CS378083A1 - Zapojeni korekcniho systemu elektronoveho litografu - Google Patents

Zapojeni korekcniho systemu elektronoveho litografu

Info

Publication number
CS378083A1
CS378083A1 CS833780A CS378083A CS378083A1 CS 378083 A1 CS378083 A1 CS 378083A1 CS 833780 A CS833780 A CS 833780A CS 378083 A CS378083 A CS 378083A CS 378083 A1 CS378083 A1 CS 378083A1
Authority
CS
Czechoslovakia
Prior art keywords
litografu
korekcniho
elektronoveho
systemu
zapojeni
Prior art date
Application number
CS833780A
Other languages
Czech (cs)
Other versions
CS236158B1 (en
Inventor
Karel Ing Hladil
Tomas Ing Papirek
Petr Rndr Vasina
Original Assignee
Hladil Karel
Tomas Ing Papirek
Petr Rndr Vasina
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hladil Karel, Tomas Ing Papirek, Petr Rndr Vasina filed Critical Hladil Karel
Priority to CS833780A priority Critical patent/CS236158B1/en
Publication of CS378083A1 publication Critical patent/CS378083A1/en
Publication of CS236158B1 publication Critical patent/CS236158B1/en

Links

CS833780A 1983-05-26 1983-05-26 Involvement of electron lithograph correction system CS236158B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS833780A CS236158B1 (en) 1983-05-26 1983-05-26 Involvement of electron lithograph correction system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS833780A CS236158B1 (en) 1983-05-26 1983-05-26 Involvement of electron lithograph correction system

Publications (2)

Publication Number Publication Date
CS378083A1 true CS378083A1 (en) 1984-02-13
CS236158B1 CS236158B1 (en) 1985-05-15

Family

ID=5378878

Family Applications (1)

Application Number Title Priority Date Filing Date
CS833780A CS236158B1 (en) 1983-05-26 1983-05-26 Involvement of electron lithograph correction system

Country Status (1)

Country Link
CS (1) CS236158B1 (en)

Also Published As

Publication number Publication date
CS236158B1 (en) 1985-05-15

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