uhlovodíků na žhavém kovovém nebo nekovovém podkladu - substrátu· charakter pokryvu mimo výrobní podmínky a Jakost substrátu je závislý také na chemickém a krystalografickém složení substrátu. Na některém povrchu substrátu se tvoří vrstva velmi dobře a na jiném povrchu# například molybdenu# vzniká obtížně# nerovnoměrně# nebo se špatnou soudržností# zejména když se jedná o substrát značně členitý nebo složený z různých materiálů·The invention relates to a method of coating high melting components with pyrolytic carbon · pyrolytic carbon is deposited in a layer by high temperature decomposition of hydrocarbons on a hot metal or non-metallic substrate - the nature of the coating outside production conditions and substrate quality also depends on the chemical and crystallographic composition of the substrate. On some surface of the substrate a layer is formed very well and on another surface # for example, molybdenum # is difficult to produce # unevenly # or poorly cohesive # especially when the substrate is very rugged or composed of different materials ·
V současné době je součástka předem opatřena vrstvou kovů ze skupiny IV b, v b а VI periodické soustavy prvků# například titanu# zirkonia# molybdenu# tantalu nebo wolframu# které jsou na součástku nanášeny například kataforeticky# jak je popsáno v autorském osvědčení č. 207 968· Povléká-li se však součástka o velmi jemné struktuře# zejména členité# u níž Je vyžadovaná značná přesnost v tloušlce pokryvu# dochází často к nerovnoměrnému nanášení kovů a tím i к následnému nerovnoměrnému pokrytí pyrolytickým uhlíkem· Uvedený nedostatek je odstraněn způsobem povlékání součástek o vysoké teplotě tání pyrolytickým uhlíkem# Jehož podstatou Je, že před vytvořením povlaku se zpracovávané plochy součástí zdrsní na aritmetickou střední úchylku profilu max. 0#3 až 0#7 ^um. povrch součástí je například zdrsněn na určitou střední aritmetickou úchylku profilu. Uvedené zdrsnění Je možno provést některou ze známých metod# například jemným brusným pískováním apod· Následný pokryv pyrolytickým uhlíkem je vždy proveditelný stejnoměrně a bez nerovností· způsob je popsán na následujícím příkladu·At present, the component is pre-coated with Group IV b, vb and VI metals of the periodic system # of elements such as titanium # zirconium # molybdenum # tantalum or tungsten # which are deposited on the workpiece e.g. · However, when a very fine structure is coated # especially rugged # where considerable precision in coating thickness is required # often uneven metal deposition and consequently uneven pyrolytic carbon coating is mentioned · This deficiency is remedied by the coating of high-component parts pyrolytic carbon melting point # whose essence is that, prior to coating, the treated surfaces of the components are roughened to an arithmetic mean profile deviation of max. 0 # 3 to 0 # 7 µm. for example, the surface of the components is roughened to a certain mean arithmetic deviation of the profile. The abrasion can be carried out by one of the known methods # for example fine abrasive sanding, etc. · Subsequent pyrolytic carbon coating can always be carried out uniformly and without unevenness · the method is described in the following example ·
Povrch molybdenových mřížek určených do vysílacích elektronek je zdrsněn úzkým směrovaným proudem písku na střední aritmetickou úchylku profilu maximálně o 0#3 až 0#7 yum. Mřížky jsou zbaveny zbytku písku v ultrazvukové čističce a v reaktoru o rozsahu teplot 1 000 až 1 700 °C a tlaků 20 až 2 000 Pa povlečeny vrstvou pyrolytického uhlíku.The surface of the molybdenum gratings for the transmitting tubes is roughened by a narrow, directed stream of sand to a maximum profile arithmetic deviation of at most 0 # 3 to 0 # 7 yum. The grids are de-sanded in a ultrasonic cleaner and in a reactor at temperatures ranging from 1000 to 1,700 ° C and pressures of 20 to 2,000 Pa, coated with a pyrolytic carbon layer.
Způsob povlékání podle vynálezu je možno využít v elektrotechnickém# metalurgickém a polovodičovém průmyslu a v oblasti výroby zdravotní techniky·The coating process according to the invention can be used in the electrotechnical # metallurgical and semiconductor industry and in the field of medical technology production.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS869538A CS271103B1 (en) | 1986-12-18 | 1986-12-18 | Method of components coating with high melting temperature by means of pyrolytic carbon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS869538A CS271103B1 (en) | 1986-12-18 | 1986-12-18 | Method of components coating with high melting temperature by means of pyrolytic carbon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS953886A1 CS953886A1 (en) | 1990-01-12 |
| CS271103B1 true CS271103B1 (en) | 1990-08-14 |
Family
ID=5445286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS869538A CS271103B1 (en) | 1986-12-18 | 1986-12-18 | Method of components coating with high melting temperature by means of pyrolytic carbon |
Country Status (1)
| Country | Link |
|---|---|
| CS (1) | CS271103B1 (en) |
-
1986
- 1986-12-18 CS CS869538A patent/CS271103B1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS953886A1 (en) | 1990-01-12 |
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